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METHOD FOR FABRICATING SEMICONDUCTOR DEVICE
A method for fabricating a semiconductor device includes: forming a first film on a nitride semiconductor layer so as to contact the nitride semiconductor...
GATE INSULATING LAYER AND METHOD FOR FORMING THE SAME
The present disclosure provides A gate insulating layer comprising: a first silicon nitride film having a first thickness and a first content of N--H bonds; a...
Compact Mass Spectrometer
A miniature mass spectrometer is disclosed comprising an atmospheric pressure ionisation source, a first vacuum chamber having an atmospheric pressure sampling...
SYSTEMS AND METHODS FOR TRANSFER OF IONS FOR ANALYSIS
The invention generally relates to systems and methods for transferring ions for analysis. In certain embodiments, the invention provides a system for...
SYNCHRONIZATION OF ION GENERATION WITH CYCLING OF A DISCONTINUOUS
The invention generally relates to methods and devices for synchronization of ion generation with cycling of a discontinuous atmospheric interface. In certain...
In a pause time assigned for switching voltage applied to a quadrupole mass filter or other ion transport optical system so as to switch the mass-to-charge...
Contamination Filter for Mass Spectrometer
Methods and systems for performing mass spectrometry are provided herein. In accordance with various aspects of the applicants' teachings, the methods and...
WAVEFORM FOR IMPROVED ENERGY CONTROL OF SPUTTERED SPECIES
This disclosure describes systems and methods for regulating the density and kinetic energy of ions in a sputtering deposition chamber. A pulsed DC waveform...
SPUTTERING TARGET AND METHOD OF PRODUCING THE SAME
A sputtering target, which has excellent mechanical workability; and makes it possible to deposit a film of a compound including Cu and Ga as major components,...
Method and Device for Generating an Electrical Discharge
A device and method for generating an electrical discharge are described. A first electrode (30) is operated to be a cathode relative to a second electrode...
APPARATUS FOR THE PLASMA TREATMENT OF SURFACES AND A METHOD FOR TREATING
SURFACES WITH PLASMA
Apparatus and method for the plasma treatment of surfaces with a first electrode and a second electrode, the apparatus and method comprises an alternating...
PLASMA PROCESSING APPARATUS
A plasma processing apparatus includes: a vessel which includes a reaction chamber, atmosphere within the reaction chamber capable of being depressurized; a...
THERMAL SPRAYING METHOD AND DEVICE THEREFOR
The invention relates to a thermal spraying method, in particular for coating a surface by means of a plasma beam, using a shaped plasma beam, wherein a first...
System, Method and Apparatus for RF Power Compensation in a Plasma
Plasma processing systems and methods including a plasma processing chamber and an RF transmission path. The plasma processing chamber including an...
HALL EFFECT ENHANCED CAPACITIVELY COUPLED PLASMA SOURCE
Embodiments disclosed herein include a plasma source for abating compounds produced in semiconductor processes. The plasma source has a first plate and a...
Plasma Processing Apparatus and Opening and Closing Mechanism used therein
A plasma etching apparatus 1 includes a processing chamber 2 having a plasma generating portion 3, a processing portion 4, an exhaust portion 5, and a manifold...
PLASMA PROCESSING APPARATUS
A plasma processing apparatus is provided that is configured to supply a gas into a chamber, generate a plasma from the gas using a power of an electromagnetic...
PLASMA PROCESSING SYSTEM INCLUDING A SYMMETRICAL REMOTE PLASMA SOURCE FOR
MINIMAL ION ENERGY
A remote plasma source is enclosed by a pair of counter electrodes of conical or similar shape that are mirror images of one another and connected across a...
PLASMA PROCESSING APPARATUS
A plasma processing apparatus includes a processing chamber, a part of which is formed of a dielectric window; a substrate supporting unit, provided in the...
LITHOGRAPHY SYSTEM AND METHOD OF MANUFACTURING ARTICLES
At least one method of manufacturing articles and at least one lithography system are provided herein. A lithography system according to an exemplary...
GEOMETRIC FIELD ENHANCEMENT TO MAINTAIN ELECTRODE CONDUCTIVITY
Features that create localized electric field enhancement are deliberately introduced on conductors where deposits having insulating characteristics can form....
COMPOSITE SCAN PATH IN A CHARGED PARTICLE MICROSCOPE
The invention relates to a scanning-type charged particle microscope and a method for operation of such a microscope. Disclosed is a novel scanning strategy to...
Charged Particle Beam Device and Method for Adjusting Charged Particle
The present invention relates to enabling a versatile charged particle beam device, which is used for a wide range of kinds of samples to be observed and has...
E-BEAM INSPECTION APPARATUS AND METHOD OF USING THE SAME ON VARIOUS
INTEGRATED CIRCUIT CHIPS
The present invention discloses an e-beam inspection tool, and an apparatus for detecting defects. In one aspect is described an apparatus for detecting...
METHOD FOR MEASURING A DISTANCE OF A COMPONENT FROM AN OBJECT AND FOR
SETTING A POSITION OF A COMPONENT IN A...
The system described herein determines a distance of a component of a particle beam device from an object to the particle beam device and sets a position of...
X-RAY GENERATOR AND FLUORESCENT X-RAY ANALYZER
The present invention provides an X-ray generator including an X-ray tube 2 radiating primary X-rays X1 to a specimen S, a housing 3 accommodating the X-ray...
COLD FIELD ELECTRON EMITTERS BASED ON SILICON CARBIDE STRUCTURES
A cold cathode field emission electron source capable of emission at levels comparable to thermal sources is described. Emission in excess of 6 A/cm.sup.2 at...
LOW-FREQUENCY CIRCUIT BREAKER
An object is to obtain a low-frequency circuit breaker which has a simple configuration and a small size as a whole and is advantageous in view of costs. There...
Safety switching device with failsafe inputs
A fail-safe safety switching device comprises first and second input channels for receiving first and second input signals, and a first testing arrangement for...
COMMUNICATING WITH POWER SWITCHING DEVICES
In one example, a method includes receiving, at a first time by a power switching device via an input connector of the power switching device, a signal that...
MULTIPLEXING, SWITCHING AND TESTING DEVICES AND METHODS USING FLUID
A fluid pressure actuated device for establishing electrical contact includes a first side and a second side each defining a respective cavity. A respective...
CONTROL SYSTEM INCLUDING SINGLE LINE SWITCHES AND METHOD
A control system and method of controlling a control system includes a set of pressure-controlled devices having at least a first device and a second device...
SUPPORTING STRUCTURE OF CLOSING RESISTOR FOR HIGH VOLTAGE CIRCUIT BREAKER
The present invention relates to a supporting structure of a closing resistor for a high voltage circuit breaker, capable of stably supporting the closing...
KNOB ASSEMBLY AND KNOB CONTROL SYSTEM FOR VEHICLE INCLUDING THE SAME
A knob assembly includes a head portion and a cylindrical-shaped protruding portion protruding from one surface of the head portion. The protruding portion is...
A keyboard includes plural keys, a base plate and a backlight module. Each key includes a keycap and a sliding element. The keycap includes a first protrusion...
Keyboard includes a keyboard unit for inputting commands into an electronic device and a base unit. The base unit includes a first part and a second part. The...
KEYSWITCH MODULE AND KEYBOARD
A keyswitch module includes a bottom plate, a movable plate, a keycap, and a connecting assembly. The moving plate is stacked with the bottom plate and capable...
MAGNETICALLY BIASED RETRACTING KEY ASSEMBLY AND KEYBOARD
Magnetically biased retracting key assemblies and keyboards are provided. A key assembly includes a touch surface for receiving a press input from a user and a...
MULTI-USE SWITCH FOR ELECTRONIC DEVICE
A multi-use switch for an electronic device includes a pressing piece configured to be pressed by an external force, a number of conducting elements located on...
SURGICAL INSTRUMENTS AND SWITCH ASSEMBLIES THEREOF
A switch assembly includes a switch housing, a first switch subassembly, and a second switch subassembly. The first switch subassembly includes a shaft and a...
ADJUSTABLE DOOR ASSEMBLY
One or more apparatuses are provided for forming a seal between a circuit breaker and an enclosure. A adjustable door assembly comprises an inner floating...
CAPACITOR AND METHOD FOR CHARGING AND DISCHARGING THE SAME
Provided is a capacitor in which, even in the case of a high maximum charging voltage, decomposition of the electrolyte can be suppressed and charging and...
ELECTRODE FOR POWER STORAGE DEVICE, POWER STORAGE DEVICE, AND METHOD FOR
MANUFACTURING ELECTRODE FOR POWER...
An electrode for a power storage device includes carbon nanotubes, graphene, an ionic liquid, and a three-dimensional network metal porous body which holds the...
METHOD FOR MAKING SOLID ELECTROLYTIC CAPACITOR PACKAGE STRUCTURE WITH
IMPROVED CONDUCTIVE TERMINALS
The instant disclosure relates to a method for making solid electrolytic capacitor package structure with improved conductive terminals. The first step is to...
SEALING ELEMENT AND WOUND-TYPE SOLID STATE ELECTROLYTIC CAPACITOR THEREOF
A sealing element of the instant disclosure includes a cover body, an exterior convex portion, and an interior convex portion. The cover body has a first...
SOLID-STATE ELECTROLYTIC CAPACITOR WITH IMPROVED METALLIC ANODE AND METHOD
FOR MANUFACTURING THE SAME
The instant disclosure relates to a solid electrolytic capacitor with improved metallic anode and a method for manufacturing the same. The solid electrolytic...
SOLID ELECTROLYTIC CHIP CAPACITOR AND MANUFACTURING METHOD THEREOF
A solid electrolytic chip capacitor is provided which comprises a substrate layer, an electrical insulating block, a conductive polymer layer, a patterned...
An electronic component comprises an element body, an external electrode, and an insulating resin coating layer. The element body has a pair of end faces...
An electronic component includes a multilayer capacitor and an interposer. The multilayer capacitor includes an element body and a pair of external electrodes....
MULTILAYER CERAMIC CAPACITOR
A multilayer ceramic capacitor includes a ceramic multilayer body including dielectric ceramic layers and inner electrodes laminated with the dielectric...