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Patent # Description
2016/0148812 METHOD OF IMPROVING LINE ROUGHNESS IN SUBSTRATE PROCESSING
Provided is a method for processing a semiconductor substrate to reduce line roughness, the method comprising: positioning a substrate in a film-forming...
2016/0148811 Method of Manufacturing Semiconductor Device and Substrate Processing Apparatus
A method of manufacturing a semiconductor device includes (a) providing a substrate and (b) forming a film including a first element, a second element and a...
2016/0148810 High-efficiency line-forming optical systems and methods for defect annealing and dopant activation
High-efficiency line-forming optical systems and methods for defect annealing and dopant activation are disclosed. The system includes a CO.sub.2-based...
2016/0148809 FORMATION OF ISOLATION SURROUNDING WELL IMPLANTATION
Embodiments of present invention provide a method of making well isolations. The method includes forming a hard-mask layer on top of said substrate; forming a...
2016/0148808 METHOD FOR FABRICATING SEMICONDUCTOR DEVICE
A method of fabricating a semiconductor device is provided. A plurality of target patterns is formed on a substrate. The plurality of target patterns is...
2016/0148807 POLYCRYSTALLINE SEMICONDUCTOR NANOSTRUCTURED MATERIAL
A method for producing a network of nanostructures from at least one semiconductor material, including a step of forming nanostructures on the surface of a...
2016/0148806 METHOD OF DEPOSITING AMMONIA FREE AND CHLORINE FREE CONFORMAL SILICON NITRIDE FILM
Provided herein are methods of depositing conformal silicon nitride films using atomic layer deposition by exposure to a halogen-free, N--H-bond-free, and...
2016/0148805 CYCLIC ALUMINUM OXYNITRIDE DEPOSITION
A process for depositing aluminum oxynitride (AlON) is disclosed. The process comprises subjecting a substrate to temporally separated exposures to an aluminum...
2016/0148804 METHOD FOR PRODUCING A THIN FILM TRANSISTOR
A method for producing a thin film transistor includes forming a transistor prototype on a substrate, with the transistor prototype including a face having a...
2016/0148803 SYSTEM AND METHOD FOR CONTROLLING WAFER AND THIN FILM SURFACE TEMPERATURE
A vapor deposition system and its wafer and thin-film temperature control method are disclosed. A susceptor carries a plurality of wafer holders with each...
2016/0148802 Liquid Chemical for Forming Protecting Film
Disclosed is a liquid chemical for forming a water-repellent protecting film at least on a surface of a recessed portion of an uneven pattern at the time of...
2016/0148801 SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND STORAGE MEDIUM
A substrate processing apparatus, that performs oxidization on a surface of a substrate in a vacuum atmosphere formed in a vacuum chamber, includes an...
2016/0148800 SELECTIVE INHIBITION IN ATOMIC LAYER DEPOSITION OF SILICON-CONTAINING FILMS
Methods of selectively inhibiting deposition of silicon-containing films deposited by atomic layer deposition are provided. Selective inhibition involves...
2016/0148799 METHODS FOR MANUFACTURING SEMICONDUCTOR DEVICES
The present disclosure provides a method of manufacturing a semiconductor device having silicon nitride with a tensile stress, the method comprising: c1)...
2016/0148798 Lamp and headlighting arrangement for obtaining a color appearance in an automotive headlight
A lamp 10 is described which may be used in an automotive headlight 12. The lamp 10 comprises at least one filament 20 within a transparent lamp vessel 16. A...
2016/0148797 DISCHARGE LAMP
A discharge lamp includes a cathode in a luminous tube, and an emitter, other than thorium, is added to the cathode. The emitter is prevented from being...
2016/0148796 CONSTRAINING ARCUATE DIVERGENCE IN AN ION MIRROR MASS ANALYSER
A charged particle analyzer apparatus comprising two opposing ion mirrors each mirror comprising inner and outer field-defining electrode systems elongated...
2016/0148795 TIME-OF-FLIGHT MASS SPECTROMETERS WITH CASSINI REFLECTOR
The invention relates to embodiments of high-resolution time-of-flight (TOF) mass spectrometers with special reflectors. The invention provides reflectors with...
2016/0148794 MINIATURE SENSOR STRUCTURES FOR ION MOBILITY SPECTROMETERS
For ion mobility spectrometry applications, a desired shape of a sensor structure may be created by forming a desired shape from a ceramic material, such as...
2016/0148793 METHOD FOR OBTAINING MASS SPECTRUM OF IONS GENERATED AT CONSTANT TEMPERATURE BY MEASURING TOTAL ION COUNT, AND...
A method for obtaining a mass spectrum of reproducible ions generated at a constant temperature by measuring a total ion count, and the use of a matrix for...
2016/0148792 Mass Spectrometer With Bypass of a Fragmentation Device
A method for analyzing a mixture of components includes forming precursor ions from the components, alternately causing the precursor ions to pass to and to...
2016/0148791 Intensity Correction for TOF Data Acquisition
Systems and methods are provided for correcting uniform detector saturation of a mass analyzer using a calibration curve. In one method, a measured spectrum is...
2016/0148790 Tungsten Sintered Sputtering Target
Provided is a tungsten sintered sputtering target, wherein the phosphorus content is 1 wtppm or less and the remainder is other unavoidable impurities and...
2016/0148789 PRE-CLEANING CHAMBER AND A SEMICONDUCTOR PROCESSING APPARATUS CONTAINING THE SAME
The present disclosure provides a pre-cleaning chamber. The pre-cleaning chamber includes a cavity, a top cover of the cavity, and an ion filtering unit with...
2016/0148788 GAS RING FOR PLASMA SYSTEM AND METHOD OF MANUFACTURING THE SAME
A gas ring for a plasma system includes a gas ring body having a surface and an insulating protective layer covering the surface. Methods of manufacturing the...
2016/0148787 PLASMA ETCHING APPARATUS
A plasma etching apparatus is for etching a substrate and includes at least one chamber, a substrate support positioned within the at least one chamber, and a...
2016/0148786 PULSED PLASMA CHAMBER IN DUAL CHAMBER CONFIGURATION
Embodiments for processing a substrate in a pulsed plasma chamber are provided. A processing apparatus with two chambers, separated by a plate fluidly...
2016/0148785 CHARGED PARTICLE BEAM WRITING APPARATUS, AND CHARGED PARTICLE BEAM WRITING METHOD
A charged particle beam writing apparatus includes a correction term calculation processing circuitry to calculate a correction term which corrects an error of...
2016/0148784 DYNAMIC PATTERN GENERATOR AND METHOD OF TOGGLING MIRROR CELLS OF THE DYNAMIC PATTERN GENERATOR
The present disclosure provides a method for operating a dynamic pattern generator (DPG) having a mirror array. The method comprises receiving a clock signal,...
2016/0148783 METHOD OF SPECIMEN PROCESSING IN AN APPARATUS WITH TWO OR MORE PARTICLE BEAMS AND APPARATUS FOR THIS PROCESSING
A method and apparatus for processing a specimen with two or more particle beams, wherein the specimen has a milled side that is processed by a first particle...
2016/0148782 Scanning Electron Microscope
This scanning electron microscope is provided with: a deceleration means that decelerates an electron beam (5) when the electron beam is passing through an...
2016/0148781 CHARGED PARTICLE BEAM APPARATUS AND INSPECTION METHOD USING THE SAME
A charged particle beam apparatus makes it possible to acquire information in the cross-sectional direction (depth direction) of a sample having an internal...
2016/0148780 QUANTITATIVE SECONDARY ELECTRON DETECTION
Quantitative Secondary Electron Detection (QSED) using the array of solid state devices (SSD) based electron-counters enable critical dimension metrology...
2016/0148779 Specimen Preparation Device
A specimen preparation device prepares a cross section of a specimen by applying an ion beam, the specimen preparation device including: an ion beam generator...
2016/0148778 MICRO X-RAY TUBE
The present disclosure may provide a micro X-ray tube with a filter tube to filter X-rays and at the same time to serve as an insulator. For this, the X-ray...
2016/0148777 ENCAPSULATED STRUCTURE FOR X-RAY GENERATOR WITH COLD CATHODE AND METHOD OF VACUUMING THE SAME
An encapsulated structure of an X ray generator with a cold cathode and method of vacuuming the same are disclosed. The X ray generator has a glass ball-tube...
2016/0148776 FIELD EMISSION DEVICE
Provided herein is a field emission device. The field emission device includes a cathode which is connected to a negative power supply and emits electrons, an...
2016/0148775 ANODE LAYER SLIT ION SOURCE
A linear anode layer ion source is provided that includes a top pole having a linear ion emitting slit. An anode under the top pole has a slit aligned with the...
2016/0148774 FIELD-EMISSION DEVICE WITH IMPROVED BEAMS-CONVERGENCE
The present disclosure may provide a field emission device with an enhanced beam convergence. For this, the device may include a gate structure disposed...
2016/0148773 FERROELECTRIC EMITTER FOR ELECTRON BEAM EMISSION AND RADIATION GENERATION
Disclosed are methods and devices suitable for generating electron beams and pulses of radiation. Specifically, in some disclosed embodiments, multiple...
2016/0148772 SWITCH WITH OVERLOAD RELEASE ABILITY
A switch includes first and second conductive prongs that have upper portions located within a switch casing and lower portions exposed therefrom, a button...
2016/0148771 THERMAL-MECHANICAL FLEXIBLE OVERLOAD SENSOR
An overload relay is provided for electrical equipment, such as a motor. The overload relay includes a set of electrical contacts, a trip mechanism and a...
2016/0148770 ELECTROMECHANICAL SWITCHING DEVICE WITH ELECTRODES HAVING 2D LAYERED MATERIALS WITH DISTINCT FUNCTIONAL AREAS
An electromechanical switching device includes a first electrode, comprising layers of a first 2D layered material, which layers exhibit a first surface; a...
2016/0148769 SELF-HOLDING MAGNET WITH A PARTICULARLY LOW ELECTRIC TRIGGER VOLTAGE
A self-holding magnet has a spring (accumulator spring) and a first armature. The self-holding magnet is capable of holding the first magnet armature against...
2016/0148768 CONTROL CIRCUIT OF DIODE CONTACT PROTECTION COMBINATION SWITCH AND RELAY CONTROL METHOD
A diode contact protection combination switch and a specific implementation method. The combination switch comprises a primary contact protection circuit...
2016/0148767 FAIL-SAFE SYSTEM FOR PROCESS MACHINE
An apparatus is for a process machine having a process-status switch and a process-control element. The apparatus includes a sensor input signal conditioning...
2016/0148766 MOLDED-CASE CIRCUIT BREAKER
A molded-case circuit breaker includes a handle, a contact system and an actuating device. In an embodiment, the handle is movable between an "ON" position and...
2016/0148765 OPERATOR CONTROL DEVICE FOR AN ELECTRICAL APPLIANCE AND ELECTRICAL APPLIANCE
An operator control device for an electrical appliance has a cover, a rotary actuator as an actuating element and a mount for the rotary actuator. The rotary...
2016/0148764 Switching Device for a Radio Pushbutton, Radio Pushbutton, and Method for Producing a Switching Signal of a...
The current embodiments provide a switch device for a wireless pushbutton, wherein the switch device comprising an energy conversion mechanism, a signal output...
2016/0148763 KEY STRUCTURE WITH REDUCED RESONANT NOISE
A key structure with reduced resonant noise includes a base plate formed with a first supporting portion and a second supporting portion, a conductive film...
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