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Patent # Description
2018/0286648 ACTIVE STABILIZATION OF ION TRAP RADIOFREQUENCY POTENTIALS
Disclosed are improved methods and structures for actively stabilizing the oscillation frequency of a trapped ion by noninvasively sampling and rectifying the...
2018/0286647 REDUCING DETECTOR WEAR DURING CALIBRATION AND TUNING
A method of operating a mass spectrometer comprising: detecting a first ion species using a first gain setting of a detector or a first emission current for a...
2018/0286646 SPUTTERING TARGET
A sputtering target comprising a target material, wherein a sputtering face of the target material has a ramp provided to reduce a thickness of the target...
2018/0286645 PLASMA PROCESSING APPARATUS
A plasma processing apparatus includes a conveyance unit that has a rotator in a vacuum container, and circulating carries a workpiece by the rotator along a...
2018/0286644 PLASMA PROCESSING APPARATUS
A plasma processing apparatus includes a vacuum container, a conveyance unit including a rotator and circulating and carrying a workpiece through the...
2018/0286643 ADVANCED OPTICAL SENSOR, SYSTEM, AND METHODOLOGIES FOR ETCH PROCESSING MONITORING
An apparatus, system, and method for in-situ etching monitoring in a plasma processing chamber. The apparatus includes a continuous wave broadband light...
2018/0286642 ELECTROSTATIC CHUCK WITH FLEXIBLE WAFER TEMPERATURE CONTROL
An apparatus for processing a substrate is provided. A first coolant gas pressure system, a second coolant gas pressure system, a third coolant gas pressure...
2018/0286641 PLASMA GENERATING UNIT AND SUBSTRATE TREATING APPARATUS COMPRISING THE SAME
Disclosed are a plasma generating unit and a substrate treating apparatus including the same. The substrate treating apparatus includes a process chamber...
2018/0286640 Material Deposition Prevention on a Workpiece in a Process Chamber
Focus ring assemblies for plasma processing apparatus are provided. In one example implementation, an apparatus includes a plasma source configured to generate...
2018/0286639 Pedestal Assembly for Plasma Processing Apparatus
Pedestal assemblies for processing apparatus, such as plasma processing apparatus are provided. In one example implementation, a plasma processing apparatus...
2018/0286638 SUBSTRATE PROCESSING APPARATUS AND METHOD FOR PROCESSING SUBSTRATE
A substrate processing apparatus includes a chamber, a susceptor provided in the chamber, a shower plate having a plate part provided with a plurality of...
2018/0286637 ION IMPLANTER AND ION IMPLANTATION METHOD
An ion implanter includes a plasma shower device configured to supply electrons to an ion beam with which a wafer is irradiated. The plasma shower device...
2018/0286636 HIGH VOLTAGE RESISTIVE OUTPUT STAGE CIRCUIT
Some embodiments include a high voltage, high frequency switching circuit. The switching circuit may include a high voltage switching power supply that...
2018/0286635 CYCLOTRONIC PLASMA ACTUATOR WITH ARC-MAGNET FOR ACTIVE FLOW CONTROL
In an embodiment of the invention there is a cyclotronic actuator. The actuator is defined by having a high-voltage plasma driver connected to a first...
2018/0286634 MULTI-ZONE GAS DISTRIBUTION PLATE (GDP) AND A METHOD FOR DESIGNING THE MULTI-ZONE GDP
A multi-zone gas distribution plate (GDP) for high uniformity in plasma-based etching is provided. A housing defines a process chamber and comprises a gas...
2018/0286633 ION MILLING SYSTEM
To provide an ion milling system that can suppress an orbital shift of an observation electron beam emitted from an electron microscope column, the ion milling...
2018/0286632 OBJECT PREPARATION DEVICE AND PARTICLE BEAM DEVICE WITH AN OBJECT PREPARATION DEVICE AND METHODS OF OPERATING...
The invention relates to an object preparation device (114) for preparing an object (124, 425) in a particle beam apparatus. By way of example, the particle...
2018/0286631 OPTICAL-CAVITY BASED PONDEROMOTIVE PHASE PLATE FOR TRANSMISSION ELECTRON MICROSCOPY
An optical cavity is defined by a first mirror and a second mirror. The first mirror has a front surface that includes a first concave mirror. The second...
2018/0286630 Multi Charged Particle Beam Inspection Apparatus, and Multi Charged Particle Beam Inspection Method
A multi charged particle beam inspection apparatus includes a plurality of sensors, arranged inside or on a periphery of a secondary electron image acquisition...
2018/0286629 CHARGED PARTICLE BEAM APPARATUS
A charged particle beam device includes a charged particle source that generates a charged particle beam, a focus adjustment unit that adjusts a focal position...
2018/0286628 CHARGED PARTICLE BEAM APPARATUS
Disclosed herein is a charged particle beam apparatus. The apparatus includes a charged particle beam column irradiating a sample with a charged particle beam,...
2018/0286627 Charged Particle Beam Apparatus
An object of the invention is to provide a charged particle beam apparatus capable of achieving both acquisition of an image having high resolution of an...
2018/0286626 SEM IMAGE ACQUISITION DEVICE AND SEM IMAGE ACQUISITION METHOD
An SEM image acquisition device including a scanning signal generation unit configured to rotate a scanning direction of the electron beam to be scanned on the...
2018/0286625 PARTICLE-OPTICAL APPARATUS AND PARTICLE BEAM SYSTEM
A beam deflector includes a magnetic-flux-guiding structure which has an opening through which a beam axis extends, and at least two coils arranged at the...
2018/0286624 X-Ray Source for 2D Scanning Beam Imaging
A two-dimensional X-ray scanner that includes a beam steerer for steering an electron beam to impinge upon a target; and a collimator further including an...
2018/0286623 THREE-DIMENSIONAL BEAM FORMING X-RAY SOURCE
Three dimensional beam forming X-ray source includes an electron beam generator (EBG) to generate an electron beam. A target element is disposed a...
2018/0286622 ELECTRON GUN, ELECTRON TUBE AND HIGH-FREQUENCY CIRCUIT SYSTEM
The purpose is to make it possible to autonomously suppress a reduction in an electron beam without providing a means for supervising the electron beam...
2018/0286621 SEMICONDUCTOR-FREE VACUUM FIELD EFFECT TRANSISTOR FABRICATION AND 3D VACUUM FIELD EFFECT TRANSISTOR ARRAYS
A vacuum field-emission-transistor device, a drain comprised of either a metal or a semimetal material, a gate arranged adjacent to, but separated from, the...
2018/0286620 LOW VOLTAGE CIRCUIT BREAKER
A low voltage circuit breaker is provided. The low voltage circuit breaker includes a contact system with a first contact and a second contact that are...
2018/0286619 APPARATUS AND METHOD FOR CONTROLLING CURRENT
The present invention relates to an apparatus for controlling an output current provided from an inverter to a plant according to a current command. The...
2018/0286617 Method, System, and Apparatus to Prevent Electrical or Thermal-Based Hazards in Conduits
A method, apparatus, and system for protection from hazards of conductivity is disclosed using non-electrical means to disrupt electrical current with a...
2018/0286616 ELECTROMAGNETIC RELAY
An electromagnetic relay includes an electromagnet, an armature configured to be attracted and moved by the electromagnet, and a contact. The contact includes...
2018/0286615 SWITCHING ELEMENT FOR ELECTRICAL ENERGY DISTRIBUTION BOARD AND ELECTRICAL ENERGY DISTRIBUTION BOX FITTED WITH...
This switching element for an electrical energy distribution board comprises a distribution bar (13) and a support plate (14) on which the distribution bar is...
2018/0286614 Hermetic Terminal for High-Capacity Relay and Contact Device for High-Capacity Relay Including the Hermetic...
A hermetic terminal for a high-capacity relay includes: a metal container provided with a through hole; a pipe lead inserted through the through hole; an...
2018/0286613 Controlling a Controllably Conductive Device Based on Zero-Crossing Detection
A load control device may control power delivered to an electrical load from an AC power source. The load control device may include a controllably conductive...
2018/0286612 SYSTEMS AND METHODS FOR SENDING A POWER SIGNAL TO A POWER SWITCHING DEVICE WITH GALVANIC ISOLATION
A power electronics arrangement may comprise a power supply, a controller configured to receive a power from the power supply and generate an output signal, a...
2018/0286611 DIMMER SWITCH SYSTEM WITH SECONDARY SWITCH
A dimmer switch system electrically connected between a power source and a load includes a primary housing including a primary switch actuatable by a user, a...
2018/0286610 MODULAR SAFETY RELAY CIRCUIT FOR THE SAFE CONTROL OF AT LEAST ONE MACHINE
To enable a safe monitoring with a small cabling effort of a modular safety relay circuit, a modular safety relay circuit for the safe control of at least one...
2018/0286609 POWER TRANSMISSION APPARATUS
A power transmission apparatus includes a power delivery unit generating a power, a load unit receiving the power, a cable, at least a connector, at least a...
2018/0286608 AIR BREAK ELECTRICAL SWITCH HAVING A BLADE TOGGLE MECHANISM
An electrical switch includes a pivotally supported blade, a toggle mechanism, and an operating mechanism. The operating mechanism is drivable in a first...
2018/0286607 REMOTE CONTROL WITH CONFIGURABLE BUTTONS
Described herein are several examples of an apparatus that features receptacles configured to accept interchangeable buttons. Each of the interchangeable...
2018/0286606 KEYBOARD DEVICE
The present invention provides a keyboard device, including an elastic sheet-like member, a keycap configured to hold the elastic sheet-like member, a membrane...
2018/0286605 REACTIVE FORCE GENERATION DEVICE
A to-be-depressed member includes an elastic dome. A sectional shape of the dome orthogonal to an axis line (X2) of the dome is line-symmetric about a symmetry...
2018/0286604 REACTION FORCE GENERATING MEMBER AND KEY SWITCH DEVICE
A reaction force generating member includes: a first dome that gives a reaction force to an operation member according to the depression of the operation...
2018/0286603 KEYSWITCH STRUCTURE
A keyswitch structure includes a base, a keycap, a first support, a second support, and a connection structure. The keycap moves up and down relative to the...
2018/0286602 ELECTRICAL SYSTEM, AND ELECTRICAL SWITCHING APPARATUS AND GUARD MEMBER THEREFOR
A guard member is for an electrical switching apparatus of an electrical system. The electrical system includes at least one electrical conductor. The...
2018/0286601 TWIN-ROLL BLOCKING UNIT FOR A TRIGGERING MECHANISM FOR A SWITCHING DEVICE
A triggering mechanism is for a switching device, in particular for low-voltage devices and systems, medium-voltage devices and systems, and/or high-voltage...
2018/0286600 ELECTROCHEMICAL DEVICE
An electrochemical device has a positive electrode, a negative electrode, separators, and an electrolyte. The negative electrode has: a negative-electrode...
2018/0286599 Direct Microwave Production of Graphene
Provided is a method of producing graphene directly from a non-intercalated and non-oxidized graphitic material, comprising: (a) dispersing the graphitic...
2018/0286598 A METHOD OF MAKING A MULTILAYER STRUCTURE
A method of making a multilayer structure is provided, comprising providing a substrate; providing a coating composition, comprising: a liquid carrier and a...
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