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Patent # Description
2019/0129320 MICROLITHOGRAPHIC MASK, METHOD FOR DETERMINING EDGE POSITIONS OF THE IMAGES OF THE STRUCTURES OF SUCH A MASK...
For the purposes of measuring structures of a microlithographic mask, a method for capturing absolute positions of structures on the mask and a method for...
2019/0129319 METROLOGY ROBUSTNESS BASED ON THROUGH-WAVELENGTH SIMILARITY
A method including obtaining a measurement result from a target on a substrate, by using a substrate measurement recipe; determining, by a hardware computer...
2019/0129318 PROJECTION EXPOSURE SYSTEM FOR MICROLITHOGRAPHY WITH A MEASUREMENT DEVICE
A projection exposure system (10) includes: a mask holding device (14), a substrate holding device (36), projection optics (26) imaging the mask structures...
2019/0129317 LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
An apparatus having: a system configured to measure an object; a base structure; an object support constructed to hold the object, the object support movably...
2019/0129316 Method Of Determining A Value Of A Parameter Of Interest, Method Of Cleaning A Signal Containing Information...
The disclosure relates to methods of determining a value of a parameter of interest of a patterning process, and of cleaning a signal containing information...
2019/0129315 Metrology Apparatus, Method of Measuring a Structure, Device Manufacturing Method
Metrology apparatus and methods are disclosed for measuring a structure formed on a substrate. In one arrangement, different components of a radiation beam are...
2019/0129314 Measurement System, Calibration Method, Lithographic Apparatus and Positioner
The invention relates to a measurement system for a projection system of a lithographic apparatus, comprising: --a sensor plate; --a detector comprising an...
2019/0129313 ESTIMATION OF DATA IN METROLOGY
Methods and apparatus for estimating an unknown value of at least one of a plurality of sets of data, each set of data including a plurality of values...
2019/0129312 Generation of Vector Partially Coherent Optical Sources Using Phase-Only Spatial Light Modulators
A VPCS generator that includes a laser that emits coherent light; an interferometer consisting of PBSs to split the laser light into its vertical and...
2019/0129311 LIQUID JET AND RECOVERY SYSTEM FOR IMMERSION LITHOGRAPHY
A liquid immersion lithography apparatus includes a projection system having an optical member of which an incidence side has a convex lens shape, and a flow...
2019/0129310 Method for Manufacturing Light Guide Elements
Systems and methods described herein relate to the manufacture of optical elements and optical systems. An example method includes overlaying a first mask on a...
2019/0129309 DIRECT EXPOSURE MACHINE WITHOUT MASK
The present invention provides a direct exposure machine without mask, comprising a stage device and an exposure device. The stage device supports an exposed...
2019/0129308 DIGITAL MASKING SYSTEM, PATTERN IMAGING APPARATUS AND DIGITAL MASKING METHOD
A digital masking system includes a supporting structure for supporting a material, and a pattern imaging apparatus. The pattern imaging apparatus includes a...
2019/0129307 RESIST UNDERLAYER COMPOSITION, AND METHOD OF FORMING PATTERNS USING THE COMPOSITION
A resist underlayer composition and a method of forming patterns, the composition including a solvent; and a polymer that includes a structural unit...
2019/0129306 UNDERLAYER COATING COMPOSITIONS FOR USE WITH PHOTORESISTS
Underlayer coating compositions are provided that comprise 1) a resin; and a solvent component comprising one or more solvents having a boiling of 200.degree....
2019/0129305 UNDERLYING COATING COMPOSITIONS FOR USE WITH PHOTORESISTS
New composition and methods are provided that include antireflective compositions that can exhibit enhanced etch rates in standard plasma etchants. Preferred...
2019/0129304 RESIST QUALITY CONTROL METHOD AND METHOD FOR OBTAINING RESIST QUALITY PREDICTION MODEL
An object of the invention is to provide a simple, mechanized analytical approach for resist quality control and early source investigation when a defect...
2019/0129303 POLYIMIDES
This disclosure relates to a polyimide polymer that includes the reaction product of: (a) at least one diamine selected from the group consisting of a diamine...
2019/0129302 COMPOSITION INCLUDING QUANTUM DOT, MANUFACTURING METHOD QUANTUM DOT AND COLOR FILTER
A photosensitive resin composition includes: (A) a binder resin; (B) a photopolymerizable monomer; (C) a photopolymerization initiator; (D) a quantum dot...
2019/0129301 RESIST COMPOSITIONS
A resist composition having a) metal-containing nanoparticles and/or nanoclusters, and b) ligands and or organic linkers, wherein one or both of a) or b) are...
2019/0129300 PELLICLE FILM, PELLICLE FRAME, PELLICLE, METHOD FOR PRODUCING SAME, ORIGINAL PLATE FOR LIGHT EXPOSURE, LIGHT...
Provided are a pellicle film, a pellicle frame and a pellicle having a higher EUV transmittance. An exposure pattern plate capable of performing EUV...
2019/0129299 A MEMBRANE FOR EUV LITHOGRAPHY
Membranes for EUV lithography are disclosed. In one arrangement, a membrane has a stack having layers in the following order: a first capping layer including...
2019/0129298 METHODS AND APPARATUS TO CONTROL GRAYSCALE PHOTOLITHOGRAPHY
Methods and apparatus to control grayscale lithography are disclosed. A disclosed example apparatus for adjusting a grayscale lithography process includes an...
2019/0129297 METHODS OF FORMING SEMICONDUCTORS USING ETCHING EFFECT PREDICTIONS AND METHODS FOR DETERMINING INPUT PARAMETERS...
An etching effect prediction method includes determining a sample area of a mask pattern in which etch bias is to be predicted, determining input parameters...
2019/0129296 TENSIONED PROJECTION SCREEN
A projection screen apparatus having a perimeter frame and a substantially blank screen is provided.
2019/0129295 PROJECTION SYSTEM
A projection system has a light source, a spatial light modulator, a light recycling system, and a lens assembly. The light source emits source light toward...
2019/0129294 IMAGE PROJECTION APPARATUS AND IMAGE PROJECTION METHOD
An image projection apparatus includes a light irradiation device configured to irradiate a laser beam, an optical scan device configured to deflect the laser...
2019/0129293 PROJECTOR AND METHOD FOR CONTROLLING PROJECTOR
A projector includes a projection section that projects first light representing an image on a projection surface, a detection section that detects whether or...
2019/0129292 ACTUATOR, OPTICAL DEVICE, AND PROJECTOR
Movement of a movable portion without stopping at any moment can be achieved by a simple configuration including a beam structural portion including two beam...
2019/0129291 PROJECTOR WITH IMPROVED CONTRAST
A projector, including a light modulation module including at least one light modulator illuminated by light of at least two primary colours, light of each...
2019/0129290 DUAL-COLOR PROJECTOR
A dual-color projector is disclosed that includes a blue laser device configured to emit a blue laser light, a red laser device configured to emit a red laser...
2019/0129289 LIGHT SOURCE APPARATUS AND PROJECTOR
A light source apparatus includes a plurality of semiconductor lasers arranged on a substrate along a first direction, a rod integrator on which the plurality...
2019/0129288 LIGHT SOURCE DEVICE AND PROJECTOR USING THE SAME
A light source device comprising: a light source section which generates any one of blue light, red light, and green light; a phosphor which generates a...
2019/0129287 LIGHTING DEVICE AND PROJECTION DISPLAY APPARATUS
A lighting device of the present disclosure includes an excitation light source, a phosphor, a spreader, a reflective layer, and a reflective region. The...
2019/0129286 PROJECTOR AND LENS MODULE
The invention discloses a projector, including a light source, a light engine module and a lens module. The lens module includes a plate, a lens, at least two...
2019/0129285 PROJECTION OPTICAL SYSTEM AND PROJECTOR
A projection optical system that enlarges an image to be displayed on an image display surface to an angle of view of 70 degrees or more, projects the enlarged...
2019/0129284 DYNAMIC FILM PROJECTOR
A dynamic film projector includes a driving mechanism having two rotation shafts parallelly extending upwardly, and a first projection assembly and a second...
2019/0129283 CAMERA MOUNTING SYSTEM
A device for mounting an action camera to a protrusion includes a fastener and a mounting arm configured to be secured to the action camera. The mounting arm...
2019/0129282 IMAGING DEVICE AND CONTROL METHOD THEREOF
A camera main body includes a mount, a solid-state imaging element, a main body controller, a card I/F, an accessory information storage section, a rear...
2019/0129281 CAMERA MODULE
A durable camera module comprises a lens holder and a lens barrel. An opening is defined in the lens holder. The opening passes through the lens holder along...
2019/0129280 DRAINAGE CHANNEL FOR A SUBMERSIBLE CAMERA WITH DRAINAGE PORTS ON TWO SURFACES
A camera system with six faces and a front housing is configured to capture images and audio content from external the camera body. The camera system includes...
2019/0129279 DRIVE APPARATUS, DRIVE METHOD, AND OPTICAL DEVICE
Noise produced during phase-difference changes is minimized without decreasing the responsiveness of a vibration-wave motor. A lens-side MCU for a lens barrel...
2019/0129278 SUPERCONTINUUM SOURCE, METHOD FOR GENERATING AND EMITTING A SUPERCONTINUUM, MULTIPHOTON EXCITATION FLUORESCENCE...
An ultrashort light pulse oscillated from an ultrashort pulse oscillator enters a waveguide (2) via a polarization control element (3). After conversion into a...
2019/0129277 VARIABLE-ASTIGMATISM BEAM ADAPTATION DEVICE AND FREQUENCY CONVERSION UNITS
Beam adaptation devices are disclosed for variable-astigmatic adjustment of electromagnetic radiation propagating along a beam axis of the beam adaptation...
2019/0129276 Nonreciprocal Light Propagation Systems and Methods
An optical resonator system comprises an optical resonator (30) and means (32, 42, 44) for coupling into the resonator counterpropagating waves at total...
2019/0129275 SYSTEM, METHOD AND APPARATUS FOR NON-MECHANICAL OPTICAL AND PHOTONIC BEAM STEERING
This disclosure teaches a thin film beam steering system comprising either flat or tilted transparent electrodes on one side of the electro-optical crystal...
2019/0129274 DISPLAY DEVICE AND METHOD FOR CONTROLLING A DISPLAY DEVICE
The present application relates to a display device, comprising a backlight source, a liquid crystal lens layer having a plurality of lens units arranged in a...
2019/0129273 OPTICAL MODULATOR
The present invention has an object to provide an optical modulator having a small-sized circuit configuration and a smaller voltage drop amount in a...
2019/0129272 CONFIGURABLE HEATING DEVICE AND METHOD OF USING THE SAME
A device includes a comparator configured to compare a transmission phase of light in a photonic component with a reference phase. The device further includes...
2019/0129271 FLEXIBLE ELECTRONIC DEVICE
A flexible electronic device has a display region and a package region surrounding the display region. The flexible electronic device includes a substrate, a...
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