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Patent # Description
2018/0329312 METHOD OF DETERMINING AN OVERLAY ERROR, MANUFACTURING METHOD AND SYSTEM FOR MANUFACTURING OF A MULTILAYER...
This document describes a method of determining an overlay error during manufacturing of a multilayer semiconductor device. Manufacturing of the semiconductor...
2018/0329311 METHODS FOR IDENTIFYING A PROCESS WINDOW BOUNDARY
A method including: determining a value of a characteristic of a patterning process or a product thereof, at a current value of a processing parameter;...
2018/0329310 FREEFORM DISTORTION CORRECTION
Methods and systems are provided that, in some embodiments, print and process a layer. The layer can be on a wafer or on an application panel. Thereafter,...
2018/0329309 SYSTEM AND METHOD FOR INDUSTRIAL SCALE CONTINUOUS HOLOGRAPHIC LITHOGRAPHY
A system and method for patterning of a substrate at sub-micron length scales using interference lithography that includes a substrate; a chuck that promotes...
2018/0329308 REFLECTIVE OPTICAL ELEMENT AND OPTICAL SYSTEM FOR EUV LITHOGRAPHY
A reflective optical element for the extreme ultraviolet (EUV) wavelength range having a multi-layer system extending over an area on a substrate. The system...
2018/0329307 POSITION MEASURING METHOD OF AN ALIGNMENT TARGET
A method of measuring a position of an alignment target on a substrate using an optical system. The method includes measuring a sub-segmented target by...
2018/0329306 Imaging Device
An imaging device for projecting individually controllable laser beams onto an imaging surface movable in an X-direction. The device includes a plurality of...
2018/0329305 Method of Designing Metrology Targets, Substrates Having Metrology Targets, Method of Measuring Overlay, and...
Metrology targets are formed by a lithographic process, each target comprising a bottom grating and a top grating. Overlay performance of the lithographic...
2018/0329304 SUBSTRATE BAKING APPARATUS AND BAKING OPERATION MEHOD THEREOF
This application provides a substrate baking apparatus and a baking operation method. The apparatus includes: a ring-shaped bearer body, used to cover a...
2018/0329303 FEEDING ASSEMBLY FOR LOADING A FLEXOGRAPHIC PLATE IN A TREATMENT STATION
The present invention relates to a feeding assembly (1) for automatically loading a flexographic plate (5) in a treatment station (7). The assembly according...
2018/0329302 METHOD OF PROVIDING PHOTOPATTERNED FUNCTIONAL SURFACES
An article is prepared with surface regions having different contact angles. A reactive silane material is attached to a surface having a reactive tail...
2018/0329301 COMPOSITION FOR FORMING FINE RESIST PATTERN AND PATTERN FORMING METHOD USING SAME
The present invention relates to a shrink material composition for fattening a resist pattern prepared from a negative-tone lithography process, comprising at...
2018/0329300 Flexographic Printing Plate with Improved Storage Stability
A method of making a relief image printing element comprising a plurality of relief printing dots. The method includes the steps of: (a) providing at least one...
2018/0329299 FLUORINE FREE PHOTOPATTERNABLE PHENOL FUNCTIONAL GROUP CONTAINING POLYMER COMPOSITIONS
Various polycycloolefinic polymers containing phenolic pendent groups and compositions thereof useful for forming self-imageable films encompassing such...
2018/0329298 RADIATION-SENSITIVE RESIN COMPOSITION AND RESIST PATTERN-FORMING METHOD
A radiation-sensitive resin composition includes a first compound represented by formula (1), a first polymer comprising an acid-labile group, and a...
2018/0329297 CURABLE COMPOSITION AND CURED ARTICLE USING SAME
The heat- or energy ray-curable composition for members contains an onium gallate salt having a specific structure. The invention is a heat- or energy...
2018/0329296 CLICK-CHEMISTRY COMPATIBLE STRUCTURES, CLICK-CHEMISTRY FUNCTIONALIZED STRUCTURES, AND MATERIALS AND METHODS FOR...
According to several embodiments, a composition of matter includes: a three-dimensional structure comprising photo polymerized molecules. At least some of the...
2018/0329295 COLORING COMPOSITION, COLOR FILTER, PATTERN FORMING METHOD, SOLID-STATE IMAGING DEVICE, AND IMAGE DISPLAY DEVICE
Provided is a coloring composition capable of producing a cured film having suppressed color unevenness even in a case where the coloring composition is used...
2018/0329294 LITHOGRAPHY APPARATUS AND METHOD OF MANUFACTURING ARTICLE
A lithography apparatus, before performing patterning, performs a first process for obtaining a position of a mark on a substrate by first template matching,...
2018/0329293 IMPRINT METHOD, IMPRINT APPARATUS, IMPRINT SYSTEM, AND METHOD OF MANUFACTURING ARTICLE
The present invention provides an imprint method of performing a forming process which includes supplying an imprint material on a substrate and then forming a...
2018/0329292 Lithographic Apparatus and Method of Operating a Lithographic Apparatus
A method of operating a lithographic apparatus that comprises: a projection system configured to provide exposure radiation for patterning a substrate...
2018/0329291 Method for Forming a Pellicle
The present disclosure relates to a method for forming a pellicle for extreme ultraviolet lithography, the method comprising: forming a coating of a first...
2018/0329290 Lithographic Reticle System
The present disclosure provides a lithographic reticle system comprising a reticle, a first pellicle membrane mounted in front of the reticle, and a second...
2018/0329289 Method for Forming a Carbon Nanotube Pellicle Membrane
The present disclosure relates to a method for forming a carbon nanotube pellicle membrane for an extreme ultraviolet lithography reticle, the method...
2018/0329288 PELLICLE AND METHOD OF USING THE SAME
A pellicle includes a frame. The frame includes a check valve, wherein the check valve is configured to permit gas flow from an interior of the pellicle to an...
2018/0329287 MASK PLATES AND MANUFACTURING METHODS OF ARRAY SUBSTRATES
The present disclosure relates to a mask plate and a manufacturing method of array substrates. The mask plate includes: at least two first sub-areas and at...
2018/0329286 FILM MASK, METHOD FOR MANUFACTURING SAME, AND METHOD FOR FORMING PATTERN USING FILM MASK
The present application relates to a film mask including: a transparent substrate; a darkened light-shielding pattern layer provided on the transparent...
2018/0329285 REFLECTIVE MASK BLANK, REFLECTIVE MASK AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
An object of the present invention is to obtain a reflective mask blank capable of obtaining high contrast at the edges of a phase shift film pattern. Provided...
2018/0329284 PROJECTION METHOD, PROJECTION SYSTEM, AND PROJECTOR OF FULLY COVERING MULTI-DIRECTIONAL CIRCULAR-SCREEN THROUGH...
The projection method obtains a circular-screen projection surface by dividing a visual platform to be projected, arranges each optical machine to be arranged...
2018/0329283 PROJECTION METHOD, PROJECTOR AND PROJECTION SYSTEM OF FULLY COVERING MULTI-DIRECTIONAL CIRCULAR-SCREEN
The present invention provides a projection method, a projector and a projection system of fully covering a multi-directional circular-screen. The projection...
2018/0329282 LIGHT SOURCE APPARATUS AND PROJECTOR
A light source apparatus according to an aspect of the invention includes a light source unit including a light source section that includes a plurality of...
2018/0329281 GIMBAL HAVING PARALLEL STABILITY MECHANISM
A gimbal mechanism includes a first actuator providing rotation about a first actuator axis, a second actuator providing rotation about a second actuator axis...
2018/0329280 CAMERA RIG
Implementations of a camera rig configured for use in the production of virtual reality (VR) content are provided. In some implementations, the camera rig may...
2018/0329279 MULTI-CAMERA SUPPORT BRACKET
A dual camera support bracket that includes a mounting device is described. The described mounting device is capable of positioning, securing, and protecting...
2018/0329278 RETRACTABLE LIGHTING BOX FOR PHOTOGRAPHY
A lighting box for photography comprising paneling held in place via a frame that can by quickly assembled and broken down from a small, lightweight carrying...
2018/0329277 LENS DRIVING DEVICE AND CAMERA MODULE INCLUDING SAME
One embodiment of a camera module comprises: a lens barrel including at least one lens; a bobbin for accommodating the lens barrel; and a fixing part disposed...
2018/0329276 OPTICAL SYSTEM
An optical system is provided and includes a light-sensing element, at least one optical lens, a reflecting unit and a first driving assembly. The reflecting...
2018/0329275 POSITION DETECTING APPARATUS AND IMAGE STABILIZATION APPARATUS TO WHICH POSITION DETECTING APPARATUS IS APPLIED
A position detecting apparatus includes: a fixed member in which a magnet is disposed, a movable member including a movable barrel in which a coil and an...
2018/0329274 SYSTEM AND METHOD FOR GENERATING AN OPTICAL FREQUENCY STANDARD
A system for generating an optical frequency standard is described. The system comprises a first laser source for generating a first laser output at a first...
2018/0329273 FREQUENCY CONVERSION OF ELECTROMAGNETIC RADIATION
A frequency conversion device and method is disclosed. In one aspect, a frequency device includes an array of mutually spaced semiconductor islands composed of...
2018/0329272 ALL OPTICAL SAMPLING BY SLANTED LIGHT INTERROGATION FOR CROSS-CORRELATED ENCODED RECORDING (SLICER)
Single-shot transient optical signals are recorded in a time regime of picoseconds to nanosecond. An auxiliary pump beam is crossed through the signal to...
2018/0329271 Surface Acoustic Wave (SAW) Spatial Light Modulator Device Providing Varying SAW Speed
A system and method for a Surface Acoustic Wave (SAW) spatial light modulator module, or SAW device that provides varying acoustic wave speed are disclosed....
2018/0329270 LASER SCANNER BASED ON SWITCHING FILMS
A new Laser scanner system does replace all known laser scanner systems, that either are galvanometer based or not. It makes possible to steer a beam of even...
2018/0329269 Optical Modulation Device
The invention relates to optical modulation devices and, in particular, monolithically integrated optical modulation devices. Disclosed herein is a...
2018/0329268 ELECTRONIC PAPER DISPLAY PANEL, DRIVING METHOD AND ELECTRONIC PAPER DISPLAY DEVICE
An electronic paper display panel, including a first and second substrate; an electrophoresis layer arranged between the first and second substrates, the...
2018/0329267 TFT array having conducting lines with low resistance
A pixel structure in a pixel for used in a display panel has a plurality of grooves made on a substrate and a plurality of conducting lines formed in the...
2018/0329266 MANUFACTURING METHOD OF ARRAY SUBSTRATE, ARRAY SUBSTRATE AND DISPLAY APPARATUS
The embodiments of the present disclosure provide a method of manufacturing an array substrate, an array substrate and a display apparatus. A method of...
2018/0329265 DISPLAY DEVICE
A display device is provided. The display device includes a first substrate, a second substrate, a polymer dispersed liquid crystal layer arranged between the...
2018/0329264 SEMICONDUCTOR DEVICE AND PROJECTION-TYPE DISPLAY UNIT
A semiconductor device according to an embodiment of the disclosure includes: a first substrate; a TFT element provided on the first substrate with a first...
2018/0329263 ARRAY SUBSTRATE, FABRICATING METHOD THEREOF, AND DISPLAY DEVICE
An array substrate, a fabricating method thereof, and a related display device are provided. The method for forming an array substrate can comprises: forming a...
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