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Patent # Description
2017/0011917 ATOMIC LAYER EPITAXY FOR SEMICONDUCTOR GATE STACK LAYER FOR ADVANCED CHANNEL DEVICES
Embodiments of the present disclosure provide methods and apparatus for forming an epitaxial layer on a substrate. The substrate is exposed to pulsed laser...
2017/0011916 METHOD OF FABRICATING TRANSITION METAL CHALCOGENIDE IN LARGE SCALE AND APPARATUS FOR THE METHOD
Provided is a method of forming a transition metal chalcogenide thin-film and the method includes preparing a first substrate having formed thereon a...
2017/0011915 METHOD FOR SYNTHESIS OF TWO-DIMENSIONAL DICHALCOGENIDE SEMICONDUCTORS
The present disclosure relates to methods of making a transition metal dichalcogenide. The methods can include a step of depositing a transition metal onto a...
2017/0011914 TRANSPARENT NANOCRYSTALLINE DIAMOND COATINGS AND DEVICES
A method for coating a substrate comprises producing a plasma ball using a microwave plasma source in the presence of a mixture of gases. The plasma ball has a...
2017/0011913 METHOD FOR FABRICATING A SEMICONDUCTOR STRUCTURE
Method for fabricating a semiconductor structure. The semiconductor structure includes: a crystalline silicon substrate; a dielectric layer on the crystalline...
2017/0011912 SEMICONDUCTOR ASSEMBLIES WITH FLEXIBLE SUBSTRATES
Embodiments of semiconductor assemblies, and related integrated circuit devices and techniques, are disclosed herein. In some embodiments, a semiconductor...
2017/0011911 NITRIDE SEMICONDUCTOR ELEMENT AND NITRIDE SEMICONDUCTOR PACKAGE
A nitride semiconductor element capable of accommodating GaN electron transfer layers of a wide range of thickness, so as to allow greater freedom of device...
2017/0011910 REACTIVE CURING PROCESS FOR SEMICONDUCTOR SUBSTRATES
In some embodiments, a reactive curing process may be performed by exposing a semiconductor substrate in a process chamber to an ambient containing hydrogen...
2017/0011909 EMISSIVITY, SURFACE FINISH AND POROSITY CONTROL OF SEMICONDUCTOR REACTOR COMPONENTS
An apparatus and methods are provided related to a surface of a reaction chamber assembly component. The surface may be roughened and/or anodized to provide...
2017/0011908 METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM
A method of manufacturing a semiconductor device includes forming a film on a substrate by performing a cycle a predetermined number of times. The cycle...
2017/0011907 SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS, AND STORAGE MEDIUM
Disclosed is a substrate processing method including: supplying a first solvent including a fluorine-free organic solvent, to a workpiece; supplying a second...
2017/0011906 PRETREATMENT METHOD FOR PHOTORESIST WAFER PROCESSING
Certain embodiments herein relate to methods and apparatus for processing a partially fabricated semiconductor substrate in a remote plasma environment. The...
2017/0011905 METHOD OF MAKING A PACKAGED SEMICONDUCTOR DEVICE
A method of removing metal oxide from electrically conductive contacts of a packaged semiconductor device includes mixing a solution including vinegar and...
2017/0011904 FILM FORMING APPARATUS HAVING AN INJECTOR
A thin film forming apparatus includes: an injector, the injector including: a distributor including a first distribution portion connected to a first gas...
2017/0011903 METHOD FOR MANUFACTURING SEMICONDUCTOR WAFER
A mirror-finishing chamfer polishing is applied using an abrasive-grain-free polishing solution to a chamfered portion of a semiconductor wafer having an oxide...
2017/0011902 DETERMINING DEVICE FOR HYDROCARBON EMISSIONS OF MOTORS
A determination device for hydrocarbon emissions of a thermal engine including an inspection probe for removing a sample volume from a liquid, a measurement...
2017/0011901 Methods of Optimizing Ion Transmission Between Differentially Pumped Vacuum Chambers
Apparatus and methods for optimizing the transmission of ions between two differentially pumped vacuum chambers. Ion transmission from the higher pressure...
2017/0011900 DOUBLE BEND ION GUIDES AND DEVICES USING THEM
Certain configurations of devices are described herein that include a DC multipole that is effective to doubly bend the ions in an entering particle beam. In...
2017/0011899 Method of Optimising Spectral Data
A method of mass spectrometry or ion mobility spectrometry is disclosed. The method comprises: providing a plurality of species of ions; analysing the ions...
2017/0011898 BEAM TRANSMISSION SYSTEM AND METHOD THEREOF
A beam current transmission system and method are disclosed. The beam current transmission system comprises an extraction device, a mass analyzer, a divergent...
2017/0011897 MASS SPECTROMETER
The mass spectrometer (1) provides an ionization chamber (11) therein with: a probe (15) having a sample to be measured flow path (155) for spraying a sample...
2017/0011896 DETECTOR PLATE FOR RADIATION ANALYSIS AND METHOD FOR PRODUCING SAME
A detector plate includes a carrier plate, especially an injection-molded carrier plate, having a plurality of detector elements for detecting ionizing...
2017/0011895 Cu-Ga ALLOY SPUTTERING TARGET AND METHOD FOR PRODUCING SAME
According to the present invention, a Cu--Ga alloy sputtering target which is a sintered body has a composition with 29.5 atom % to 43.0 atom % of Ga and a...
2017/0011894 MAGNETRON AND MAGNETRON SPUTTERING DEVICE
Embodiments of the invention provide a magnetron and a magnetron sputtering device, including an inner magnetic pole and an outer magnetic pole with opposite...
2017/0011893 SYSTEMS AND METHODS FOR REMOVING PARTICLES FROM A SUBSTRATE PROCESSING CHAMBER USING RF PLASMA CYCLING AND PURGING
Systems and methods for operating a substrate processing system include processing a substrate arranged on a substrate support in a processing chamber. At...
2017/0011892 BEARING DEVICE AND PLASMA PROCESSING APPARATUS
Embodiments of the invention provide a bearing device and a plasma processing apparatus. According to at least one embodiment, the bearing device includes a...
2017/0011891 ETCH RATE AND CRITICAL DIMENSION UNIFORMITY BY SELECTION OF FOCUS RING MATERIAL
A method and apparatus are provided for plasma etching a substrate in a processing chamber. A focus ring assembly circumscribes a substrate support, providing...
2017/0011890 PLASMA PROCESSING DEVICE
A plasma processing device that includes a processing chamber which is disposed in a vacuum vessel and is decompressed internally, a sample stage which is...
2017/0011889 PULSED REMOTE PLASMA METHOD AND SYSTEM
A system and method for providing pulsed excited species from a remote plasma unit to a reaction chamber are disclosed. The system includes a pressure control...
2017/0011888 LOW-PRESSURE PLASMA SYSTEM WITH SEQUENTIAL CONTROL PROCESS
The low pressure plasma system includes a treatment chamber which is pumped out in a first process step by means of a pump. In a second process step a gas...
2017/0011887 UV-ASSISTED REACTIVE ION ETCH FOR COPPER
The invention includes generating a plasma from a process gas for etching copper on a substrate; providing DC bias pulses to the substrate; exposing at least...
2017/0011886 PLASMA PROCESSING APPARATUS
Disclosed is a plasma processing apparatus including: a processing container; and a partition plate made of an insulating material, having a plurality of...
2017/0011885 METHOD FOR PREPARING CROSS-SECTIONS BY ION BEAM MILLING
The disclosure provides a method for preparing a cross-section of a sample by milling with a focused ion beam. The cross-section is to be prepared at a...
2017/0011884 ADJUSTMENT METHOD FOR CHARGED PARTICLE BEAM DRAWING APPARATUS AND CHARGED PARTICLE BEAM DRAWING METHOD
According to one embodiment, a method of adjusting a charged particle beam drawing apparatus includes obtaining an offset amount in beam size to be set in the...
2017/0011883 SYSTEM AND METHOD FOR SCANNING AN OBJECT WITH AN ELECTRON BEAM
A method and a charged particle beam system that includes charged particle beam optics and a movable stage; wherein the movable stage is configured to...
2017/0011882 SYSTEM AND METHOD FOR SETTING A TEMPERATURE OF AN OBJECT WITHIN A CHAMBER
A system that may include a chamber, a motorized system, a chuck, a controller, multiple temperature sensors and a cooling module; wherein the chuck is...
2017/0011881 IMAGING LOW ELECTRON YIELD REGIONS WITH A CHARGED BEAM IMAGER
A system that may include a processor, wherein the processor comprise an image waveform finder, a synthetic image generator and an output image generator;...
2017/0011880 X-RAY DEVICE
Example embodiments presented herein are directed towards an x-ray generating device. The device comprises at least one electron emitter(s) (22, 22_1, 22_2,...
2017/0011879 IMPULSE VOLTAGE GENERATING DEVICE
An impulse voltage generating device includes: an insulation cylinder; a DC power source positioned outside the insulation cylinder; capacitors arranged...
2017/0011878 Electrical Switching Arrangement With Improved Linear Bearing
An electrical switch comprising a solenoid assembly including a core casing having a first bearing site and a bearing bush having a second bearing site, an...
2017/0011877 THERMAL CIRCUIT BREAKER
A thermally activated safety switch for safeguarding a consumer of a power supply network of a vehicle, having a switch housing in a temperature-independent...
2017/0011876 Magnet and actuator
The present invention provides a magnet, which comprises a body having a first and a second section, and a slide arranged to be movable relative to the body...
2017/0011875 Device For Switching A Direct Current
A device for switching a direct current includes an operating current path which has a mechanical switch, a switch-off current path which is connected in...
2017/0011874 PARTICLE RESISTANT ENCLOSURE FOR DEAD TANK CIRCUIT BREAKER
A tank for a circuit breaker has a body defining an interior volume and having opposing ends. An flange is at each end of the body with the flanges defining a...
2017/0011873 TACTILE SWITCH FOR AN ELECTRONIC DEVICE
One embodiment of the disclosure includes an input module. The input module includes a switch, a rotatable and translatable input member operably connected to...
2017/0011872 SWITCH
The switch includes the base, a plurality of the fixed contact terminals, the sliding body, the operation lever, the coil spring, and the cover. From above the...
2017/0011871 ILLUMINATED PUSH-BUTTON SWITCH AND KEYBOARD
An illuminated push-button switch according to the present invention includes a key top, a plunger, and a supporting fix member that forms a space between the...
2017/0011870 LOW PROFILE KEYBOARD BACKLIGHT MODULE
A low profile keyboard backlight module includes an electrically insulative bottom membrane layer, an intermediate membrane layer including a conducting layer,...
2017/0011869 KEYBOARD FOR ELECTRONIC DEVICE
An input mechanism is disclosed. The input mechanism includes a dome support structure defining an opening that extends through the dome support structure, a...
2017/0011868 MULTIPLE STATE SWITCH ASSEMBLY
An electrical multiple stage switch assembly includes an assembly casing, a first component carrier, and at least one multiple stage switch including a first...
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