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A patterning method is provided. A photoresist layer is formed on a target layer. An etching resistance layer is formed on the photoresist layer. The...
REMOVAL OF METAL
Methods of removing metal from a portion of a substrate are useful in integrated circuit fabrication. Methods include exposing the substrate to an oxidizing...
METHOD AND DEVICE FOR POLISHING SEMICONDUCTOR WAFER
A method includes: polishing a semiconductor wafer by a polishing device; measuring a form of the semiconductor wafer by a measuring device before a polished...
Hybrid Ion Source and Mass Spectrometric Device
In order to provide an ion source that can be easily switched with high sensitivity and in a short time, the ion source includes an ionization probe for...
AC GATE ION FILTER METHOD AND APPARATUS
The present invention uses an AC voltage instead of DC voltage on an ion gate to filter/selectively pass ions. The ions that pass through the AC ion gate can...
System of devices and components of said system
This invention relates to vacuum complex system of devices (VCSD), including, requiring vacuum the main unit (objects and processes, requiring a vacuum...
MULTI-BLOCK SPUTTERING TARGET WITH INTERFACE PORTIONS AND ASSOCIATED
METHODS AND ARTICLES
A sputtering target that includes at least two consolidated blocks, each block including an alloy including a first metal (e.g., a refractory metal such as...
MULTI-BLOCK SPUTTERING TARGET AND ASSOCIATED METHODS AND ARTICLES
A sputtering target that includes at least two consolidated blocks, each block including an alloy including molybdenum in an amount greater than about 30...
Temperature Control Device
A temperature control device includes: a circulating cooling/heating unit cooling and heating a circulating fluid and circulating the circulating fluid...
PLASMA REACTOR VESSEL AND ASSEMBLY, AND A METHOD OF PERFORMING PLASMA
Plasma reactor vessel comprising a vacuum chamber; a first electrode in the vacuum chamber; a second electrode in the vacuum chamber, opposed to the first...
FREQUENCY TUNING FOR DUAL LEVEL RADIO FREQUENCY (RF) PULSING
Methods and apparatus for frequency tuning in process chambers using dual level pulsed power are provided herein. In some embodiments, a method for frequency...
PLASMA PROCESSING METHOD
A plasma processing method is provided that includes a step of loading a substrate into a chamber where a plasma process is to be executed, a step of applying...
GAS INTAKE DEVICE OF MAGNETRON SPUTTERING VACUUM CHAMBER AND MAGNETRON
A gas intake device of magnetron sputtering vacuum chamber and a magnetron sputtering apparatus with the gas intake device, the gas intake device of magnetron...
WORKPIECE PROCESSING CHAMBER HAVING A ROTARY MICROWAVE PLASMA ANTENNA WITH
SLOTTED SPIRAL WAVEGUIDE
A microwave antenna includes a first spiral conduit having a first conduit end, first plural ports in a floor of the first spiral conduit spaced apart along...
Circulating Cooling/Heating Device
A circulating cooling/heating device that is configured to cool and heat a circulating fluid supplied to a chamber in plasma-etching equipment includes: a...
INDUCTIVELY COUPLED PLASMA APPARATUS
Methods and apparatus for plasma processing are provided herein. In some embodiments, a plasma processing apparatus includes a process chamber having an...
The present invention relates to a lens-less Foucault method wherein a transmission electron microscope objective lens (5) is turned off, an electron beam...
DEVICE MANUFACTURING APPARATUS AND MANUFACTURING METHOD OF MAGNETIC DEVICE
According to one embodiment, a device manufacturing apparatus includes a substrate holding portion holding a substrate; an ion source including a housing, an...
X-RAY TUBE ASSEMBLY
According to one embodiment, an X-ray tube assembly includes a cathode which emits electrons in an electron orbit direction, an anode target including a target...
ATMOSPHERIC IONIZER INCLUDING A SOURCE THAT SUPPLIES ELECTRICAL ENERGY TO
AN ION-GENERATING STRUCTURE WITHOUT WIRES
An atmospheric ionizer includes a source that supplies electrical energy to an ion-generating structure without the use of wires or other connecting structures...
LOW VOLTAGE NANOSCALE VACUUM ELECTRONIC DEVICES
An electronic device including a first conducting layer, a second conducting layer, and an insulating layer provided between the conducting layers. At least...
Fuse Unit Attachment Structure
A fuse unit attachment structure includes a fuse bracket to be mounted on a battery directly attaching type fuse unit and a bracket connecting member for...
ELECTRICALLY PROGRAMMABLE FUSE STRUCTURE AND FABRICATION METHOD THEREOF
A method for fabricating an electrically programmable fuse structure is provided. The method includes providing a substrate. The method also includes forming...
INSTANT TRIP APPARATUS OF MOLDED CASE CIRCUIT BREAKER
The instant trip apparatus of the molded case circuit breaker includes a case, a magnet part disposed in the case to generate magnetic attractive force when...
ELECTRICAL CONTACT APPARATUS, ASSEMBLIES, AND METHODS OF OPERATION
An electrical contact apparatus is disclosed. The contact apparatus has first contact member having a first contact, a movable contact member received adjacent...
RECONFIGURABLE DEVICE FOR TERAHERTZ (THz) AND INFRARED (IR) FILTERING AND
A reconfigurable device for terahertz (THz) or infrared (IR) ranges that includes a base substrate, a lower array attached to the base substrate, and an upper...
Magnetic Latching Relay of Parallel Type Magnetic Circuit
A magnetic latching relay of a parallel type magnetic circuit, forming two parallel permanent magnetic circuits on the permanent magnetic circuit of a relay;...
BISTABLE RELAY AND BISTABLE ACTUATOR
A bistable relay and a bistable actuator are provided. The bistable actuator includes a magnetic latching mechanism and an electromagnet. The magnetic latching...
MEMS-based Switching System
A switching element that is at least partially implemented in one or more printed wiring boards (PWBs). A plurality of inputs and a plurality of outputs may be...
Active Electrical Component
An active electrical component is disclosed. The active electrical component comprises a contact extending away from an outer side of the component in an...
REMOTE CONTROLLED SWITCH COVER
A light switch cover for converting a standard toggle switch into a remote-controlled toggle switch. In one embodiment, the light switch cover comprises a...
COMPUTER THIN FILM SWITCH KEYBOARD
The present invention discloses a computer thin film switch keyboard, wherein the keyboard comprises keys/keycaps, a light guide film, a fixing film/air hole...
CASE KEYBOARD WITH THIN FILM SWITCHES
A case keyboard with thin film switches is provided. The case keyboard includes a case, a tablet PC fixing frame and a keyboard main body. The tablet PC fixing...
Ultra Low Travel Keyboard
A keyboard or keyboard key that has a force sensor that measures the force imparted to the key when a user presses the key or rests a finger on a key. Key...
A metallic button includes a metallic keycap and an annular buffer member. The metallic keycap has a peripheral side surface, and defines an annular receiving...
PRESSURE-ACTUATED SAFETY SWITCH WITH MONITORING FUNCTION
A security switch has a switch head with an actuator and having a button top. The security switch is mounted in a housing wall. The actuator is designed so as...
TRENCHED SUPER/ULTRA CAPACITORS AND METHODS OF MAKING THEREOF
A method of manufacturing trenched electrochemical double layer capacitors is provided. One aspect of the method employs state-of-the art processes used in...
Method for Producing Electrode Film for Electric Double Layer Capacitors
Provided is a method for producing a high-strength electrode film for an EDLC, where scraps generated when producing the electrode film are reusable. The...
Provided is an electrochemical capacitor which has low DC internal resistance, and which minimizes increase in the DC internal resistance due to a high...
A MULTICOMPONENT APPROACH TO ENHANCE STABILITY AND CAPACITANCE IN
An electrochemical energy storage device includes a first polymer electrode and a second polymer electrode spaced apart from the first polymer electrode such...
PHOTOVOLTAIC DEVICE AND METHOD FOR MANUFACTURING SAME
A photovoltaic device includes two or more layers of organic photoelectric conversion module base plates that are stacked and connected, and that each include...
OPTO-ELECTRONIC DEVICE MODULE AND METHOD FOR MANUFACTURING THE SAME
The present invention relates to a module of opto-electronic devices, which comprises a plurality of opto-electronic devices arranged on a first electrically...
DYE-SENSITIZED SOLAR CELL INCLUDING A POROUS INSULATION SUBSTRATE AND A
METHOD FOR PRODUCING THE POROUS...
The present invention relates to a dye-sensitized solar cell including a working electrode (1), a first conducting layer (3) for extracting photo-generated...
TUNGSTEN POWDER AND ANODE BODY OF CAPACITOR
The present invention provides an electrolytic capacitor which uses, as an anode body thereof, a sintered body that is obtained by sintering a tungsten powder...
METHOD FOR MANUFACTURING SOLID ELECTROLYTIC CAPACITOR
A method for manufacturing a solid electrolytic capacitor having an electrically conductive polymer layer. In the method, a first electrically conductive...
ELECTROSTATIC DAMPING OF MEMS DEVICES
The present invention generally relates to a method and apparatus for damping a plate electrode or switching element in a MEMS DVC device. A resistor disposed...
MULTILAYER CERAMIC ELECTRONIC COMPONENT
A multilayer ceramic electronic component includes a ceramic body having an end surface and a side surface adjacent to thereto such that the end surface and...
MULTI LAYER CERAMIC CAPACITOR, EMBEDDED BOARD USING MULTI LAYER CERAMIC
CAPACITOR AND MANUFACTURING METHOD THEREOF
A multilayer ceramic capacitor includes a multilayer ceramic sintering body and one or two or more internal electrode units formed to be placed inside the...
MULTILAYER CERAMIC ELECTRONIC COMPONENT
A multilayer ceramic electronic component in which an interface of an edge region of an external electrode that extends around to a side surface of a ceramic...
CERAMIC GREEN SHEET, METHOD FOR MANUFACTURING MULTILAYER CERAMIC
CAPACITOR, AND MULTILAYER CERAMIC CAPACITOR
A ceramic green sheet where the proportion of a Si-containing constituent coating the surface of barium titanate-based ceramic particles is 95% or higher, and...