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Patent # Description
2017/0287715 ALUMINUM OXIDE PASSIVATION FOR SOLAR CELLS
The present application provides effective and efficient structures and methods for the formation of solar cell base and emitter regions and passivation layers...
2017/0287714 METHOD FOR MANUFACTURING SEMICONDUCTOR SUBSTRATE
A method for manufacturing a semiconductor substrate that, even when a substrate which has, on a surface thereof, a three-dimensional structure having...
2017/0287713 FORMING METHOD OF HARD MASK, FORMING APPARATUS OF HARD MASK AND RECORDING MEDIUM
A catalyst is imparted selectively to a plateable material portion 32 by performing a catalyst imparting processing on a substrate W having a non-plateable...
2017/0287712 PLASMA PROCESSING DEVICE, PLASMA PROCESSING METHOD AND MANUFACTURING METHOD OF ELECTRONIC DEVICE
A plasma processing device, a plasma processing method and a manufacturing method of an electronic device with excellent uniformity, are capable of performing...
2017/0287711 METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
In accordance with an embodiment of the present disclosure, a method of manufacturing a semiconductor device may include forming an opening passing-through a...
2017/0287710 THERMAL ABSORPTION COATING ON SAPPHIRE FOR EPITAXIAL PROCESS
A method of forming an epitaxial layer on a substrate such as a sapphire wafer that does not readily absorb thermal radiation. The method includes coating a...
2017/0287709 Semiconductor Substrate with Stress Relief Regions
A crystalline base substrate including a first semiconductor material and having a main surface is provided. The base substrate is processed so as to damage a...
2017/0287708 IMPRINT RESIST AND SUBSTRATE PRETREATMENT FOR REDUCING FILL TIME IN NANOIMPRINT LITHOGRAPHY
Facilitating throughput in nanoimprint lithography processes by using an imprint resist including fluorinated components and a substrate treated with a...
2017/0287707 SEMICONDUCTOR DEVICE MANUFACTURING METHOD AND RECORDING MEDIUM
A method of manufacturing a semiconductor device includes: preparing a substrate processing apparatus including a substrate process chamber having a...
2017/0287706 Reduction of Surface Roughness in Epitaxially Grown Germanium by Controlled Thermal Oxidation
Methods for reducing surface roughness of germanium are described herein. In some embodiments, the surface roughness is reduced by thermal oxidation of...
2017/0287705 Method for Cleaning Wafer, and Chemical Used in Such Cleaning Method
Provided herein is a method for cleaning a wafer having a fine uneven surface pattern that at least partially contains a silicon element using a wafer cleaning...
2017/0287704 SUBSTRATE PROCESSING APPARATUS, CONTROL METHOD OF SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING SYSTEM
Whether a film on a peripheral portion of a substrate is appropriately removed is rapidly determined without depending on a kind of the film on the peripheral...
2017/0287703 SUBSTRATE PROCESSING APPARATUS AND PROCESSING METHOD OF SUBSTRATE PROCESSING APPARATUS
Imaging can be performed well even when an imaging device is disposed at a position facing a peripheral portion of a substrate. A substrate processing...
2017/0287702 NANO-SCALE STRUCTURES
A nanoscale structure includes an array of pillars over an underlying layer, a separation wall layer including first separation walls formed over sidewalls of...
2017/0287700 SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
A substrate processing apparatus comprises: a liquid film former which forms a liquid film by supplying a liquid on an upper surface of the substrate W held...
2017/0287699 SUBSTRATE PROCESSING APPARATUS, LIQUID PROCESSING METHOD, AND STORAGE MEDIUM
Provided is a substrate processing apparatus that removes a film by supplying a processing liquid to the peripheral edge of a substrate. An ejection unit...
2017/0287698 Patterned Layer Design for Group III Nitride Layer Growth
A method of fabricating a device using a layer with a patterned surface for improving the growth of semiconductor layers, such as group III nitride-based...
2017/0287697 METHOD FOR MANUFACTURING AN SOI WAFER
A method for manufacturing an SOI wafer having SOI layer includes a thinning step to adjust SOI film thickness of the SOI wafer, including the steps of: (A1)...
2017/0287696 METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM
A semiconductor device manufacturing method includes: vertically arranging and storing a plurality of substrates in a processing container and forming a...
2017/0287695 PHOTOCURABLE COMPOSITION, AND METHODS USING THE SAME FOR FORMING CURED PRODUCT PATTERN AND FOR MANUFACTURING...
A photocurable composition contains a polymerizable compound (A) satisfying O.sub.A=N.sub.A/(N.sub.C,A-N.sub.O,A), wherein N.sub.A, N.sub.C,A and N.sub.O,A...
2017/0287694 PHOTOLITHOGRAPHIC PATTERNING OF ELECTRONIC DEVICES
A method of patterning a device includes forming a fluorinated photopolymer layer over a device substrate. The photopolymer layer has a lower portion proximate...
2017/0287693 MONOLITHIC COLLIMATOR AND ENERGY ANALYZER FOR ION SPECTROMETRY
Disclosed are various examples related to ion or particle spectrometry utilizing a monolithic collimator and energy analyzer. In one example, a particle...
2017/0287692 Combined Mass-to-Charge Ratio and Charge State Selection in Tandem Mass Spectrometry
A mass spectrometer is disclosed comprising an ion mobility spectrometer and an ion gate. A collision cell is arranged downstream of the ion gate. The...
2017/0287691 MASS SPECTROMETER
In a mass spectrometer according to the present invention, when MRM measurements for a plurality of MRM transitions need to be performed within one cycle, a...
2017/0287690 ION FOCUSING
The invention generally relates to apparatuses for focusing ions at or above ambient pressure and methods of use thereof. In certain embodiments, the invention...
2017/0287689 ION MANIPULATION DEVICE FOR GUIDING OR CONFINING IONS IN AN ION PROCESSING APPARATUS
An ion manipulation device for guiding or confining ions in an ion processing apparatus. The device has a first circuit board, wherein at least one first...
2017/0287688 METHODS OF DETECTING REVERSE TRIIODOTHYRONINE BY MASS SPECTROMETRY
Provided are methods for determining the amount of reverse T3 in a sample using mass spectrometry. The methods generally involve ionizing reverse T3 in a...
2017/0287687 DATA INDEPENDENT ACQUISITION WITH VARIABLE MULTIPLEXING DEGREE
A method is disclosed for analyzing ions by mass spectrometry by repeatedly executing a data acquisition cycle to acquire product ion data across a precursor...
2017/0287686 Multi-Channel Photomultiplier Tube Assembly
A multi-channel photomultiplier tube (PMT) detector assembly includes a photocathode. The detector assembly includes a first dynode channel including a first...
2017/0287685 SPUTTERING TARGET ASSEMBLY HAVING A GRADED INTERLAYER AND METHODS OF MAKING
A sputtering target assembly includes a sputtering target having a rear surface, a backing plate having a front surface, and an interlayer disposed between the...
2017/0287684 DETECTING AN ARC OCCURING DURING SUPPLYING POWER TO A PLASMA PROCESS
Methods, apparatus and systems for detecting an arc during supplying a plasma process in a plasma chamber with a power are provided. An example plasma power...
2017/0287683 AEROSOL DEPOSITION COATING FOR SEMICONDUCTOR CHAMBER COMPONENTS
An component of a processing chamber comprises an aerosol deposited coating on the component, the aerosol deposited coating comprising a first type of metal...
2017/0287682 SYSTEMS AND METHODS FOR PERFORMING EDGE RING CHARACTERIZATION
A substrate support in a substrate processing system includes an inner portion arranged to support a substrate, an edge ring surrounding the inner portion, and...
2017/0287681 SUBSTRATE PROCESSING APPARATUS
A substrate processing apparatus includes: a substrate holder to vertically load a plurality of substrates in multiple stages with an interval therebetween and...
2017/0287680 Ceramic Layer for Electrostatic Chuck Including Embedded Faraday Cage for RF Delivery and Associated Methods
A ceramic layer is attached to a top surface of a base plate using a bond layer. The ceramic layer has a top surface configured to support a substrate. At...
2017/0287679 PLASMA GAS JETTING DEVICE
Plasma gas is ejected from inner gas ejection ports that are formed in a downstream side housing, and nitrogen gas is supplied as protective gas to a...
2017/0287678 HIGH TEMPERATURE ELECTROLYSIS GLOW DISCHARGE DEVICE
The present invention provides a glow discharge assembly that includes an electrically conductive cylindrical screen, a flange assembly, an electrode, an...
2017/0287677 PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
A plasma processing apparatus includes a processing chamber, a rotation table installed in the processing chamber and configured to load a substrate on an...
2017/0287676 METHOD FOR AUTOMATIC CORRECTION OF ASTIGMATISM
The method is for automatic astigmatism correction of a lens system. A first image of a first frequency spectrum in a microscope is provided. The first image...
2017/0287675 Method and System for Charge Control for Imaging Floating Metal Structures on Non-Conducting Substrates
A scanning electron microscopy system is disclosed. The system includes a sample stage configured to secure a sample having conducting structures disposed on...
2017/0287674 PARTICLE-OPTICAL SYSTEMS AND ARRANGEMENTS AND PARTICLE-OPTICAL COMPONENTS FOR SUCH SYSTEMS AND ARRANGEMENTS
A particle-optical arrangement comprises a charged-particle source for generating a beam of charged particles; a multi-aperture plate arranged in a beam path...
2017/0287673 Shielded, Transmission-Target, X-Ray Tube
A transmission-target x-ray tube can include an x-ray window 12 mounted on a window-housing 13. The window-housing 13 can be made of a high density material...
2017/0287672 Asymmetric Core Quadrupole with Concave Pole Tips
A magnetic assembly for focusing an electron beam includes one or more quadrupole assemblies, each quadrupole assembly having at least a pair of separate...
2017/0287671 Angled Flat Emitter For High Power Cathode With Electrostatic Emission Control
In the present invention, a computed tomography system, an X-ray tube used therein and a cathode assembly disposed in the X-ray tube, as well as an associated...
2017/0287670 EMITTER AND X-RAY TUBE
According to one embodiment, an emitter comprise a base portion including an electron emission surface from which electrons are emitted, a pair of leg portions...
2017/0287669 FABRICATION METHODS AND MODAL STIFFINING FOR NON-FLAT SINGLE/MULTI-PIECE EMITTER
An electron emitter assembly includes a plurality of electron emitters, and a removable structure connected to, and fixing a positional relationship among,...
2017/0287668 X-RAY GENERATING TUBE INCLUDING ELECTRON GUN, X-RAY GENERATING APPARATUS AND RADIOGRAPHY SYSTEM
Provided is an X-ray generating tube including an electron gun, which includes a grid electrode secured to a support member. In the X-ray generating tube,...
2017/0287667 BIMODE IMAGE ACQUISITION DEVICE WITH PHOTOCATHODE
Image acquisition device comprising a photocathode, converting an incident flux of photons into a flux of electrons, a sensor, and a processor. The device...
2017/0287666 CIRCUIT BREAKER CHARACTERISTIC MONITORING DEVICE
A circuit breaker characteristic monitoring device monitors the operation of a circuit breaker to estimate the amount of consumption of a movable contact and...
2017/0287665 BOOM MOUNTABLE BREAKER AND METHODS OF USING SAME
A boom mountable breaker system and a method of using same for interrupting electrical transmission through a portion of an energized conductor downstream of a...
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