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LATTICE-MISMATCHED SEMICONDUCTOR STRUCTURES WITH REDUCED DISLOCATION
DEFECT DENSITIES AND RELATED METHODS FOR...
Fabrication of monolithic lattice-mismatched semiconductor heterostructures with limited area regions having upper portions substantially exhausted of...
STRAINED STACKED NANOSHEET FETS AND/OR QUANTUM WELL STACKED NANOSHEET
Exemplary embodiments provide for fabricating a nanosheet stack structure having one or more sub-stacks. Aspects of the exemplary embodiments include: growing...
METHOD FOR DISSOLVING CHALCOGEN ELEMENTS AND METAL CHALCOGENIDES IN
The present disclosure provides a method of preparing a chalcogen containing solution that is hydrazine free and hydrazinium free, wherein the method...
SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME
It is an object to provide an oxide semiconductor which is suitable for use in a semiconductor device. Alternatively, it is another object to provide a...
MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE
One object is to have stable electrical characteristics and high reliability and to manufacture a semiconductor device including a semi-conductive oxide film....
METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
Electrical characteristics of transistors using an oxide semiconductor are greatly varied in a substrate, between substrates, and between lots, and the...
METHOD FOR MANUFACTURING SILICON-CARBIDE SEMICONDUCTOR ELEMENT
In this method for manufacturing a semiconductor element, a modified layer produced by subjecting a substrate (70) to mechanical polishing is removed by...
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
A substrate processing method is provided. In the method, a plurality of substrates is placed on a plurality of substrate holding areas provided in a surface...
COMPOSITION FOR FORMING FERROELECTRIC THIN FILM, AND METHOD FOR
A composition containing a precursor of a ferroelectric thin film, a solvent, and a reaction control substance, can form a ferroelectric thin film by temporary...
VAPOR DEPOSITION OF METAL OXIDES, SILICATES AND PHOSPHATES, AND SILICON
Metal silicates or phosphates are deposited on a heated substrate by the reaction of vapors of alkoxysilanols or alkylphosphates along with reactive metal...
COMPOSITIONS OF LOW-K DIELECTRIC SOLS CONTAINING NONMETALLIC CATALYSTS
A sol composition for producing a porous low-k dielectric material is provided. The composition can include at least one silicate ester, a polar solvent,...
METHOD FOR FORMING NITRIDE SEMICONDUCTOR DEVICE
A method for producing a nitride semiconductor device is disclosed. The method includes steps of: forming a channel layer, an InAlN doped layer sequentially on...
SEMICONDUCTOR SUBSTRATE, SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING
THE SEMICONDUCTOR DEVICE
A semiconductor substrate having a silicon-based substrate, a buffer layer provided on the silicon-based substrate and made of a nitride semiconductor...
VAPOR DEPOSITION OF SILICON-CONTAINING FILMS USING PENTA-SUBSTITUTED
Disclosed are methods of depositing silicon-containing films on one or more substrates via vapor deposition processes using penta-substituted disilanes, such...
TIME-OF-FLIGHT MASS SPECTROMETER WITH SPATIAL FOCUSING OF A BROAD MASS
The invention relates to time-of-flight mass spectrometers which operate with pulsed ionization of superficially adsorbed analyte substances and with an...
GLOW DISCHARGE MASS SPECTROMETRY METHOD AND DEVICE
A glow discharge mass spectrometry device and method, the device including a glow discharge lamp (1), gas flow-injection elements, the glow discharge lamp...
MASS SPECTROMETER, USE THEREOF, AND METHOD FOR THE MASS SPECTROMETRIC
EXAMINATION OF A GAS MIXTURE
The disclosure relates to a mass spectrometer for mass spectrometric examination of gas mixtures, including: an ionization device and an ion trap for storage...
MASS ANALYSIS DEVICE
A mass analysis device capable of reliably detecting the peak in a mass chromatogram of a given m/z is equipped with a control unit, which generates a mass...
Ion Detection System and Method
A detection system and a method for detecting ions which have been separated in a time-of-flight (TOF) mass analyzer, comprising an amplifying arrangement for...
Compact Mass Spectrometer
A miniature mass spectrometer is disclosed comprising an atmospheric pressure ionisation source, a first vacuum chamber having an atmospheric pressure sampling...
END BLOCK ARRANGEMENT AND SOCKET ARRANGEMENT
According to various embodiments, a socket arrangement for holding an end block on a process chamber may include the following: a first socket element with a...
OXIDE SINTERED BODY AND SPUTTERING TARGET, AND METHOD FOR PRODUCING SAME
An oxide sintered body is obtained by sintering indium oxide, gallium oxide and tin oxide. The oxide sintered body has a relative density of 90% or more and an...
SPUTTERING TARGET AND METHOD OF PRODUCING THIN FILM BY USING SPUTTERING
There is provided a sputtering target for forming an amorphous film, the sputtering target including an electrically conductive mayenite compound, wherein...
Nanocluster Production Device
Improvement of control of size and structure of nanoclusters with a nanocluster production apparatus is intended. Increase of an obtained amount and a yield of...
System and Method for Detecting a Process Point in Multi-Mode Pulse
A system and method of identifying a selected process point in a multi-mode pulsing process includes applying a multi-mode pulsing process to a selected wafer...
GLASS PALLET FOR SPUTTERING SYSTEMS
Pallets for transporting one or more glass substrates in a substantially vertical orientation through a sputtering system. In some cases, a pallet comprising a...
NOISE BASED FREQUENCY TUNING AND IDENTIFICATION OF PLASMA CHARACTERISTICS
This disclosure describes systems, methods, and apparatus for frequency tuning a power source so as to optimize power delivery to a plasma load as well as...
GAS SUPPLY DELIVERY ARRANGEMENT INCLUDING A GAS SPLITTER FOR TUNABLE GAS
A gas supply delivery arrangement of a plasma processing system for processing a substrate with gases introduced through at least first, second, and third gas...
SUBSTRATE FOR MOUNTING GAS SUPPLY COMPONENTS AND METHODS THEREOF
A gas delivery substrate for mounting gas supply components of a gas delivery system for a semiconductor processing apparatus. The substrate includes a...
PLASMA REACTOR WITH NON-POWER-ABSORBING DIELECTRIC GAS SHOWER PLATE
A gas distribution plate for a plasma reactor has a dielectric front plate and a dielectric back plate bonded together, with gas injection orifices extending...
Separation of Chips on a Substrate
Various methods and apparatuses are provided relating to separation of a substrate into a plurality of parts. For example, first a partial separation is...
Workpiece Processing Method And Apparatus
A system and method for processing a workpiece is disclosed. A plasma chamber is used to create a ribbon ion beam, extracted through an extraction aperture. A...
METHOD FOR FORMING RESIST FILM AND CHARGED PARTICLE BEAM WRITING METHOD
In a method for forming a resist film, a first resist film is formed on a light shielding film formed on a substrate, by using a spin coating method. A...
CHARGED PARTICLE BEAM WRITING APPARATUS, CHARGED PARTICLE BEAM WRITING
METHOD, AND SHOT CORRECTION METHOD OF...
In a charged particle beam writing apparatus, a charged particle optical system includes a first, second, and third deflection control system configured to...
PARTICLE-OPTICAL SYSTEMS AND ARRANGEMENTS AND PARTICLE-OPTICAL COMPONENTS
FOR SUCH SYSTEMS AND ARRANGEMENTS
A particle-optical arrangement comprises a charged-particle source for generating a beam of charged particles; a multi-aperture plate arranged in a beam path...
BEAM EXTRACTION SLIT STRUCTURE AND ION SOURCE
A beam extraction slit structure includes a plasma chamber interior surface that is, in operation, in contact with a plasma; a plasma chamber exterior surface...
Methods and Apparatus for Determining, Using, and Indicating Ion Beam
Disclosed are embodiments of an ion beam sample preparation and coating apparatus and methods. A sample may be prepared in one or more ion beams and then a...
Electron Microscope and Elemental Mapping Image Generation Method
An electron microscope includes an acquisition section that acquires an electron microscope image of a specimen that includes a plurality of identical...
CHARGED PARTICLE MICROSCOPE WITH SPECIAL APERTURE PLATE
A Charged Particle Microscope, comprising: includes A specimen holder, for holding a specimen; A source, for producing a beam of charged particles; An...
BLANKING DEVICE FOR MULTI CHARGED PARTICLE BEAMS, AND MULTI CHARGED
PARTICLE BEAM WRITING APPARATUS
A blanking device for multi charged particle beams includes a plurality of individual blanking mechanisms configured to individually deflect a corresponding...
ELECTRODE ASSEMBLY HAVING PIERCE ELECTRODES FOR CONTROLLING SPACE CHARGE
An electrode assembly for accelerating or decelerating an ion beam is provided. In one example, the electrode assembly may include a pair of exit electrodes...
ELECTROSTATIC LENS HAVING A DIELECTRIC SEMICONDUCTING MEMBRANE
Electrostatic lenses for focusing a beam of charged particles, and in particular an electron beam, are used especially in the electron guns of electron...
Charged Particle Beam System and Method of Operating a Charged Particle
The disclosure relates to a method of operating a gas field ion beam system in which the gas field ion beam system comprises an external housing, an internal...
METHOD AND APPARATUS FOR A POROUS ELECTROSPRAY EMITTER
An ionic liquid ion source can include a microfabricated body including a base and a tip. The body can be formed of a porous material compatible with at least...
Ion Beam Uniformity Control
A plasma chamber having improved controllability of the ion density of the extracted ribbon ion beam is disclosed. A plurality of pairs of RF biased electrodes...
SURFACE MOUNT ELECTRICAL FUSE WITH A SUPPORT BRIDGE
An improved surface mount electrical fuse including a first fuse terminal; a second fuse terminal spaced apart from the first fuse terminal; and a fuse element...
AXIAL MAGNETIC FIELD COIL FOR VACUUM INTERRUPTER
A contact assembly for use in a vacuum interrupter includes a contact disc of a first electrically conductive material, a coil, and a contact support. The coil...
A magnetic actuator includes: a movable unit, movable between a first position and a second position, and including an integrally formed eddy-current component...
METHOD FOR DRIVING AN INDUCTIVE ACTUATOR
A method for driving an inductive actuator having an actuating element and an actuator coil, includes initially acting on the actuator coil with a voltage...
OVER-TEMPERATURE PROTECTION METHOD, OVER-TEMPERATURE PROTECTION CIRCUIT
AND LINEAR DRIVING CIRCUIT THEREOF
A method of over-temperature protection for a power switch, can include: (i) generating a sensing signal by sensing a temperature of the power switch; (ii)...