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Patent # Description
2017/0003605 LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
A gas knife configured to dry a surface in an immersion lithographic apparatus is optimized to remove liquid by ensuring that a pressure gradient is built up...
2017/0003604 EXPOSURE METHOD, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD
Within area where of four heads installed on a wafer stage, heads included in the first head group and the second head group to which three heads each belong...
2017/0003603 MOVABLE BODY DRIVE METHOD, MOVABLE BODY DRIVE SYSTEM, PATTERN FORMATION METHOD, PATTERN FORMING APPARATUS,...
Positional information of a movable body in a Y-axis direction is measured using an interferometer and an encoder whose short-term stability of measurement...
2017/0003602 MULTISCALE PATTERNING OF A SAMPLE WITH APPARATUS HAVING BOTH THERMO-OPTICAL LITHOGRAPHY CAPABILITY AND THERMAL...
The present invention provides a method for multiscale patterning of a sample. The method includes: placing the sample in an apparatus having both...
2017/0003601 EXPOSURE METHOD, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD
Within area where of four heads installed on a wafer stage, heads included in the first head group and the second head group to which three heads each belong...
2017/0003600 EXPOSURE APPARATUS, EXPOSURE METHOD, AND DEVICE MANUFACTURING METHOD
An exposure apparatus is equipped with a fine movement stage that can hold a liquid with a projection optical system when the stage is at a position facing an...
2017/0003599 EXPOSURE METHOD, EXPOSURE APPARATUS, AND METHOD FOR PRODUCING DEVICE
A liquid immersion exposure apparatus includes a projection system having a last element and a liquid supply system by which an immersion liquid is supplied to...
2017/0003598 CORRECTION OF NON-UNIFORM PATTERNS USING TIME-SHIFTED EXPOSURES
An image correction application relating to the ability to apply maskless lithography patterns to a substrate in a manufacturing process is disclosed. The...
2017/0003597 EUV LIGHT SOURCE FOR A LIGHTING DEVICE OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS
An EUV light source for an illumination device of a microlithographic proj ection exposure apparatus, includes an electron source for generating an electron...
2017/0003596 METHOD FOR FORMING PHOTOLITHOGRAPHIC PATTERN
In accordance with some embodiments of the disclosed subject matter, a method for forming a photolithographic pattern is provided. The method comprises:...
2017/0003595 PATTERN-FORMING METHOD, RESIN, AND COMPOSITION
A pattern-forming method comprises: forming a resist underlayer film on an upper face side of a substrate; forming a silicon-containing film on an upper face...
2017/0003594 Elastomer-Assisted Manufacturing
Methods of performing lithography in films attached to elastomeric substrates are provided, including methods of performing optical lithography using...
2017/0003593 PHOTOSENSITIVE LAMINATE, TRANSFER MATERIAL, PATTERNED PHOTOSENSITIVE LAMINATE, METHOD FOR MANUFACTURING THE...
An object of the invention is to provide a photosensitive laminate in which two or more layers can be collectively patterned, a transfer material, a patterned...
2017/0003592 PATTERN-FORMING METHOD
A pattern-forming method comprises: forming a resist underlayer film on an upper face side of a substrate; forming a silicon-containing film on an upper face...
2017/0003591 MANUFACTURING METHOD FOR ACTINIC RAY-SENSITIVE OR RADIATION-SENSITIVE RESIN COMPOSITION, ACTINIC RAY-SENSITIVE...
A manufacturing method for an actinic ray-sensitive or radiation-sensitive resin composition that contains a resin, an acid generator, an organic acid, and a...
2017/0003590 RESIST COMPOSITION AND PATTERNING PROCESS
A resist composition is provided comprising (A) a fluorine-containing polymer, (B) a base resin, (C) an acid generator, and (D) a solvent mixture of a first...
2017/0003589 PHOTOINITIATOR AND PHOTOSENSITIVE COMPOSITION INCLUDING THE SAME
Provided is a photoinitiator represented by Formula 1: ##STR00001## The photoinitiator is suitable for photocrosslinking. Further provided is a photosensitive...
2017/0003588 PHOTOSENSITIVE CONDUCTIVE FILM
A photosensitive conductive film includes: a support film; and a photosensitive layer which is provided on the support film, wherein the photosensitive layer...
2017/0003587 SULFONIC ACID DERIVATIVE COMPOUNDS AS PHOTOACID GENERATORS IN RESIST APPLICATIONS
Novel photoacid generator compounds are provided. Photoresist compositions that include the novel photoacid generator compounds are also provided. The...
2017/0003586 PHOTOSENSITIVE RESIN COMPOSITION AND USES THEREOF
The invention relates to a photosensitive resin composition for black matrix, a color filter formed by the black matrix, and a liquid crystal display element....
2017/0003585 Mask Pellicle Indicator for Haze Prevention
A pellicle mask assembly includes a mask, a pellicle frame, and a pellicle membrane. The pellicle frame has a bottom side attached to the mask, and a top side...
2017/0003584 INORGANIC MATERIAL FILM, PHOTOMASK BLANK, AND METHOD FOR MANUFACTURING PHOTOMASK
An inorganic material film containing tin within the concentration range of 0.1 atomic percent or higher but no higher than 11.5 atomic percent eliminates the...
2017/0003583 MASK BLANK AND TRANSFER MASK
Provided is a mask blank in which a thin film for transfer pattern formation is provided on a main surface of a transparent substrate. The thin film is made of...
2017/0003582 PRISM GROUP AND PROJECTION APPARATUS
A prism group including a first, a second, and a third prisms is provided. The first prism has a first light incidence surface, a first light emitting surface,...
2017/0003581 PROJECTOR
A projector includes a base, a light module secured on the base, and a cover secured on the light module. The light module includes a bracket, and the cover...
2017/0003580 Apparatus for High Efficiency Laser Static Phosphor Module
In described examples, a body includes an opening in a central portion of a surface, a cavity having sides extending from the opening into the body, and a...
2017/0003579 OPTICAL PATH CHANGING DEVICE AND PROJECTION IMAGE DISPLAY APPARATUS
The optical path changing device of the present disclosure includes an optical member having a parallel plate face for changing an optical path, and first,...
2017/0003578 OSCILLATING LENS MODULE AND PROJECTOR
The invention discloses an oscillating lens module and a projector. The oscillating lens module includes a frame, a first coil, a lens, and a second coil. The...
2017/0003577 PLATE FOR CAMERA EQUIPMENT
A plate provides clearance between a camera and a quick-release receiver securing the camera to a support.
2017/0003576 LENS DRIVE ADAPTER, LENS BARREL, LENS APPARATUS AND IMAGE CAPTURING APPARATUS
The lens drive adapter is detachably attachable to a lens barrel on which an operation member and a lens electric contact portion are provided. The adapter...
2017/0003575 CAMERA FEATURES OF AN ELECTRONIC DEVICE
An electronic device having a securing member for a camera module is disclosed. The securing member may include several flexible spring elements extending...
2017/0003574 SYSTEMS AND DEVICES FOR MODULAR PORTABLE LIGHTING
Modular lighting systems having light heads, lighting poles or stands connected to and transferring power to the light head, a power pack connected to and...
2017/0003573 SYSTEMS AND METHODS FOR AUTOFOCUS TRIGGER
Method and systems for autofocus triggering focusing are disclosed herein. In one example, a system may include a lens, a memory component configured to store...
2017/0003572 POWER-SCALABLE NONLINEAR OPTICAL WAVELENGTH CONVERTER
A system includes a nonlinear crystal positioned such that a focus of a laser beam is outside the nonlinear crystal in at least one plane perpendicular to a...
2017/0003571 INTEGRATED OPTICAL MODULATOR OF THE MACH-ZEHNDER TYPE
An integrated modulator of the Mach-Zehnder type includes two optical arms containing waveguides with PN junctions and biasing circuits for reverse biasing the...
2017/0003570 MULTI-LAYERED ELECTROPHORETIC DISPLAYS
Apparatus and methods for forming a composite electrophoretic display comprised of multiple, stacked electrophoretic displays are described. The individual...
2017/0003569 ELECTROPHORETIC DISPERSION LIQUID, METHOD OF MANUFACTURING ELECTROPHORETIC DISPERSION LIQUID, ELECTROPHORETIC...
According to the invention, an electrophoretic dispersion liquid includes at least one type of an electrophoretic particle, and a dispersion medium, in which...
2017/0003568 DISPLAY UNIT AND ELECTRONIC APPARATUS
The invention provides a display unit having a drive substrate (11) having a display region and a circuit forming region; a drive device (15) provided at the...
2017/0003567 DISTRIBUTED DEVICE NETWORK-BASED CONTROL SYSTEM WITH DECOUPLED INTELLIGENCE FOR SMART WINDOWS
A distributed device control system is provided. The system includes a plurality of windows, each window of the plurality of windows having at least one...
2017/0003566 PINHOLE MITIGATION FOR OPTICAL DEVICES
Methods, apparatus, and systems for mitigating pinhole defects in optical devices such as electrochromic windows. One method mitigates a pinhole defect in an...
2017/0003565 ELECTROCHROMIC DEVICE HAVING THREE-DIMENSIONAL ELECTRODE
An electrochromic device comprises (i) a conductive layer, (ii) an electrochromic material, on the conductive layer, (iii) an electrolyte, on the...
2017/0003564 COUNTER ELECTRODE FOR ELECTROCHROMIC DEVICES
The embodiments herein relate to electrochromic stacks, electrochromic devices, and methods and apparatus for making such stacks and devices. In various...
2017/0003563 ELECTROCHROMIC ELEMENT, OPTICAL FILTER, LENS UNIT, IMAGE PICKUP APPARATUS, AND WINDOW MEMBER
Provided is an electrochromic element, which is capable of correcting possible charge imbalance, and is suppressed in color remaining, the electrochromic...
2017/0003562 ELECTROCHROMIC ELEMENT, OPTICAL FILTER, LENS UNIT, IMAGE PICKUP APPARATUS, AND WINDOW MEMBER
Provided is an electrochromic element, including a first electrode, a second electrode, a carrier, and an electrolyte, and an anodic organic electrochromic...
2017/0003561 LIQUID CRYSTAL DISPLAY
According to one embodiment, a liquid crystal display includes an array substrate provided with pixel electrodes including a first pixel electrode and a second...
2017/0003560 LIQUID CRYSTAL DISPLAY
A liquid crystal display includes a display panel including first and second subpixels, where the first subpixel includes a first switching device including a...
2017/0003559 ARRAY SUBSTRATE AND LIQUID CRYSTAL DISPLAY PANEL
An array substrate, including: data lines, scan lines intersecting the data lines; and a plurality of pixel regions; where each of the plurality of pixel...
2017/0003558 LIQUID CRYSTAL DISPLAY PANEL AND LIQUID CRYSTAL DISPLAY DEVICE
A liquid crystal display panel includes switching elements, transparent pixel electrodes, and a transparent common electrode having a predetermined area...
2017/0003557 THIN FILM TRANSISTOR SUBSTRATE AND LIQUID CRYSTAL DISPLAY INCLUDING THE SAME
A thin film transistor array panel includes a first subpixel electrode and a second subpixel electrode electrically connected with a drain electrode through a...
2017/0003556 LIQUID CRYSTAL DISPLAY DEVICE AND METHOD OF MANUFACTURING THE SAME
A liquid crystal display device is provided. A liquid crystal display device, comprising: a first substrate and a second substrate facing each other; a liquid...
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