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Patent # Description
2016/0254156 Process for Filling Vias in the Microelectronics
A process for metalizing a through silicon via feature in a semiconductor integrated circuit device, the process including, during the filling cycle, reversing...
2016/0254155 METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
A protection film is formed on a semiconductor substrate. Impurity ions are implanted into the semiconductor substrate through the protection film. The...
2016/0254154 METHODS OF FORMING PATTERNS WITH BLOCK COPOLYMER
A method of forming patterns includes forming a guide pattern and first peripheral patterns on an underlying layer. The guide pattern provides first openings...
2016/0254153 METHODS OF FORMING PATTERNS HAVING DIFFERENT SHAPES
A method of forming patterns includes forming pillars and first peripheral patterns on an underlying layer, forming a separation wall layer covering sidewalls...
2016/0254152 Reduction of Edge Effects from Aspect Ratio Trapping
A device includes a crystalline material within an area confined by an insulator. In one embodiment, the area confined by the insulator is an opening in the...
2016/0254151 LASER ANNEALING DEVICE, PRODUCTION PROCESS OF POLYCRYSTALLINE SILICON THIN FILM, AND POLYCRYSTALLINE SILICON...
The invention relates to the field of laser annealing, and discloses a laser annealing device, a production process of a polycrystalline silicon thin film, and...
2016/0254150 SELECTIVE DOPANT JUNCTION FOR A GROUP III-V SEMICONDUCTOR DEVICE
An approach to providing a method of forming a dopant junction in a semiconductor device. The approach includes performing a surface modification treatment on...
2016/0254149 METHOD OF MANUFACTURING SILICON CARBIDE SEMICONDUCTOR SUBSTRATE AND METHOD OF MANUFACTURING SILICON CARBIDE...
A step of preparing a silicon carbide substrate (S11), a step of forming a first silicon carbide semiconductor layer on the silicon carbide substrate using a...
2016/0254148 SILICON CARBIDE SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD FOR SAME
A method of manufacturing a silicon carbide semiconductor device in which a first-conductivity-type silicon carbide semiconductor epitaxial layer is formed on...
2016/0254147 COMPOUND SEMICONDUCTOR STRUCTURE
A method for fabricating semiconductor structure comprises the steps of providing a substrate including a first crystalline semiconductor material, patterning...
2016/0254146 Methods and structures for preparing single crystal silicon wafers for use as substrates for epitaxial growth...
This document describes the fabrication and use of ceramic stabilizing layer fabricated right on the product silicon wafer to facilitate its use as a substrate...
2016/0254145 METHODS FOR FABRICATING SEMICONDUCTOR STRUCTURE WITH CONDENSED SILICON GERMANIUM LAYER
Methods of forming condensed first layer and semiconductor structures formed from the methods are provided. The methods include, for instance providing at...
2016/0254144 LOW TEMPERATURE FABRICATION OF LATERAL THIN FILM VARISTOR
A structure and method for fabricating a laterally configured thin film varistor surge protection device using low temperature sputtering techniques which do...
2016/0254143 METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
To provide a semiconductor device having improved reliability. After formation of a first insulating film for an interlayer insulating film by spin coating,...
2016/0254142 Lithographic Resist With Floating Protectant
An improved resist material and a technique for patterning a workpiece such as an integrated circuit workpiece that offers improved resistance to environmental...
2016/0254141 COPOLYMER FORMULATION FOR DIRECTED SELF-ASSEMBLY, METHODS OF MANUFACTURE THEREOF AND ARTICLES COMPRISING THE SAME
Disclosed herein is a pattern forming method comprising providing a substrate devoid of a layer of a brush polymer; disposing upon the substrate a composition...
2016/0254140 METHOD FOR CLEANING WAFER
A method for cleaning a wafer that has a pattern of recessed and projected portions formed on a surface thereof and contains at least one element selected from...
2016/0254139 SEMICONDUCTOR SUBSTRATE TREATMENT LIQUID, TREATMENT METHOD, AND METHOD FOR MANUFACTURING...
Provided is a semiconductor substrate treatment liquid which removes an organic material on the top of a semiconductor substrate from the semiconductor...
2016/0254138 COLUMNAR CRYSTAL CONTAINING LIGHT EMITTING ELEMENT AND METHOD OF MANUFACTURING THE SAME
A method of manufacturing a semiconductor element by forming, on a substrate, columnar crystals of a nitride-base or an oxide-base compound semiconductor, and...
2016/0254137 PLASMA PRE-CLEAN MODULE AND PROCESS
A method for integrated circuit fabrication can include removing silicon oxide by a pre-clean process. The pre-clean process can include depositing a...
2016/0254136 METHOD OF DEPOSITING A SILICON-CONTAINING FILM
A method of depositing a silicon-containing film using a film deposition apparatus is provided. The apparatus includes a turntable provided in a process...
2016/0254135 DISCHARGE LAMP WITH OPTIMIZED SALT FILLING
A discharge lamp has a discharge vessel for generating an arc discharge between two electrodes. The discharge vessel contains an inert gas, and metal halides....
2016/0254134 MASS SPECTROMETER AND LIQUID-METAL ION SOURCE FOR A MASS SPECTROMETER OF THIS TYPE
The invention relates to a mass spectrometer comprising an ion source for producing a primary ion beam, which has a heatable ion emitter coated by a liquid...
2016/0254133 AMBIENT DESORPTION, IONIZATION, AND EXCITATION FOR SPECTROMETRY
An ion source includes a plasma generator for supplying plasma at an ionization region proximate to a sample surface. The plasma generator applies energy that...
2016/0254132 ASSEMBLIES FOR ION AND ELECTRON SOURCES AND METHODS OF USE
Certain embodiments described herein are directed to devices that can be used to align the components of a source assembly in a source housing. In some...
2016/0254131 MASS SPECTROMETRY ANALYSIS OF MICROORGANISMS IN SAMPLES
The invention generally relates to systems and methods for mass spectrometry analysis of microorganisms in samples.
2016/0254130 MS/MS Analysis Using ECD or ETD Fragmentation
A method of mass spectrometry is disclosed comprising: providing supercharged analyte ions; and supplying electrons or reagent ions to said analyte ions so as...
2016/0254129 Data Dependent MS/MS Analysis
A method of mass spectrometry is disclosed comprising comparing mass spectral data so as to identify a precursor ion in the mass spectral data that has a...
2016/0254128 SPUTTERING TARGET AND PROCESS FOR PRODUCING IT
A sputtering target is composed of an Mo alloy containing at least one metal of group 5 of the Periodic Table, where the average content of group 5 metal is...
2016/0254127 METHOD AND DEVICE FOR PRODUCING UNIFORM FILMS ON MOVING SUBSTRATES AND FILMS PRODUCED IN THIS WAY
The invention relates to the deposition of optical precision films with high uniformity, precision, particle freedom and low absorption on the substrate. For...
2016/0254126 APPARATUS AND METHODS FOR MODIFYING WEBS OF MATERIAL WITH PLASMA
Using electrostatic means, such as plasma, webs can be cut, and webs can be bonded together. A plasma is created and directed at an intervening poly or a...
2016/0254125 METHOD FOR COATING SURFACES
A method for providing a protective layer over a substrate is provided. A ceramic layer is deposited over the substrate, wherein the ceramic layer has a...
2016/0254124 RF Multi-Feed Structure To Improve Plasma Uniformity
A plasma source assembly for use with a processing chamber is described. The assembly includes a multi-feed RF power connection to a single or multiple RF hot...
2016/0254123 SHIELDED LID HEATER ASSEMBLY
A shielded lid heater lid heater suitable for use with a plasma processing chamber, a plasma processing chamber having a shielded lid heater and a method for...
2016/0254122 METHOD FOR GENERATING PARAMETER PATTERN, ION IMPLANTATION METHOD AND FEED FORWARD SEMICONDUCTOR MANUFACTURING...
The present disclosure provides a method for generating a parameter pattern including: performing a plurality of measurements upon a plurality of regions on a...
2016/0254121 Alignment of Multi-Beam Patterning Tool
Alignment of multi-beam pattern tools includes generating a test pattern having multiple features with a multi-beam patterning tool, acquiring an image...
2016/0254120 Near-field Optical Transmission Electron Emission Microscope
The Near-field Optical Transmission Electron Emission Microscope involves the combination, in one instrument, of optical imaging in the near-field regime or...
2016/0254119 PULSE PROCESSING
A system for analyzing an analogue signal comprising randomly spaced events, the event having an event height, comprises: Converting the signal to a series...
2016/0254118 Measurement Method and Electron Microscope
A measurement method capable of easily measuring the directions of detector segments of a segmented detector relative to a scanning transmission electron...
2016/0254117 MULTIFUNCTIONAL ULTRAFAST ELECTRON GUN OF TRANSMISSION ELECTRON MICROSCOPE
The present invention discloses a multifunctional ultrafast electron gun of a transmission electron microscopy. The ultrafast electron gun of a transmission...
2016/0254116 METAL ELECTRODE, AND ELECTRON GUN, ELECTRON TUBE, AND X-RAY TUBE USING METAL ELECTRODE
A metal including a passivation film 33a with a thickness of 10 nm or more is used as a metal electrode (a focus cup electrode 33) for generating an electric...
2016/0254115 ROTARY X-RAY ANODE AND PRODUCTION METHOD
A rotary X-ray anode has a support body and a focal track formed on the support body. The support body and the focal track are produced as a composite by...
2016/0254114 SELF-ALIGNED GATED EMITTER TIP ARRAYS
Methods for fabrication of self-aligned gated tip arrays are described. The methods are performed on a multilayer structure that includes a substrate, an...
2016/0254113 ELECTROMAGNETIC RELAY
An electromagnetic relay includes a contact device including a fixed terminal with a fixed contact formed, and a movable contactor with a movable contact...
2016/0254112 Single-Channel Safety Output
A safety switching device for fail-safely switching on and off an electrical load, and to a system comprising at least two safety switching devices which...
2016/0254111 MAGNETIC CONTROL DEVICES FOR ENCLOSURES
A control device for an enclosure is disclosed, where the control device includes a first portion positioned proximate to a back side of an enclosure surface...
2016/0254110 ELECTRICAL SWITCH
An electrical switch includes a gas-insulated tube, a contact system in the tube having fixed and movable contacts, a contact operating element passed out of...
2016/0254109 Commutating Switch with Blocking Semiconductor
A mechanical switch that works by commutation of the current to an energy absorbing path or sequence of paths through at least one blocking semiconductor to...
2016/0254108 DIELECTRIC LOADED FLUIDS FOR HIGH VOLTAGE SWITCHING
This disclosure relates to methods and systems to reduce high voltage breakdown jitters in liquid dielectric switches. In particular, dielectric liquids have...
2016/0254107 ARC QUENCHING CHAMBER INSERT
An arc quenching chamber insert for an electrical switching device has a metal plate holder made of an insulating material, and in which a predefinable...
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