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SPUTTERING TARGETS AND DEVICES INCLUDING Mo, Nb, and Ta, AND METHODS
Sputtering targets including molybdenum, niobium and tantalum are found to be useful for sputtering films for electronic devices. Sputtering targets with about...
CYLINDRICAL SPUTTERING TARGET MATERIAL
Provided is a cylindrical sputtering target material formed of copper or a copper alloy, in which an average value of the special grain boundary length ratios...
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
To control temperature of a sample in plasma processing with high accuracy while securing an electrostatic chucking force without breakdown of an electrostatic...
DATA ANALYSIS METHOD FOR PLASMA PROCESSING APPARATUS, PLASMA PROCESSING
METHOD AND PLASMA PROCESSING APPARATUS
A stable etching process is realized at an earlier stage by specifying the combination of wavelength and time interval, which exhibits a minimum prediction...
ETCHING SOURCE INSTALLABLE IN A STORAGE MEDIUM PROCESSING TOOL
A plasma etching source installable into at least one of multiple compartments of a sputter deposition tool. The plasma etching source includes a first...
COOLING STRUCTURE AND PARALLEL PLATE ETCHING APPARATUS
A cooling structure is provided that, includes a cooling target member, a cooling plate including a cooling mechanism and being configured to cool the cooling...
VAPOR DEPOSITION APPARATUS, DEPOSITION METHOD, AND METHOD OF MANUFACTURING
ORGANIC LIGHT-EMITTING DISPLAY...
Provided is a vapor deposition apparatus including: a plasma generator configured to change at least a portion of a first raw material gas into a radical form;...
CONTOURED SHOWERHEAD FOR IMPROVED PLASMA SHAPING AND CONTROL
Semiconductor processing chamber showerheads with contoured faceplates, as well as techniques for producing such faceplates, are provided. Data describing...
CERAMIC GAS DISTRIBUTION PLATE WITH EMBEDDED ELECTRODE
A gas distribution plate for a substrate processing system includes a ceramic lower portion of the gas distribution plate including a plurality of ceramic...
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
A plasma processing apparatus includes a processing chamber including a dielectric window; a coil shaped RF antenna provided outside the dielectric window; a...
METHOD AND ION IMPLANTER FOR LOW TEMPERATURE IMPLANTATION
A method for a recipe of a low temperature implantation comprises: pre-cooling a workpiece transferred from a FOUP to a lower temperature to meet the recipe,...
CHARGED PARTICLE BEAM DRAWING APPARATUS
A charged particle beam drawing apparatus has a vacuum container including a bottom plate, the bottom plate including a curved portion curved externally and a...
CHARGED PARTICLE BEAM SYSTEM AND METHODS
Disclosed is a charged particle beam system comprising a charged particle beam column having a charged particle source forming a charged particle beam, an...
Charged Particle Beam Device and Charged Particle Beam Device Control
The objective of the present invention is to provide a charged particle beam device, wherein the positional relationship between reflected electron detection...
Inspection equipment frequency transforms a mirror electron image with respect to position coordinates, calculates a value of a frequency plane origin or a...
METHOD FOR CALIBRATION OF A CD-SEM CHARACTERISATION TECHNIQUE
A calibration method for a CD-SEM technique, includes determining a match function converting at least one parameter obtained by modelling a measurement...
Charged Particle Beam Apparatus and Sample Image Acquiring Method
Disclosed is a charged particle beam apparatus wherein a partitioning film capable of transmitting a charged particle beam is provided between a charged...
Provided is an electron microscope wherein a detector requiring the application of a voltage is used to obtain a micrograph from a sample placed in a gas...
Some embodiments are directed to a support for receiving a biological sample, the support comprising at least one support member, and including graphene...
Diaphragm Mounting Member and Charged Particle Beam Device
Conventional devices have been difficult to use due to insufficient consideration being given to factors such as the cost necessary for diaphragm replacement...
Anti-Contamination Trap, and Vacuum Application Device
In conventional structures, a space between a dual cooling tank is vacuum insulated, and a cooling part is cooled via a highly thermally conductive material...
X-ray Tube Anode Arrangement
A method of manufacturing an X-ray tube component, includes diffusion bonding or brazing an anode of rhodium, molybdenum or tungsten to a heat spreader of...
INTEGRATED DEVICES WITH PHOTOEMISSIVE STRUCTURES
An apparatus is disclosed for the examination and inspection of integrated devices such as integrated circuits. X-rays are transmitted through the integrated...
PLANAR FIELD EMITTERS AND HIGH EFFICIENCY PHOTOCATHODES BASED ON
A method of forming a field emitter comprises disposing a first layer on a substrate. The first layer is seeded with nanodiamond particles. The substrate with...
AFFIXED OBJECT, FUSIBLE LINK, AND AFFIXING STRUCTURE FOR FUSIBLE LINK
A connection portion of a locking member is bent such that the connection portion is made apart from a second upper surface portion as the connection portion...
ELECTRICAL COMPONENT UNIT, FUSIBLE LINK UNIT, AND FIXING STRUCTURE
Provided is a fusible link unit (electrical component unit) including a fusible link (electrical component), a battery terminal fixed to an electrode post...
Fuse Unit for Connecting Battery
In a fuse unit for connecting a battery, including a fuse element having an external connection plate part to which a screw terminal fitting is screwed, a...
COMPONENT UNIT, FUSIBLE LINK UNIT, AND AFFIXING STRUCTURE FOR THE
Provided is a fusible link unit in which a case includes case-side locking portions to be locked in a fusible link so as to affix the fusible link, the fusible...
CIRCUIT BREAKER WITH HYBRID SWITCH
An alternating current circuit breaker includes a first galvanic separation switch (SW2) and a bypass switch (SW1) in a live line, and a second galvanic...
SYSTEMS AND METHODS FOR FREEWHEEL CONTACTOR CIRCUITS
A circuit for use with a contactor including at least one contact is provided. The circuit includes a first segment including a voltage source, a first coil, a...
POWER FEED LINE SWITCHING CIRCUIT, BRANCHING DEVICE, SUBMARINE CABLE
SYSTEM, AND POWER FEED LINE SWITCHING METHOD
This power feed line switching circuit for switching connection states among a plurality of power feed lines has a plurality of switching circuits, and a...
BYPASS SWITCH FOR HVDC TRANSMISSION
A bypass switch for high voltage direct current (HVDC) transmission is provided. The bypass switch includes a housing, a fixed contactor disposed in the...
Magnetic deadman switch
Various implementations of a magnetic deadman switch are provided. In one implementation, for example, the switch comprises a housing and a pair of electrical...
Gas Circuit Breaker
Provided is a gas circuit breaker that can reduce control energy smaller than that in previous double motion systems and an excessive force applied to a...
Switching Device with Improved Tripping Action in the Event of a Short
A switching device having an arc quenching chamber, a fixed contact element and a movable contact element movable in a sliding contact between untripped and...
In a switching device (1) for converting a mechanical movement into an electrical switching signal, comprising a housing (2) and an electrical switching...
Method And Control System For Controlling A Switching Device
A method controls a switching device having at least one phase comprising at least one couple of contacts which can be actuated for switching between a closed...
Lockout/Tagout Device for Control Switches
A pivoting lockout member that is mounted to a pair of hinge member installed onto a control switch. Each of the hinge members includes a planar flange having...
MOUNTING ASSEMBLY FOR A CIRCUIT BREAKER MECHANISM
A mounting assembly for a circuit breaker mechanism includes a base and a mid-cover disposed adjacent the base. Also included is a first pair of mounting posts...
Switch Unit, In Particular A Circuit Breaker
A switch unit, preferably implementing a circuit breaker, includes a contact slide unit formed by a contact slide, a fixed contact piece and a moveable contact...
ENERGY STORAGE DEVICE
Proposed is an energy storage device, particularly for use in motor vehicles, comprising at least one base body as well as at least one housing section fixed...
Sealing Structure of a Dye-Sensitized Solar Cell and Sealing Method
The present invention relates to a method of sealing a dye-sensitized solar cell, which seals a dye-sensitized solar cell module filled and sealed with an...
PHOTOVOLTAIC ELEMENTS HAVING LONG-TERM STABILITY THAT CAN BE PRECIPITATED
OUT OF SOLUTIONS, AND IN-SITU METHOD...
The present invention relates to a photovoltaic element comprising one front electrode and one further electrode comprising respectively one glass substrate...
Method of Operating an Integrated Switchable Capacitive Device
A variable capacitor includes a fixed main capacitor electrode disposed in a first metal layer overlying a substrate, a second main capacitor electrode spaced...
Hard Start Kit for Multiple Replacement Applications
A hard start capacitor replacement unit has a plurality of capacitors in a container sized to fit in existing hard start capacitor space. The capacitors are 4...
CAPACITOR MODULE AND POWER CONVERSION DEVICE
Provided is a capacitor module (10) for connection to a plurality of power conversion circuits, which includes: a dielectric part (11) that has a plurality of...
MULTILAYER CERAMIC COMPONENT AND BOARD HAVING THE SAME
A multilayer ceramic component includes a multilayer ceramic capacitor including a ceramic body including a plurality of first and second internal electrodes,...
MULTI-LAYERED CERAMIC ELECTRONIC DEVICE, METHOD FOR MAKING SAME
A multi-layered ceramic electronic device is made by attaching respective inner bonding surfaces of two lead frames to two opposite electrode junctions of a...
Ceramic Multi-Layer Capacitor Based on BaTi(1-y)ZryO3
A ceramic multi-layer capacitor is disclosed. In an embodiment, the capacitor includes a main body having ceramic layers and first and second electrode layers...
SURFACE-TREATED METAL POWDER, AND METHOD FOR PRODUCING SAME
Provided are a surface-treated copper powder and a metal powder that exhibit superior sinter delay properties and are suitable for use in the manufacture of...