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Patent # Description
US-9,312,123 Method of manufacturing semiconductor device and substrate processing apparatus
Provided is a technique including forming a film by performing a cycle a predetermined number of times. The cycle includes: (a) forming a discontinuous first...
US-9,312,122 Rinse liquid for insulating film and method of rinsing insulating film
A rinse liquid for an insulation layer, the rinse liquid including a solvent represented by the following Chemical Formula 1: ##STR00001##
US-9,312,121 Method for cleaning contact hole and forming contact plug therein
The method for cleaning a contact hole and forming a contact plug therein is provided. The method includes steps of: providing a silicon substrate; forming a...
US-9,312,120 Method for processing an oxygen containing semiconductor body
A method for processing a semiconductor body is disclosed. In an embodiment, the method includes reducing an oxygen concentration in a silicon wafer in a first...
US-9,312,119 Open trap mass spectrometer
An open electrostatic trap mass spectrometer is disclosed for operation with wide and diverging ion packets. Signal on detector is composed of signals...
US-9,312,118 Mass spectrometer
A mass analyzer is provided comprising a plurality of electrodes having apertures through which ions are transmitted. A plurality of pseudo-potential...
US-9,312,117 Methods, apparatus, and system for mass spectrometry
A miniature, low cost mass spectrometer capable of unit resolution over a mass range of 10 to 50 AMU. The mass spectrometer incorporates several features that...
US-9,312,116 Mass distribution spectrometry method and mass distribution spectrometer
The present invention provides a mass distribution spectrometry which reduces an influence of the dispersion in the times at which ionizing beams irradiate a...
US-9,312,115 Mass spectrometer
Flanges (10a) of an attachment plate (10) integrally combined with an ion detector (5) are fixed to an inner surface of a vacuum chamber (1) via cushioning...
US-9,312,114 Ion ejection from a quadrupole ion trap
A method of ejecting ions to be analyzed from a quadrupole ion trap in which a trapping field is created by one or more RF voltages applied to one or more...
US-9,312,113 Contamination-proof ion guide for mass spectrometry
The invention relates to a radio frequency ion guide construction for use in mass spectrometry that minimizes contamination by allowing ions rejected by the RF...
US-9,312,112 Evacuating a sample chamber
In one general aspect, a sample is transferred into a mass spectrometer by capturing a sample on a collector, inserting the collector into a sample chamber...
US-9,312,111 Apparatus and method for sub-micrometer elemental image analysis by mass spectrometry
A mass spectrometer system having: a primary ion source capable of irradiating a segment on a planar sample with a beam of primary ions, an orthogonal ion...
US-9,312,110 System and method for grouping precursor and fragment ions using selected ion chromatograms
LC/MS data generated by an LC/MS system is analyzed to determine groupings of ions associated with originating molecules. Ions are grouped initially according...
US-9,312,109 High pressure ion chamber enclosure support mount
A radiation detection assembly includes an ionization chamber for detecting radiation. An exterior enclosure houses the ionization chamber within an interior...
US-9,312,108 Sputtering apparatus
A magnetron assembly for a rotary target cathode comprises an elongated support structure, a magnet bar structure movably positioned below the support...
US-9,312,107 Disk handling apparatus and method for supporting a disk during material deposition at a deposition station
A disk handling apparatus for supporting a disk during material deposition at a deposition station, comprising a disk vacuum paddle having a centrally disposed...
US-9,312,106 Digital phase controller for two-phase operation of a plasma reactor
Phase angle between opposing electrodes in a plasma reactor is controlled in accordance with a user selected phase angle. Direct digital synthesis of RF...
US-9,312,105 Method for etching insulation film
Disclosed is a method for etching an insulation film of a processing target object. The method includes: in a first term, periodically switching ON and OFF of a...
US-9,312,104 Coil antenna with plural radial lobes
A low inductance coil antenna for a plasma reactor has plural conductor lobes extending radially from respective RF supply connections.
US-9,312,103 Self-aligned dynamic pattern generator device and method of fabrication
A dynamic pattern generator (DPG) device and method of making a DPG device are disclosed. The DPG device is used in semiconductor processing tools that require...
US-9,312,102 Apparatus and method for processing substrate using ion beam
A method of processing a substrate in an apparatus including a substrate holder which holds the substrate, an ion source which emits an ion beam, a neutralizer...
US-9,312,101 Endpoint detection for photolithography mask repair
A method includes scanning a lithography mask with a repair process, and measuring back-scattered electron signals of back-scattered electrons generated from...
US-9,312,100 Sensitivity correction method for dose monitoring device and particle beam therapy system
In a particle beam therapy system which scans a particle beam and irradiates the particle beam to an irradiation position of an irradiation subject and has a...
US-9,312,099 Charged particle beam device and method for analyzing defect therein
The present invention provides a charged particle beam device capable of automatically setting proper analysis positions for defects having various shapes. This...
US-9,312,098 Method of examining a sample in a charged-particle microscope
Examining a sample in a charged-particle microscope of a scanning transmission type includes: Providing a beam of charged particles that is directed from a...
US-9,312,097 Specimen holder used for mounting samples in electron microscopes
A novel specimen holder for specimen support devices for insertion in electron microscopes. The novel specimen holder of the invention provides mechanical...
US-9,312,096 Sample holder
A sample holder according to an embodiment is a sample holder on which a sample to be observed with an electron microscope is mounted. The sample holder...
US-9,312,095 Method and system for automating sample preparation for microfluidic cryo TEM
A method and system is provided for automatically preparing transmission electron microscopy (TEM) samples for examination by depositing extremely small samples...
US-9,312,094 Charged particle beam device
This charged particle beam device comprises: an electron beam source (1); a charged particle optical system that includes an object lens (9) and that irradiates...
US-9,312,093 Particle beam device comprising an electrode unit
A particle beam device comprises a beam generator for generating a particle beam having charged particles and an electrode unit having a first electrode and a...
US-9,312,092 Deflection plate and deflection device for deflecting charged particles
A deflection plate having a non-planar shape, for deflecting charged particles is provided. An associated method is also provided.
US-9,312,091 Charged particle beam apparatus
In order to provide a charged particle beam apparatus enabling reduction of deflecting coma aberration in cases such as where wide field-of-view scanning is...
US-9,312,090 X-ray emitter housing
An x-ray emitter housing includes a first housing part and a second housing part that are connected to one another in a form-fit manner using an axially acting...
US-9,312,089 Method for making field emission cathode
The disclosure relates to a method for making field emission cathode. A microchannel plate is provided. The microchannel plate includes a first surface and a...
US-9,312,088 Solenoid actuated circuit breaker
A circuit breaker includes a breaker handle that is remotely operated using a modular actuator mechanism. The actuator mechanism may be a solenoid or other...
US-9,312,087 Electronic contactor including separable upper bodies
Disclosed is an electronic contactor including: a lower body; a magnetic force generator disposed within the lower body and magnetized by electric power...
US-9,312,086 Proximity switch with snap lock
A proximity switch (20, 20A) that snaps quickly and locks between first and second positions of movable electrical contacts (32). A magnet (42) moves a first...
US-9,312,085 Circuit breaker with fluid injection
A circuit breaker including an ejection device including an arc-extinction medium for improved extinction of an arc formed during a breaker operation and an...
US-9,312,084 Contact slider unit for a switching unit, in particular for a circuit breaker
A contact slider unit is disclosed for a switching unit, in particular for a circuit breaker, having a contact slider and a contact piece. In an embodiment, the...
US-9,312,083 Threaded rod-and-spacer switch handle tie
A switch coupling assembly is configured for coupling switch handles to provide simultaneous actuation and deactivation of an electrical device. The switch...
US-9,312,082 Mechanical interlock structure for switchgear
An interlock structure is coupled between actuating structure and a travel adjuster of a circuit breaker. The interlock structure includes a body having a bore...
US-9,312,081 Arcless fusible switch disconnect device for DC circuits
A fusible switch disconnect includes a fuse, a primary switch connected in series with the fuse. and a semiconductor switch device connected in parallel with...
US-9,312,080 Power tool
A power tool includes at least one grip housing having at least one handle-shaped grip region and at least one switching unit having at least one movably...
US-9,312,079 Keyswitch and keyboard therewith
A key switch disposed on a base of a keyboard includes a key cap, a linkage bar, an edge plate and a recess portion. The key cap is disposed above the base. The...
US-9,312,078 Patterned graphite oxide films and methods to make and use same
The present invention relates to patterned graphite oxide films and methods to make and use same. The present invention includes a novel strategy developed to...
US-9,312,077 Double layer capacitors
Activated carbons having improved volumetric capacitance and double layer capacitors including these activated carbons are described herein.
US-9,312,076 Very high energy-density ultracapacitor apparatus and method
A very high energy-density ultracapacitor apparatus and method includes more than one carbon electrode with an outer surface and an inner surface. A conductive...
US-9,312,075 High voltage tantalum anode and method of manufacture
Tantalum powders produced using a tantalum fiber precursor are described. The tantalum fiber precursor is chopped or cut into short lengths having a uniform...
US-9,312,074 Solid electrolytic capacitor with interlayer crosslinking
A method for preparing a solid electrolytic capacitor and an improved solid electrolytic capacitor is provided. The method includes providing an anode, forming...
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