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Patent # | Description |
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2019/0004438 |
DEVICE METROLOGY TARGETS AND METHODS An overlay metrology system includes one or more processors coupled to an illumination source to direct illumination to a sample and a detector to capture... |
2019/0004437 |
METROLOGY PARAMETER DETERMINATION AND METROLOGY RECIPE SELECTION A method including: for a metrology target, having a first biased target structure and a second differently biased target structure, created using a patterning... |
2019/0004436 |
METHOD OF FABRICATING RETICLE A method for exposing a wafer substrate includes forming a reticle having a device pattern. A relative orientation between the device pattern and a mask field... |
2019/0004435 |
METHOD AND APPARATUS FOR DIRECT WRITE MASKLESS LITHOGRAPHY A patterning apparatus, including: a substrate holder constructed to support a substrate; a particle generator configured to generate particles in the... |
2019/0004434 |
FLUID HANDLING STRUCTURE AND LITHOGRAPHIC APPARATUS An immersion lithographic apparatus having a fluid handling structure, the fluid handling structure configured to confine immersion fluid to a region and... |
2019/0004433 |
REACTION FORCE DIVERSION MECHANISM, MOTOR DEVICE AND PHOTOLITHOGRAPHY
MACHINE A reaction force diversion mechanism, a motor device and a photolithography machine are disclosed. The photolithography machine includes an illumination unit,... |
2019/0004432 |
METHOD FOR PREDICTING AT LEAST ONE ILLUMINATION PARAMETER FOR EVALUATING
AN ILLUMINATION SETTING In a method for predicting at least one illumination parameter for evaluating an illumination setting for illuminating an object field of a projection exposure... |
2019/0004431 |
OPTICAL DEVICE FOR A LITHOGRAPHY APPARATUS, AND LITHOGRAPHY APPARATUS The disclosure relates to an optical device for a lithography system, including an optical element, a supporting frame supporting the optical element, a sensor... |
2019/0004430 |
Lithography Techniques for Reducing Resist Swelling The present disclosure provides lithography resist materials and corresponding lithography techniques for improving lithography resolution, in particular, by... |
2019/0004429 |
METHOD FOR ACQUIRING PARAMETER FOR DOSE CORRECTION OF CHARGED PARTICLE
BEAM, CHARGED PARTICLE BEAM WRITING... A parameter acquiring method for dose correction of a charged particle beam includes writing evaluation patterns on a substrate coated with resist; writing,... |
2019/0004428 |
FORMING CONDUCTIVE VIAS USING A LIGHT GUIDE The present invention provides a process and a structure of forming conductive vias using a light guide. In an exemplary embodiment, the process includes... |
2019/0004427 |
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD A substrate processing apparatus includes a spin chuck that holds a substrate, a processing liquid supply unit that supplies a first processing liquid having... |
2019/0004426 |
NEGATIVE RESIST PATTERN-FORMING METHOD, AND COMPOSITION FOR UPPER LAYER
FILM FORMATION Provided is a negative resist pattern-forming method that enables a resist pattern with fewer development defects to be formed while favorable water repellency... |
2019/0004425 |
METHOD OF FORMING RESIST PATTERN The objective is to favorably form a clear resist pattern using a resist composition containing a polymer that can inhibit resist pattern collapse when used as... |
2019/0004424 |
THERMALLY CONDUCTIVE TYPE PHOTOSENSITIVE RESIN A thermally conductive type photosensitive resin is provided. The resin comprises (a) a photosensitive polyimide, (b) an inorganic filler, and (c) a silica... |
2019/0004423 |
CURED FILM AND METHOD FOR PRODUCING SAME Provided is a cured film having high chemical resistance, high elongation, and high adhesion to metal copper. A cured film formed by curing a photosensitive... |
2019/0004422 |
COMPOSITION, FILM, CURED FILM, OPTICAL SENSOR, AND METHOD FOR PRODUCING
FILM A composition includes at least one of particles having an average primary particle diameter of 50 to 150 nm or particles having an average major axis length... |
2019/0004421 |
PATTERN FORMING METHOD, PRODUCTION METHOD FOR PROCESSED SUBSTRATE,
PRODUCTION METHOD FOR OPTICAL COMPONENT,... A pattern forming method comprising, a step (1) of coating a layer formed of a curable composition (A1) containing at least a certain polymerizable compound... |
2019/0004420 |
PHOTOMASK BLANK AND PHOTOMASK A photomask blank for an exposure light of ArF excimer laser, including a transparent substrate and a light-shielding film containing molybdenum, silicon, and... |
2019/0004419 |
MASK BLANK, TRANSFER MASK, METHOD FOR MANUFACTURING TRANSFER MASK, AND
METHOD FOR MANUFACTURING SEMICONDUCTOR... A mask blank is provided, by which an alignment mark can be formed between a transparent substrate and a laminated structure of a light semitransmissive film,... |
2019/0004418 |
METHODS OF IMPROVING OPTICAL PROXIMITY CORRECTION MODELS AND METHODS OF
FABRICATING SEMICONDUCTOR DEVICES USING... A method of fabricating a semiconductor device includes designing a layout, performing an optical proximity correction (OPC) process to correct the designed... |
2019/0004417 |
CRITICAL DIMENSION VARIATION CORRECTION IN EXTREME ULTRAVIOLET LITHOGRAPHY A method of correcting a critical dimension (CD) variation in extreme ultraviolet (EUV) photolithography includes mapping the CD variation of a wafer exposure... |
2019/0004416 |
Lithography Mask and Method In an embodiment, a photomask includes: a substrate over a first conductive layer, the substrate formed of a low thermal expansion material (LTEM); a second... |
2019/0004415 |
DEVICE FOR TESTING FISH-EYE CAMERA A test device for the image-capturing ability of a fish-eye camera comprises a test box, an image test console carrying the fish-eye camera, a light plate on... |
2019/0004414 |
Adaptive Resolution and Projection Format in Multi-Directional Video Techniques are described for implementing format configurations for multi-directional video and for switching between them. Source images may be assigned to... |
2019/0004413 |
COLOUR PROJECTOR WITH SPECTRAL CONVERSION COLORATION WHEEL A system for projecting images, configured to implement a sequential type colour projection. The system includes an emissive matrix display device; and a... |
2019/0004412 |
PORTABLE AIR PROJECTION APPARATUS Provided is a portable air projection apparatus, which may be used in conjunction with a mobile phone and can project the content displayed on the screen of... |
2019/0004411 |
VIRTUAL IMAGE DISPLAY DEVICE A virtual image display device includes: a projection unit that projects an image display light; a concave mirror that reflects the image display light toward... |
2019/0004410 |
IMAGE DISPLAY APPARATUS, IMAGE DISPLAY METHOD, AND PROGRAM An image display apparatus according to an embodiment of the present technology includes a first light source module, a second light source module, an output... |
2019/0004409 |
LIGHT SOURCE APPARATUS AND PROJECTION DISPLAY APPARATUS The light source apparatus includes a solid state light source, a phosphor plate, a dichroic mirror, a phase differential panel and an optical filter. The... |
2019/0004408 |
OPTICAL MIXER AND MULTI-WAVELENGTH HOMOGENEOUS LIGHT SOURCE USING THE SAME An optical mixer efficiently homogenizes light flux emitted from a plurality of light sources emitting light having different wavelengths to provide a... |
2019/0004407 |
COLOR CONVERSION LAYER AND DISPLAY APPARATUS HAVING THE SAME Disclosed is a color conversion layer including at least one light emitting material including at least one composite particle surrounded partially or totally... |
2019/0004406 |
HIGH-SPEED DISPLAY DEVICE, HIGH-SPEED DISPLAY METHOD, AND REALTIME
MEASUREMENT-PROJECTION DEVICE A high-speed display device inputs first video information having a first frame rate and a gradation of first number of bits, generates a set of M (integer of... |
2019/0004405 |
HOLDING CASE FOR INSTALLING HANDSET ADD-ON LENS, HANDSET EXTERNAL LENS
CONNECTION STRUCTURE, AND HANDSET... The present application relates to a holding case for installing handset add-on lens. The holding case comprises a housing body, the housing body has a front... |
2019/0004404 |
ARTICULATED STABILIZER FRAME WITH MAGNETIC ATTACHMENT FOR MONOPOD A camera support apparatus includes a telescopically collapsible monopod, a pad sized and shaped to be set on by a user, especially a user in a wheelchair and... |
2019/0004403 |
Contoured Airfoil Payload Stabilizer A buoyant airfoil stabilization platform that can compensate for fluid flow above, below, and around an attached payload. The airfoil stabilization platform... |
2019/0004402 |
MOUNTING SYSTEMS FOR ELECTRONIC DEVICES Mounting systems can couple cameras to other objects that support the cameras. A secure connection between the mounting system and the camera can prevent the... |
2019/0004401 |
Mount Hinge for an Electronic Device A hinge for an electronic device includes a base including a stem, a ball rigidly fixed to the stem, a first friction surface that contacts and is configured... |
2019/0004400 |
IMAGE CAPTURING CONTROL APPARATUS, CONTROL METHOD, AND STORAGE MEDIUM There is provided an image capturing control apparatus. An AF control unit performs AF control within an area included in a captured area and corresponding to... |
2019/0004399 |
PORTABLE APPARATUS FOR PROVIDING ACOUSTIC AND/OR WEATHER SHIELDING FOR
AUDIO AND/OR VIDEO RECORDING DEVICES A portable apparatus for providing acoustic and/or weather shielding for audio and/or video recording devices. The apparatus includes a collapsible housing... |
2019/0004398 |
SHUTTER APPARATUS AND IMAGING APPARATUS A shutter apparatus includes a shutter base having an opening, a light shield configured to reciprocate between a closed state that closes the opening and an... |
2019/0004397 |
Mobile Device with Tandem Lenses A system and method for a mobile device which has at least two tandem lenses. The tandem lenses work together to create a final image. The final image can be a... |
2019/0004396 |
LIFETIME EXTENDING AND PERFORMANCE IMPROVEMENTS OF OPTICAL FIBERS VIA
LOADING A method of making a microstructured optical fiber including loading the core and cladding materials of the fiber with hydrogen and deuterium at a loading... |
2019/0004395 |
COMPONENT SHIFTING APPARATUS WITH SHAPE MEMORY ALLOY ACTUATORS Systems and methods for shifting a position of one or more optical elements are disclosed. In embodiment, a system may include a housing having a chamber... |
2019/0004394 |
BEAM STEERING DEVICE AND ELECTRONIC APPARATUS INCLUDING THE SAME A beam steering device includes an optical waveguide configured to split input light into a plurality of split light along a plurality of paths and output the... |
2019/0004393 |
OPTICAL SCANNING DEVICE THAT INCLUDES WAVEGUIDES An optical scanning device includes: a first waveguide that propagates light by total reflection; and a second waveguide. The second waveguide includes: a... |
2019/0004392 |
INFORMATION PROCESSING METHOD AND ELECTRONIC APPARATUS An information processing method includes determining a type of a virtual scene displayed by a virtual electronic device, determining a target focus distance... |
2019/0004391 |
ELECTRICALLY CONTROLLABLE OPTICAL ELEMENT MADE OF AN OPTICALLY ISOTROPIC
LIQUID, IN PARTICULAR LENS, AND METHOD... In order to configure or produce an electrically controllable optical element on the basis of the electro-optic Kerr effect with a low threshold and operating... |
2019/0004390 |
NOVEL TRANSPARENCY AND COLOR TUNABLE ELECTRO-OPTICAL DEVICE USING
COLLOIDAL CORE/SHELL NANOPARTICLES According to one embodiment, a product is a mixture including a solvent and generally spherical colloidal nanoparticles, the colloidal nanoparticles each... |
2019/0004389 |
LIGHT REFLECTIVE MATERIAL AND LIGHT CONTROL DEVICE Provided is a light reflective material that enables stable switching between light transmission and light reflection when used in a light control device. A... |