At Patents you can conduct a Patent Search, File a Patent Application, find a Patent Attorney, or search available technology through our Patent Exchange. Patents are available using simple keyword or date criteria. If you are looking to hire a patent attorney, you've come to the right place. Protect your idea and hire a patent lawyer.
PELLICLE AGING ESTIMATION AND PARTICLE REMOVAL FROM PELLICLE VIA ACOUSTIC
A pellicle is disposed over a lithography mask. An acoustic wave generator is placed over the pellicle. The acoustic wave generator is configured to generate...
WAFER LITHOGRAPHY EQUIPMENT
According to one embodiment, wafer lithography equipment includes an exposure unit transferring a circuit pattern onto a wafer, a measurement unit measuring a...
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND STORAGE
A substrate processing apparatus includes a carrier block, an end block for returning a substrate picked up from the carrier block to the carrier block, and a...
METHOD FOR FORMING PATTERN
According to an embodiment, a method for forming a pattern includes selectively forming a first film on a first region on a substrate. The first region is...
Radiation Source and Method for Lithography
A radiation source suitable for providing radiation to a lithographic apparatus generates radiation from a plasma (12) generated from a fuel (31) within an...
TARGET MATERIAL SUPPLY APPARATUS FOR AN EXTREME ULTRAVIOLET LIGHT SOURCE
A target material supply apparatus for an extreme ultraviolet (EUV) light source includes a tube that includes a first end, a second end, and a sidewall...
EUV Lithography System and Method with Optimized Throughput and Stability
The present disclosure provides an extreme ultraviolet (EUV) lithography process. The process includes loading a wafer to an EUV lithography system having an...
METHOD OF RECOVERING RESIST PATTERN
A method of recovering a defect portion of a resist pattern formed on a substrate including applying a shrinking agent composition so as to cover the resist...
NOVEL CHEMICAL TREATMENT FOR LITHOGRAPHY IMPROVEMENT IN A NEGATIVE TONE
A material layer is formed over a substrate. A negative tone photoresist layer is formed over the material layer. An exposure process is performed to the...
Lithographic Method and Apparatus
A method of correcting an optical image formed by an optical system, the method including obtaining a map indicative of a polarization dependent property of...
ARTICLES WITH SILVER-CONTAINING POLYMERIC COMPLEXES
Articles are prepared to have a substrate and a silver-containing composition on either or both supporting sides of the substrate. The silver-containing...
SILVER-CONTAINING COMPOSITIONS CONTAINING REACTIVE POLYMERS
Silver-containing compositions contain a water-soluble complex of a reactive polymer with either reducible silver ions or silver nanoparticles, the reactive...
METHOD FOR FORMING PHOTOSENSITIVE RESIN LAYER, METHOD FOR PRODUCING
PHOTORESIST PATTERN, AND METHOD FOR...
A method of forming a photosensitive resin layer including laminating a photosensitive resin layer including a chemically amplified positive-type ...
RESIST COMPOSITION, METHOD FOR FORMING RESIST PATTERN, ACID GENERATOR AND
A resist composition which generates acid upon exposure and exhibits changed solubility in a developing solution under action of acid, and which includes a...
MASK BLANK AND TRANSFER MASK
A mask blank, including: a thin film for forming a transfer pattern; a resist underlying film made of a resist underlying composition and provided on the thin...
METHOD AND APPARATUS FOR ESTIMATING FOCUS AND DOSE OF AN EXPOSURE PROCESS
A structure in semiconductor fabrication includes at least a first periodic asymmetric feature and a periodic asymmetric second feature. The first feature...
TWO-DIMENSIONAL PROCESS WINDOW IMPROVEMENT
A method of optimizing a semiconductor mask layout is provided. The method includes accessing a digital file comprising the semiconductor mask layout,...
SYSTEM AND METHOD FOR MANUFACTURING PLANARIZED EXTREME ULTRAVIOLET
An integrated extreme ultraviolet (EUV) blank production system includes: a vacuum chamber for placing a substrate in a vacuum; a first deposition system for...
LIGHT REFLECTION TYPE LITHOGRAPHY MASK, ITS MANUFACTURING METHOD, MASK
DATA GENERATION METHOD AND MASK BLANK
One embodiment of the present invention provides a light reflection type lithography mask including: a substrate; and a reflection layer. The reflection layer...
REFLECTIVE PHOTOMASK, METHOD FOR MANUFACTURING SAME AND PROGRAM FOR MAKING
A reflective photomask includes a substrate and a reflective layer on the substrate. The reflective layer has a top surface opposite to the substrate and a...
MULTI-DIRECTION IMAGE PROJECTING SYSTEM
A multi-direction image projecting system includes a housing that has a top wall, a bottom wall and a perimeter wall which is attached to and extends between...
SCREEN AND DISPLAY/IMAGING DEVICE
The present invention improves the light usage efficiency of image light. A screen according to one configuration of the present invention includes: a...
SCREEN DEVICE, IMAGE DISPLAY SYSTEM, AND IMAGE DISPLAY METHOD
This disclosure discloses a screen device. The screen device includes a screen part used for displaying an image, at least one polyhedron including a plurality...
PROJECTION DEVICE, PROJECTION CONTROL METHOD, AND STORAGE MEDIUM, SUITABLE
FOR PROJECTOR OR THE LIKE USING...
A projection device includes a semiconductor light-emitting element, a rotary wheel configured to emit lights of a plurality of colors in a time-division...
PROJECTION SYSTEM FOR ENHANCING AND MODIFYING THE APPEARANCE OF A
The present disclosure includes a projection system for enhancing color saturation and contrast for a projected image. The projection surface includes a coat...
LIGHT SOURCE APPARATUS AND PROJECTION DISPLAY APPARATUS
A light source apparatus of the disclosure includes a solid state light source; a substrate that has a phosphor region where a phosphor is formed that emits...
PROJECTOR AND METHOD OF CONTROLLING PROJECTOR
A projector according to an aspect of the invention includes a discharge lamp having a light emitting tube and configured to emit light, a light modulation...
IMAGE PROJECTION APPARATUS, AND LIGHT SOURCE UNIT
An image projection apparatus includes an outer casing having a mounting port, a light source unit detachably disposed in a body of image projection apparatus...
CONVERTER LENS DEVICE AND PHOTOGRAPHING SYSTEM INCLUDING THE SAME
The present disclosure is directed to a converter lens device that includes a first mount to which a master lens device is capable of being attached, a second...
Extensive Light-Emitting Element for a Flash Apparatus, Flash Apparatus
and Electronic Device Comprising a...
An extensive light-emitting element, a flash apparatus and an electronic device having a flash apparatus are disclosed. In an embodiment the extensive...
BLADE DRIVE DEVICE AND OPTICAL APPARATUS
To provide a blade drive device capable of suppressing operation failures due to the leakage flux. The blade drive device 1 attached to a camera module...
ADJUSTABLE SPEED FAST LASER SCANNING SYSTEM AND TWO-PHOTON MICROSCOPE
The present invention concerns a laser scanning system (18) comprising: --a first acousto-optical deflector (30) deflecting a beam in a first direction (X) to...
Random access stimulated emission depletion (STED) microscopy
Optical scanning system, comprising an optical system for guiding a first and a second light beam, and deflector devices for deflecting first and second light...
INTEGRATED LIGHT SOURCE AND LIGHT OUTPUT CONTROL METHOD
An integrated light source includes an optical circuit (3) including at least an interference optical switch and a light emitting unit (2) outputting optical...
Optical Phased Array Using Stacked Parallel Plate Wave Guides And Method
Of Fabricating Arrays Of Stacked...
A method for fabricating crystalline dielectric material on top of metal layers to produce an apparatus for non-mechanical steering of an input laser beam is...
INTERFEROMETRIC MODULATOR MIRROR DESIGN WITHOUT METAL LAYER IN THE HINGE
Various implementations described herein involve interferometric modulators (IMODs), which may be single-mirror IMODs (SMIs). Such IMODs may include an...
METHOD AND APPARATUS FOR HIGH RESOLUTION REFLECTIVE IMAGE DISPLAY
A reflective image display comprising of a rigid and thermally stable layer is proposed where light is reflected in a semi-specular or semi-retro-reflective...
CONDUCTIVE ASSEMBLY FOR CHANGING COLOR OF LENS
A conductive assembly for changing a color of a lens is revealed herein to comprise first and second conductive devices separately disposed at an upper front...
LIQUID CRYSTAL PANEL, METHOD FOR DRIVING THE SAME, AND LIAUID CRYSTAL
The present invention provides a liquid crystal display panel comprising: a display area in which a display area in which an array of pixel units is disposed,...
ARRAY SUBSTRATE AND DISPLAY DEVICE
An array substrate and a display device having the array substrate are provided. The array substrate comprises a display region and a non-display region...
TFT-LCD DISPLAY PANEL BASED ON HSD STRUCTURE AND MANUFACTURING METHOD
The present disclosure discloses a TFT-LCD display panel based on an HSD structure, including: a sub-pixel unit array; a plurality of pairs of gate lines, with...
LCD Panel and Via Hole Used for Electrical ConnectionThereof
The present invention discloses a liquid crystal display panel and a via hole used for electrical connection. The via hole is provided on an insulating...
LIQUID CRYSTAL DISPLAY DEVICE
A pixel portion has a liquid crystal sandwiched between a pixel electrode and a common electrode. Incident Light onto the liquid crystal is modulated in...
DISPLAY DEVICE AND METHOD OF MANUFACTURING THE SAME
A display device includes: a lower substrate including pixel regions and a light shielding area; an upper substrate opposed to the lower substrate; a liquid...
TFT SUBSTRATE AND METHOD FOR MANUFACTURING THE SAME
The present invention provides a TFT substrate and method for manufacturing the same. The method comprises the steps of: providing a substrate; forming a TFT...
LIQUID CRYSTAL DISPLAY (LCD) PANEL, MANUFACTURING METHOD THEREOF AND
A liquid crystal display (LCD) panel, a manufacturing method thereof and a display device are provided. The LCD panel includes an array substrate and a color...
PIXEL STRUCTURE AND LIQUID CRYSTAL PANEL
A pixel structure and a liquid crystal panel are disclosed. The pixel structure comprises a data line (1), a pixel electrode (3), a gate line (2), and at least...
LIQUID CRYSTAL DISPLAY DEVICE
A transverse electric field-type liquid crystal display device displays by rotating homogeneous-aligned liquid crystals by a transverse electric field...
LIQUID CRYSTAL LENS DEVICE AND IMAGE DISPLAY DEVICE
A liquid crystal lens device includes a first electrode unit, a counter electrode and a liquid crystal layer. The first electrode unit includes a first and a...
LIQUID CRYSTAL DISPLAY DEVICE
A liquid crystal display device includes a first substrate and a second substrate. The first substrate includes a gate line and an auxiliary capacitance line...