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Process for Filling Vias in the Microelectronics
A process for metalizing a through silicon via feature in a semiconductor integrated circuit device, the process including, during the filling cycle, reversing...
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
A protection film is formed on a semiconductor substrate. Impurity ions are implanted into the semiconductor substrate through the protection film. The...
METHODS OF FORMING PATTERNS WITH BLOCK COPOLYMER
A method of forming patterns includes forming a guide pattern and first peripheral patterns on an underlying layer. The guide pattern provides first openings...
METHODS OF FORMING PATTERNS HAVING DIFFERENT SHAPES
A method of forming patterns includes forming pillars and first peripheral patterns on an underlying layer, forming a separation wall layer covering sidewalls...
Reduction of Edge Effects from Aspect Ratio Trapping
A device includes a crystalline material within an area confined by an insulator. In one embodiment, the area confined by the insulator is an opening in the...
LASER ANNEALING DEVICE, PRODUCTION PROCESS OF POLYCRYSTALLINE SILICON THIN
FILM, AND POLYCRYSTALLINE SILICON...
The invention relates to the field of laser annealing, and discloses a laser annealing device, a production process of a polycrystalline silicon thin film, and...
SELECTIVE DOPANT JUNCTION FOR A GROUP III-V SEMICONDUCTOR DEVICE
An approach to providing a method of forming a dopant junction in a semiconductor device. The approach includes performing a surface modification treatment on...
METHOD OF MANUFACTURING SILICON CARBIDE SEMICONDUCTOR SUBSTRATE AND METHOD
OF MANUFACTURING SILICON CARBIDE...
A step of preparing a silicon carbide substrate (S11), a step of forming a first silicon carbide semiconductor layer on the silicon carbide substrate using a...
SILICON CARBIDE SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD FOR SAME
A method of manufacturing a silicon carbide semiconductor device in which a first-conductivity-type silicon carbide semiconductor epitaxial layer is formed on...
COMPOUND SEMICONDUCTOR STRUCTURE
A method for fabricating semiconductor structure comprises the steps of providing a substrate including a first crystalline semiconductor material, patterning...
Methods and structures for preparing single crystal silicon wafers for use
as substrates for epitaxial growth...
This document describes the fabrication and use of ceramic stabilizing layer fabricated right on the product silicon wafer to facilitate its use as a substrate...
METHODS FOR FABRICATING SEMICONDUCTOR STRUCTURE WITH CONDENSED SILICON
Methods of forming condensed first layer and semiconductor structures formed from the methods are provided. The methods include, for instance providing at...
LOW TEMPERATURE FABRICATION OF LATERAL THIN FILM VARISTOR
A structure and method for fabricating a laterally configured thin film varistor surge protection device using low temperature sputtering techniques which do...
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
To provide a semiconductor device having improved reliability. After formation of a first insulating film for an interlayer insulating film by spin coating,...
Lithographic Resist With Floating Protectant
An improved resist material and a technique for patterning a workpiece such as an integrated circuit workpiece that offers improved resistance to environmental...
COPOLYMER FORMULATION FOR DIRECTED SELF-ASSEMBLY, METHODS OF MANUFACTURE
THEREOF AND ARTICLES COMPRISING THE SAME
Disclosed herein is a pattern forming method comprising providing a substrate devoid of a layer of a brush polymer; disposing upon the substrate a composition...
METHOD FOR CLEANING WAFER
A method for cleaning a wafer that has a pattern of recessed and projected portions formed on a surface thereof and contains at least one element selected from...
SEMICONDUCTOR SUBSTRATE TREATMENT LIQUID, TREATMENT METHOD, AND METHOD FOR
Provided is a semiconductor substrate treatment liquid which removes an organic material on the top of a semiconductor substrate from the semiconductor...
COLUMNAR CRYSTAL CONTAINING LIGHT EMITTING ELEMENT AND METHOD OF
MANUFACTURING THE SAME
A method of manufacturing a semiconductor element by forming, on a substrate, columnar crystals of a nitride-base or an oxide-base compound semiconductor, and...
PLASMA PRE-CLEAN MODULE AND PROCESS
A method for integrated circuit fabrication can include removing silicon oxide by a pre-clean process. The pre-clean process can include depositing a...
METHOD OF DEPOSITING A SILICON-CONTAINING FILM
A method of depositing a silicon-containing film using a film deposition apparatus is provided. The apparatus includes a turntable provided in a process...
DISCHARGE LAMP WITH OPTIMIZED SALT FILLING
A discharge lamp has a discharge vessel for generating an arc discharge between two electrodes. The discharge vessel contains an inert gas, and metal halides....
MASS SPECTROMETER AND LIQUID-METAL ION SOURCE FOR A MASS SPECTROMETER OF
The invention relates to a mass spectrometer comprising an ion source for producing a primary ion beam, which has a heatable ion emitter coated by a liquid...
AMBIENT DESORPTION, IONIZATION, AND EXCITATION FOR SPECTROMETRY
An ion source includes a plasma generator for supplying plasma at an ionization region proximate to a sample surface. The plasma generator applies energy that...
ASSEMBLIES FOR ION AND ELECTRON SOURCES AND METHODS OF USE
Certain embodiments described herein are directed to devices that can be used to align the components of a source assembly in a source housing. In some...
MASS SPECTROMETRY ANALYSIS OF MICROORGANISMS IN SAMPLES
The invention generally relates to systems and methods for mass spectrometry analysis of microorganisms in samples.
MS/MS Analysis Using ECD or ETD Fragmentation
A method of mass spectrometry is disclosed comprising: providing supercharged analyte ions; and supplying electrons or reagent ions to said analyte ions so as...
Data Dependent MS/MS Analysis
A method of mass spectrometry is disclosed comprising comparing mass spectral data so as to identify a precursor ion in the mass spectral data that has a...
SPUTTERING TARGET AND PROCESS FOR PRODUCING IT
A sputtering target is composed of an Mo alloy containing at least one metal of group 5 of the Periodic Table, where the average content of group 5 metal is...
METHOD AND DEVICE FOR PRODUCING UNIFORM FILMS ON MOVING SUBSTRATES AND
FILMS PRODUCED IN THIS WAY
The invention relates to the deposition of optical precision films with high uniformity, precision, particle freedom and low absorption on the substrate. For...
APPARATUS AND METHODS FOR MODIFYING WEBS OF MATERIAL WITH PLASMA
Using electrostatic means, such as plasma, webs can be cut, and webs can be bonded together. A plasma is created and directed at an intervening poly or a...
METHOD FOR COATING SURFACES
A method for providing a protective layer over a substrate is provided. A ceramic layer is deposited over the substrate, wherein the ceramic layer has a...
RF Multi-Feed Structure To Improve Plasma Uniformity
A plasma source assembly for use with a processing chamber is described. The assembly includes a multi-feed RF power connection to a single or multiple RF hot...
SHIELDED LID HEATER ASSEMBLY
A shielded lid heater lid heater suitable for use with a plasma processing chamber, a plasma processing chamber having a shielded lid heater and a method for...
METHOD FOR GENERATING PARAMETER PATTERN, ION IMPLANTATION METHOD AND FEED
FORWARD SEMICONDUCTOR MANUFACTURING...
The present disclosure provides a method for generating a parameter pattern including: performing a plurality of measurements upon a plurality of regions on a...
Alignment of Multi-Beam Patterning Tool
Alignment of multi-beam pattern tools includes generating a test pattern having multiple features with a multi-beam patterning tool, acquiring an image...
Near-field Optical Transmission Electron Emission Microscope
The Near-field Optical Transmission Electron Emission Microscope involves the combination, in one instrument, of optical imaging in the near-field regime or...
A system for analyzing an analogue signal comprising randomly spaced events, the event having an event height, comprises: Converting the signal to a series...
Measurement Method and Electron Microscope
A measurement method capable of easily measuring the directions of detector segments of a segmented detector relative to a scanning transmission electron...
MULTIFUNCTIONAL ULTRAFAST ELECTRON GUN OF TRANSMISSION ELECTRON MICROSCOPE
The present invention discloses a multifunctional ultrafast electron gun of a transmission electron microscopy. The ultrafast electron gun of a transmission...
METAL ELECTRODE, AND ELECTRON GUN, ELECTRON TUBE, AND X-RAY TUBE USING
A metal including a passivation film 33a with a thickness of 10 nm or more is used as a metal electrode (a focus cup electrode 33) for generating an electric...
ROTARY X-RAY ANODE AND PRODUCTION METHOD
A rotary X-ray anode has a support body and a focal track formed on the support body. The support body and the focal track are produced as a composite by...
SELF-ALIGNED GATED EMITTER TIP ARRAYS
Methods for fabrication of self-aligned gated tip arrays are described. The methods are performed on a multilayer structure that includes a substrate, an...
An electromagnetic relay includes a contact device including a fixed terminal with a fixed contact formed, and a movable contactor with a movable contact...
Single-Channel Safety Output
A safety switching device for fail-safely switching on and off an electrical load, and to a system comprising at least two safety switching devices which...
MAGNETIC CONTROL DEVICES FOR ENCLOSURES
A control device for an enclosure is disclosed, where the control device includes a first portion positioned proximate to a back side of an enclosure surface...
An electrical switch includes a gas-insulated tube, a contact system in the tube having fixed and movable contacts, a contact operating element passed out of...
Commutating Switch with Blocking Semiconductor
A mechanical switch that works by commutation of the current to an energy absorbing path or sequence of paths through at least one blocking semiconductor to...
DIELECTRIC LOADED FLUIDS FOR HIGH VOLTAGE SWITCHING
This disclosure relates to methods and systems to reduce high voltage breakdown jitters in liquid dielectric switches. In particular, dielectric liquids have...
ARC QUENCHING CHAMBER INSERT
An arc quenching chamber insert for an electrical switching device has a metal plate holder made of an insulating material, and in which a predefinable...