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Patent # Description
2017/0221709 EPITAXIAL GROWTH METHODS AND STRUCTURES THEREOF
A method and structure for providing a two-step defect reduction bake, followed by a high-temperature epitaxial layer growth. In various embodiments, a...
2017/0221708 FORMING STACKED NANOWIRE SEMICONDUCTOR DEVICE
A semiconductor device comprises a nanowire arranged over a substrate, a gate stack arranged around the nanowire, a spacer arranged along a sidewall of the...
2017/0221707 Semiconductor Device and Method for Manufacturing Thereof
A transistor that is formed using an oxide semiconductor film is provided. A transistor that is formed using an oxide semiconductor film with reduced oxygen...
2017/0221706 SYSTEM AND METHOD IN INDIUM-GALLIUM-ARSENIDE CHANNEL HEIGHT CONTROL FOR SUB 7NM FINFET
A method for forming a group III-V semiconductor channel region in a transistor is provided herein. The method includes exposing a substrate including an oxide...
2017/0221705 COMPOSITE SUBSTRATE, SEMICONDUCTOR DEVICE, AND METHOD FOR MANUFACTURING THEREOF
According to one embodiment, a semiconductor device is provided with a first single crystal layer, a polycrystalline layer provided on an entire surface of the...
2017/0221704 Methods of Spin-on Deposition of Metal Oxides
Techniques herein provide methods for depositing spin-on metal materials for creating metal hard mask (MHM) structures without voids in the deposition. This...
2017/0221703 Film Forming Methd and Film Forming Apparatus
A method of forming a silicon nitride film on a substrate in a vacuum vessel, includes forming the silicon nitride film by depositing a layer of reaction...
2017/0221702 Method of Double Patterning Lithography Process Using Plurality of Mandrels for Integrated Circuit Applications
A method includes performing a double patterning process to form a first mandrel, a second mandrel, and a third mandrel, with the third mandrel being between...
2017/0221701 RTP PROCESS FOR DIRECTED SELF-ALIGNED PATTERNS
A semiconductor processing method and semiconductor device are described. A substrate having a directed self-assembling material disposed thereon is heated to...
2017/0221700 Method For Metal Gate Surface Clean
The present disclosure provides a method for forming an integrated circuit (IC) structure. The method includes providing a metal gate (MG), an etch stop layer...
2017/0221699 METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM
There is provided a method of manufacturing a semiconductor device, which includes: forming a seed layer doped with a dopant on a substrate by performing a...
2017/0221698 METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM
A semiconductor device manufacturing method includes forming a film having a desired composition on a substrate by selectively performing at least one of:...
2017/0221697 METHOD FOR MANUFACTURING SIC EPITAXIAL WAFER AND SIC EPITAXIAL WAFER
In order to reduce edge defects efficiently and sufficiently, a method for manufacturing a SiC epitaxial wafer according to the present invention is a method...
2017/0221696 SUBSTRATE CLEANING DEVICE, SUBSTRATE PROCESSING APPARATUS, SUBSTRATE CLEANING METHOD AND SUBSTRATE PROCESSING...
An outer peripheral end of the substrate is held with a plurality of chuck pins provided at a spin plate abutting against a plurality of portions of the outer...
2017/0221695 SYSTEMS AND METHODS FOR EJECTION OF IONS FROM AN ION TRAP
The invention generally relates to systems and methods for ejection of ions from an ion trap. In certain embodiments, systems and methods of the invention sum...
2017/0221694 SEGMENTED LINEAR ION TRAP FOR ENHANCED ION ACTIVATION AND STORAGE
A linear ion trap includes at least two discrete trapping regions for processing ions, a RF electrical potential generator, a multi-output DC electrical...
2017/0221693 MEMS-BASED 3D ION TRAPPING DEVICE FOR USING LASER PENETRATING ION TRAPPING STRUCTURE, AND METHOD FOR...
An ion trap device is disclosed with a method of manufacturing thereof including a substrate, first and second RF electrode rails, first and second DC...
2017/0221692 BAND PASS EXTRACTION FROM AN ION TRAPPING DEVICE AND TOF MASS SPECTROMETER SENSITIVITY ENHANCEMENT
A multipole rod set of an ion guide is adapted to receive a radial RF trapping voltage and a radial dipole direct current DC voltage. A lens electrode of the...
2017/0221691 NANOPARTICULATE ASSISTED NANOSCALE MOLECULAR IMAGING BY MASS SPECTROMETRY
Methods and devices for mass spectrometry are described, specifically the use of nanoparticulate implantation as a matrix for secondary ion and more generally...
2017/0221690 Method of Introducing Ions into a Vacuum Region of a Mass Spectrometer
A method of mass spectrometry or ion mobility spectrometry is disclosed. The method comprises providing a spectrometer comprising an orifice between an...
2017/0221689 Ion Separation and Storage System
Ions provided from an ion source are separated ions into a plurality of different ion groups according to at least one ion property. At least some of the...
2017/0221688 METHOD FOR SUPPLYING GAS FOR PLASMA BASED ANALYTICAL INSTRUMENT
To achieve an effective gas filtering in a plasma spectrometric apparatus using a gas of a comparatively high consumption flow rate, and to improve the...
2017/0221687 METHOD FOR CHARACTERISING A SAMPLE BY MASS SPECTROMETRY IMAGING
Disclosed is a method for characterizing a sample by mass spectrometry imaging (MSI) according to which a spatial arrangement of at least one ion in the sample...
2017/0221686 NORMALIZATION OF MASS SPECTRA ACQUIRED BY MASS SPECTROMETRIC IMAGING
Mass spectra acquired by imaging mass spectrometry (IMS), in particular MALDI imaging of tissue sections, are each normalized by one of: the p-norm of the mass...
2017/0221685 METHODS FOR IGNITING A PLASMA IN A SUBSTRATE PROCESSING CHAMBER
Embodiments of method for igniting a plasma are provided herein. In some embodiments, a method for igniting a plasma includes: flowing a process gas into a...
2017/0221683 CLEANING APPARATUS FOR AN EXHAUST PATH OF A PROCESS REACTION CHAMBER
A cleaning apparatus of an exhaust path of a process reaction chamber used in a manufacturing of articles including a semiconductor or an LCD. The cleaning...
2017/0221682 PLASMA PROCESSING APPARATUS
In a plasma processing apparatus according to an exemplary embodiment, a gas supply system supplies a gas into a processing container. A plasma source excites...
2017/0221681 SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING APPARATUS
A substrate processing system is provided with a transfer module that transports a substrate to be processed, and a plurality of processing units which are...
2017/0221680 NANOSTRUCTURED MATERIAL AND METHOD OF MAKING THE SAME
Nanostructured material exhibiting a random anisotropic nanostructured surface, and exhibiting an average reflection at 60 degrees off angle less than 1...
2017/0221679 TREATING BIOMASS
Methods and systems are described for processing cellulosic and lignocellulosic materials and useful intermediates and products, such as energy and fuels. For...
2017/0221678 APPARATUS AND METHOD FOR IN-SITU CLEANING IN ION BEAM APPARATUS
An apparatus may include an electrostatic filter having a plurality of electrodes; a voltage supply assembly coupled to the plurality of electrodes; a cleaning...
2017/0221677 ION MILLING DEVICE AND ION MILLING METHOD
To provide an ion gun of a penning discharge type capable of narrowing a beam with a low ion beam current at a low acceleration voltage, an ion milling device...
2017/0221676 Charged Particle Beam Device, Electron Microscope and Sample Observation Method
Provided is an electron microscope with which a sample can be observed stably and with high accuracy. The electron microscope comprises: a sample stage; an...
2017/0221675 Method for inspecting a sample using an assembly comprising a scanning electron microscope and a light microscope
The invention relates to a method for inspecting a sample with an assembly comprising a scanning electron microscope (SEM) and a light microscope (LM). The...
2017/0221674 VACUUM CHAMBER ARRANGEMENT FOR CHARGED PARTICLE BEAM GENERATOR
The invention relates to charged particle beam generator comprising a charged particle source for generating a charged particle beam, a collimator system...
2017/0221673 CHARGED-PARTICLE MICROSCOPE WITH ASTIGMATISM COMPENSATION AND ENERGY-SELECTION
A method of producing a corrected beam of charged particles for use in a charged-particle microscope, comprising the following steps: Providing a...
2017/0221672 Charged Particle Beam Device
An object of the present invention is to provide a charged particle beam device which can realize improved contrast of an elongated pattern in a specific...
2017/0221671 ION MILLING DEVICE, ION SOURCE AND ION MILLING METHOD
To provide an ion gun of a penning discharge type capable of achieving a milling rate which is remarkably higher than that in the related art, an ion milling...
2017/0221670 Fluid Injector for X-Ray Tubes and Method to Provide a Liquid Anode by Liquid Metal Indjection
A fluid injector for x-ray tubes and a method to provide a liquid anode by liquid metal injection, wherein the fluid injector includes a device to inject fluid...
2017/0221669 Ceramic Ion Source Chamber
The IHC ion source comprises an ion source chamber having a cathode and a repeller on opposite ends. The ion source chamber is constructed of a ceramic...
2017/0221668 ION GENERATION APPARATUS AND ELECTRIC EQUIPMENT
Each of first to fourth needle-like electrodes is arranged such that a direction of extension thereof is parallel, and generates ions by discharge. Through a...
2017/0221667 MICROSTRUCTURED SURFACE WITH LOW WORK FUNCTION
A horizontal multilayer junction-edge field emitter includes a plurality of vertically-stacked multilayer structures separated by isolation layers. Each...
2017/0221666 INTERRUPTION APPARATUS EMPLOYING ACTUATOR HAVING MOVABLE ENGAGEMENT ELEMENT
An improved interruption apparatus includes a plurality of poles, with each of the poles including an actuator. In one embodiment, the actuator can be a fuse...
2017/0221665 ELECTROMAGNETIC POWER CONTACTOR PROVIDED WITH A CONTROL ROD WITH A STOP
The invention relates to an electromagnetic contactor including: --first and second magnetic cores, the second core being mobile relative to the first core;...
2017/0221664 RELAY
Some embodiments of the present disclosure relate to a relay capable of preventing a chattering phenomenon, and capable of solving an unbalanced contact state...
2017/0221663 ELECTROMAGNETIC RELAY
An electromagnetic relay includes an electromagnet unit, a contact unit including a movable contact spring with a movable contact provided thereon and a fixed...
2017/0221662 ELECTRIC CIRCUIT BREAKER DEVICE
The present invention provides an electric circuit breaker device, wherein, in a cylindrical space penetrating from a first end to a second end of a housing...
2017/0221661 SWITCHING DEVICE AND METHOD FOR DETECTING WHETHER SAID SWITCHING DEVICE IS BEING ACTUATED
A switch device is presented. The switch device comprises a magnet supported such that it can be tilted, a transmitter device coupled to the magnet, designed...
2017/0221660 MAGNETICALLY ALIGNED CIRCUIT
Examples are disclosed that relate to magnetically aligned switching circuits. One disclosed example provides an electronic component comprising a first...
2017/0221659 DEVICE FOR MONITORING THE VACUUM QUALITY OF A VACUUM CIRCUIT BREAKER
A device for monitoring vacuum quality of a vacuum circuit breaker, the device including at least one rigid assembly including a first stationary conductive...
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