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Patent # Description
2019/0004438 DEVICE METROLOGY TARGETS AND METHODS
An overlay metrology system includes one or more processors coupled to an illumination source to direct illumination to a sample and a detector to capture...
2019/0004437 METROLOGY PARAMETER DETERMINATION AND METROLOGY RECIPE SELECTION
A method including: for a metrology target, having a first biased target structure and a second differently biased target structure, created using a patterning...
2019/0004436 METHOD OF FABRICATING RETICLE
A method for exposing a wafer substrate includes forming a reticle having a device pattern. A relative orientation between the device pattern and a mask field...
2019/0004435 METHOD AND APPARATUS FOR DIRECT WRITE MASKLESS LITHOGRAPHY
A patterning apparatus, including: a substrate holder constructed to support a substrate; a particle generator configured to generate particles in the...
2019/0004434 FLUID HANDLING STRUCTURE AND LITHOGRAPHIC APPARATUS
An immersion lithographic apparatus having a fluid handling structure, the fluid handling structure configured to confine immersion fluid to a region and...
2019/0004433 REACTION FORCE DIVERSION MECHANISM, MOTOR DEVICE AND PHOTOLITHOGRAPHY MACHINE
A reaction force diversion mechanism, a motor device and a photolithography machine are disclosed. The photolithography machine includes an illumination unit,...
2019/0004432 METHOD FOR PREDICTING AT LEAST ONE ILLUMINATION PARAMETER FOR EVALUATING AN ILLUMINATION SETTING
In a method for predicting at least one illumination parameter for evaluating an illumination setting for illuminating an object field of a projection exposure...
2019/0004431 OPTICAL DEVICE FOR A LITHOGRAPHY APPARATUS, AND LITHOGRAPHY APPARATUS
The disclosure relates to an optical device for a lithography system, including an optical element, a supporting frame supporting the optical element, a sensor...
2019/0004430 Lithography Techniques for Reducing Resist Swelling
The present disclosure provides lithography resist materials and corresponding lithography techniques for improving lithography resolution, in particular, by...
2019/0004429 METHOD FOR ACQUIRING PARAMETER FOR DOSE CORRECTION OF CHARGED PARTICLE BEAM, CHARGED PARTICLE BEAM WRITING...
A parameter acquiring method for dose correction of a charged particle beam includes writing evaluation patterns on a substrate coated with resist; writing,...
2019/0004428 FORMING CONDUCTIVE VIAS USING A LIGHT GUIDE
The present invention provides a process and a structure of forming conductive vias using a light guide. In an exemplary embodiment, the process includes...
2019/0004427 SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
A substrate processing apparatus includes a spin chuck that holds a substrate, a processing liquid supply unit that supplies a first processing liquid having...
2019/0004426 NEGATIVE RESIST PATTERN-FORMING METHOD, AND COMPOSITION FOR UPPER LAYER FILM FORMATION
Provided is a negative resist pattern-forming method that enables a resist pattern with fewer development defects to be formed while favorable water repellency...
2019/0004425 METHOD OF FORMING RESIST PATTERN
The objective is to favorably form a clear resist pattern using a resist composition containing a polymer that can inhibit resist pattern collapse when used as...
2019/0004424 THERMALLY CONDUCTIVE TYPE PHOTOSENSITIVE RESIN
A thermally conductive type photosensitive resin is provided. The resin comprises (a) a photosensitive polyimide, (b) an inorganic filler, and (c) a silica...
2019/0004423 CURED FILM AND METHOD FOR PRODUCING SAME
Provided is a cured film having high chemical resistance, high elongation, and high adhesion to metal copper. A cured film formed by curing a photosensitive...
2019/0004422 COMPOSITION, FILM, CURED FILM, OPTICAL SENSOR, AND METHOD FOR PRODUCING FILM
A composition includes at least one of particles having an average primary particle diameter of 50 to 150 nm or particles having an average major axis length...
2019/0004421 PATTERN FORMING METHOD, PRODUCTION METHOD FOR PROCESSED SUBSTRATE, PRODUCTION METHOD FOR OPTICAL COMPONENT,...
A pattern forming method comprising, a step (1) of coating a layer formed of a curable composition (A1) containing at least a certain polymerizable compound...
2019/0004420 PHOTOMASK BLANK AND PHOTOMASK
A photomask blank for an exposure light of ArF excimer laser, including a transparent substrate and a light-shielding film containing molybdenum, silicon, and...
2019/0004419 MASK BLANK, TRANSFER MASK, METHOD FOR MANUFACTURING TRANSFER MASK, AND METHOD FOR MANUFACTURING SEMICONDUCTOR...
A mask blank is provided, by which an alignment mark can be formed between a transparent substrate and a laminated structure of a light semitransmissive film,...
2019/0004418 METHODS OF IMPROVING OPTICAL PROXIMITY CORRECTION MODELS AND METHODS OF FABRICATING SEMICONDUCTOR DEVICES USING...
A method of fabricating a semiconductor device includes designing a layout, performing an optical proximity correction (OPC) process to correct the designed...
2019/0004417 CRITICAL DIMENSION VARIATION CORRECTION IN EXTREME ULTRAVIOLET LITHOGRAPHY
A method of correcting a critical dimension (CD) variation in extreme ultraviolet (EUV) photolithography includes mapping the CD variation of a wafer exposure...
2019/0004416 Lithography Mask and Method
In an embodiment, a photomask includes: a substrate over a first conductive layer, the substrate formed of a low thermal expansion material (LTEM); a second...
2019/0004415 DEVICE FOR TESTING FISH-EYE CAMERA
A test device for the image-capturing ability of a fish-eye camera comprises a test box, an image test console carrying the fish-eye camera, a light plate on...
2019/0004414 Adaptive Resolution and Projection Format in Multi-Directional Video
Techniques are described for implementing format configurations for multi-directional video and for switching between them. Source images may be assigned to...
2019/0004413 COLOUR PROJECTOR WITH SPECTRAL CONVERSION COLORATION WHEEL
A system for projecting images, configured to implement a sequential type colour projection. The system includes an emissive matrix display device; and a...
2019/0004412 PORTABLE AIR PROJECTION APPARATUS
Provided is a portable air projection apparatus, which may be used in conjunction with a mobile phone and can project the content displayed on the screen of...
2019/0004411 VIRTUAL IMAGE DISPLAY DEVICE
A virtual image display device includes: a projection unit that projects an image display light; a concave mirror that reflects the image display light toward...
2019/0004410 IMAGE DISPLAY APPARATUS, IMAGE DISPLAY METHOD, AND PROGRAM
An image display apparatus according to an embodiment of the present technology includes a first light source module, a second light source module, an output...
2019/0004409 LIGHT SOURCE APPARATUS AND PROJECTION DISPLAY APPARATUS
The light source apparatus includes a solid state light source, a phosphor plate, a dichroic mirror, a phase differential panel and an optical filter. The...
2019/0004408 OPTICAL MIXER AND MULTI-WAVELENGTH HOMOGENEOUS LIGHT SOURCE USING THE SAME
An optical mixer efficiently homogenizes light flux emitted from a plurality of light sources emitting light having different wavelengths to provide a...
2019/0004407 COLOR CONVERSION LAYER AND DISPLAY APPARATUS HAVING THE SAME
Disclosed is a color conversion layer including at least one light emitting material including at least one composite particle surrounded partially or totally...
2019/0004406 HIGH-SPEED DISPLAY DEVICE, HIGH-SPEED DISPLAY METHOD, AND REALTIME MEASUREMENT-PROJECTION DEVICE
A high-speed display device inputs first video information having a first frame rate and a gradation of first number of bits, generates a set of M (integer of...
2019/0004405 HOLDING CASE FOR INSTALLING HANDSET ADD-ON LENS, HANDSET EXTERNAL LENS CONNECTION STRUCTURE, AND HANDSET...
The present application relates to a holding case for installing handset add-on lens. The holding case comprises a housing body, the housing body has a front...
2019/0004404 ARTICULATED STABILIZER FRAME WITH MAGNETIC ATTACHMENT FOR MONOPOD
A camera support apparatus includes a telescopically collapsible monopod, a pad sized and shaped to be set on by a user, especially a user in a wheelchair and...
2019/0004403 Contoured Airfoil Payload Stabilizer
A buoyant airfoil stabilization platform that can compensate for fluid flow above, below, and around an attached payload. The airfoil stabilization platform...
2019/0004402 MOUNTING SYSTEMS FOR ELECTRONIC DEVICES
Mounting systems can couple cameras to other objects that support the cameras. A secure connection between the mounting system and the camera can prevent the...
2019/0004401 Mount Hinge for an Electronic Device
A hinge for an electronic device includes a base including a stem, a ball rigidly fixed to the stem, a first friction surface that contacts and is configured...
2019/0004400 IMAGE CAPTURING CONTROL APPARATUS, CONTROL METHOD, AND STORAGE MEDIUM
There is provided an image capturing control apparatus. An AF control unit performs AF control within an area included in a captured area and corresponding to...
2019/0004399 PORTABLE APPARATUS FOR PROVIDING ACOUSTIC AND/OR WEATHER SHIELDING FOR AUDIO AND/OR VIDEO RECORDING DEVICES
A portable apparatus for providing acoustic and/or weather shielding for audio and/or video recording devices. The apparatus includes a collapsible housing...
2019/0004398 SHUTTER APPARATUS AND IMAGING APPARATUS
A shutter apparatus includes a shutter base having an opening, a light shield configured to reciprocate between a closed state that closes the opening and an...
2019/0004397 Mobile Device with Tandem Lenses
A system and method for a mobile device which has at least two tandem lenses. The tandem lenses work together to create a final image. The final image can be a...
2019/0004396 LIFETIME EXTENDING AND PERFORMANCE IMPROVEMENTS OF OPTICAL FIBERS VIA LOADING
A method of making a microstructured optical fiber including loading the core and cladding materials of the fiber with hydrogen and deuterium at a loading...
2019/0004395 COMPONENT SHIFTING APPARATUS WITH SHAPE MEMORY ALLOY ACTUATORS
Systems and methods for shifting a position of one or more optical elements are disclosed. In embodiment, a system may include a housing having a chamber...
2019/0004394 BEAM STEERING DEVICE AND ELECTRONIC APPARATUS INCLUDING THE SAME
A beam steering device includes an optical waveguide configured to split input light into a plurality of split light along a plurality of paths and output the...
2019/0004393 OPTICAL SCANNING DEVICE THAT INCLUDES WAVEGUIDES
An optical scanning device includes: a first waveguide that propagates light by total reflection; and a second waveguide. The second waveguide includes: a...
2019/0004392 INFORMATION PROCESSING METHOD AND ELECTRONIC APPARATUS
An information processing method includes determining a type of a virtual scene displayed by a virtual electronic device, determining a target focus distance...
2019/0004391 ELECTRICALLY CONTROLLABLE OPTICAL ELEMENT MADE OF AN OPTICALLY ISOTROPIC LIQUID, IN PARTICULAR LENS, AND METHOD...
In order to configure or produce an electrically controllable optical element on the basis of the electro-optic Kerr effect with a low threshold and operating...
2019/0004390 NOVEL TRANSPARENCY AND COLOR TUNABLE ELECTRO-OPTICAL DEVICE USING COLLOIDAL CORE/SHELL NANOPARTICLES
According to one embodiment, a product is a mixture including a solvent and generally spherical colloidal nanoparticles, the colloidal nanoparticles each...
2019/0004389 LIGHT REFLECTIVE MATERIAL AND LIGHT CONTROL DEVICE
Provided is a light reflective material that enables stable switching between light transmission and light reflection when used in a light control device. A...
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