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Patent # Description
2018/0076025 Pentachlorodisilane
Disclosed is a Silicon Precursor Compound for deposition, the Silicon Precursor Compound comprising pentachlorodisilane; a composition for film forming, the...
2018/0076024 ALUMINUM COMPOUND, METHOD OF FORMING THIN FILM BY USING THE SAME, AND METHOD OF FABRICATING INTEGRATED CIRCUIT...
An aluminum compound is represented by Chemical Formula (I) and is used as a source material for forming an aluminum-containing thin film.
2018/0076023 High Temperature Silicon Oxide Atomic Layer Deposition Technology
Processes for depositing SiO.sub.2 films on a wafer surface utilizing an aminosilane compound as a silicon precursor are described.
2018/0076022 METHOD OF TREATING SEMICONDUCTOR SUBSTRATE
In a method of treating a semiconductor substrate, a plurality of active regions and a plurality of trench isolation regions are formed by selectively etching...
2018/0076021 SUBSTRATE PROCESSING APPARATUS
A substrate processing apparatus includes an inner tube installed to accommodate a plurality of substrates and having a first opening, an outer tube configured...
2018/0076020 In-Situ Pre-Clean For Selectivity Improvement For Selective Deposition
Methods to selectively deposit a film on a first surface (e.g., a metal surface) relative to a second surface (e.g., a dielectric surface) by exposing the...
2018/0076019 PATTERN FORMING METHOD, SELF-ORGANIZATION MATERIAL, AND METHOD OF MANUFACTURING SEMICONDUCTOR APPARATUS
According to one embodiment, a pattern forming method includes supplying, onto an under layer, a self-organization material including a block copolymer which...
2018/0076018 SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
A substrate processing method includes a substrate holding step of horizontally holding a substrate, a liquid film forming step of supplying a processing...
2018/0076017 METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM
A method of manufacturing a semiconductor device includes: forming a film on a substrate by performing a cycle a predetermined number of times. The cycle...
2018/0076016 WAFER AND METHOD OF PROCESSING WAFER
A method of processing a wafer having on a face side thereof a device area with a plurality of devices formed therein and an outer circumferential excess area...
2018/0076015 APPARATUS AND METHOD FOR RAPID CHEMICAL ANALYSIS USING DIFFERENTIAL DESORPTION
The present invention is directed to a method and device to generate a chemical signature for a mixture of analytes. The present invention involves using a...
2018/0076014 SUB-ATMOSPHERIC PRESSURE LASER IONIZATION SOURCE USING AN ION FUNNEL
A system and method for sample analysis using sub-atmospheric pressure (sub-AP) laser ionization. The sub-AP ion source includes a holder with a sample...
2018/0076013 Sample Preparation Apparatus and Method for Elemental Analysis Spectrometer
A sample preparation apparatus for an elemental analysis system comprising a sample combustion and/or reduction and/or pyrolysis arrangement for receiving a...
2018/0076012 Method for Identification of the Monoisotopic Mass of Species of Molecules
The invention concerns a method for identification of the monoisotopic mass or a parameter correlated the mass of the isotopes of the isotope distribution of...
2018/0076011 MOLYBDENUM CONTAINING TARGETS
The invention is directed at sputter targets including 50 atomic % or more molybdenum, a second metal element of titanium, and a third metal element of...
2018/0076010 TEXTURED SKIN FOR CHAMBER COMPONENTS
A chamber component for a processing chamber is disclosed herein. In one embodiment, a chamber component for a processing chamber has a base component body....
2018/0076009 METHODS AND SYSTEMS FOR PLASMA DEPOSITION AND TREATMENT
This application is directed to an apparatus for creating microwave radiation patterns for an object detection system. The apparatus includes a waveguide...
2018/0076008 DISCHARGE ELECTRODE
Heretofore, silicon nitride film formed by low pressure plasma CVD has been used for an antireflection film of a solar battery. But it is difficult to reduce...
2018/0076007 Angle Control For Radicals And Reactive Neutral Ion Beams
A workpiece processing apparatus allowing independent control of the extraction angles of charged ions and reactive neutrals is disclosed. The apparatus...
2018/0076006 BLANKING APERTURE ARRAY APPARATUS, CHARGED PARTICLE BEAM LITHOGRAPHY APPARATUS, AND ELECTRODE TESTING METHOD
In one embodiment, a BAA apparatus 204 includes apertures 3, each of which being provided to blank charged particle beams 20. The apparatus 204 further...
2018/0076005 METHOD OF DETERMINING THE DEFLECTION OF AN ELECTRON BEAM RESULTING FROM AN ELECTRIC FIELD AND/OR A MAGNETIC FIELD
Method of determining a local electric field and/or a local magnetic field in a sample and/or the dielectric constant of a material and/or the angle between...
2018/0076004 Charged Particle Beam Device and Sample Observation Method
A charged particle beam device wherein a transmission image corresponding to an arbitrary diffraction spot or a diffraction pattern corresponding to a partial...
2018/0076003 METHOD AND APPARATUS FOR A POROUS ELECTROSPRAY EMITTER
An ionic liquid ion source can include a microfabricated body including a base and a tip. The body can be formed of a porous material compatible with at least...
2018/0076002 CHARGED PARTICLE BEAM WRITING APPARATUS, METHOD OF ADJUSTING BEAM INCIDENT ANGLE TO TARGET OBJECT SURFACE, AND...
A charged particle beam writing apparatus according to one aspect of the present invention includes an emission unit to emit a charged particle beam, an...
2018/0076001 COMPOSITE BEAM APPARATUS
Disclosed is a composite beam apparatus capable of suppressing the influence of charge build-up, or electric field or magnetic field leakage from an electron...
2018/0076000 X-RAY BACK SCATTERING FOR INSPECTION OF PART
Described herein is an x-ray backscatter apparatus for non-destructive inspection of a part. The apparatus includes an x-ray emitter and a zone plate. The...
2018/0075999 ANODE
An anode has a base member, on which an X-ray active layer is applied. A first cooling circuit with a first cooling medium extends at least in part in the base...
2018/0075998 MULTI-LAYER X-RAY SOURCE FABRICATION
Fabrication of a multi-layer X-ray source is disclosed using bulk structures to fabricate a multi-layer target structure. In one implementation, layers of...
2018/0075997 X-RAY TUBE AND A CONTROLLER THEREOF
An X-ray tube comprises a vacuum vessel; a cathode and an anode fixedly disposed inside the vacuum vessel; and a rotary mechanism that rotates the vacuum...
2018/0075996 HARNESS HOLDER, POWER EQUIPMENT UNIT, AND VEHICLE
A harness holder for holding a harness therein, includes: a holder main body whose upper portion is open; a holder cover which covers the upper portion of the...
2018/0075995 SAFETY SWITCH AND ASSOCIATED METHODS
A cable pull switch includes a polychotomous sensor configured to provide a reading of at least one of a plurality of values, the reading corresponding to a...
2018/0075994 CONTACT SURFACE FOR MEMS DEVICE
Systems and methods for forming an electrostatic MEMS switch that is used to hot switch a source of current or voltage. At least one surface of the MEMS switch...
2018/0075993 TERMINAL CONNECTION STRUCTURE AND ELECTROMAGNETIC RELAY USING SAME
A terminal connection structure with a good material yield and high productivity, free of mounting failure. The terminal connection structure is provided with:...
2018/0075992 RELAY WITH A CONTROLLER
The disclosure relates to a relay having a controllable relay contact, having an electrical connection terminal where an electrical variable is able to be...
2018/0075991 COMPOSITE ARC SHIELDS FOR VACUUM INTERRUPTERS AND METHODS FOR FORMING SAME
The disclosed concept pertains to vacuum interrupters and arc-resistant shields. The arc-resistant shields are positioned in between a ceramic insulator. Each...
2018/0075990 CIRCUIT BREAKER SYSTEM WITH HEATING RADIATOR AND PARTICLE TRAP
A circuit breaker system has an SF6 tank having a wall, and an SF6 heating system. The SF6 heating system includes a heater disposed externally of the tank,...
2018/0075989 DIRECT-BACKLIT KEYBOARD
A direct-backlit keyboard is disclosed, the direct-backlit keyboard comprising a plurality of keys, a thin film circuit board, a base plate, a copper etched...
2018/0075988 KEY STRUCTURE, MANUFACTURING METHOD THEREOF, AND KEYBOARD DEVICE USING THE SAME
The present invention provides a key structure and a manufacturing method thereof. The key structure includes a keycap made of a first material and a graphics...
2018/0075987 KEY STRUCTURE
A key structure includes a base plate, a keycap and a connecting element. The connecting element includes a first frame and a second frame. The first frame is...
2018/0075986 SWITCH-TYPE KEY STRUCTURE
An improved switch-type key structure includes a support plate, a microswitch, a connection element, and a key cap. The microswitch is fixed onto the support...
2018/0075985 KEY STRUCTURE
A key structure includes a base plate, a position-limiting structure, a stabilizer bar and a keycap. The position-limiting structure is connected with and...
2018/0075984 METHOD FOR CLEANING AN ON-LOAD TOP CHANGER, AND ON-LOAD TAP CHANGER
In a method for cleaning an on-load tap changer (19) in a regulating transformer (20), provision is made for the on-load tap changer (19) to comprise a moving...
2018/0075983 ELECTRICAL CIRCUIT BREAKER WITH SEPARABLE ELECTRICAL CONTACTS
An electrical circuit breaker with separable electrical contacts includes a fixed electrical contact, a mobile electrical contact, that can be displaced...
2018/0075982 ENHANCED STRUCTURAL SUPERCAPACITORS
The present disclosure is directed to structural supercapacitors and electrodes for structural supercapacitors having high energy storage and high mechanical...
2018/0075981 ETHER-BRIDGED DICATION, IONIC LIQUID ELECTROLYTE AND CHARGE STORAGE DEVICE THEREOF
An ether-bridged dication is provided with two monovalent cations bonded via a carbon chain having ether group(s). The ether-bridged dication, monovalent...
2018/0075980 HYBRID CAPACITOR AND SEPARATOR FOR HYBRID CAPACITORS
Provided is a hybrid capacitor with an excellent long-term stability. A hybrid capacitor includes a positive electrode 1 including a positive-electrode active...
2018/0075979 PHOTOELECTRIC CONVERSION DEVICE
A photoelectric conversion device of an embodiment includes, in sequence: a substrate; a first electrode; a photoelectric conversion layer containing a...
2018/0075978 PHOTOELECTRIC CONVERSION DEVICE
Provided is a photoelectric conversion device having high durability against light irradiation including a cathode, an anode, an active layer that is provided...
2018/0075977 SELF-POWERED GHZ SOLUTION-PROCESSED HYBRID PEROVSKITE PHOTODETECTORS
Organic-inorganic hybrid perovskite (OIHP) based photo-responsive devices include an OIHP active layer disposed between a cathode layer and an anode layer, and...
2018/0075976 Solid Electrolytic Capacitor with Improved Leakage Current
A capacitor assembly that is capable of exhibiting good electrical properties even under a variety of conditions is provided. More particularly, the capacitor...
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