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Method and apparatuses for removing polysilicon from semiconductor
Methods and apparatuses for removing polysilicon material from a semiconductor workpiece are disclosed. A particular method includes contacting a polishing pad...
Chemical mechanical polishing composition and methods relating thereto
A method for chemical mechanical polishing of a substrate comprising a barrier material in the presence of at least one of an interconnect metal and a low-k...
Method of depositing tungsten film with reduced resistivity and improved
A method of controlling the resistivity and morphology of a tungsten film is provided, comprising depositing a first film of a bulk tungsten layer on a...
Method of manufacturing semiconductor device and substrate processing
Formation of a boron compound is suppressed on the inner wall of a nozzle disposed in a high-temperature region of a process chamber. A semiconductor device...
Cobalt titanium oxide dielectric films
Electronic apparatus and methods of forming the electronic apparatus include a cobalt titanium oxide film on a substrate for use in a variety of electronic...
Liner for tungsten/silicon dioxide interface in memory
A semiconductor wafer assembly includes a base of dielectric. A layer of silicon is deposited thereover. A metal hard mask is deposited over the silicon. A...
Method of manufacturing semiconductor device suitable for forming wiring
using damascene method
(a1) A concave portion is formed in an interlayer insulating film formed on a semiconductor substrate. (a2) A first film of Mn is formed by CVD, the first film...
Semiconductor device manufacturing method and storage medium
An object of the present invention is to obtain a favorable etching shape in etching an organic film formed on a substrate. A semiconductor device manufacturing...
Semiconductor device with solder balls having high reliability
A semiconductor device includes a substrate, a metal layer, an alloy layer and a Sn--Ag--Cu-based solder ball. The metal layer is configured to be formed on the...
Packaging conductive structure and method for manufacturing the same
A packaging conductive structure for a semiconductor substrate and a method for manufacturing the structure are provided. The structure comprises an under bump...
Wafer level package using stud bump coated with solder
A method of fabricated a wafer level package is described. In one embodiment, the method includes fabricating at least one active device on a semiconductor...
Semiconductor device and method of fabricating the same
A semiconductor device having increased reliability includes a fuse region and a monitoring region. Fuses are located on an insulation film in the fuse region...
Semiconductor device and method of manufacturing semiconductor device
There is provided a method of manufacturing a semiconductor device, the method including performing at least one of: processing, when forming the first...
Methods of forming patterns, and methods of forming integrated circuits
Some embodiments include methods of forming patterns in substrates by utilizing block copolymer assemblies as patterning materials. A block copolymer assembly...
Zinc sulfide crystals for optical components
Zinc sulfide (ZnS) single crystals and multi-grain ZnS crystals are suitable for many applications. The disclosed method produces ZnS single crystals or...
Method for producing semiconductor chip with adhesive film, adhesive film
for semiconductor used in the method,...
A method for producing a semiconductor chip with an adhesive film, which includes: preparing a laminate in which a semiconductor wafer, an adhesive film and a...
Manufacturing method for light emitting device
A light emitting device manufacturing method including the steps of corrugatedly scanning a laser beam along a plurality of division lines formed on a light...
Method and structure for fabricating multiple tiled regions onto a plate
using a controlled cleaving process
A reusable transfer substrate member for forming a tiled substrate structure. The member including a transfer substrate, which has a surface region. The surface...
Isolation structures for integrated circuits and modular methods of
forming the same
A variety of isolation structures for semiconductor substrates include a trench formed in the substrate that is filled with a dielectric material or filled with...
Low loss substrate for integrated passive devices
Electronic elements (44, 44', 44'') having an active device region (46) and integrated passive device (IPD) region (60) on a common substrate (45) preferably...
Method for manufacturing semiconductor device
In a method of manufacturing a semiconductor device, a first film is formed directly on a semiconductor substrate and a second film is formed on the first film....
Method of sealing an air gap in a layer of a semiconductor structure and
A method of sealing an air gap in a layer of a semiconductor structure comprises providing a first layer of the semiconductor structure having at least one air...
Method for forming an interfacial passivation layer on the Ge
The invention discloses a method for forming an interfacial passivation layer on the Ge semiconductor. The supercritical CO.sub.2 fluids is used to form an...
Low capacitance precision resistor
A precision low capacitance resistor is formed, e.g., in a bulk substrate. An embodiment includes forming a source/drain region on a substrate, patterning a...
Semiconductor device and method of manufacturing the same
Any of a plurality of contact plugs which reaches a diffusion layer serving as a drain layer of an MOS transistor has an end provided in contact with a lower...
Isolation structures for preventing photons and carriers from reaching
active areas and methods of formation
Regions of an integrated circuit are isolated by a structure that includes at least one isolating trench on the periphery of an active area. The trench is deep,...
Method for manufacturing dielectric isolation type semiconductor device
A method for manufacturing a dielectric isolation type semiconductor device comprises: forming a plurality of trenches in a first region on a major surface of a...
Method of ONO integration into MOS flow
A method of ONO integration of a non-volatile memory device (e.g. EEPROM, floating gate FLASH and SONOS) into a baseline MOS device (e.g. MOSFET) is described....
Atomic layer deposition of hafnium lanthanum oxides
There is provided an improved method for depositing thin films using precursors to deposit binary oxides by atomic layer deposition (ALD) techniques. Also...
Method of doping semiconductors
A method of doping a semiconductor body is provided herein. In one embodiment, a semiconductor body is exposed to an activated hydrogen gas for a predetermined...
Method for forming voltage sustaining layer with opposite-doped islands
for semiconductor power devices
A method of manufacturing a semiconductor device includes preparing a semiconductor wafer with a substrate of a first conductivity type and forming a first...
Semiconductor storage device and method for manufacturing the same
A semiconductor storage device has a plurality of word lines formed with a predetermined interval on a semiconductor substrate, a selection transistor provided...
Semiconductor device and manufacturing method of the same
A disclosed semiconductor device includes multiple gate electrodes disposed on a semiconductor substrate; and multiple sidewall spacers disposed on sidewalls of...
Semiconductor device manufacturing method
A semiconductor device manufacturing method includes removing an insulating film on a semiconductor substrate by etching and subsequently oxidizing a surface of...
Manufacturing method of semiconductor device and substrate processing
A manufacturing method of a semiconductor device, including the steps of: loading into a processing chamber a substrate having a high dielectric gate insulating...
Method for manufacturing semiconductor device, and semiconductor device
In a transistor region, a source interconnect layer and a gate electrode are buried in trenches. A source extending region is provided adjacent to the...
Nonvolatile semiconductor memory and method of manufacturing the same
A nonvolatile semiconductor memory has a semiconductor substrate, a first insulating film formed on a channel region on a surface portion of the semiconductor...
Method of forming lutetium and lanthanum dielectric structures
Methods of forming dielectric structures are shown. Methods of forming dielectric structures are shown that include lutetium oxide and lanthanum aluminum oxide...
Transistor with embedded Si/Ge material having reduced offset to the
A strain-inducing semiconductor alloy may be formed on the basis of cavities which may have a non-rectangular shape, which may be maintained even during...
Methods of forming DRAM arrays
Some embodiments include methods of forming transistor gates. A gate stack is placed within a reaction chamber and subjected to at least two etches, and to one...
Method of fabricating a dynamic random access memory
A method of fabricating a dynamic random access memory is provided. First, a substrate at least having a memory device area and a peripheral device area is...
Method for manufacturing semiconductor device
A method for manufacturing a semiconductor device includes forming a first interlayer insulating film over a semiconductor substrate; forming a first opening in...
A semiconductor memory device includes a substrate and an interconnect region carried by the substrate. A donor layer is coupled to the interconnect region...
Method of fabricating efuse, resistor and transistor
A method of fabricating an efuse, a resistor and a transistor includes the following steps: A substrate is provided. Then, a gate, a resistor and an efuse are...
Method of fabricating a semiconductor device having a lateral double
diffused MOSFET transistor with a lightly...
Methods and systems for monolithically fabricating a lateral double-diffused MOSFET (LDMOS) transistor having a source, drain, and a gate on a substrate, with a...
Manufacture of semiconductor device with stress structure
A method for manufacturing a semiconductor device includes the steps of (a) forming a gate electrode on a silicon substrate, through a gate insulating film; (b)...
Method of fabricating a thin film transistor using boron-doped oxide
semiconductor thin film
Provided is a method of fabricating a thin film transistor including source and drain electrodes, a novel channel layer, a gate insulating layer, and a gate...
Semiconductor component with surface mountable devices and method for
producing the same
A semiconductor component including: a substrate, at least one semiconductor chip arranged on the substrate and at least one passive device likewise arranged on...
Organic transistor active substrate, manufacturing method thereof, and
A method of manufacturing an organic transistor active substrate is disclosed. The organic transistor active substrate includes an organic transistor in which a...
Overmolded semiconductor package with a wirebond cage for EMI shielding
According to one exemplary embodiment, an overmolded package includes a component situated on a substrate. The overmolded package further includes an overmold...