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Patent # Description
2016/0238949 EXPOSURE METHOD, EXPOSURE APPARATUS, AND METHOD FOR PRODUCING DEVICE
A liquid immersion exposure apparatus in which a substrate is exposed with an exposure beam, includes a projection optical system by which the substrate is...
2016/0238948 APPARATUS AND METHOD FOR MAINTAINING IMMERSION FLUID IN THE GAP UNDER THE PROJECTION LENS DURING WAFER EXCHANGE...
An immersion exposure apparatus and method exposes a substrate with a light beam via an optical element and immersion liquid. A table holds the substrate and...
2016/0238947 PATTERN FORMATION METHOD AND EXPOSURE APPARATUS
According to one embodiment, According to one embodiment, a pattern formation method includes disposing a mask and a substrate separately from each other, the...
2016/0238946 LITHOGRAPHY APPARATUS, LITHOGRAPHY METHOD, PROGRAM, LITHOGRAPHY SYSTEM, AND ARTICLE MANUFACTURING METHOD
A lithography apparatus has a plurality of processing units configured to respectively perform patternings on a plurality of substrates that belong to a lot,...
2016/0238945 NOVEL PHOTORESIST STRIPPER AND APPLICATION PROCESS THEREOF
A novel photoresist stripping liquid, used for removing superfluous photoresist on a substrate, comprises an organic solvent used for dissolving, a...
2016/0238944 USE OF COMPOSITIONS COMPRISING A SURFACTANT AND A HYDROPHOBIZER FOR AVOIDING ANTI PATTERN COLLAPSE WHEN...
In a method of treating a substrate including patterns having line-space dimensions of 50 nm or below, the substrate is rinsed by an aqueous composition...
2016/0238943 PHOTORESIST STRIPPING METHOD AND APPARATUS
The present invention provides a photoresist stripping method and photoresist stripping apparatus. The photoresist stripping method includes: step1, providing...
2016/0238942 PHOTOSENSITIVE CONDUCTIVE FILM, CONDUCTIVE PATTERN FORMATION METHOD USING SAME, AND CONDUCTIVE PATTERN SUBSTRATE
The conductive pattern formation method according to the present invention comprises a step of providing a photosensitive conductive film including a...
2016/0238941 MASKLESS LITHOGRAPHY FOR WEB BASED PROCESSING
The present disclosure generally relates to a method and apparatus for processing a web-based substrate. As the substrate travels between rollers, the...
2016/0238940 EXPOSURE DEVICE AND EXPOSURE METHOD
An exposure device and an exposure method are provided. The exposure device includes an exposure lamp, a mask plate and a marking equipment. The marking...
2016/0238939 METHOD FOR MONITORING FOCUS IN EUV LITHOGRAPHY
This invention relates to a method of obtaining optimal focus for exposing a photoresist in an EUV lithography with an EUV mask containing a pattern with an...
2016/0238938 METHODS OF FORMING PATTERNS
Methods of forming patterns includes guide patterns on a neutral layer. A self-assembling block copolymer (BCP) layer on the guide patterns and the neutral...
2016/0238937 HIGH-SENSITIVITY MULTILAYER RESIST FILM AND METHOD OF INCREASING PHOTOSENSITIVITY OF RESIST FILM
A resist film structure is provided, which allows a resist layer to have improved photosensitivity to EUV or electron beams without changing the ...
2016/0238936 RESIST UNDERLAYER FILM FORMATION COMPOSITION AND METHOD FOR FORMING RESIST PATTERN USING THE SAME
A novel resist underlayer film formation composition for lithography includes: a polymer having a structure of Formula (1) at a terminal of a polymer chain; a...
2016/0238935 COATING COMPOSITION, AND PROCESS FOR PRODUCING PHOTORESIST LAMINATE
To provide a coating composition which exhibits excellent followability to a difference in level in its application, and which is capable of forming a coating...
2016/0238934 NOVEL PHOTORESIST ADDITIVE FOR OUTGASSING REDUCTION AND OUT-OF-BAND RADIATION ABSORPTION
A patternable layer is formed over a substrate. A photo-sensitive layer is formed over the patternable layer. The photo-sensitive layer contains an additive....
2016/0238933 Composition And Method For Lithography Patterning
An anti-reflective coating (ARC) composition for use in lithography patterning and a method of using the same is disclosed. In an embodiment, the ARC...
2016/0238932 PHOTOIMAGEABLE POLYOLEFIN COMPOSITIONS CONTAINING PHOTOBASE GENERATORS
Embodiments in accordance with the present invention encompass self-imageable polymer compositions containing a variety of photobase generators which are...
2016/0238931 PHOTOIMAGEABLE COMPOSITIONS CONTAINING PHOTOBASE GENERATORS
Embodiments in accordance with the present invention encompass negative-tone, solvent developable, self-imageable polymer compositions containing photobase...
2016/0238930 HEMIACETAL COMPOUND, POLYMER, RESIST COMPOSITION, AND PATTERNING PROCESS
A polymer for resist use is obtainable from a hemiacetal compound having formula (1a) wherein R.sup.1 is H, CH.sub.3 or CF.sub.3, R.sup.2 to R.sup.4 each are H...
2016/0238929 UV-PATTERNABLE HARD-COATING FOR TRANSPARENT CONDUCTIVE FILM
The present invention relates to the substrates with UV-patternable hard-coating (UPHC) with, either on top or below the transparent conductive materials such...
2016/0238928 DURABLE METAL FILM DEPOSITION FOR MASK REPAIR
Methods and tools for repairing a semiconductor mask are provided. The method includes steps of positioning the semiconductor mask within a repair chamber...
2016/0238927 RETICLE AND FABRICATION METHOD THEREOF, AND METHOD FOR FABRICATING PATTERNS ON A SUBSTRATE
A reticle is provided. The reticle comprises a substrate having at least a first region and a second region; and an organic layer aligned in certain directions...
2016/0238926 PHOTOMASK BLANKS, PHOTOMASKS FABRICATED USING THE SAME, AND METHODS OF FABRICATING PHOTOMASK USING THE SAME
Photomask blanks are provided. One of the photomask blanks includes a light transmission substrate, a light blocking layer disposed on a top surface of the...
2016/0238925 REFLECTIVE MASK BLANK, METHOD OF MANUFACTURING SAME, REFLECTIVE MASK AND METHOD OF MANUFACTURING SEMICONDUCTOR...
A reflective mask blank capable of facilitating the discovery of contaminants, scratches and other critical defects by inhibiting the detection of pseudo...
2016/0238924 STRUCTURE AND METHOD FOR FIXING PHASE EFFECTS ON EUV MASK
This invention relates to a structure for fixing phase effects on EUV mask which contains a repeating pattern with an assist feature, or a pattern with two...
2016/0238923 LIGHT SOURCE APPARATUS AND PROJECTION DISPLAY APPARATUS
The light source apparatus of the present disclosure includes a solid-state light source, a dichroic mirror for reflecting blue excitation light emitted from...
2016/0238922 FLUORESCENT WHEEL FOR PROJECTORS AND LIGHT EMITTING DEVICE FOR PROJECTORS
Provided is a fluorescent wheel for a projector capable of suppressing the heating of the phosphor layer and a light emitting device for a projector using the...
2016/0238921 OVERHEAD PROJECTION DISPLAY DEVICE
A rear-projection display device comprises a mobile light source supplying a light beam of at least one wavelength, a holographic mirror reflecting only said...
2016/0238920 PROJECTION DEVICE AND DISPLAY RACK
A projection device is disposable into a display platform of a display rack having a plurality of display platforms, for directly projecting an image frame...
2016/0238919 IMAGING APPARATUS
An imaging apparatus includes an optical path forming member which includes at least one exterior wall surrounding an imaging optical system and defines an...
2016/0238918 ELECTROPHORESIS DISPLAY APPARATUS, MANUFACTURING METHOD OF ELECTROPHORESIS DISPLAY APPARATUS, AND ELECTRONIC DEVICE
Provided is an electrophoresis display apparatus in which light is unlikely to be reflected by a partition wall part and which realizes high contrast. An...
2016/0238917 DISPLAY PANEL, DISPLAY DEVICE, DISPLAY PANEL MANUFACTURING METHOD AND DISPLAY METHOD
A display panel includes a display layer and two electrophoresis layers; the display layer is located between the two electrophoresis layers; the display layer...
2016/0238916 Liquid Crystal Display Device
A first transistor, a second transistor, a third transistor, a fourth transistor are provided. In the first transistor, a first terminal is electrically...
2016/0238915 DISPLAY DEVICE
A display device includes a plurality of pixels, and each of the plurality of pixels includes: a first sub-pixel including a transistor connected to a gate...
2016/0238914 Liquid Crystal Display Panel and Array Substrate
This invention discloses a liquid crystal display panel and an array substrate. The liquid crystal display device comprises a first substrate, a second...
2016/0238913 TFT ARRAY SUBSTRATE STRUCTURE
The present invention provides a TFT array substrate structure, which includes first and second gates (11, 13), a semiconductor layer (20), first and second...
2016/0238912 DISPLAY PANEL
A display panel is provided. The display panel includes a first substrate, a first insulating layer, a common electrode, a second insulating layer, a first...
2016/0238911 STATIC ELECTRICITY PROTECTION CIRCUIT, ELECTRO-OPTICAL APPARATUS, AND ELECTRONIC EQUIPMENT
A first static electricity protection circuit is provided with a first n-type transistor and a first p-type transistor, a second static electricity protection...
2016/0238910 LIQUID CRYSTAL DISPLAY DEVICE
A liquid crystal display includes a first substrate and a second substrate opposed to each other with a liquid crystal layer between the first substrate and...
2016/0238909 LIQUID CRYSTAL DISPLAY DEVICE
A liquid crystal display includes a first substrate and a second substrate opposed to each other with a liquid crystal layer between the first substrate and...
2016/0238908 CURVED LIQUID CRYSTAL DISPLAY DEVICE
A display device includes a transistor, a data line, a pixel electrode, a common electrode, and a liquid crystal layer. The data line is connected to a source...
2016/0238907 PIXEL ELECTRODE AND LIQUID CRYSTAL DISPLAY DEVICE
In the technical field of liquid crystal display, a pixel electrode and a liquid crystal display are provided. The pixel electrode comprises a first trunk and...
2016/0238906 TFT ARRAY SUBSTRATE STRUCTURE
The present invention provides a TFT (Thin-Film Transistor) array substrate structure, which includes a plurality of sub-pixels (4) arranged to correspond to a...
2016/0238905 LIQUID CRYSTAL DISPLAY HAVING IMPROVED COLOR DISPLAY
A liquid crystal display includes: a first pixel and a second pixel for displaying different colors, the first pixel and the second pixel each including a...
2016/0238904 LIQUID CRYSTAL DISPLAY
A liquid crystal display includes: a first substrate; and pixel electrodes disposed on the first substrate, each of the pixel electrodes including: a stem...
2016/0238903 LIQUID CRYSTAL DISPLAY DEVICE
The displacement between a TFT substrate and a counter substrate and the cut of an alignment film caused by a columnar spacer are prevented. A liquid crystal...
2016/0238902 LIQUID CRYSTAL DISPLAY DEVICE
In an IPS system liquid crystal display device, scan lines are extended in a first direction and arrayed in a second direction, video signal lines are extended...
2016/0238901 LIQUID CRYSTAL DISPLAY DEVICE AND MANUFACTURING METHOD FOR SAME
Display device, including: substrates, color filters having first and second color filters, drain and gate signal lines (of light blocking material), wherein,...
2016/0238900 ARRAY SUBSTRATE AND LIQUID CRYSTAL DISPLAY PANEL USING SAME
The present invention provides an array substrate and a liquid crystal display panel using the array substrate. The array substrate includes: a glass substrate...
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