At Patents you can conduct a Patent Search, File a Patent Application, find a Patent Attorney, or search available technology through our Patent Exchange. Patents are available using simple keyword or date criteria. If you are looking to hire a patent attorney, you've come to the right place. Protect your idea and hire a patent lawyer.
METHOD OF IMPROVING LINE ROUGHNESS IN SUBSTRATE PROCESSING
Provided is a method for processing a semiconductor substrate to reduce line roughness, the method comprising: positioning a substrate in a film-forming...
Method of Manufacturing Semiconductor Device and Substrate Processing
A method of manufacturing a semiconductor device includes (a) providing a substrate and (b) forming a film including a first element, a second element and a...
High-efficiency line-forming optical systems and methods for defect
annealing and dopant activation
High-efficiency line-forming optical systems and methods for defect annealing and dopant activation are disclosed. The system includes a CO.sub.2-based...
FORMATION OF ISOLATION SURROUNDING WELL IMPLANTATION
Embodiments of present invention provide a method of making well isolations. The method includes forming a hard-mask layer on top of said substrate; forming a...
METHOD FOR FABRICATING SEMICONDUCTOR DEVICE
A method of fabricating a semiconductor device is provided. A plurality of target patterns is formed on a substrate. The plurality of target patterns is...
POLYCRYSTALLINE SEMICONDUCTOR NANOSTRUCTURED MATERIAL
A method for producing a network of nanostructures from at least one semiconductor material, including a step of forming nanostructures on the surface of a...
METHOD OF DEPOSITING AMMONIA FREE AND CHLORINE FREE CONFORMAL SILICON
Provided herein are methods of depositing conformal silicon nitride films using atomic layer deposition by exposure to a halogen-free, N--H-bond-free, and...
CYCLIC ALUMINUM OXYNITRIDE DEPOSITION
A process for depositing aluminum oxynitride (AlON) is disclosed. The process comprises subjecting a substrate to temporally separated exposures to an aluminum...
METHOD FOR PRODUCING A THIN FILM TRANSISTOR
A method for producing a thin film transistor includes forming a transistor prototype on a substrate, with the transistor prototype including a face having a...
SYSTEM AND METHOD FOR CONTROLLING WAFER AND THIN FILM SURFACE TEMPERATURE
A vapor deposition system and its wafer and thin-film temperature control method are disclosed. A susceptor carries a plurality of wafer holders with each...
Liquid Chemical for Forming Protecting Film
Disclosed is a liquid chemical for forming a water-repellent protecting film at least on a surface of a recessed portion of an uneven pattern at the time of...
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND STORAGE
A substrate processing apparatus, that performs oxidization on a surface of a substrate in a vacuum atmosphere formed in a vacuum chamber, includes an...
SELECTIVE INHIBITION IN ATOMIC LAYER DEPOSITION OF SILICON-CONTAINING
Methods of selectively inhibiting deposition of silicon-containing films deposited by atomic layer deposition are provided. Selective inhibition involves...
METHODS FOR MANUFACTURING SEMICONDUCTOR DEVICES
The present disclosure provides a method of manufacturing a semiconductor device having silicon nitride with a tensile stress, the method comprising: c1)...
Lamp and headlighting arrangement for obtaining a color appearance in an
A lamp 10 is described which may be used in an automotive headlight 12. The lamp 10 comprises at least one filament 20 within a transparent lamp vessel 16. A...
A discharge lamp includes a cathode in a luminous tube, and an emitter, other than thorium, is added to the cathode. The emitter is prevented from being...
CONSTRAINING ARCUATE DIVERGENCE IN AN ION MIRROR MASS ANALYSER
A charged particle analyzer apparatus comprising two opposing ion mirrors each mirror comprising inner and outer field-defining electrode systems elongated...
TIME-OF-FLIGHT MASS SPECTROMETERS WITH CASSINI REFLECTOR
The invention relates to embodiments of high-resolution time-of-flight (TOF) mass spectrometers with special reflectors. The invention provides reflectors with...
MINIATURE SENSOR STRUCTURES FOR ION MOBILITY SPECTROMETERS
For ion mobility spectrometry applications, a desired shape of a sensor structure may be created by forming a desired shape from a ceramic material, such as...
METHOD FOR OBTAINING MASS SPECTRUM OF IONS GENERATED AT CONSTANT
TEMPERATURE BY MEASURING TOTAL ION COUNT, AND...
A method for obtaining a mass spectrum of reproducible ions generated at a constant temperature by measuring a total ion count, and the use of a matrix for...
Mass Spectrometer With Bypass of a Fragmentation Device
A method for analyzing a mixture of components includes forming precursor ions from the components, alternately causing the precursor ions to pass to and to...
Intensity Correction for TOF Data Acquisition
Systems and methods are provided for correcting uniform detector saturation of a mass analyzer using a calibration curve. In one method, a measured spectrum is...
Tungsten Sintered Sputtering Target
Provided is a tungsten sintered sputtering target, wherein the phosphorus content is 1 wtppm or less and the remainder is other unavoidable impurities and...
PRE-CLEANING CHAMBER AND A SEMICONDUCTOR PROCESSING APPARATUS CONTAINING
The present disclosure provides a pre-cleaning chamber. The pre-cleaning chamber includes a cavity, a top cover of the cavity, and an ion filtering unit with...
GAS RING FOR PLASMA SYSTEM AND METHOD OF MANUFACTURING THE SAME
A gas ring for a plasma system includes a gas ring body having a surface and an insulating protective layer covering the surface. Methods of manufacturing the...
PLASMA ETCHING APPARATUS
A plasma etching apparatus is for etching a substrate and includes at least one chamber, a substrate support positioned within the at least one chamber, and a...
PULSED PLASMA CHAMBER IN DUAL CHAMBER CONFIGURATION
Embodiments for processing a substrate in a pulsed plasma chamber are provided. A processing apparatus with two chambers, separated by a plate fluidly...
CHARGED PARTICLE BEAM WRITING APPARATUS, AND CHARGED PARTICLE BEAM WRITING
A charged particle beam writing apparatus includes a correction term calculation processing circuitry to calculate a correction term which corrects an error of...
DYNAMIC PATTERN GENERATOR AND METHOD OF TOGGLING MIRROR CELLS OF THE
DYNAMIC PATTERN GENERATOR
The present disclosure provides a method for operating a dynamic pattern generator (DPG) having a mirror array. The method comprises receiving a clock signal,...
METHOD OF SPECIMEN PROCESSING IN AN APPARATUS WITH TWO OR MORE PARTICLE
BEAMS AND APPARATUS FOR THIS PROCESSING
A method and apparatus for processing a specimen with two or more particle beams, wherein the specimen has a milled side that is processed by a first particle...
Scanning Electron Microscope
This scanning electron microscope is provided with: a deceleration means that decelerates an electron beam (5) when the electron beam is passing through an...
CHARGED PARTICLE BEAM APPARATUS AND INSPECTION METHOD USING THE SAME
A charged particle beam apparatus makes it possible to acquire information in the cross-sectional direction (depth direction) of a sample having an internal...
QUANTITATIVE SECONDARY ELECTRON DETECTION
Quantitative Secondary Electron Detection (QSED) using the array of solid state devices (SSD) based electron-counters enable critical dimension metrology...
Specimen Preparation Device
A specimen preparation device prepares a cross section of a specimen by applying an ion beam, the specimen preparation device including: an ion beam generator...
MICRO X-RAY TUBE
The present disclosure may provide a micro X-ray tube with a filter tube to filter X-rays and at the same time to serve as an insulator. For this, the X-ray...
ENCAPSULATED STRUCTURE FOR X-RAY GENERATOR WITH COLD CATHODE AND METHOD OF
VACUUMING THE SAME
An encapsulated structure of an X ray generator with a cold cathode and method of vacuuming the same are disclosed. The X ray generator has a glass ball-tube...
FIELD EMISSION DEVICE
Provided herein is a field emission device. The field emission device includes a cathode which is connected to a negative power supply and emits electrons, an...
ANODE LAYER SLIT ION SOURCE
A linear anode layer ion source is provided that includes a top pole having a linear ion emitting slit. An anode under the top pole has a slit aligned with the...
FIELD-EMISSION DEVICE WITH IMPROVED BEAMS-CONVERGENCE
The present disclosure may provide a field emission device with an enhanced beam convergence. For this, the device may include a gate structure disposed...
FERROELECTRIC EMITTER FOR ELECTRON BEAM EMISSION AND RADIATION GENERATION
Disclosed are methods and devices suitable for generating electron beams and pulses of radiation. Specifically, in some disclosed embodiments, multiple...
SWITCH WITH OVERLOAD RELEASE ABILITY
A switch includes first and second conductive prongs that have upper portions located within a switch casing and lower portions exposed therefrom, a button...
THERMAL-MECHANICAL FLEXIBLE OVERLOAD SENSOR
An overload relay is provided for electrical equipment, such as a motor. The overload relay includes a set of electrical contacts, a trip mechanism and a...
ELECTROMECHANICAL SWITCHING DEVICE WITH ELECTRODES HAVING 2D LAYERED
MATERIALS WITH DISTINCT FUNCTIONAL AREAS
An electromechanical switching device includes a first electrode, comprising layers of a first 2D layered material, which layers exhibit a first surface; a...
SELF-HOLDING MAGNET WITH A PARTICULARLY LOW ELECTRIC TRIGGER VOLTAGE
A self-holding magnet has a spring (accumulator spring) and a first armature. The self-holding magnet is capable of holding the first magnet armature against...
CONTROL CIRCUIT OF DIODE CONTACT PROTECTION COMBINATION SWITCH AND RELAY
A diode contact protection combination switch and a specific implementation method. The combination switch comprises a primary contact protection circuit...
FAIL-SAFE SYSTEM FOR PROCESS MACHINE
An apparatus is for a process machine having a process-status switch and a process-control element. The apparatus includes a sensor input signal conditioning...
MOLDED-CASE CIRCUIT BREAKER
A molded-case circuit breaker includes a handle, a contact system and an actuating device. In an embodiment, the handle is movable between an "ON" position and...
OPERATOR CONTROL DEVICE FOR AN ELECTRICAL APPLIANCE AND ELECTRICAL
An operator control device for an electrical appliance has a cover, a rotary actuator as an actuating element and a mount for the rotary actuator. The rotary...
Switching Device for a Radio Pushbutton, Radio Pushbutton, and Method for
Producing a Switching Signal of a...
The current embodiments provide a switch device for a wireless pushbutton, wherein the switch device comprising an energy conversion mechanism, a signal output...
KEY STRUCTURE WITH REDUCED RESONANT NOISE
A key structure with reduced resonant noise includes a base plate formed with a first supporting portion and a second supporting portion, a conductive film...