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Patent # Description
2016/0172199 NANOCRYSTAL MEMORY AND METHODS FOR FORMING SAME
A charge-storing device includes a charge-storing layer including nanocrystals. The nanocrystals are formed by a deposition technique incorporating deuterated...
2016/0172198 Simultaneous Hydrophilization of Photoresist and Metal Surface Preparation: Methods, Systems, and Products
Methods and systems for using the downstream active residuals of a reducing-chemistry atmospheric plasma to provide multiple advantages to pre-plating surface...
2016/0172197 METHOD AND APPARATUS FOR NEUTRAL BEAM PROCESSING BASED ON GAS CLUSTER ION BEAM TECHNOLOGY AND ARTICLES PRODUCED...
A method for treating a silicon substrate, and a silicon substrate, provide a surface treated with an accelerated neutral beam.
2016/0172196 Method of Semiconductor Integrated Circuit Fabrication
A method of fabricating a semiconductor integrated circuit (IC) is disclosed. A a dielectric layer is formed over a substrate. An interlayer is formed over the...
2016/0172195 NANOSTRUCTURES HAVING LOW DEFECT DENSITY AND METHODS OF FORMING THEREOF
A method of forming nanostructure comprises forming self-assembled nucleic acids on at least a portion of a substrate. The method further comprises contacting...
2016/0172194 METHOD FOR BLOCKING A TRENCH PORTION
A method is provided for blocking a portion of a longitudinal through-hole during manufacture of a semiconductor structure, comprising the steps of: forming a...
2016/0172193 CONTROLLED MANUFACTURING METHOD OF METAL OXIDE SEMICONDUCTOR AND METAL OXIDE SEMICONDUCTOR STRUCTURE HAVING...
A method of controlling a growth crystallographic plane of a metal oxide semiconductor having a wurtzite crystal structure by using a thermal chemical vapor...
2016/0172192 CYCLICAL DEPOSITION OF GERMANIUM
In some aspects, methods for forming a germanium thin film using a cyclical deposition process are provided. In some embodiments, the germanium thin film is...
2016/0172191 Method of Manufacturing Semiconductor Device and Non-Transitory Computer-Readable Recording Medium
There are provided a substrate processing apparatus including: a process chamber accommodating a substrate including a polysilicon film having an ...
2016/0172190 GATE OXIDE FORMATION PROCESS
A gate oxide formation process includes the following steps. A first gate oxide layer is formed on a substrate. The first gate oxide layer is thinned to a...
2016/0172189 METHOD OF SELECTIVE GAS PHASE FILM DEPOSITION ON A SUBSTRATE
According to one embodiment of the invention, a method is provided for selective surface deposition. In one example, the method includes providing a substrate...
2016/0172188 RINSE SOLUTION FOR SILICA THIN FILM, METHOD OF PRODUCING SILICA THIN FILM, AND SILICA THIN FILM
A rinse solution for a silica thin film includes trimethylbenzene, diethylbenzene, indane, indene, tert-butyl toluene, methylnaphthalene, a mixture including...
2016/0172187 METHOD OF FORMING FINE PATTERN AND METHOD OF MANUFACTURING INTEGRATED CIRCUIT DEVICE USING THE METHOD
A method of forming a fine pattern includes forming pillar-shaped guides regularly arranged on a feature layer, forming a block copolymer layer on the feature...
2016/0172186 Method For Metal Gate Surface Clean
The present disclosure provides a method for forming an integrated circuit (IC) structure. The method includes providing a metal gate (MG), an etch stop layer...
2016/0172185 METHOD FOR MEASURING OVERALL CONCENTRATION OF OXIDIZING SUBSTANCES, SUBSTRATE CLEANING METHOD, AND SUBSTRATE...
To allow online monitoring of the overall concentration of oxidizing substances in electrolyzed sulfuric acid, for example, in a cleaning system, absorbance...
2016/0172184 METHOD FOR CLEANING A WAFER
A method for cleaning a wafer is provided. The method comprises the following steps. First, a clean solution is provided with a first amount to a front side...
2016/0172183 FILM FORMING METHOD
Disclosed is a method of forming a nitride film on a substrate to be processed ("processing target substrate") in a processing container. The method includes...
2016/0172182 LASER PROCESSING APPARATUS
A laser beam irradiation unit of a laser processing apparatus includes a laser oscillator which oscillates a laser beam, an output power adjustment unit which...
2016/0172181 ILLUMINANT AND OPERATING METHOD THEREFOR
The invention relates to an illuminant having a gas volume and a coaxial HF energy coupling device for the excitation thereof using surface waves. It is...
2016/0172180 METHODS, APPARATUS, AND SYSTEM FOR MASS SPECTROMETRY
A miniature, low cost mass spectrometer capable of unit resolution over a mass range of 10 to 50 AMU. The mass spectrometer incorporates several features that...
2016/0172179 Vacuum System
The invention concerns a vacuum system, comprising a first vacuum chamber and a second vacuum chamber, the first vacuum chamber being evacuated by a first...
2016/0172178 SAMPLE DROPLET GENERATION FROM SEGMENTED FLUID FLOW AND RELATED DEVICES AND METHODS
A sample droplet generator transforms a segmented array of sample material into a continuous stream of droplets containing analytes. The droplets may serve as...
2016/0172177 INTERMITTENT MASS SPECTROMETER INLET
An intermittent sample inlet device and methods for use of the intermittent sample inlet device are described that include an orifice plate with an entrance...
2016/0172176 SYSTEMS AND METHODS OF SUPPRESSING UNWANTED IONS
Certain embodiments described herein are directed to systems including a cell downstream of a mass analyzer. In some instances, the cell is configured as a...
2016/0172175 METHOD AND KIT FOR DETERMINING METABOLITES ON DRIED BLOOD SPOT SAMPLES
A method for individuating with high sensitivity and specificity ADA metabolites from dried blood spot. The method described herein can be used to extract...
2016/0172174 MATRIX FILM FORMING DEVICE
A matrix film forming device including a first electrode plate including a mounting surface on which a sample plate P is mounted; a second electrode plate...
2016/0172173 Cascaded-Signal-Intensifier-Based Ion Imaging Detector for Mass Spectrometer
A detector system for a mass spectrometer comprises: a metal channel dynode (MCD) comprising at least one perforated metal plate configured to receive the...
2016/0172172 HIGH-VOLTAGE POWER UNIT AND MASS SPECTROMETER USING THE POWER UNIT
An excessive overshoot preventing unit (16) is connected to a loop in which a command voltage Vf according to a difference between: a voltage obtained by...
2016/0172171 AUTOMATIC DETERMINATION OF DEMULTIPLEXING MATRIX FOR ION MOBILITY SPECTROMETRY AND MASS SPECTROMETRY
Multiplexed ion mobility spectrometry (IMS), mass spectrometry (MS) such as time-of-flight mass spectrometry (TOFMS), or hybrid IM-MS is carried out on a...
2016/0172170 ANALYZER
There is provided an analyzer including: an ionizer unit that ionizes molecules to be analyzed; a filter unit that selectively passes ions generated by the...
2016/0172169 ELECTRON MULTIPLIER AND PHOTOMULTIPLIER INCLUDING THE SAME
The present invention relates to an electron multiplier and others to effectively suppress luminescence noise, even in compact size, in which each of...
2016/0172168 APPARATUS FOR PVD DIELECTRIC DEPOSITION
Apparatus for physical vapor deposition of dielectric material is provided herein. In some embodiments, a chamber lid of a physical vapor deposition chamber...
2016/0172167 COPPER MATERIAL FOR HIGH-PURITY COPPER SPUTTERING TARGET, AND HIGH-PURITY COPPER SPUTTERING TARGET
In a copper material for a high-purity copper sputtering target of the present invention, a purity of Cu excluding O, H, N, and C is in a range of 99.999980...
2016/0172166 TARGET, ADAPTED TO AN INDIRECT COOLING DEVICE, HAVING A COOLING PLATE
A device for cooling a target, having a component that includes a cooling duct and having an additional thermally conductive plate that is detachably fastened...
2016/0172165 Carrier Ring Structure and Chamber Systems Including the Same
A carrier ring for use in a chamber implemented for depositing films and chambers that use the carrier ring are provided. The carrier ring has an annular disk...
2016/0172164 REMOTE DELIVERY OF CHEMICAL REAGENTS
Fluid storage and dispensing systems and methods for remote delivery of fluids are described, for providing fluid from a source vessel at lower voltage to one...
2016/0172163 MICROWAVE PLASMA PROCESSING APPARATUS AND MICROWAVE SUPPLYING METHOD
Disclosed is a microwave plasma processing apparatus including: a processing container configured to define a processing space; a microwave generator...
2016/0172162 Computation Of Statistics For Statistical Data Decimation
Systems and methods for statistical data decimation are described. The method includes receiving a variable from a radio frequency (RF) system, propagating the...
2016/0172161 PLASMA PROCESSING APPARATUS
Provided is a plasma processing apparatus capable of obtaining desired etch profiles and preventing the degradation of yield rates due to the adhesion of...
2016/0172160 PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
A plasma processing apparatus includes: an evacuable processing chamber including a dielectric window; a substrate supporting unit, provided in the processing...
2016/0172159 APPARATUS AND METHOD TO CONTROL AN ION BEAM
An apparatus to control a ribbon ion beam. The apparatus may include a coil assembly comprising a plurality of electromagnetic coils configured to generate a...
2016/0172158 SAMPLE HOLDER AND FOCUSED-ION-BEAM MACHINING DEVICE PROVIDED THEREWITH
To realize a focused-ion-beam machining apparatus capable of machining a thin sample with a wide area and a uniform film thickness and a needle-like sample...
2016/0172157 IMAGE TYPE ELECTRON SPIN POLARIMETER
Provided is an image type electron spin polarimeter. It at least comprises a scattering target, a two-dimensional electron detector and an electron bending...
2016/0172156 SOURCE FOR SELECTIVELY PROVIDING POSITIVELY OR NEGATIVELY CHARGED PARTICLES FOR A FOCUSING COLUMN
A single column charged particle source with user selectable configurations operates in ion-mode for FIB operations or electron mode for SEM operations....
2016/0172155 DEVICE AND METHOD OF DETECTING AND GENERATING COMBINED MODULATED PARTICLE WAVE-FRONTS
The present disclosure relates to a particle and energy detection system. More particularly, the present disclosure relates to coherent particle ...
2016/0172154 Charged Particle Beam Device
Proposed is a charged particle beam device including an arithmetic processing unit that generates an image of a sample, based on a detection signal that is...
2016/0172153 MICROSCOPY SUPPORT STRUCTURES
Electron microscope support structures and methods of making and using same. The support structures are generally constructed using semiconductor materials and...
2016/0172152 ELECTRON MICROSCOPE HAVING A CARRIER
An electronic microscope includes a carrier, a first driving unit, a flow-buffer unit and an electron source. The carrier carries a sample. The first driving...
2016/0172151 APPARATUS AND METHODS FOR ABERRATION CORRECTION IN ELECTRON BEAM BASED SYSTEM
One embodiment relates to an apparatus for aberration correction in an electron beam lithography system. An inner electrode surrounds a pattern generating...
2016/0172150 Swing Objective Lens
A scanning electron microscope (SEM) with a swing objective lens (SOL) reduces the off-aberrations to enhance the image resolution, and extends the e-beam...
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