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Patent # Description
2018/0275536 ELECTROPHOTOGRAHIC PHOTORECEPTOR AND IMAGE FORMING APPARATUS
An electrophotographic photoreceptor includes: a cylindrical base body having a two-step stepped chamfer between a base body outer peripheral face and a base...
2018/0275534 TEMPERATURE CONTROLLED HEAT TRANSFER FRAME FOR PELLICLE
An exposure apparatus for transferring a pattern from a reticle to a workpiece, a pellicle being positioned near the reticle, includes a heat transfer frame,...
2018/0275533 EXPOSURE APPARATUS AND EXPOSURE METHOD, AND FLAT PANEL DISPLAY MANUFACTURING METHOD
In an exposure apparatus, on a substrate holder, a plurality of grating areas is arranged mutually apart in the X-axis direction, and a plurality of heads that...
2018/0275532 MOVABLE BODY APPARATUS, EXPOSURE APPARATUS, MANUFACTURING METHOD OF FLAT-PANEL DISPLAY AND DEVICE MANUFACTURING...
A substrate stage device that moves a substrate has: a noncontact holder that supports the substrate in a noncontact manner; a first drive section that moves...
2018/0275531 CARRYING PLATFORM AND EXPOSURE METHOD
A carrying platform and an exposure method are provided. The carrying platform includes: a plurality of sub-stands, configured to co-carry an object. Each...
2018/0275530 Multi-Layer Overlay Metrology Target and Complimentary Overlay Metrology Measurement Systems
A system for measuring overlay from a multi-layer overlay target for use in imaging based metrology is disclosed. The system is configured for measuring...
2018/0275529 OPTIMIZATION METHOD AND SEYSTEM FOR OVERLAY ERROR COMPENSATION
An optimization method for overlay error compensation is disclosed. The method comprises setting process parameters for each semiconductor layer of a...
2018/0275528 OPTICAL SYSTEM FOR PRODUCING LITHOGRAPHIC STRUCTURES
An optical system for producing lithographic structures is disclosed. Also disclosed is a method for determining relative coordinates of a position of a...
2018/0275527 OPTICAL IMAGING ARRANGEMENT WITH ACTIVELY ADJUSTABLE METROLOGY SUPPORT UNITS
An optical imaging arrangement includes an optical projection system, a support structure system and a control device. The optical projection system includes a...
2018/0275526 OPTICAL APPARATUS FOR USE IN PHOTOLITHOGRAPHY
An optical apparatus includes an interchange mechanism and an optical assembly of an illumination system or a projection objective. At least one of the...
2018/0275525 LITHOGRAPHIC THERMAL DISTORTION COMPENSATION WITH THE USE OF MACHINE LEARNING
Lithographic exposure tool and method for operating thereof that includes modification of the tool (assessed based on the measurements of geometrical...
2018/0275524 ASYMMETRY MONITORING OF A STRUCTURE
A method including obtaining a first value of an optical characteristic determined for an etched profile of a substrate measured at a first wavelength of...
2018/0275523 Stochastically-Aware Metrology and Fabrication
A system for stochastically-aware metrology includes a controller to be communicatively coupled to a fabrication tool. The controller receives a production...
2018/0275522 PROXIMITY EXPOSURE DEVICE AND EXPOSURE METHOD THEREOF
The embodiments of the disclosure relate to a proximity exposure device and an exposure method thereof. The proximity exposure device includes: a loading...
2018/0275521 METHOD AND APPARATUS FOR PATTERN CORRECTION AND VERIFICATION
A method including providing a plurality of unit cells for a plurality of gauge patterns appearing in one or more images of one or more patterning process...
2018/0275520 FEMALE MOLD AND METHOD FOR MANUFACTURING THE SAME
A method for manufacturing a female mold is provided in the embodiments of the disclosure, comprising: providing a substrate; forming a substrate layer of the...
2018/0275519 Pattern Formation Method
A pattern formation method includes forming a first pattern in a first film in a first region and forming a second pattern in the first film in a second region...
2018/0275518 PATTERN FORMING METHOD, METHOD FOR MANUFACTURING ELECTRONIC DEVICE, LAMINATE FILM, AND COMPOSITION FOR FORMING...
One embodiment of the present invention provides a pattern forming method including a step for forming an actinic ray-sensitive or radiation-sensitive film on...
2018/0275517 CROSS-LINKABLE FLUORINATED PHOTOPOLYMER
A photosensitive composition is disclosed including a fluorinated photo cross-linkable polymer provided in a fluorinated solvent such as a hydrofluoroether....
2018/0275516 SULFONIUM SALT, RESIST COMPOSITION, AND PATTERNING PROCESS
The present invention provides a sulfonium salt capable of providing a resist composition having few defects in photolithography where a high energy beam is...
2018/0275515 PHOTOSENSITIVE RESIN COMPOSITION FOR FLEXOGRAPHIC PRINTING AND FLEXOGRAPHIC PRINTING ORIGINAL PLATE
A photosensitive resin composition for flexographic printing, comprising at least (A) a hydrophilic copolymer, (B) an elastomer, (C) a polymerizable...
2018/0275514 RADIATION-SENSITIVE RESIN COMPOSITION, CURED FILM, PATTERN FORMING METHOD, SOLID-STATE IMAGING DEVICE, AND...
Provided are a radiation-sensitive resin composition having good sensitivity and excellent temporal stability of the sensitivity, a cured film, a pattern...
2018/0275513 POLYMER OF POLYIMIDE PRECURSOR, POSITIVE TYPE PHOTOSENSITIVE RESIN COMPOSITION, NEGATIVE TYPE PHOTOSENSITIVE...
This is to provide a polymer of a polyimide precursor which is soluble in an aqueous alkaline solution, and capable of using a base resin of a positive type...
2018/0275512 RESIST COMPOSITION AND PATTERNING PROCESS
A resist composition comprising a base polymer and a sulfonium or iodonium salt capable of generating fluorobenzenesulfonic acid bonded to iodized benzoic acid...
2018/0275511 SUBSTRATE PRETREATMENT AND ETCH UNIFORMITY IN NANOIMPRINT LITHOGRAPHY
A nanoimprint lithography method includes contacting a composite polymerizable coating formed from a pretreatment composition and an imprint resist with a...
2018/0275510 IMPRINTING APPARATUS AND IMPRINTING METHOD
An imprinting apparatus includes a substrate holding unit having a first region configured to receive a substrate, and a second region positioned outside a...
2018/0275509 REDUCING ELECTRIC CHARGE IN IMPRINT LITHOGRAPHY
Methods and systems for contacting a polymerizable material on a surface of a substrate with a patterning surface of a template; curing the polymerizable...
2018/0275508 METHOD OF MANUFACTURING PELLICLE AND APPARATUS FOR ASSEMBLING PELLICLE
A method of manufacturing a pellicle includes preparing a pellicle frame having an adhesive layer coated thereon, treating a pellicle membrane with vapor under...
2018/0275507 MASK BLANK SUBSTRATE, SUBSTRATE WITH MULTILAYER REFLECTION FILM, TRANSMISSIVE MASK BLANK, REFLECTIVE MASK, AND...
Disclosed is a mask blank substrate for use in lithography, wherein the main surface on which the transfer pattern of the substrate is formed has a root mean...
2018/0275506 REFLECTION-TYPE EXPOSURE MASK
A reflection-type exposure mask includes a light reflector provided in a pattern on a substrate. The light reflector has a multilayer structure including...
2018/0275505 TRANSPARENT SCREEN SHEET, TRANSPARENT SCREEN, AND IMAGE DISPLAY SYSTEM
A transparent screen sheet that displays images projected from a front side of the transparent screen sheet and/or a rear side of the transparent screen sheet...
2018/0275504 DISPLAY DEVICE
A display device includes a screen, first and second projectors, a detector, and a controller. The screen has first and second surfaces. The first projector...
2018/0275503 DISPLAY DEVICE
A display device includes a screen, first and second projectors, and a controller. The screen has first and second surfaces. The first projector projects a...
2018/0275502 DISPLAY DEVICE
A display device includes a screen, first and second projectors, and a controller. The screen has first and second surfaces. The first projector projects a...
2018/0275501 ILLUMINATION APPARATUS
An illumination apparatus that is to be disposed in a recess formed in a part of a building includes: a light-emitting module that includes a board and a...
2018/0275500 LED Plug-in Outlet or DC Power Light has LED-unit(s)
The LED plug-in outlet or DC power light has LED-unit(s) to offer one or more than one near-by lighted-location(s) with preferred adjustable angle constriction...
2018/0275499 ILLUMINATION SYSTEM AND ILLUMINATION METHOD
An illumination system includes: a first luminaire that is of an internal lighting type and includes a light emitter that emits first illumination light having...
2018/0275498 ILLUMINATION APPARATUS AND ILLUMINATION SYSTEM
An illumination apparatus includes: a case having an opening portion; a first light source disposed in the case and including a plurality of light-emitting...
2018/0275497 LIGHT SOURCE SYSTEM AND PROJECTOR
A light source system according to an aspect of the invention comprises a light source unit, an optical path switching device configured to selectively switch...
2018/0275496 WAVELENGTH CONVERSION ELEMENT, LIGHT SOURCE DEVICE, AND PROJECTOR
A wavelength conversion element includes a phosphor layer, a support member, and a thermal stress reduction member disposed between the phosphor layer and the...
2018/0275495 ILLUMINATOR AND PROJECTOR
An illuminator includes a light source that emits light containing a predetermined polarized light component, an optical element that transmits the light...
2018/0275494 ACCESSORY APPARATUS, IMAGE PICKUP APPARATUS, AND IMAGING SYSTEM
An interchangeable lens serving as an accessory apparatus includes a power control unit configured to switch between a first power state where communication...
2018/0275493 IMAGE PICKUP APPARATUS TO WHICH ACCESSORY IS REMOVABLY ATTACHED, AND IMAGE PICKUP SYSTEM
An image pickup apparatus that suppresses looseness of an accessory fastened to a fastening portion of an apparatus body. An image pickup apparatus includes an...
2018/0275492 ACTIVELY STABILIZED PAYLOAD SUPPORT APPARATUS AND METHODS
A payload stabilizer and methods for stabilizing a payload suitable for use with video camera payloads. The stabilizer has a feedback system providing...
2018/0275491 LENS BARREL AND CAMERA PROVIDED WITH SAME
A lens barrel is detachably attached to a camera body, and includes an exterior unit, a rear frame, a tripod mount, and a tripod lock screw. The exterior unit...
2018/0275490 TELESCOPIC LIMITING STRUCTURE, CAMERA BODY AND CAMERA
A telescopic limiting structure includes a first retractable member and a second retractable member. The first retractable member includes a first inclined...
2018/0275489 LAMP CUP AND CAMERA
A camera includes an image-capturing part, a plurality of lamp cups, and a plurality of lighting parts disposed in the lamp cups correspondingly. The lamp cup...
2018/0275488 Parametric Conversion of Chirped Femtosecond Pump Pulses
The invention relates to an apparatus for generating laser pulses by non-linear four-wave mixing. It is an object of the invention to provide a technique which...
2018/0275487 WAVELENGTH CONVERSION DEVICE
A wavelength conversion device having an excitation source 1, a laser medium 3 between an input mirror 5a and an output mirror 5b, consisting of an optic...
2018/0275486 WIDEBAND ULTRA-HIGH REFRACTIVE INDEX MESOSCOPIC CRYSTAL STRUCTURE USING SPACE-FILLING OF ELECTRIC DIPOLE AND...
A wideband ultra-high refractive index mesoscopic crystal structure using space-filling of an electric dipole according to one aspect of the present disclosure...
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