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EXCIMER LASER ANNEALING APPARATUS AND METHOD OF USING THE SAME
An excimer laser annealing apparatus and the method thereof are disclosed. The apparatus has a substrate holder and an excimer laser unit. The substrate holder...
METHOD OF FABRICATING ZINC OXIDE NANOSTRUCTURES USING LIQUID MASKING LAYER
A method of preparing zinc oxide nanostructures using a liquid masking layer is disclosed. The method includes preparing a substrate having a zinc oxide seed...
PREPARATION METHOD FOR CRYSTALLINE SILICON THIN FILM BASED ON LAYER
Provided is a preparation method of a crystalline silicon film. The method includes: 1) forming a mask for making a periodic silicon rod array on a...
Semiconductor Device and a Method of Manufacturing Same
With an SiC semiconductor device, the surface of a termination region is covered with a passivation film, and the passivation film is provided with a thermal...
Precise Critical Dimension Control Using Bilayer ALD
Methods for self-aligned multiple patterning including controlled slimming of features during spacer layer deposition. Multiple spacer layer deposition process...
METHOD FOR CLEANING CONTACT HOLE AND FORMING CONTACT PLUG THEREIN
The method for cleaning a contact hole and forming a contact plug therein is provided. The method includes steps of: providing a silicon substrate; forming a...
Space Focus Time of Flight Mass Spectrometer
A Time of Flight mass spectrometer is disclosed wherein a fifth order spatial focusing device is provided. The device which may comprise an additional stage in...
IONIZATION PROBE ASSEMBLIES
The invention relates generally to sample ionization, and provides ionization probe assemblies, systems, computer program products, and methods useful for this...
Mass Analyser and Method of Mass Analysis
An electrostatic ion trap for mass analysis includes a first array of electrodes and a second array of electrodes, spaced from the first array of electrode....
In-Ce-O-BASED SPUTTERING TARGET AND METHOD FOR PRODUCING THE SAME
[Object] To provide: an In--Ce--O-based sputtering target capable of suppressing nodules and abnormal discharge over a long period, even though the Ce content...
METHOD OF AND MAGNET ASSEMBLY FOR HIGH POWER PULSED MAGNETRON SPUTTERING
A magnet assembly for use in high power pulsed magnetron sputtering comprises a configuration of magnets having a magnetic field topology comprising magnetic...
SYSTEMS AND METHODS FOR INTERNAL SURFACE CONDITIONING ASSESSMENT IN PLASMA
In an embodiment, a plasma source includes a first electrode, configured for transfer of one or more plasma source gases through first perforations therein; an...
TEMPERATURE CONTROL SYSTEM AND TEMPERATURE CONTROL METHOD
There is provided a temperature control system, including: a stage configured to support a workpiece and provided with a heat exchange medium flow path formed...
Plasma Processing Device
A plasma processing device is provided. The plasma processing device includes a plate formed between a window covering a top portion of a chamber where plasma...
APPARATUS FOR HIGH COMPRESSIVE STRESS FILM DEPOSITION TO IMPROVE KIT LIFE
Apparatus for extending process kit components lifetimes are disclosed. In some embodiments, a process kit includes: a first ring having an inner wall defining...
SEMICONDUCTOR MANUFACTURING APPARATUS, SEMICONDUCTOR MANUFACTURING METHOD,
AND FLOW RATE ADJUSTING MECHANISM
According to one embodiment, a semiconductor manufacturing apparatus includes a chamber, a substrate support part, a gas supply part, an exhaust port, and a...
LOCAL DRY ETCHING APPARATUS
A local dry etching apparatus includes a single vacuum chamber, a plurality of gas introduction units each including a discharge tube having an injection port...
Defect Detection Using Structural Information
Systems and methods for detecting defects on a specimen based on structural information are provided. One system includes one or more computer subsystems...
MULTI SPECIES ION SOURCE
A high brightness ion source with a gas chamber includes multiple channels, wherein the multiple channels each have a different gas. An electron beam is passed...
Charged Particle Beam System and Method of Operating a Charged Particle
The present disclosure relates to a gas field ion source comprising a housing, an electrically conductive tip arranged within the housing, a gas supply for...
ELECTRON GUN, CHARGED PARTICLE GUN, AND CHARGED PARTICLE BEAM APPARATUS
USING ELECTRON GUN AND CHARGED PARTICLE GUN
The purpose of the present invention is to provide a charged particle gun using merely an electrostatic lens, said charged particle gun being relatively small...
ALIGNING A FEATURELESS THIN FILM IN A TEM
When preparing a Hole-Free Phase Plates (HFPP) a preferably featureless thin film should be placed with high accuracy in the diffraction plane of the TEM, or a...
ION GENERATION APPARATUS AND ELECTRIC EQUIPMENT INCLUDING THE SAME
A housing, a substrate accommodated in the housing, a needle electrode for generating ions through discharging, which is held by the substrate such that a tip...
CIRCUIT BREAKER CROSSBAR ASSEMBLY
A circuit breaker crossbar assembly includes an elongate crossbar having a longitudinal axis, a first end and a second end, and having at least one support...
A piezoelectric multiplexer includes an actuator and multiple piezo-morph beams. The actuator includes an actuator conducting head and an actuator stem, and...
Contactor Drive Circuit
A contactor drive circuit includes a power supply, a processor, a line connection and control unit, a first drive end, and a second drive end; when a contactor...
Single-Pole Breaking Unit Comprising a Rotary Contact Bridge, and a
Switchgear Device, and Circuit Breaker...
A single-pole breaking unit which includes a rotary contact bridge, a stationary contact operating with the contact bridge and connected to a current input, a...
COMPOSITE ARC SHIELDS FOR VACUUM INTERRUPTERS AND METHODS FOR FORMING SAME
The disclosed concept pertains to vacuum interrupters and arc-resistant shields. The arc-resistant shields are positioned in between a ceramic insulator. Each...
SWITCH DEVICE FOR VEHICULAR AIR CONDITIONING SYSTEM
A switch device for a vehicular air conditioning system includes a transverse wing surrounded by a knob of an air vent. A circuit board is mounted to an inner...
An actuator is provided for creating an electrical contact between two tracks of a printed circuit board. The actuator includes a polymer part, forming an arm...
Provided is a push switch which has less variations in load characteristic and operation life among products and the deformation of a press member is kept...
A pushbutton switch includes a pushbutton unit and a resilient member. The pushbutton unit includes a mounting seat and a pushbutton covering the mounting...
SWITCH STRIP, SAFETY SENSOR STRIP AND PRODUCTION METHOD THEREOF, AND ALSO
The invention relates to a switch strip (10) for an apparatus for detecting an obstruction (210) in the movement range (221) of a closure element (220), in...
ELECTRICAL DOUBLE-LAYER CAPACITOR FOR HIGH-VOLTAGE OPERATION AT
An electrical double-layer capacitor for high-voltage operation at high operating temperatures, includes a housing, carbon positioned in the housing, and...
PRODUCTION METHOD FOR ALUMINUM POROUS BODY, ALUMINUM POROUS BODY, CURRENT
COLLECTOR, ELECTRODE, AND...
A production method for an aluminum porous body includes a step of producing a resin structure by forming an aluminum film on a surface of a resin base having...
PERIODIC NANOSTRUCTURES FOR HIGH ENERGY-DENSITY AND HIGH POWER-DENSITY
DEVICES AND SYSTEMS AND USES THEREOF
Periodic nanostructures for high energy-density and high-power density device and systems and uses thereof. Hierarchical nanostructured materials having...
A super-capacitor has a substrate, at least two porous electrodes integrated within the substrate, and an electrolyte extending between the at least two porous...
TA POWDER, PRODUCTION METHOD THEREFOR, AND TA GRANULATED POWDER
Method of producing Ta powder for tantalum solid electrolytic capacitor capable of stably providing CV value of more than 220 k and to provide the Ta powder...
METALLIC GLASS-ALLOYS FOR CAPACITOR ANODES
A metallic glass formed from a Be-containing alloy near eutectic composition has the chemical formula: (M.sub.1-aX.sub.a).sub.bBe.sub.cY.sub.dZ.sub.e wherein M...
MULTI-LAYER CERAMIC CAPACITOR
The present invention relates to a multi-layer ceramic capacitor which includes a ceramic main body formed by stacking internal electrodes and dielectric...
ELECTRONIC COMPONENT AND METHOD OF MANUFACTURING THE SAME
An electronic component of a multi-layered structure includes a laminate formed by stacking a plurality of ceramic bodies and an external electrode made of a...
MULTILAYER CERAMIC ELECTRONIC COMPONENT AND METHOD OF MANUFACTURING THE
There is provided a multilayer ceramic electronic component including: a ceramic body in which internal electrodes and dielectric layers containing a barium...
MULTILAYER CERAMIC CAPACITOR
In a multilayer ceramic capacitor, SG represents an average of a distance between end portions of inner electrodes in a width direction and side surfaces of a...
CAPACITOR ASSEMBLY ADAPTED FOR CIRCUIT BOARD
A capacitor assembly is providing for adapting a replacement capacitor to an existing circuit board layout. The capacitor assembly has an adapter with a plate...
METHOD FOR MANUFACTURING PERMANENT MAGNET
Provided is a method for manufacturing an Nd--Fe--B-based permanent magnet having an improved coercive force while reducing the amount of Dy used. A method for...
METHOD FOR MANUFACTURING RARE-EARTH MAGNETS
Provided is a method for manufacturing a rare-earth magnet capable of preventing the lubricant from flowing down during hot deformation processing, whereby...
SINTERED MAGNET PRODUCTION MOLD, AND SINTERED MAGNET PRODUCTION METHOD
USING THE SAME
A sintered magnet production mold which can improve the uniformity in the filling density of the alloy powder. The main body has a main cavity formed inwards...
SPACE-ADAPTIVE WIRELESS POWER TRANSFER SYSTEM AND METHOD USING MULTIPLE
A magnetic resonance wireless power transfer method according to an aspect of the present invention includes transmitting power from a source coil to the Tx...
LAMINATED COMMON-MODE CHOKE COIL
In a common-mode choke coil, first annular conductors are helically defined from the lower layer to the upper layer, and first annular conductors are helically...
INTEGRATED SOUND SHIELD FOR AIR CORE REACTOR
An air core power reactor (10) having a noise mitigating sound shield (40). In one embodiment the sound shield includes a plurality of sound absorbing panels...