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Patent # Description
2018/0284622 ILLUMINATION SYSTEM OF A MICROLITHOGRAPHIC PROJECTION DEVICE AND METHOD FOR OPERATING SUCH A SYSTEM
The disclosure provides an illumination system of a microlithographic projection device having an image plane, in which a mask can be arranged, and a first...
2018/0284621 METHOD OF CONTROLLING A LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD, CONTROL SYSTEM FOR A...
In a method of controlling a lithographic apparatus, historical performance measurements are used to calculate a process model relating to a lithographic...
2018/0284620 ELECTRON BEAM IRRADIATION APPARATUS AND ELECTRON BEAM DYNAMIC FOCUS ADJUSTMENT METHOD
An electron beam irradiation apparatus includes a first electrode being annular, arranged along the optical axis of the electron beam, at the downstream from...
2018/0284619 EXPOSURE APPARATUS AND EXPOSURE METHOD, AND FLAT PANEL DISPLAY MANUFACTURING METHOD
A control system controls a drive system of a substrate holder, based on correction information to compensate for measurement error of a measurement system...
2018/0284618 EXTREME ULTRAVIOLET LIGHT GENERATING APPARATUS
An extreme ultraviolet light generating apparatus may include: a chamber, within which extreme ultraviolet light is generated from a droplet which is supplied...
2018/0284617 EXTREME ULTRAVIOLET LIGHT GENERATION DEVICE
An extreme ultraviolet light generation device includes: an EUV sensor configured to measure energy of extreme ultraviolet light generated when a target is...
2018/0284616 SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND RECORDING MEDIUM
A coating and developing apparatus 2 includes a first protection processing unit U01, a film forming unit U02, a first cleaning processing unit U03 and a...
2018/0284615 RESIST UNDERLAYER FILM COMPOSITION, PATTERNING PROCESS, AND METHOD FOR FORMING RESIST UNDERLAYER FILM
Provided is a resist underlayer film composition which is excellent in resistance to a basic hydrogen peroxide aqueous solution, in gap-filling and...
2018/0284614 RESIST UNDERLAYER FILM COMPOSITION, PATTERNING PROCESS, AND METHOD FOR FORMING RESIST UNDERLAYER FILM
A resist underlayer film composition is excellent in resistance to a basic hydrogen peroxide aqueous solution in gap-filling and planarization characteristics...
2018/0284613 A PHOTOSENSITIVE COMPOSITION AND COLOR CONVERTING FILM
The present invention relates to a photosensitive composition, and a color conversion film. The present invention further relates to a use of the...
2018/0284612 RESIST COMPOSITION AND METHOD OF FORMING RESIST PATTERN
A resist composition which generates an acid when exposed and whose solubility in a developer is changed by an action of an acid, the resist composition...
2018/0284611 RESIST COMPOSITION AND METHOD OF FORMING RESIST PATTERN
A resist composition which generates an acid when exposed and whose solubility in a developer is changed by an action of an acid, the resist composition...
2018/0284610 RESIST COMPOSITION, METHOD OF FORMING RESIST PATTERN, COMPOUND, AND ACID DIFFUSION CONTROL AGENT
A resist composition which generates acid upon exposure and exhibits changed solubility in a developing solution under action of acid, the resist composition...
2018/0284609 PHOTOSENSITIVE COMPOSITIONS, COLOR FILTER AND MICROLENS DERIVED THEREFROM
Embodiments in accordance with the present invention encompass self-imagable polymer compositions containing a colorant which are useful for forming films that...
2018/0284608 PHOTOPATTERNED GROWTH OF ELECTRONICALLY ACTIVE BRUSH POLYMERS FOR LIGHT EMITTING DIODE DISPLAYS
Disclosed herein is an article comprising a substrate; a first region having a first brush polymer chemically bonded to the substrate; where the first brush...
2018/0284607 RADIATION-SENSITIVE COMPOSITION
The present invention provides a radiation-sensitive composition containing (A) a resist base material, (B) an optically active diazonaphthoquinone compound,...
2018/0284606 RESIST COMPOSITION, METHOD OF FORMING RESIST PATTERN, FLUORINE-CONTAINING COMPOUND, AND COMPOUND
A resist composition which generates acid upon exposure and exhibits changed solubility in a developing solution under action of acid, the resist composition...
2018/0284605 ACID-CLEAVABLE MONOMER AND POLYMERS INCLUDING THE SAME
A monomer having formula (I): ##STR00001## wherein in formula (I), groups and variables are the same as described in the specification.
2018/0284604 METHOD AND SYSTEM FOR IMPRINT FORCE CONTROL
Methods, systems, and apparatus for applying an imprinting force to an imprint lithography template, including providing, by a controller using a first control...
2018/0284603 OUTER MASK, PLASMA PROCESSING APPARATUS, AND MANUFACTURING METHOD OF PHOTO MASK
An outer mask used when manufacturing a photo mask by etching an object to be processed, the object having a surface on which a pattern portion is provided,...
2018/0284602 PHOTOMASK AND METHOD OF FORMING THE SAME
A method for forming a photomask includes the following steps. A substrate is provided, which has a pattern region and a peripheral region surrounding the...
2018/0284601 BLANK MASK AND FABRICATION METHOD THEREOF, AND METHOD OF FABRICATING PHOTOMASK
A method of fabricating a photomask includes providing a blank mask; removing a portion of the resist layer to form a patterned resist layer exposing a portion...
2018/0284600 METHOD AND APPARATUS FOR REPAIRING DEFECTS OF A PHOTOLITHOGRAPHIC MASK FOR THE EUV RANGE
The invention relates to a method and an apparatus for repairing at least one defect of a photolithographic mask for the extreme ultraviolet (EUV) wavelength...
2018/0284599 PELLICLE FOR EXPOSURE TO EXTREME ULTRAVIOLET LIGHT, PHOTOMASK ASSEMBLY, AND METHOD OF MANUFACTURING THE PELLICLE
Provided is a pellicle for exposure to extreme ultraviolet light (EUVL) according to an example embodiment, and the pellicle includes a pellicle membrane; and...
2018/0284598 PELLICLE
A pellicle for a lithographic device and a method for its manufacture. The pellicle comprises a carbon-based film having a thickness of between 0.1 nm and 10...
2018/0284597 ETCH KERNEL DEFINITION FOR ETCH MODELING
Geometrically-defined kernels are applied along each point of a lithographic contour to derive etch parameters that can be used to characterize the etch...
2018/0284596 EXTREME ULTRAVIOLET PHOTOMASK AND METHOD FOR FABRICATING THE SAME
An extreme ultraviolet (EUV) photomask includes a mask substrate, a reflection layer and a light-absorbing pattern layer. The reflection layer is disposed on...
2018/0284595 MASK AND PHOTOLITHOGRAPHY SYSTEM
A mask includes a transparent substrate, a first pattern, a second pattern, and a sub-resolution auxiliary feature. The first pattern and the second pattern...
2018/0284594 IMAGING METHOD AND IMAGING SYSTEM
An imaging method is provided. In an example, the imaging method includes a first X-ray image including a ROI of a subject is taken by an image capturing...
2018/0284593 REAR PROJECTION SCREEN
A rear projection screen includes a transparent substrate, a light absorbing film and a first diffusion film in sequence from a projection side to a viewer...
2018/0284592 PROJECTION SCREEN
Provided is a projection screen that can effectively diffuse incident light coming from a wide range of angles in the transverse direction and the longitudinal...
2018/0284591 PROJECTION SCREEN
Provided is a projection screen which can effectively diffuse incident light coming from a wide angle, despite that the number of laminated sheets of a light...
2018/0284590 HIGH PERFORMANCE SCREENS FOR LASER PROJECTION
The present invention provides a cinema screen that improves audience perception of brightness at, for example, a premium theater without additional...
2018/0284589 Improved Spontaneous Pop-Up Display Device
The present invention provides an improved collapsible portable, display device. The improved collapsible, portable display device, has a housing having a...
2018/0284588 AUTOFOCUS SYSTEM, PROJECTOR WITH AUTOFOCUS SYSTEM, AND AUTOFOCUS METHOD
An autofocus method for a projector is provided. A projection lens of the projector projects at least projecting one image. The image includes a correction...
2018/0284587 REAR-PROJECTED ANIMATED DISPLAY DEVICE
A system may include an enclosure with an exterior wall that defines a cavity therein. The exterior wall may have an interior surface and an exterior surface....
2018/0284586 PROJECTOR AND ILLUMINATION SYSTEM THEREOF
A projector and an illumination system thereof are provided. The illumination system includes an excitation light source group, a phosphor wheel, a light...
2018/0284585 LOW-PROFILE BEAM SPLITTER
Examples of light projector systems for directing input light from a light source to a spatial light modulator are provided. For example, an optical device is...
2018/0284584 WAVELENGTH CONVERSION ELEMENT, LIGHT SOURCE APPARATUS, AND PROJECTOR
A wavelength conversion element according to an aspect of the invention includes a wavelength conversion section having a first surface, a reflection section...
2018/0284583 LIGHT SOURCE DEVICE AND PROJECTOR
A light source device includes a first light source configured to emit excitation light in a first wavelength band and a wavelength conversion member having a...
2018/0284582 ILLUMINATION SYSTEM AND PROJECTION APPARATUS
An illumination system includes a first light source, a second light source, a third light source and a thermoelectric cooler. The first light source is...
2018/0284581 PROJECTOR AND PANEL FOR OPENING
A projector that projects an image on a screen includes a projection port for projecting the image in a direction tilting to the lower side with respect to the...
2018/0284580 INTRA-ORAL CAMERA
A camera attachment device includes a mounting ring for attachment over a camera lens of a mobile phone. A periscope module includes a first periscope end for...
2018/0284579 DRIVING APPARATUS, GIMBAL, IMAGING DEVICE, AERIAL VEHICLE AND MOVABLE DEVICE
A gimbal includes a support, a carrying member carrying an electrical component, a carrying member driver coupled to the support and the carrying member, and a...
2018/0284578 MULTIDIRECTIONAL DRIVE DEVICE, AND AUTOMATIC CAMERA
A multidirectional drive device includes: a driven member that comprises a spherical surface having depressions and protrusions; a rotation driving part that...
2018/0284577 CAMERA MODULE
A camera module, which is mounted on an inside of a front windshield of a vehicle and to image an external environment of the vehicle, includes a lens unit and...
2018/0284576 IMAGING APPARATUS, IMAGING METHOD, AND PROGRAM
The present technology relates to an imaging apparatus, an imaging method, and a program capable of obtaining a color image even in a case where photographing...
2018/0284575 UNDERWATER IMAGE CAPTURING APPARATUS
To make it possible to control an image capturing position and its direction in water easily and flexibly through the use of a miniature unmanned aerial...
2018/0284574 METHOD AND DEVICE FOR CAMERA RAPID AUTOMATIC FOCUSING
The disclosure discloses a method and device for camera rapid automatic focusing. The method comprises: driving a lens to move to multiple different focus...
2018/0284573 SWITCHABLE IMAGER LENS COVER
An imager module for a vehicle includes an imager having an imager lens. The imager is configured to collect image data from at least one of inside and outside...
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