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Patent # Description
2016/0313657 PATTERN FORMING APPARATUS, MARK DETECTING APPARATUS, EXPOSURE APPARATUS, PATTERN FORMING METHOD, EXPOSURE...
While a wafer stage linearly moves in a Y-axis direction, a multipoint AF system detects surface position information of the wafer surface at a plurality of...
2016/0313656 INSPECTION METHOD, LITHOGRAPHIC APPARATUS, MASK AND SUBSTRATE
A method and apparatus for obtaining focus information relating to a lithographic process. The method includes illuminating a target, the target having...
2016/0313655 APPARATUS AND METHOD FOR OVERLAY MEASUREMENT
The present disclosure provides apparatus and methods for overlay measurement. An exemplary overlay measurement apparatus includes an illuminating unit,...
2016/0313654 Metrology Method and Apparatus, Computer Program and Lithographic System
Disclosed are a method, computer program and associated apparatuses for measuring a parameter of a lithographic process. The method comprising the steps of:...
2016/0313653 Method and Apparatus for Measuring a Structure on a Substrate, Models for Error Correction, Computer Program...
A reconstruction process includes measuring structures formed on a substrate by a lithographic process, determining a reconstruction model for generating...
2016/0313652 OVERLAY OPERATION METHOD AND OVERLAY CONTROL METHOD
An overlay operation method and an overlay control method are disclosed. A first mark and a second mark are identified on a substrate, wherein the first mark...
2016/0313651 YIELD ESTIMATION AND CONTROL
A defect prediction method for a device manufacturing process involving production substrates processed by a lithographic apparatus, the method including...
2016/0313650 EXPOSURE APPARATUS, EXPOSURE METHOD, AND METHOD FOR PRODUCING DEVICE
A liquid immersion exposure apparatus includes a projection system, a movable stage, an alignment system and a measurement member. The projection system has a...
2016/0313649 Actuation Mechanism, Optical Apparatus and Lithography Apparatus
An actuator to displace, for example a mirror, provides movement with at least two degrees of freedom by varying the currents in two electromagnets (370). A...
2016/0313648 MONITOR METHOD FOR PROCESS CONTROL IN A SEMICONDUCTOR FABRICATION PROCESS
A monitor method for process control in a semiconductor fabrication process is disclosed. A first alignment mark is formed in a layer on a substrate, and its...
2016/0313647 Method for Hotspot Detection and Ranking of a Lithographic Mask
The present disclosure is related to a method for detecting and ranking hotspots in a lithographic mask used for printing a pattern on a substrate. According...
2016/0313646 FACET MIRROR FOR USE IN A PROJECTION EXPOSURE APPARATUS FOR MICROLITHOGRAPHY
A facet mirror is to be used as a bundle-guiding optical component in a projection exposure apparatus for microlithography. The facet mirror has a plurality of...
2016/0313645 PATTERN FORMING METHOD, ACTINIC RAY-SENSITIVE OR RADIATION-SENSITIVE RESIN COMPOSITION, METHOD FOR...
The present invention relates to a pattern forming method including: forming a film using an actinic ray-sensitive or radiation-sensitive resin composition...
2016/0313644 PATTERN FORMATION METHOD
According to one embodiment, at first, a first resist film made from a first radiation sensitive composition is formed on a processing object film. Then, light...
2016/0313643 Silane Composition and Cured Film Thereof, and Method for Forming Negative Resist Pattern Using Same
A composition provided to contain: an alkoxysilane condensate obtained by the condensation of alkoxysilane A represented by general formula (1):...
2016/0313642 PHOTOSENSITIVE POLYIMIDE COMPOSITIONS
This disclosure relates to a photosensitive composition that includes at least one fully imidized polyimide polymer having a weight average molecular weight in...
2016/0313641 PHOTOSENSITIVE POLYIMIDE COMPOSITIONS
This disclosure relates to a dry film structure that includes a carrier substrate, and a polymeric layer supported by the carrier substrate. The polymeric...
2016/0313640 MAKING MICRO-CHANNEL ELECTRODE STRUCTURE
A method of making a micro-channel electrode structure includes providing a curable layer and imprinting the curable layer to form an electrode micro-channel...
2016/0313639 PHOTOSENSITIVE RESIN COMPOSITION, PIXEL LAYER, PROTECTIVE FILM, SPACER, THIN-FILM TRANSISTOR, COLOR FILTER, AND...
The invention provides a photosensitive resin composition that can be applied in a pixel layer, a protective film, a spacer, a thin-film transistor, a color...
2016/0313638 Layout Decomposition Methods and Systems
A layout decomposition method is provided which may include building, a graph including a plurality of nodes and edges from a layout design including a...
2016/0313637 Apparatus and Method for Manufacturing a Pellicle, and a Pellicle
An apparatus for manufacturing a pellicle, the apparatus comprising: a stressing assembly for stressing a film; and a substrate support for supporting a...
2016/0313636 LED PROJECTION LIGHT HAS FEATURES
The AC or DC powered LED projection light to project Bigger-size image desire location, It may has more than one function to get certain purpose which selected...
2016/0313635 MEDICAL IMAGING APPARATUS AND PROJECTION DEVICE
A medical imaging apparatus comprises a gantry, a table, a first emitting unit, and a reflection unit. The table is movable to go in and out of the gantry. The...
2016/0313634 DISPLAY DEVICE AND MEDICAL DIAGNOSTIC IMAGING DEVICE
According to an embodiment, a display device includes a reflecting member and a display. The reflecting member has a reflecting surface and has an optical...
2016/0313633 LIGHT SOURCE DEVICE AND PROJECTION-TYPE DISPLAY DEVICE
A light source device is equipped with a light source main unit, an optical element, a phosphor unit, and a condensing element. The optical axis of the light...
2016/0313632 COOLING SYSTEM FOR A PROJECTOR
An air duct is secured in a projector. The air duct is configured to help a fan module to cool a light emitting module. The fan module defines an air vent....
2016/0313631 OPTICAL SYSTEM AND OPTICAL APPARATUS INCLUDING THE SAME
An optical system has a first optical axis on an incident side and a second optical axis on an exit side, and the first optical axis and the second optical...
2016/0313630 Omnidirectional Bracket for Cameras and Accessories
A mechanical camera bracket for mounting different accessories to the camera is disclosed that ensures a positive lock through the central hub from which...
2016/0313629 CAMERA MODULE
Provided in the present invention is a camera module comprising: an imaging lens on which incident light from an external environment is reflected; and an...
2016/0313628 CAMERA MODULE STRUCTURE HAVING ELECTRONIC DEVICE CONNECTIONS FORMED THEREIN
A camera module including a camera module carrier having a lens actuator attached thereto and at least two conductive carrier traces that are electrically...
2016/0313627 HIGH-TEMPERATURE ISOTROPIC PLASMA ETCHING PROCESS TO PREVENT ELECTRICAL SHORTS
A method includes placing a device having a titanium nitride layer into a chamber. The device also has a mask that includes a photoresist material and an...
2016/0313626 REFLECTANCE VARIABLE ELEMENT AND METHOD FOR MANUFACTURING SAME
This invention enables obtainment of a reflectance variable element having a high cold tolerance. Two transparent substrates are disposed so as to face each...
2016/0313625 BACKPLANE FOR ELECTRO-OPTIC DISPLAY
A backplane for an electro-optic display comprising pixels with reduced capacitance. The pixel architecture results in a backplane with some voltage spiking,...
2016/0313624 ELECTROPHORETIC FLUID
This invention relates to electrophoretic fluids comprising a solvent, a dye, white particles, and coloured particles selected from red, green, blue, magenta,...
2016/0313623 LIQUID CRYSTAL DISPLAY DEVICE AND METHOD OF MANUFACTURING A LIQUID CRYSTAL DISPLAY DEVICE
A liquid crystal display device (10) includes: gate wiring (501) formed on a substrate (500) and along a first direction; drain wiring (702) formed on the...
2016/0313622 DISPLAY SUBSTRATE, ITS MANUFACTURING METHOD, AND DISPLAY DEVICE
The present invention relates to the field of display technology, and provides a display substrate, its manufacturing method, and a display device. The method...
2016/0313621 ARRAY SUBSTRATE AND METHOD FOR MANUFACTURING THE SAME, DISPLAY DEVICE AND ELECTRONIC DEVICE
The array substrate according to the present disclosure may include a base substrate, gate lines and data lines arranged in a crisscross manner on the base...
2016/0313620 GOA CIRCUIT REPAIR METHOD
In the GOA circuit repair method provided by the present invention, the repair signal (Repair signal) is received by the GOA unit circuits of the Nth stage and...
2016/0313619 ARRAY SUBSTRATE AND METHOD OF REPAIRING BROKEN LINES THEREFOR
The present invention provides an array substrate and method of repairing broken lines therefor, by forming a via on the organic layer corresponding to each...
2016/0313618 LIQUID CRYSTAL DISPLAY DEVICE AND MANUFACTURING METHOD THEREOF
A liquid crystal display device includes: a liquid crystal layer between first and second display panels. Then first display panel includes:gate and data lines...
2016/0313617 Self-Capacitance Touch Liquid Crystal Grating, Manufacturing Method Thereof, Driving Method Thereof, Display...
Embodiments of the invention provide a self-capacitance touch liquid crystal grating, a manufacturing method thereof, a driving method thereof, a...
2016/0313616 LIQUID CRYSTAL DISPLAY DEVICE
A liquid crystal display device includes: first and second substrates disposed to be opposed to each other; a liquid crystal layer held between the first and...
2016/0313615 PIXEL STRUCTURE, ARRAY SUBSTRATE, DISPLAY DEVICE AND METHOD FOR MANUFACTURING THE SAME
The present disclosure provides a pixel structure, an array substrate and a display device and a method for manufacturing the same. The pixel structure...
2016/0313614 LIQUID CRYSTAL DISPLAY
A disclosed liquid crystal display includes an upper plate and a lower plate with a liquid crystal layer interposed therebetween. The display also includes a...
2016/0313613 PIXEL STRUCTURE AND DISPLAY PANEL
A pixel structure includes a gate line, a first data line, first and second pixel electrodes, first and second active devices, an insulation layer, and first...
2016/0313612 LIQUID CRYSTAL LENS AND DISPLAY DEVICE
The present invention provides a liquid crystal lens and a display device, belongs to the field of display technology, and can solve a problem that strong...
2016/0313611 LIQUID CRYSTAL PANEL AND DISPLAY APPARATUS
The disclosure is related to a liquid crystal panel. The liquid crystal panel comprises a color filter substrate, an array substrate and a liquid crystal layer...
2016/0313610 METHOD OF MANUFACTURING LIQUID CRYSTAL DISPLAY PANEL
A method of manufacturing a liquid crystal display panel is provided, which comprises steps of: manufacturing an array substrate; manufacturing a color film...
2016/0313609 LIQUID CRYSTAL DISPLAY AND METHOD OF MANUFACTURE THEREOF
A liquid crystal display includes a first substrate and a second substrate facing each other; a pixel electrode disposed on the first substrate; a first...
2016/0313608 LIQUID CRYSTAL DISPLAY PANEL AND LIQUID CRYSTAL DISPLAY DEVICE
The present invention provides a liquid crystal display panel and a liquid crystal display device having excellent display quality, with reduced string-like...
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