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Patent # Description
2018/0164698 MULTI-METAL FILL WITH SELF-ALIGNED PATTERNING AND DIELECTRIC WITH VOIDS
Photolithography overlay errors are a source of patterning defects, which contribute to low wafer yield. An interconnect formation process that employs a...
2018/0164697 WAFER-BASED LIGHT SOURCE PARAMETER CONTROL
A photolithography method includes producing, from an optical source, a pulsed light beam; and scanning the pulsed light beam across a substrate of a...
2018/0164696 OPTICAL PROCESSING APPARATUS AND SUBSTRATE PROCESSING APPARATUS
An optical processing apparatus includes: a housing; a stage; and a light irradiation unit configured to cause a light source unit to emit light so as to form...
2018/0164695 MULTIPLE PATTERNING DECOMPOSITION AND MANUFACTURING METHODS FOR IC
A multiple patterning decomposition method for IC is provided. Features of layout of IC are decomposed into a plurality of nodes. The nodes are classified to...
2018/0164694 LITHOGRAPHY APPARATUS
A lithography apparatus is provided. The lithography apparatus a reticle having a first surface and a second surface facing each other, and a pattern region...
2018/0164693 ILLUMINATION SYSTEM FOR EUV PROJECTION EXPOSURE APPARATUS, EUV PROJECTION EXPOSURE APPARATUS INCLUDING...
An illumination system for an EUV projection exposure apparatus is designed for shaping illumination radiation from at least a portion of received EUV...
2018/0164692 EXPOSURE APPARATUS, EXPOSURE METHOD, AND DEVICE MANUFACTURING METHOD
A movement area of a stage includes first-fifth areas. In the first area, three of four heads except for a first head respectively face three of four sections...
2018/0164691 PROJECTION EXPOSURE METHODS AND SYSTEMS
Projection exposure methods, systems, sub-systems and components are disclosed. Methods can include performing a first exposure to image a first sub-pattern of...
2018/0164690 IMAGING OPTICAL UNIT FOR EUV PROJECTION LITHOGRAPHY
An imaging optical unit for EUV projection lithography serves to image an object field into an image field. Mirrors guide imaging light from the object field...
2018/0164689 SUBSTRATE TREATMENT METHOD AND THERMAL TREATMENT APPARATUS
A thermal treatment apparatus that performs a thermal treatment on a metal-containing film formed on a substrate, includes: a treatment chamber that houses the...
2018/0164688 Lithography System and Lithography Method for Improving Image Contrast
Systems and methods are disclosed herein for enhancing lithography printability, and in particular, for enhancing image contrast. An exemplary method includes...
2018/0164687 POSITION ADJUSTING UNIT OF OPTICAL ELEMENT AND MASKLESS EXPOSURE APPARATUS INCLUDING THE SAME
A position adjusting unit according to some example embodiments includes a base; a mounting part, a driving unit, and a locking part on the base. The mounting...
2018/0164686 METHOD USING SILICON-CONTAINING UNDERLAYERS
Methods of manufacturing electronic devices employing wet-strippable underlayer compositions comprising a condensate and/or hydrolyzate of a polymer comprising...
2018/0164685 METHOD USING SILICON-CONTAINING UNDERLAYERS
Methods of manufacturing electronic devices employing wet-strippable underlayer compositions comprising a condensate and/or hydrolyzate of a polymer comprising...
2018/0164684 RESIST MATERIAL AND METHOD FOR FORMING SEMICONDUCTOR STRUCTURE USING RESIST LAYER
A resist material and methods for forming a semiconductor structure including using the resist material are provided. The method for forming a semiconductor...
2018/0164683 RESIN COMPOSITION, METHOD FOR MANUFACTURING SEMICONDUCTOR ELEMENT USING THE SAME, AND SEMICONDUCTOR DEVICE
Provided is a resin composition including: (A1) an alkali-soluble resin having a specific structural unit; (A2) at least one resin selected from the group...
2018/0164682 PHOTORESIST COMPOSITION AND A METHOD FOR FORMING A FINE PATTERN USING THE SAME
A photoresist composition includes a photosensitive polymer including a polymer chain and at least one first functional group coupled to the polymer chain, and...
2018/0164681 COLORING PHOTOSENSITIVE COMPOSITION, CURED FILM, COLOR FILTER, LIGHT-SHIELDING FILM, SOLID-STATE IMAGING...
Provided are a coloring photosensitive composition that is curable in a low-temperature environment, as well as a cured film, a color filter, a light-shielding...
2018/0164680 TEMPLATE AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
A template for patterning processes has a first protrusion portion on a first surface with a first step portion in a first region and a second step portion in...
2018/0164679 PROCESS FOR OBTAINING HIGH-PERIOD, THICK ORDERED FILMS COMPRISING A BLOCK COPOLYMER
The present invention relates to a process for obtaining high-period (typically >10 nm), thick (typically >20 nm) ordered films on a nanometric scale...
2018/0164678 FLUID DROPLET METHODOLOGY AND APPARATUS FOR IMPRINT LITHOGRAPHY
A method can be used to generate a fluid droplet pattern for an imprint lithography process using a fluid dispense system having fluid dispense ports. The...
2018/0164677 PHOTOMASK, LAMINATE COMPRISING PHOTOMASK, PHOTOMASK PREPARATION METHOD, AND PATTERN FORMING METHOD USING PHOTOMASK
The present specification relates to a photomask, a laminate including the photomask, a method for manufacturing the photomask and a method for forming a...
2018/0164676 ANTI-ESD PHOTOMASK AND METHOD OF FORMING THE SAME
The present disclosure provides an anti-ESD photomask and method of the same. In the method, a substrate is provided first. Then, a light-shielding layer is...
2018/0164675 PHOTOMASK AND FABRICATION METHOD THEREFOR
A method of manufacturing a mask includes depositing an end-point layer over a light transmitting substrate, depositing a phase shifter over the end-point...
2018/0164674 PHOTOMASK BLANK INCLUDING A THIN CHROMIUM HARDMASK
Methods for manufacturing a photomask, photomask blanks, and photomasks used in chip fabrication. A phase-shift layer is formed on a mask blank, a hardmask...
2018/0164673 DIAGNOSTIC CAMERA APPARATUS AND METHOD FOR INSPECTION OF AN ENCLOSED TUBE SYSTEM
The present disclosure relates in general to a diagnostic device for inspection of an enclosed tube system, and more particular, to obtain images or video of...
2018/0164672 IMAGE PROJECTION DEVICE
An image projection device is disclosed having a body defining an aperture that includes a slide frame receiving slot that is transverse to the aperture and a...
2018/0164671 AERIAL IMAGE DISPLAY DEVICE
This aerial image display device is provided with an optical plate having a plurality of reflective surfaces orthogonal to each other in plan view, a...
2018/0164670 INFORMATION PROCESSING APPARATUS AND METHOD, AND PROJECTION IMAGING APPARATUS AND INFORMATION PROCESSING METHOD
There is provided an information processing apparatus and method, and a projection imaging apparatus and an information processing method capable of...
2018/0164669 LASER LIGHT SOURCE AND PROJECTION DISPLAY DEVICE
A laser light source is disclosed that includes a laser device, a first diffusion element, a fluorescence wheel, and a second diffusion element. The...
2018/0164668 PROJECTION APPARATUS, PROJECTION METHOD, AND STORAGE MEDIUM HAVING PROGRAM STORED THEREON, WHICH PROVIDE...
A projection apparatus includes a light source unit which time-divisionally emits light in colors by light emission from light emitting devices; a display...
2018/0164667 LIGHT SOURCE MODULE AND PROJECTION APPARATUS
A light source module including a blue laser light source, an adjusting light source, a wavelength conversion device, and a light combiner is provided. The...
2018/0164666 Articulating Projector Mount
An articulating projector mount has one or more mounting rods each with a first and second end. The first end is pivotally mounted to a projector and the...
2018/0164665 Light Recycling for Projectors with High Dynamic Range
Projection systems and/or methods for efficient use of light by recycling a portion of the light energy are disclosed. In one embodiment, a projection display...
2018/0164664 Grip Belt and Imaging Apparatus
An imaging apparatus has a body portion and a grip belt. The body portion has an imaging element. The grip belt is connected to and supported on the body...
2018/0164663 IMAGING DEVICE AND CAMERA GRIP, AND IMAGING SYSTEM
A mount section 35 on which a camera grip 60 is mounted in an attachable and detachable manner is provided in an imaging device 30, and a mount section 65 that...
2018/0164662 TRIPOD ACCESSORY CLAMP
A tripod has a standard mesh and thread fitting for an adjustment handle. This invention bolts a bracket into the standard mesh and thread fitting. Then a...
2018/0164661 CAMERA MODULE
Accuracy of image stabilization is to be improved by reduction in a resonance peak. A coil (OIS coil 13) that is provided in one of a movable portion and a...
2018/0164660 TRI-AXIS CLOSED-LOOP ANTI-SHAKE STRUCTURE
Provided is a lens driving device includes a lens holder for carrying a lens; a frame for receiving the lens holder; a first driving component for driving the...
2018/0164658 DRIVE APPARATUS, DRIVE METHOD, AND OPTICAL DEVICE
Noise produced during phase-difference changes is minimized without decreasing the responsiveness of a vibration-wave motor. A lens-side MCU for a lens barrel...
2018/0164657 OPTICAL QUANTIFICATION OF INTERFACIAL CHARGE STATES
Methods of generating second harmonic generation (SHG) signals from interfaces formed with, or formed over, a noncentrosymmetric material, e.g.,...
2018/0164656 OPTICAL SIGNAL PROCESSING DEVICE
The present invention provides an optical signal processing device with a transponder aggregator function by which theoretical loss is not increased even if...
2018/0164655 SYSTEMS AND METHODS TO TRANSFORM EVENTS AND/OR MOOD ASSOCIATED WITH PLAYING MEDIA INTO LIGHTING EFFECTS
Example systems and methods to transform events and/or mood associated with playing media into lighting effects are disclosed herein. An example apparatus...
2018/0164654 SEMICONDUCTOR OPTICAL MODULATION ELEMENT
To provide a Mach-Zehnder (MZ) type semiconductor optical modulation element that can be used as a modulator, which is ultrafast and excellent in electrical...
2018/0164653 OBJECT WITH ADJUSTABLE APPEARANCE AND METHOD OF ADJUSTING THE APPEARANCE OF AN OBJECT
An object has at least one electrophoretic display. A filter overlay covers at least a part of the electrophoretic display. Control circuitry is operable to...
2018/0164652 ELECTRO-OPTIC MEDIA PRODUCED USING INK JET PRINTING
Ink jet printing can be used in the production of electro-optic displays for (a) forming a layer of a polymer-dispersed electrophoretic medium on a substrate;...
2018/0164651 POWER-OFF PROTECTION CIRCUIT AND POWER-OFF PROTECTION METHOD OF ELECTROCHROMIC DEVICE
A power-off protection circuit and a power-off protection method of an electrochromic device are revealed. A compelling bleached unit is connected to two...
2018/0164650 POST-TEMPERABLE NANOCRYSTAL ELECTROCHROMIC DEVICES
An electrochromic device may include a working electrode that includes a high temperature stable material and nanoparticles of an active core material, a...
2018/0164649 ARRAY SUBSTRATE, LIQUID CRYSTAL DISPLAY PANEL AND MANUFACTURING METHOD FOR ARRAY SUBSTRATE
An array substrate includes a first light-shielding insulation layer formed on the substrate, for block a light entering the substrate, and including a first...
2018/0164648 LIQUID CRYSTAL DISPLAY DEVICE
In a liquid crystal display device, a common electrode is formed on an organic passivation film, an interlayer insulating film is formed on the common...
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