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Patent # Description
2016/0274471 PELLICLE AGING ESTIMATION AND PARTICLE REMOVAL FROM PELLICLE VIA ACOUSTIC WAVES
A pellicle is disposed over a lithography mask. An acoustic wave generator is placed over the pellicle. The acoustic wave generator is configured to generate...
2016/0274470 WAFER LITHOGRAPHY EQUIPMENT
According to one embodiment, wafer lithography equipment includes an exposure unit transferring a circuit pattern onto a wafer, a measurement unit measuring a...
2016/0274469 SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND STORAGE MEDIUM
A substrate processing apparatus includes a carrier block, an end block for returning a substrate picked up from the carrier block to the carrier block, and a...
2016/0274468 METHOD FOR FORMING PATTERN
According to an embodiment, a method for forming a pattern includes selectively forming a first film on a first region on a substrate. The first region is...
2016/0274467 Radiation Source and Method for Lithography
A radiation source suitable for providing radiation to a lithographic apparatus generates radiation from a plasma (12) generated from a fuel (31) within an...
2016/0274466 TARGET MATERIAL SUPPLY APPARATUS FOR AN EXTREME ULTRAVIOLET LIGHT SOURCE
A target material supply apparatus for an extreme ultraviolet (EUV) light source includes a tube that includes a first end, a second end, and a sidewall...
2016/0274465 EUV Lithography System and Method with Optimized Throughput and Stability
The present disclosure provides an extreme ultraviolet (EUV) lithography process. The process includes loading a wafer to an EUV lithography system having an...
2016/0274464 METHOD OF RECOVERING RESIST PATTERN
A method of recovering a defect portion of a resist pattern formed on a substrate including applying a shrinking agent composition so as to cover the resist...
2016/0274463 NOVEL CHEMICAL TREATMENT FOR LITHOGRAPHY IMPROVEMENT IN A NEGATIVE TONE DEVELOPMENT PROCESS
A material layer is formed over a substrate. A negative tone photoresist layer is formed over the material layer. An exposure process is performed to the...
2016/0274462 Lithographic Method and Apparatus
A method of correcting an optical image formed by an optical system, the method including obtaining a map indicative of a polarization dependent property of...
2016/0274461 ARTICLES WITH SILVER-CONTAINING POLYMERIC COMPLEXES
Articles are prepared to have a substrate and a silver-containing composition on either or both supporting sides of the substrate. The silver-containing...
2016/0274460 SILVER-CONTAINING COMPOSITIONS CONTAINING REACTIVE POLYMERS
Silver-containing compositions contain a water-soluble complex of a reactive polymer with either reducible silver ions or silver nanoparticles, the reactive...
2016/0274459 METHOD FOR FORMING PHOTOSENSITIVE RESIN LAYER, METHOD FOR PRODUCING PHOTORESIST PATTERN, AND METHOD FOR...
A method of forming a photosensitive resin layer including laminating a photosensitive resin layer including a chemically amplified positive-type ...
2016/0274458 RESIST COMPOSITION, METHOD FOR FORMING RESIST PATTERN, ACID GENERATOR AND COMPOUND
A resist composition which generates acid upon exposure and exhibits changed solubility in a developing solution under action of acid, and which includes a...
2016/0274457 MASK BLANK AND TRANSFER MASK
A mask blank, including: a thin film for forming a transfer pattern; a resist underlying film made of a resist underlying composition and provided on the thin...
2016/0274456 METHOD AND APPARATUS FOR ESTIMATING FOCUS AND DOSE OF AN EXPOSURE PROCESS
A structure in semiconductor fabrication includes at least a first periodic asymmetric feature and a periodic asymmetric second feature. The first feature...
2016/0274455 TWO-DIMENSIONAL PROCESS WINDOW IMPROVEMENT
A method of optimizing a semiconductor mask layout is provided. The method includes accessing a digital file comprising the semiconductor mask layout,...
2016/0274454 SYSTEM AND METHOD FOR MANUFACTURING PLANARIZED EXTREME ULTRAVIOLET LITHOGRAPHY BLANK
An integrated extreme ultraviolet (EUV) blank production system includes: a vacuum chamber for placing a substrate in a vacuum; a first deposition system for...
2016/0274453 LIGHT REFLECTION TYPE LITHOGRAPHY MASK, ITS MANUFACTURING METHOD, MASK DATA GENERATION METHOD AND MASK BLANK
One embodiment of the present invention provides a light reflection type lithography mask including: a substrate; and a reflection layer. The reflection layer...
2016/0274452 REFLECTIVE PHOTOMASK, METHOD FOR MANUFACTURING SAME AND PROGRAM FOR MAKING MASK PATTERN
A reflective photomask includes a substrate and a reflective layer on the substrate. The reflective layer has a top surface opposite to the substrate and a...
2016/0274451 MULTI-DIRECTION IMAGE PROJECTING SYSTEM
A multi-direction image projecting system includes a housing that has a top wall, a bottom wall and a perimeter wall which is attached to and extends between...
2016/0274450 SCREEN AND DISPLAY/IMAGING DEVICE
The present invention improves the light usage efficiency of image light. A screen according to one configuration of the present invention includes: a...
2016/0274449 SCREEN DEVICE, IMAGE DISPLAY SYSTEM, AND IMAGE DISPLAY METHOD
This disclosure discloses a screen device. The screen device includes a screen part used for displaying an image, at least one polyhedron including a plurality...
2016/0274448 PROJECTION DEVICE, PROJECTION CONTROL METHOD, AND STORAGE MEDIUM, SUITABLE FOR PROJECTOR OR THE LIKE USING...
A projection device includes a semiconductor light-emitting element, a rotary wheel configured to emit lights of a plurality of colors in a time-division...
2016/0274447 PROJECTION SYSTEM FOR ENHANCING AND MODIFYING THE APPEARANCE OF A PROJECTION SURFACE
The present disclosure includes a projection system for enhancing color saturation and contrast for a projected image. The projection surface includes a coat...
2016/0274446 LIGHT SOURCE APPARATUS AND PROJECTION DISPLAY APPARATUS
A light source apparatus of the disclosure includes a solid state light source; a substrate that has a phosphor region where a phosphor is formed that emits...
2016/0274445 PROJECTOR AND METHOD OF CONTROLLING PROJECTOR
A projector according to an aspect of the invention includes a discharge lamp having a light emitting tube and configured to emit light, a light modulation...
2016/0274444 IMAGE PROJECTION APPARATUS, AND LIGHT SOURCE UNIT
An image projection apparatus includes an outer casing having a mounting port, a light source unit detachably disposed in a body of image projection apparatus...
2016/0274443 CONVERTER LENS DEVICE AND PHOTOGRAPHING SYSTEM INCLUDING THE SAME
The present disclosure is directed to a converter lens device that includes a first mount to which a master lens device is capable of being attached, a second...
2016/0274442 Extensive Light-Emitting Element for a Flash Apparatus, Flash Apparatus and Electronic Device Comprising a...
An extensive light-emitting element, a flash apparatus and an electronic device having a flash apparatus are disclosed. In an embodiment the extensive...
2016/0274441 BLADE DRIVE DEVICE AND OPTICAL APPARATUS
To provide a blade drive device capable of suppressing operation failures due to the leakage flux. The blade drive device 1 attached to a camera module...
2016/0274440 ADJUSTABLE SPEED FAST LASER SCANNING SYSTEM AND TWO-PHOTON MICROSCOPE ASSOCIATED
The present invention concerns a laser scanning system (18) comprising: --a first acousto-optical deflector (30) deflecting a beam in a first direction (X) to...
2016/0274439 Random access stimulated emission depletion (STED) microscopy
Optical scanning system, comprising an optical system for guiding a first and a second light beam, and deflector devices for deflecting first and second light...
2016/0274438 INTEGRATED LIGHT SOURCE AND LIGHT OUTPUT CONTROL METHOD
An integrated light source includes an optical circuit (3) including at least an interference optical switch and a light emitting unit (2) outputting optical...
2016/0274437 Optical Phased Array Using Stacked Parallel Plate Wave Guides And Method Of Fabricating Arrays Of Stacked...
A method for fabricating crystalline dielectric material on top of metal layers to produce an apparatus for non-mechanical steering of an input laser beam is...
2016/0274436 INTERFEROMETRIC MODULATOR MIRROR DESIGN WITHOUT METAL LAYER IN THE HINGE
Various implementations described herein involve interferometric modulators (IMODs), which may be single-mirror IMODs (SMIs). Such IMODs may include an...
2016/0274435 METHOD AND APPARATUS FOR HIGH RESOLUTION REFLECTIVE IMAGE DISPLAY
A reflective image display comprising of a rigid and thermally stable layer is proposed where light is reflected in a semi-specular or semi-retro-reflective...
2016/0274434 CONDUCTIVE ASSEMBLY FOR CHANGING COLOR OF LENS
A conductive assembly for changing a color of a lens is revealed herein to comprise first and second conductive devices separately disposed at an upper front...
2016/0274433 LIQUID CRYSTAL PANEL, METHOD FOR DRIVING THE SAME, AND LIAUID CRYSTAL DISPLAY
The present invention provides a liquid crystal display panel comprising: a display area in which a display area in which an array of pixel units is disposed,...
2016/0274432 ARRAY SUBSTRATE AND DISPLAY DEVICE
An array substrate and a display device having the array substrate are provided. The array substrate comprises a display region and a non-display region...
2016/0274431 TFT-LCD DISPLAY PANEL BASED ON HSD STRUCTURE AND MANUFACTURING METHOD
The present disclosure discloses a TFT-LCD display panel based on an HSD structure, including: a sub-pixel unit array; a plurality of pairs of gate lines, with...
2016/0274430 LCD Panel and Via Hole Used for Electrical ConnectionThereof
The present invention discloses a liquid crystal display panel and a via hole used for electrical connection. The via hole is provided on an insulating...
2016/0274429 LIQUID CRYSTAL DISPLAY DEVICE
A pixel portion has a liquid crystal sandwiched between a pixel electrode and a common electrode. Incident Light onto the liquid crystal is modulated in...
2016/0274428 DISPLAY DEVICE AND METHOD OF MANUFACTURING THE SAME
A display device includes: a lower substrate including pixel regions and a light shielding area; an upper substrate opposed to the lower substrate; a liquid...
2016/0274427 TFT SUBSTRATE AND METHOD FOR MANUFACTURING THE SAME
The present invention provides a TFT substrate and method for manufacturing the same. The method comprises the steps of: providing a substrate; forming a TFT...
2016/0274426 LIQUID CRYSTAL DISPLAY (LCD) PANEL, MANUFACTURING METHOD THEREOF AND DISPLAY DEVICE
A liquid crystal display (LCD) panel, a manufacturing method thereof and a display device are provided. The LCD panel includes an array substrate and a color...
2016/0274425 PIXEL STRUCTURE AND LIQUID CRYSTAL PANEL
A pixel structure and a liquid crystal panel are disclosed. The pixel structure comprises a data line (1), a pixel electrode (3), a gate line (2), and at least...
2016/0274424 LIQUID CRYSTAL DISPLAY DEVICE
A transverse electric field-type liquid crystal display device displays by rotating homogeneous-aligned liquid crystals by a transverse electric field...
2016/0274423 LIQUID CRYSTAL LENS DEVICE AND IMAGE DISPLAY DEVICE
A liquid crystal lens device includes a first electrode unit, a counter electrode and a liquid crystal layer. The first electrode unit includes a first and a...
2016/0274422 LIQUID CRYSTAL DISPLAY DEVICE
A liquid crystal display device includes a first substrate and a second substrate. The first substrate includes a gate line and an auxiliary capacitance line...
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