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SEMICONDUCTOR WAFER DEVICE AND MANUFACTURING METHOD THEREOF
A method of manufacturing a semiconductor device comprises providing a carrier, disposing a plurality of dies over the carrier along a first direction and a...
STRUCTURE FOR JOINING CERAMIC PLATE TO METAL CYLINDRICAL MEMBER
A member for semiconductor manufacturing device includes a susceptor 10 which is a ceramic plate formed of AlN and a gas introduction pipe 20 which is joined...
SEMICONDUCTOR MANUFACTURING EQUIPMENT COMPONENT AND METHOD OF MAKING THE
A method of making a semiconductor manufacturing equipment component, such as an electrostatic chuck, includes an application step of applying a photosensitive...
SINGLE RING DESIGN FOR HIGH YIELD, SUBSTRATE EXTREME EDGE DEFECT REDUCTION
IN ICP PLASMA PROCESSING CHAMBER
Embodiments of the invention provide a single ring comprising a circular ring-shaped body with an inner surface, closest in proximity to a centerline of the...
PLASMA ETCHING METHOD AND PLASMA ETCHING APPARATUS
A plasma etching method includes a holding step of holding a substrate, a processing gas supplying step of supplying processing gas to a space between the...
METHOD FOR COLLAPSE-FREE DRYING OF HIGH ASPECT RATIO STRUCTURES
A method for drying a substrate including a plurality of high aspect ratio (HAR) structures includes, after at least one of (i) wet etching, and (ii) wet...
SIMULTANEOUS INDEPENDENTLY CONTROLLED DUAL SIDE PCB MOLDING TECHNIQUE
Molding assemblies and methods for dual side package molding are described. In an embodiment, a molding compound is injected into a front cavity with a first...
METHOD FOR REMOVING METAL OXIDE
The present invention relates to a method of selectively removing metal oxide, particularly tungsten oxide without etching the un-oxidized metal. The method...
BARC-ASSISTED PROCESS FOR PLANAR RECESSING OR REMOVING OF VARIABLE-HEIGHT
The present disclosure provides a method of manufacturing an integrated circuit device in some embodiments. In the method, a semiconductor substrate is...
SUBSTRATE PROCESSING APPARATUS AND PROCESSING METHOD
A polishing apparatus is provided. The polishing apparatus includes: a polishing unit configured to polish a substrate by bringing a polishing tool into...
METHODS OF FORMING A HARD MASK LAYER AND OF FABRICATING A SEMICONDUCTOR
DEVICE USING THE SAME
A method of forming a hard mask layer on a substrate includes forming an amorphous carbon layer using nitrous oxide (N.sub.2O). A source of carbon and the...
MATERIAL DEPOSITION FOR HIGH ASPECT RATIO STRUCTURES
Ion species are supplied to a workpiece comprising a pattern layer over a substrate. A material layer is deposited on the pattern layer using an implantation...
SPLIT-GATE NON-VOLATILE MEMORY (NVM) CELL AND METHOD THEREFOR
A split gate memory device includes a semiconductor substrate and a select gate over the substrate. The select gate has a bottom portion and a top portion over...
SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME
A method for fabricating a semiconductor device includes: implanting a first species into a substrate at a cold temperature to form a first region; and...
A method includes providing a semiconductor substrate; forming a doping oxide layer on the semiconductor substrate; forming a patterning layer on the doping...
FINFETS AND METHODS OF FORMING FINFETS
An embodiment is a method including forming a fin on a substrate, forming a first doped region in a top portion of the fin, the first doped region having a...
METHOD FOR MANUFACTURING SEMICONDUCTOR SUBSTRATE
A method for manufacturing a semiconductor substrate. An impurity diffusion ingredient can be diffused well and uniformly from a coating film into a...
METHOD OF PROCESSING TARGET OBJECT
A controllability of a size of a mask can be improved in a multi-patterning method. A process of forming a silicon oxide film on a first mask and an...
GAS FLOW PROFILE MODULATED CONTROL OF OVERLAY IN PLASMA CVD FILMS
Methods for modulating local stress and overlay error of one or more patterning films may include modulating a gas flow profile of gases introduced into a...
Precursors Suitable For High Temperature Atomic Layer Deposition Of
Provided are methods of depositing silicon-containing films utilizing certain precursors at temperatures of 400.degree. C. or higher. Certain methods comprise...
COMPOSITION FOR FORMING SILICA LAYER, SILICA LAYER, AND ELECTRONIC DEVICE
A composition for forming a silica layer including a silicon-containing polymer having a weight average molecular weight of about 20,000 to about 70,000 and a...
Atomic Layer Deposition Of High Density Silicon Dioxide
Atomic layer deposition methods for the low temperature deposition of silicon dioxide films having low nitrogen content and low wet etch rates. Silicon dioxide...
High Temperature Silicon Oxide Atomic Layer Deposition Technology
Processes for depositing SiO.sub.2 films on a wafer surface utilizing an aminosilane compound as a silicon precursor are described.
DOUBLE-FILAMENT INCANDESCENT LAMP FOR AUTOMOTIVE VEHICLE FRONT LIGHTING
A lamp for automotive vehicle front lighting is described. The lamp (10) comprises a base (12) for mechanical and electrical connection to an automotive...
COLOR-SHIFTED LAMPS USING NEODYMIUM-FLUORINE CONTAINING COATING
The specification and drawings present a new apparatus such as a halogen incandescent lamp is presented herein, the apparatus comprising a light source such as...
ADHESIVE-LESS ASSEMBLY FOR ELECTRONIC COMPACT FLUORESCENT LAMPS
A collar includes two sections that join together in an adhesive-less manner to form an aperture, an arm with a distally-located pawl extending from a base of...
MASS MICROSCOPE APPARATUS
A mass microscope apparatus includes: a measuring unit including an ionization unit configured to ionize a sample present in an observation region, and a mass...
MALDI SUPPORT WITH MAGNETICALLY HELD SPRING STEEL PLATE
The invention relates to a low-cost spring steel plate as the sample support on a dimensionally stable and precisely shaped substructure, machined from an...
MASS SPECTROMETRY BY DETECTING POSITIVELY AND NEGATIVELY CHARGED PARTICLES
The disclosure features mass spectrometry systems and methods that include an ion source, an ion trap, a detector subsystem featuring first and second detector...
Systems and Methods for Acquiring Data for Mass Spectrometry Images
Systems and methods are provided for maximizing the data acquired from a sample in a mass spectrometry imaging experiment. An ion source device is instructed...
Rectangular Hollow Sputter Source and Method of use Thereof
A rectangular hollow sputtering source includes a box-shaped cathode including therethrough an aperture that is open at a first side and a second side of the...
ARC EVAPORATION COATING SOURCE HAVING A PERMANENT MAGNET
An arc evaporation coating source includes a target made of a coating material to be vapor-deposited, a ferromagnetic yoke for influencing the vapor deposition...
INERT-DOMINANT PULSING IN PLASMA PROCESSING SYSTEMS
A method for processing substrate in a processing chamber, which has at least one plasma generating source and a gas source for providing process gas into the...
ULTRA-HIGH SPEED ANISOTROPIC REACTIVE ION ETCHING
A system and method for reactive ion etching (RIE) system of a material is provided. The system includes a plasma chamber comprising a plasma source and a gas...
WORKPIECE PROCESSING METHOD
Disclosed is a method of processing a workpiece including a mask. The processing method includes: a first process of generating plasma of a first gas...
ANTENNA FOR PLASMA GENERATION AND PLASMA PROCESSING DEVICE HAVING THE SAME
Provided are an antenna, which is disposed in a vacuum chamber for generating an inductively coupled plasma, and a plasma processing device. The antenna and...
BLANKING APERTURE ARRAY AND CHARGED PARTICLE BEAM WRITING APPARATUS
In one embodiment, a blanking aperture array includes a substrate including an upper surface on which an insulating film is provided, a plurality of blanking...
According to one embodiment, an X-ray tube includes an elongated anode target, a cathode, and a vacuum envelope. The cathode includes an electron emission...
ELECTRON DEVICE AND METHOD FOR MANUFACTURING AN ELECTRON DEVICE
According to embodiments of the present invention, an electron device is provided. The electron device includes a support substrate, a conductive planar...
Method, system, and apparatus to prevent arc faults in electrical conduits
A method, apparatus, and system for protection from fires and electrical shock of components used in construction of electrical conduits is disclosed using...
FUSE WITH CARBON FIBER FUSIBLE ELEMENT
A fuse includes a body, a first conductive terminal coupled with a first end of the body, and a second conductive terminal coupled with a second end of the...
PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE AND
A method of forming a Micro-Electro-Mechanical System (MEMS) includes forming a lower electrode on a first insulator layer within a cavity of the MEMS. The...
SWITCHGEAR OPERATING MECHANISM
An electromagnetic rebound mechanism unit and a magnetic latch unit are fixedly installed between a switchgear and a spring drive unit by virtue of a rebound...
A safety device for an aerial lift having a basket or cage with controls which permit an operator standing in the basket or cage to manoeuvre it. The safety...
BICYCLE CONTROL DEVICE AND METHOD FOR MANUFACTURING IT
A control device for a bicycle on-board electronic device that includes: a switch for inputting a command of the on-board electronic device. There is a control...
ELECTRIC SWITCH ASSEMBLY
A rotary switch assembly, comprising a rotary contact (150, 160) and a stationary contact, and a rotary actuator (120) for rotating the rotary contact (150,...
A switch device has a circuit unit that forms an electric circuit that detects at least one of disconnection and a short circuit of a wiring connecting an...
Electrical Interruption Apparatus With Wear Indicator
An improved electrical interruption apparatus provides an improved wear indicator that is configured to depict an amount of wear that has been experienced by a...
ACTUATION SYSTEM FOR AN ELECTRICAL SWITCHING DEVICE
An actuation system for a switch assembly having at least one switch includes a linear actuator drivable for actuating the switch, and a handle configured for...
METHODS AND APPARATUS FOR THE PRODUCTION OF CAPACITOR WITH ELECTRODES MADE
OF INTERCONNECTED CORRUGATED...
The present invention provides a Digital Lighting Processer ("DLP") based Light Treatment System ("DLP-LTS") and methods to reduce portions of the carbon-based...