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Patent # Description
2019/0057866 CRYSTAL, CRYSTALLINE FILM, SEMICONDUCTOR DEVICE INCLUDING CRYSTALLINE FILM, AND METHOD FOR PRODUCING...
According to an aspect of a present inventive subject matter, a crystal includes: a corundum-structured oxide semiconductor as a major component, the...
2019/0057865 CRYSTALLINE FILM, SEMICONDUCTOR DEVICE INCLUDING CRYSTALLINE FILM, AND METHOD FOR PRODUCING CRYSTALLINE FILM
According to an aspect of a present inventive subject matter, a crystalline film includes a crystalline metal oxide as a major component, the crystalline film...
2019/0057864 Systems and Methods for UV-Based Suppression of Plasma Instability
A substrate is positioned in exposure to a plasma generation region within a plasma processing chamber. A first plasma is generated within the plasma...
2019/0057863 METHODS AND APPARATUS FOR DOPING ENGINEERING AND THRESHOLD VOLTAGE TUNING BY INTEGRATED DEPOSITION OF TITANIUM...
Methods and apparatus for forming a semiconductor structure, including depositing a doping stack having a first surface atop a high-k dielectric layer, wherein...
2019/0057862 PLASMA DEPOSITION OF CARBON HARDMASK
A method of forming a transparent carbon layer on a substrate is provided. The method comprises generating an electron beam plasma above a surface of a...
2019/0057861 MANUFACTURING METHOD FOR SEMICONDUCTOR APPARATUS
The present disclosure discloses a manufacturing method for a semiconductor apparatus, and relates to the field of semiconductor technologies. Forms of the...
2019/0057860 METHODS FOR IMPROVING PERFORMANCE IN HAFNIUM OXIDE-BASED FERROELECTRIC MATERIAL USING PLASMA AND/OR THERMAL...
A method of forming ferroelectric hafnium oxide (HfO.sub.2) in a substrate processing system includes arranging a substrate within a processing chamber of the...
2019/0057859 Methods and Systems for Forming a Mask Layer
In one aspect, the present disclosure relates to a method. The method includes providing a substrate having a patterned layer thereon, the patterned layer...
2019/0057858 GEOMETRICALLY SELECTIVE DEPOSITION OF A DIELECTRIC FILM
Provided are methods for the selective deposition of material on a sidewall surface of a patterned feature. In some embodiments, the methods involve providing...
2019/0057857 METHOD FOR FORMING SILICON NITRIDE FILM SELECTIVELY ON SIDEWALLS OF TRENCHES
A method for fabricating a layer structure in a trench includes: simultaneously forming a dielectric film containing a Si--N bond on an upper surface, and a...
2019/0057856 ION TRAPS THAT APPLY AN INVERSE MATHIEU Q SCAN
The invention generally relates to ion traps and methods of use thereof. In certain embodiments, the invention provides a system that includes a mass...
2019/0057855 Surface Ion Trap Having A Trapping Location Whose Position is Controllable in Three Dimensions with High Precision
An ion-trap system having a trapping location that is controllable with nanometer-scale precision in three dimensions is disclosed. The ion-trap system...
2019/0057854 MASS SPECTROMETERS HAVING SEGMENTED ELECTRODES AND ASSOCIATED METHODS
Disclosed herein are mass spectrometers having segmented electrodes and associated methods. According to an aspect, an apparatus or mass spectrometer includes...
2019/0057853 Floating Magnet For A Mass Spectrometer
An electromagnet assembly suitable for mass spectrometer comprising one yoke; and two pole pieces; the pole pieces being comprised in a vacuum chamber and...
2019/0057852 METHODS AND SYSTEMS FOR ION MANIPULATION
An ion manipulation device comprises a plurality of electrode rings arranged longitudinally adjacent to each other and defining a central axis therethrough. At...
2019/0057851 Physical Vapor Deposition Processing Systems Target Cooling
Physical vapor deposition target assemblies and methods of manufacturing such target assemblies are disclosed. An exemplary target assembly comprises a flow...
2019/0057850 SPUTTERING GAP MEASUREMENT APPARATUS AND MAGNETRON SPUTTERING DEVICE
A magnetron sputtering device in one embodiment of the present disclosure includes a support table supporting thereon a base substrate, and a floating mask...
2019/0057849 Physical Vapor Deposition Chamber Particle Reduction Apparatus And Methods
Physical vapor deposition processing chambers and methods of processing a substrate such as an EUV mask blank in a physical vapor deposition chamber are...
2019/0057848 MAGNETIC FORCE RELEASE FOR SPUTTERING SOURCES WITH MAGNETIC TARGET MATERIALS
A magnet bar assembly for a rotary target cathode comprises a support structure, a magnet bar structure movably attached to the support structure and including...
2019/0057847 RF IMPEDANCE MODEL BASED FAULT DETECTION
A method to detect a potential fault in a plasma system is described. The method includes accessing a model of one or more parts of the plasma system. The...
2019/0057846 PLASMA PROCESSING APPARATUS AND SAMPLE STAGE THEREOF
There is disclosed a plasma processing apparatus for processing a wafer put on a sample stage disposed in a processing chamber within a vacuum vessel by the...
2019/0057845 PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS
A decrease of an etching rate of a substrate can be suppressed, and energy of ions irradiated to an inner wall of a chamber main body can be reduced. A plasma...
2019/0057843 Plasma processing apparatus
An apparatus includes a chamber main body, a microwave output device that generates a microwave having a bandwidth, a wave guide tube that is connected between...
2019/0057842 RF SIGNAL TRANSMITTING DEVICE USED IN PLASMA PROCESSING APPARATUS
The invention provides an RF signal transmitting device for plasma processing apparatus. The device includes a metal layer embedded in a plate and a metal rod...
2019/0057841 DISTRIBUTED ELECTRODE ARRAY FOR PLASMA PROCESSING
Embodiments of the disclosure provide a plasma source assembly and process chamber design that can be used for any number of substrate processing techniques....
2019/0057840 DISTRIBUTED ELECTRODE ARRAY FOR PLASMA PROCESSING
Embodiments of the disclosure provide a plasma source assembly and process chamber design that can be used for any number of substrate processing techniques....
2019/0057839 Systems And Methods For Controlling Directionality Of Ions In An Edge Region By Using An Electrode Within A...
Systems and methods for controlling directionality of ion flux at an edge region within a plasma chamber are described. One of the systems includes a radio...
2019/0057838 METHOD FOR ELECTRONIC LITHOGRAPHY WITH ELECTROSTATIC SCREENING
An e-beam lithography process includes the following steps: implanting into a substrate, or into a dielectric layer deposited on the surface of the substrate,...
2019/0057837 APPARATUS OF PLURAL CHARGED-PARTICLE BEAMS
A multi-beam apparatus for observing a sample with high resolution and high throughput is proposed. In the apparatus, a source-conversion unit changes a single...
2019/0057836 Diffraction Pattern Detection In A Transmission Charged Particle Microscope
Techniques of using a Transmission Charged Particle Microscope for diffraction pattern detection are disclosed. An example method including irradiating at...
2019/0057835 System And Method For Reduced Workpiece Adhesion Due To Electrostatic Charge During Removal From A Processing...
A system and method for reduced workpiece adhesion during removal from a semiconductor processing station. The system provides an electrostatic charge detector...
2019/0057834 ELECTRON REFLECTOMETER AND PROCESS FOR PERFORMING SHAPE METROLOGY
An electron reflectometer includes: a sample stage; a source that produces source electrons; a source collimator; and an electron detector that receives...
2019/0057833 Charged Particle Source
This invention provides a charged particle source, which comprises an emitter and means fo generating a magnetic field distribution. The magnetic field...
2019/0057832 ANALYTICAL X-RAY TUBE WITH HIGH THERMAL PERFORMANCE
An analytical X-ray tube with an anode target material that emits characteristic X-rays in response to excitation by an electron beam may include any of...
2019/0057831 Left-handed material extended interaction klystron
A left-handed material extended interaction klystron includes: an input cavity, a middle cavity, an output cavity, first-section drift tube and a ...
2019/0057830 ELECTRON GUN ADJUSTMENT IN A VACUUM
Embodiments include a vacuum device, comprising: an enclosure configured to enclose a vacuum, the enclosure including an external base including an opening; an...
2019/0057829 ELECTRON GUN THERMAL DISSIPATION IN A VACUUM
Embodiments include a vacuum device, comprising: an enclosure configured to enclose a vacuum, comprising an external base forming at least a portion of the...
2019/0057828 Cascading Contactor Drive System
A system for sequentially interconnecting battery modules of a battery pack is disclosed. The battery pack may comprise first, second and third battery...
2019/0057827 METHOD TO DETECT OPERATIONAL STATE OF REMOTE DISCONNECT LATCHING RELAY
A method and system for monitoring a state of a relay switch. The method applies a voltage signal to a solenoid of the relay switch for actuation of the relay...
2019/0057826 Self-Powered Piezoelectric-Based Programmable Electronic Impulse Switches
A piezoelectric generator for generating power upon an acceleration and upon a deceleration of a body. The piezoelectric generator including: first and second...
2019/0057825 DC Voltage Switch
Various embodiments may include a voltage switch having two terminals linked by an operating current path comprising a mechanical switch, and having means of...
2019/0057824 SYSTEM AND METHOD FOR PROVIDING INDICATION OF A CLOSED SWITCH
A switch including a blade, an electrical terminal, and a sensor. The blade is pivotable between an open position and a closed position. The electrical...
2019/0057823 KEY SWITCH AND KEYBOARD
A key switch includes a key top; a pair of links that support the key top such that the key top is capable of being elevated and lowered; and a switch that...
2019/0057822 MOTOR CONTROL CENTER SUBUNIT HAVING MOVEABLE LINE CONTACTS AND METHOD OF MANUFACTURE
A system and method for connecting supply power to motor control components includes use of a motor control center subunit with moveable supply power contacts....
2019/0057821 Switching Device
This invention relates to a switching device (10). More specifically, the invention relates to a retrofit switching device (10) for mechanically switching a...
2019/0057820 Rotating Handle Device
A rotating handle device formed by the the mounting of an assembly including an attachment base that receives a grip and a sliding button, a sliding limiting...
2019/0057819 Method for making composite materials and flexible supercapacitor devices
Method for making composite materials and flexible supercapacitor devices The present invention provides a method (201) for making composite materials used in...
2019/0057818 POWER SUPPLY DEVICE USING SOLAR CELL, ELECTRONIC APPARATUS SUCH AS COMMUNICATION APPARATUS EQUIPPED WITH THE...
An object of the present disclosure is to suppress deterioration of a single cell in a power supply device that uses a solar cell module including a plurality...
2019/0057817 Electrolytic Capacitor
An apparatus is disclosed which includes an electrolytic capacitive element with multiple capacitor sections.
2019/0057816 ELECTRET SHEET
The present invention provides an electret sheet that retains high piezoelectricity under high-temperature condition. The electret sheet of the invention is...
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