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Patent # Description
2019/0080909 SYSTEM AND METHOD FOR PRECISION FORMATION OF A LATTICE ON A SUBSTRATE
A system and method for manufacturing a lattice structure of ionized particles on a substrate, wherein the process may be improved by controlling the number of...
2019/0080908 METHOD OF MANUFACTURING METAL HARDMASK AND SEMICONDUCTOR DEVICE
A method of manufacturing a semiconductor device includes forming an etch target layer on a substrate; forming an amorphous metal layer on the etch target...
2019/0080907 SEMICONDUCTOR STRUCTURE
A semiconductor structure comprises a substrate comprising an interlayer dielectric (ILD) and a silicon layer disposed over the ILD, wherein the ILD comprises...
2019/0080906 SPUTTERING SYSTEM AND METHOD FOR FORMING A METAL LAYER ON A SEMICONDUCTOR DEVICE
A method for sputtering an aluminum layer on a surface of a semiconductor device is presented. The method includes three sputtering steps for depositing the...
2019/0080905 METHOD OF ASSESSING SEMICONDUCTOR SUBSTRATE AND METHOD OF ASSESSING DEVICE CHIP
A method of assessing a semiconductor substrate includes a sticking step of sticking a device layer of the semiconductor substrate to a support substrate, a...
2019/0080904 Selective Deposition Defects Removal By Chemical Etch
Methods of depositing a film selectively onto a first substrate surface relative to a second substrate surface are described. The methods include exposing a...
2019/0080903 DIELECTRIC GAPFILL OF HIGH ASPECT RATIO FEATURES UTILIZING A SACRIFICIAL ETCH CAP LAYER
Methods and apparatuses for depositing material into high aspect ratio features, features in a multi-laminate stack, features having positively sloped...
2019/0080902 SUBSTRATE CLEANING COMPOSITION, SUBSTRATE TREATING METHOD, AND SUBSTRATE TREATING APPARATUS
Disclosed are an anhydrous substrate cleaning composition, a substrate treating method, and a substrate treating apparatus. The anhydrous substrate cleaning...
2019/0080901 METHOD FOR PERFORMING A PHOTOLITHOGRAPHY PROCESS
A method for performing a photolithography process is provided. The method includes forming a resist layer over a substrate and exposing a portion of the...
2019/0080900 METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
In one embodiment, a method of manufacturing a semiconductor device includes forming a first film on a substrate. The method further includes forming a second...
2019/0080899 IMPRINT APPARATUS AND IMPRINT METHOD
According to an embodiment, a first alignment mark includes a first template-side mark in which a plurality of first portions are arranged with a first period,...
2019/0080898 LIGHT SOURCE, LIGHTING DEVICE AND METHOD OF LIGHTING THE SAME
A light source is composed of a discharge lamp, a resistor and a reflector container. The discharge lamp is provided as a source of light. The resistor...
2019/0080897 PHOSPHOR-CONTAINING FILM AND BACKLIGHT UNIT
Provided are a phosphor-containing capable of suppressing deterioration of phosphors and can be manufactured with high efficiency and a backlight unit....
2019/0080896 MASS SPECTROMETER, ION OPTICAL DEVICE, AND METHOD FOR ION MANIPULATION IN MASS SPECTROMETER
The invention provides a mass spectrometer, an ion optical device, and a method for ion manipulation in a mass spectrometer. The mass spectrometer includes a...
2019/0080895 ION OPTICAL DEVICE
An ion optical device includes one or more pairs of confinement electrode units arranged at two sides of a first direction; a power supply device for applying...
2019/0080894 APPARATUS AND METHOD FOR THERMAL ASSISTED DESORPTION IONIZATION SYSTEMS
The present invention is directed to a method and device to desorb an analyte using heat to allow desorption of the analyte molecules, where the desorbed...
2019/0080893 SYSTEMS AND METHODS USING A GAS MIXTURE TO SELECT IONS
Certain configurations described herein are directed to mass spectrometer systems that can use a gas mixture to select and/or detect ions. In some instances,...
2019/0080892 HIGH FREQUENCY VOLTAGE SUPPLY CONTROL METHOD FOR MULTIPOLE OR MONOPOLE ANALYSERS
A voltage supply system for supplying an RF voltage to an RF resonant load comprising an ion-optical component of a mass spectrometer is disclosed. The system...
2019/0080891 COATER
This invention relates to generation and control of electron emission and transport in a plasma device for enhancing ionization in sputtering, including...
2019/0080890 VACUUM DEPOSITION COMPOSITE TARGET
A vacuum deposition composite target includes a plurality of target blocks each including a target body, an insulating layer and a high-resistance-conductive...
2019/0080889 Method And System For Cleaning A Process Chamber
Implementations disclosed herein generally relate to systems and methods of protecting a substrate support in a process chamber from cleaning fluid during a...
2019/0080888 PLASMA PROCESSING APPARATUS AND METHOD FOR VENTING A PROCESSING CHAMBER TO ATMOSPHERE
A plasma processing apparatus includes a processing chamber in which plasma processing is performed on a wafer, a DP that reduces a pressure in the processing...
2019/0080887 METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND SEMICONDUCTOR MANUFACTURING APPARATUS
In one embodiment, a method of manufacturing a semiconductor device includes forming a first film on a substrate. The method further includes housing the...
2019/0080886 HIGH-POWER SOLID-STATE MICROWAVE GENERATOR FOR RF ENERGY APPLICATIONS
A microwave generating system includes a modular architecture which is configurable to provide power output from under 1-kilowatt to over 100-kilowatts. The...
2019/0080885 Multi Regime Plasma Wafer Processing to Increase Directionality of Ions
Systems and methods for providing a multi regime plasma wafer processing are described. The systems and methods have three states. During a first one of the...
2019/0080884 HIGH VOLTAGE RESISTIVE OUTPUT STAGE CIRCUIT
Some embodiments include a high voltage, high frequency switching circuit. The switching circuit may include a high voltage switching power supply that...
2019/0080883 SPUTTERING APPARATUS INCLUDING GAS DISTRIBUTION SYSTEM
Some embodiments provide a magnetron sputtering apparatus including a vacuum chamber within which a controlled environment may be established, a target...
2019/0080882 MEMS FRAME HEATING PLATFORM FOR ELECTRON IMAGABLE FLUID RESERVOIRS OR LARGER CONDUCTIVE SAMPLES
A heating device having a heating element patterned into a robust MEMs substrate, wherein the heating element is electrically isolated from a fluid reservoir...
2019/0080881 EXAMINATION CONTAINER AND ELECTRON MICROSCOPE
An examination container includes a main body, a cover and a carrier stage. The main body has an accommodating trough for holding a sample. The cover is...
2019/0080880 DEVICE FOR MODULATING THE INTENSITY OF A PARTICLE BEAM FROM A CHARGED PARTICLE SOURCE
A device for modulating the intensity of a charged particle beam emitted along an axis, comprises 4.times.N consecutive deflection systems, with N=1 or 2, with...
2019/0080879 CHARGED-PARTICLE BEAM APPARATUS, CHARGED-PARTICLE BEAM WRITING APPARATUS, AND CHARGED-PARTICLE BEAM CONTROLLING...
A charged-particle beam apparatus is provided with a cathode to emit charged particle beams, an anode to propagate the charged particle beams emitted from the...
2019/0080878 Electron Gun and Electron Beam Device
An electron gun includes an emitter, an electron gun electrode, and a short-circuiting mechanism for setting the emitter and the electron gun electrode at the...
2019/0080877 CHARGED PARTICLE BEAM WRITING APPARATUS AND METHOD FOR DIAGNOSING FAILURE OF BLANKING CIRCUIT
In one embodiment, a charged particle beam writing apparatus includes a blanking circuit applying a blanking voltage to a blanking deflector, a stage on which...
2019/0080876 X-RAY IMAGING DEVICE AND DRIVING METHOD THEREOF
Provided is an X-ray imaging device and a driving method thereof, the X-ray imaging device including an electron beam generation unit including a plurality of...
2019/0080875 THERMALLY ASSISTED NEGATIVE ELECTRON AFFINITY PHOTOCATHODE
A novel photocathode employing a conduction band barrier is described. Incorporation of a barrier optimizes a trade-off between photoelectron transport...
2019/0080874 CHARGED PARTICLE GENERATION DEVICE AND TARGET UNIT
Provided is a charged particle generation device. The charged particle generation device includes a light source unit configured to emit a laser, a target...
2019/0080873 COMPACT MULTI ANTENNA BASED ION SOURCES
An ion generating device including a time-varying electromagnetic power source; and a multi-antenna ion source including a plurality of live antennas...
2019/0080872 Magnetron
To provide a magnetron capable of effectively suppressing a plurality of higher harmonic wave components with a simple configuration. A magnetron 1 is designed so...
2019/0080871 APPARATUS FOR AGING FIELD EMISSION DEVICE AND AGING METHOD THEREOF
The inventive concept relates to an apparatus for aging a field emission device configured to emitting electrons based on an electric field between a first...
2019/0080870 ELECTRON EMISSION DEVICE, METHOD FOR MANUFACTURING SAME, AND METHOD FOR MANUFACTURING ELECTRONIC DEVICE
Provided are an electron emission device having a novel structure and being capable of improving characteristics and/or extending a lifetime of a related-art...
2019/0080869 METHOD FOR CONTROLLABLY GROWING ZNO NANOWIRES
The present invention relates to a method for controllably growing ZnO nanowires, for example to be used in relation to field emission lighting. In particular,...
2019/0080868 WIDE OPERATING RANGE RELAY CONTROLLER
Provided herein is an improved bi-stable relay operable with a relay control circuit including a boost converter and an energy storage device, which is used to...
2019/0080867 EMBEDDED EXTERNAL POWER SUPPLY CONTROLLER
The present invention belongs to the technical field of electric signal transmission and conversion devices, in particular to a novel embedded external power...
2019/0080866 SWITCHING ASSEMBLIES WITH INTEGRAL HANDLE AND ROTOR AND METHODS OF ASSEMBLY
An electrical switching assembly. The electrical switching assembly includes an integral handle and rotor unit including an integral rotor portion and a handle...
2019/0080865 ELECTRICAL SWITCH METHODS AND APPARATUS
An apparatus for an electrical switch that includes a rotor cam having a rotor interface, a handle interface, and a spring arm interface. The rotor interface...
2019/0080864 INPUT DEVICE
An input device has a first electrode, a second electrode, and a third electrode. The second electrode opposes to the first electrode while being spaced apart...
2019/0080863 OPERATION MECHANISM FOR ELECTRONIC DEVICE
An operation mechanism is provided, including a fixed ring and a rotating assembly, wherein the rotating assembly is rotatably connected to the fixed ring. The...
2019/0080862 LUMINOUS KEYBOARD
A luminous keyboard includes plural keys, a membrane switch circuit member, a supporting plate and a backlight module. The membrane switch circuit member is...
2019/0080861 STRAIN GAUGE PROPORTIONAL PUSH BUTTON
A transmitter device incorporating a strain gauge proportional push button is disclosed. The transmitter device includes a printed circuit board including one...
2019/0080860 ELECTRONIC DEVICE AND ELECTRONIC DEVICE MANUFACTURING METHOD
Various embodiments relating to an electronic device including a key module are disclosed, and according to one embodiment, a portable electronic device...
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