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Patent # Description
2018/0151359 Growing III-V Compound Semiconductors from Trenches Filled with Intermediate Layers
A method of forming an integrated circuit structure includes forming an insulation layer over at least a portion of a substrate; forming a plurality of...
2018/0151358 RADIAL AND THICKNESS CONTROL VIA BIASED MULTI-PORT INJECTION SETTINGS
A gas distribution system is disclosed in order to obtain better film uniformity on a substrate in a cross-flow reactor. The better film uniformity may be...
2018/0151357 FORMATION METHOD OF SEMICONDUCTOR DEVICE STRUCTURE WITH SEMICONDUCTOR NANOWIRE
Structures and formation methods of a semiconductor device structure are provided. The semiconductor device structure includes a substrate, a first source...
2018/0151356 SEMICONDUCTOR DEVICE HAVING HIGH-K DIELECTRIC LAYER AND METHOD FOR MANUFACTURING THE SAME
A method for manufacturing a semiconductor device includes forming a semiconductor layer on a substrate, forming a high-.kappa. dielectric layer directly on...
2018/0151355 FORMATION OF SILICON-CONTAINING THIN FILMS
Methods for depositing silicon-containing thin films on a substrate in a reaction space are provided. The methods can include at least one plasma enhanced...
2018/0151354 METHOD OF FORMING DIELECTRIC FILMS, NEW PRECURSORS AND THEIR USE IN SEMICONDUCTOR MANUFACTURING
Method of deposition on a substrate of a dielectric film by introducing into a reaction chamber a vapor of a precursor selected from the group consisting of...
2018/0151353 Etching Using Chamber with Top Plate Formed of Non-Oxygen Containing Material
A method includes etching a first oxide layer in a wafer. The etching is performed in an etcher having a top plate overlapping the wafer, and the top plate is...
2018/0151352 METHOD OF MAKING GRAPHENE AND GRAPHENE DEVICES
The present invention generally relates to a method of making graphene and graphene devices.
2018/0151351 Photoresist with Gradient Composition for Improved Uniformity
The present disclosure provides an embodiment of a method for lithography patterning. The method includes coating a photoresist layer over a substrate, wherein...
2018/0151350 Reducing EUV-Induced Material Property Changes
Representative systems and methods for preventing or otherwise reducing extreme-ultraviolet-induced material property changes (e.g., layer thickness shrinkage)...
2018/0151349 PROCESS OF PRODUCING EPITAXIAL SUBSTRATE
A process of forming an epitaxial substrate that includes nitride semiconductor layers is disclosed. The process includes steps of, (a) growing a nucleus...
2018/0151348 METHOD FOR DRYING WAFER WITH GASEOUS FLUID
A method for drying a wafer is provided. The method includes providing or receiving the wafer and applying a rinsing liquid in a liquid state to the wafer. The...
2018/0151347 METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM
A method of manufacturing a semiconductor device includes forming a film on a substrate by performing a cycle a predetermined number of times. The cycle...
2018/0151346 METHOD OF TOPOLOGICALLY RESTRICTED PLASMA-ENHANCED CYCLIC DEPOSITION
In an embodiment, a method for transferring a pattern constituted by vertical spacers arranged on a template with intervals to the template, includes...
2018/0151345 DEPOSITION OF OXIDE THIN FILMS
Methods are provided herein for deposition of oxide films. Oxide films may be deposited, including selective deposition of oxide thin films on a first surface...
2018/0151344 Si PRECURSORS FOR DEPOSITION OF SiN AT LOW TEMPERATURES
Methods and precursors for depositing silicon nitride films by atomic layer deposition (ALD) are provided. In some embodiments the silicon precursors comprise...
2018/0151343 Substrate Processing Apparatus, Substrate Processing Method and Storage Medium
A substrate processing apparatus includes: a first holding part configured to hold a substrate; a second holding part configured to hold the substrate; a...
2018/0151342 METHOD FOR MANUFACTURING WAFER-LEVEL SEMICONDUCTOR PACKAGES
During the manufacture of a semiconductor package, a semiconductor wafer including a plurality of bond pads on a surface of the wafer is provided and the...
2018/0151341 ONLINE MASS SPECTROMETER FOR REAL-TIME DETECTION OF VOLATILE COMPONENTS FROM THE GAS AND LIQUID PHASE FOR...
The present disclosure relates to a method for analysis by mass spectrometer of liquid and/or gaseous samples, and to an apparatus for carrying out said...
2018/0151340 ECHO CANCELLATION FOR TIME OF FLIGHT ANALOGUE TO DIGITAL CONVERTER
A method of mass spectrometry is disclosed comprising digitising a signal output from a detector to provide a first digitised signal. A finite impulse response...
2018/0151339 SEPARATING IONS IN AN ION TRAP
A method is disclosed comprising: trapping ions in an ion trap (40); applying a first force on the ions within the ion trap in a first direction, said force...
2018/0151338 METAMATERIAL PHOTOCATHODE FOR DETECTION AND IMAGING OF INFRARED RADIATION
Exemplary metamaterial photocathodes enable detection of light from visible through long wave infrared wavelengths. Metamaterial stacks, comprising gold,...
2018/0151337 PROCESS KIT AND METHOD FOR PROCESSING A SUBSTRATE
Embodiments of process kits for process chambers and methods for processing a substrate are provided herein. In some embodiments, a process kit includes a...
2018/0151336 THE VACUUM PROCESSING APPARATUS
A vacuum processing apparatus includes a vacuum processing chamber, an upper electrode, a lower electrode, a first high-frequency power source, a second...
2018/0151335 METHOD FOR CONTROLLING EXPOSURE REGION IN BEVEL ETCHING PROCESS FOR SEMICONDUCTOR FABRICATION
A plasma processing apparatus is provided. The apparatus includes a lower sheltering module. The apparatus further includes an upper sheltering module arranged...
2018/0151334 MOVING FOCUS RING FOR PLASMA ETCHER
A semiconductor manufacturing method and semiconductor manufacturing tool for performing the same are disclosed. The semiconductor manufacturing tool includes...
2018/0151333 PLASMA ETCHING METHOD
In a plasma etching method, a deposit containing an element forming an upper electrode is deposited on a metal-containing mask having a predetermined pattern...
2018/0151332 PLASMA PROCESSING APPARATUS
A plasma processing apparatus includes a microwave output unit, a wave guide tube, a tuner, a demodulation unit, and a calculation unit. The microwave output...
2018/0151331 Universal Non-Invasive Chamber Impedance Measurement System and Associated Methods
A system is disclosed for measuring an impedance of a plasma processing chamber. The system includes a radiofrequency signal generator configured to output a...
2018/0151330 CROSS SECTIONAL DEPTH COMPOSITION GENERATION UTILIZING SCANNING ELECTRON MICROSCOPY
A method for generating cross-sectional profiles using a scanning electron microscope (SEM) includes scanning a sample with an electron beam to gather an...
2018/0151329 TIME-OF-FLIGHT CHARGED PARTICLE SPECTROSCOPY
An apparatus for performing charged particle spectroscopy, comprising: A source, for producing a pulsed beam of charged particles that propagate along a beam...
2018/0151328 CHARGED PARTICLE BEAM DEVICE AND CONTROL METHOD OF CHARGED PARTICLE BEAM DEVICE
By switching between a plurality of image transfer units based on a state of a stage and using the switched image transfer unit, traceability of stage movement...
2018/0151327 BEAM BLANKER AND METHOD FOR BLANKING A CHARGED PARTICLE BEAM
The present invention relates to a beam blanker for a scanning particle microscope for blanking a charged particle beam having a beam axis, along which charged...
2018/0151326 TIME-RESOLVED CHARGED PARTICLE MICROSCOPY
A method of investigating a specimen using charged particle microscopy, comprising the following steps: Using a primary source to produce a pulsed beam of...
2018/0151325 BIASED COVER RING FOR A SUBSTRATE PROCESSING SYSTEM
Apparatus and methods for reducing and eliminating accumulation of excessive charged particles from substrate processing systems are provided herein. In some...
2018/0151324 HEAT SINK FOR X-RAY TUBE ANODE
Disclosed is an X-ray tube having an electron source and anode disposed therein. The anode includes a target surface positioned to receive electrons emitted by...
2018/0151323 HIGH VOLTAGE ELECTRICAL DISCONNECT DEVICE WITH MAGNETIC ARC DEFLECTION ASSEMBLY
A compact disconnect device includes a magnetic arc deflection assembly including at least one set of stacked arc plates and at least one magnet disposed...
2018/0151322 CASING REPLACEABLE FUSE ASSEMBLY
A fuse assembly includes a casing having two slots defined through the first end thereof, and a conductive member is located in the casing and has a first end...
2018/0151321 CONTACTOR WITH COIL POLARITY REVERSING CONTROL CIRCUIT
A contactor includes a plurality of switches mechanically coupled to an actuator. The actuator is moveable between operational and tripped positions. Switches...
2018/0151320 TWO-LEVEL LATCH MECHANISM FOR OPERATION MECHANISM OF CIRCUIT BREAKER
A two-level latch mechanism for an operation mechanism of a circuit breaker is provided. The operation mechanism includes: a tripping component, a left side...
2018/0151319 SYSTEM AND METHOD FOR INDEPENDENTLY CONTROLLING RELAY, USING BIMETAL
The present invention relates to a system and a method for independently controlling a relay using bimetal which allow bimetal to operate based on a signal...
2018/0151318 SURGE PROTECTIVE DEVICE MODULES AND DIN RAIL DEVICE SYSTEMS INCLUDING SAME
A surge protective device (SPD) module includes a module housing, first and second module electrical terminals mounted on the module housing, a gas discharge...
2018/0151317 TIMEPIECE COMPRISING A DEVICE FOR SWITCHING A TIMEPIECE MECHANISM
The timepiece includes a chronograph mechanism with a coupling device including an operating member and a switching member which can be switched alternately...
2018/0151315 LUMINOUS KEYBOARD
A luminous keyboard includes plural keys, a light-emitting element, a light guide plate and a supporting plate. The light-emitting element emits light beams....
2018/0151314 KEYFRAME MODULE FOR AN INPUT DEVICE
System and methods for providing a keyframe module for a input device are disclosed. In an embodiment, the input device includes a keyframe having a key...
2018/0151313 PUSH SWITCH
A push switch 1 includes a movable contact member 20 with a bulging portion 20a. The push switch 1 has a fixed contact member 10 with a first fixed contact...
2018/0151312 SWITCH COMPONENT, PUSH SWITCH, ELECTRONIC DEVICE INCLUDING PUSH SWITCH
A switch component includes a spring plate and a cover of rubber. The cover of rubber covers at least one part of an upper surface of the spring plate. The...
2018/0151311 Programmable Arc Fault Circuit Interrupter (AFCI)
A programmable arc fault circuit interrupter (AFCI) is provided. The programmable AFCI includes a dual resistive shunt array for developing inputs to an analog...
2018/0151310 INSTALLATION SWITCHING DEVICE HAVING A CONTACT CLAMP
An installation switching device includes: a housing; and at least one contact clamp, which is arranged in the housing, for connecting at least one electrical...
2018/0151309 MEDIUM VOLTAGE DOUBLE POWER SUPPLY CHANGE-OVER SWITCH WITH PERMANENT MAGNET
The invention relates to a medium voltage double power supply change-over switch using a permanent magnet mechanism. The invention is provided with a spring as...
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