At Patents you can conduct a Patent Search, File a Patent Application, find a Patent Attorney, or search available technology through our Patent Exchange. Patents are available using simple keyword or date criteria. If you are looking to hire a patent attorney, you've come to the right place. Protect your idea and hire a patent lawyer.
Method of manufacturing semiconductor device and substrate processing
Provided is a technique including forming a film by performing a cycle a predetermined number of times. The cycle includes: (a) forming a discontinuous first...
Rinse liquid for insulating film and method of rinsing insulating film
A rinse liquid for an insulation layer, the rinse liquid including a solvent represented by the following Chemical Formula 1: ##STR00001##
Method for cleaning contact hole and forming contact plug therein
The method for cleaning a contact hole and forming a contact plug therein is provided. The method includes steps of: providing a silicon substrate; forming a...
Method for processing an oxygen containing semiconductor body
A method for processing a semiconductor body is disclosed. In an embodiment, the method includes reducing an oxygen concentration in a silicon wafer in a first...
Open trap mass spectrometer
An open electrostatic trap mass spectrometer is disclosed for operation with wide and diverging ion packets. Signal on detector is composed of signals...
A mass analyzer is provided comprising a plurality of electrodes having apertures through which ions are transmitted. A plurality of pseudo-potential...
Methods, apparatus, and system for mass spectrometry
A miniature, low cost mass spectrometer capable of unit resolution over a mass range of 10 to 50 AMU. The mass spectrometer incorporates several features that...
Mass distribution spectrometry method and mass distribution spectrometer
The present invention provides a mass distribution spectrometry which reduces an influence of the dispersion in the times at which ionizing beams irradiate a...
Flanges (10a) of an attachment plate (10) integrally combined with an ion detector (5) are fixed to an inner surface of a vacuum chamber (1) via cushioning...
Ion ejection from a quadrupole ion trap
A method of ejecting ions to be analyzed from a quadrupole ion trap in which a trapping field is created by one or more RF voltages applied to one or more...
Contamination-proof ion guide for mass spectrometry
The invention relates to a radio frequency ion guide construction for use in mass spectrometry that minimizes contamination by allowing ions rejected by the RF...
Evacuating a sample chamber
In one general aspect, a sample is transferred into a mass spectrometer by capturing a sample on a collector, inserting the collector into a sample chamber...
Apparatus and method for sub-micrometer elemental image analysis by mass
A mass spectrometer system having: a primary ion source capable of irradiating a segment on a planar sample with a beam of primary ions, an orthogonal ion...
System and method for grouping precursor and fragment ions using selected
LC/MS data generated by an LC/MS system is analyzed to determine groupings of ions associated with originating molecules. Ions are grouped initially according...
High pressure ion chamber enclosure support mount
A radiation detection assembly includes an ionization chamber for detecting radiation. An exterior enclosure houses the ionization chamber within an interior...
A magnetron assembly for a rotary target cathode comprises an elongated support structure, a magnet bar structure movably positioned below the support...
Disk handling apparatus and method for supporting a disk during material
deposition at a deposition station
A disk handling apparatus for supporting a disk during material deposition at a deposition station, comprising a disk vacuum paddle having a centrally disposed...
Digital phase controller for two-phase operation of a plasma reactor
Phase angle between opposing electrodes in a plasma reactor is controlled in accordance with a user selected phase angle. Direct digital synthesis of RF...
Method for etching insulation film
Disclosed is a method for etching an insulation film of a processing target object. The method includes: in a first term, periodically switching ON and OFF of a...
Coil antenna with plural radial lobes
A low inductance coil antenna for a plasma reactor has plural conductor lobes extending radially from respective RF supply connections.
Self-aligned dynamic pattern generator device and method of fabrication
A dynamic pattern generator (DPG) device and method of making a DPG device are disclosed. The DPG device is used in semiconductor processing tools that require...
Apparatus and method for processing substrate using ion beam
A method of processing a substrate in an apparatus including a substrate holder which holds the substrate, an ion source which emits an ion beam, a neutralizer...
Endpoint detection for photolithography mask repair
A method includes scanning a lithography mask with a repair process, and measuring back-scattered electron signals of back-scattered electrons generated from...
Sensitivity correction method for dose monitoring device and particle beam
In a particle beam therapy system which scans a particle beam and irradiates the particle beam to an irradiation position of an irradiation subject and has a...
Charged particle beam device and method for analyzing defect therein
The present invention provides a charged particle beam device capable of automatically setting proper analysis positions for defects having various shapes. This...
Method of examining a sample in a charged-particle microscope
Examining a sample in a charged-particle microscope of a scanning transmission type includes: Providing a beam of charged particles that is directed from a...
Specimen holder used for mounting samples in electron microscopes
A novel specimen holder for specimen support devices for insertion in electron microscopes. The novel specimen holder of the invention provides mechanical...
A sample holder according to an embodiment is a sample holder on which a sample to be observed with an electron microscope is mounted. The sample holder...
Method and system for automating sample preparation for microfluidic cryo
A method and system is provided for automatically preparing transmission electron microscopy (TEM) samples for examination by depositing extremely small samples...
Charged particle beam device
This charged particle beam device comprises: an electron beam source (1); a charged particle optical system that includes an object lens (9) and that irradiates...
Particle beam device comprising an electrode unit
A particle beam device comprises a beam generator for generating a particle beam having charged particles and an electrode unit having a first electrode and a...
Deflection plate and deflection device for deflecting charged particles
A deflection plate having a non-planar shape, for deflecting charged particles is provided. An associated method is also provided.
Charged particle beam apparatus
In order to provide a charged particle beam apparatus enabling reduction of deflecting coma aberration in cases such as where wide field-of-view scanning is...
X-ray emitter housing
An x-ray emitter housing includes a first housing part and a second housing part that are connected to one another in a form-fit manner using an axially acting...
Method for making field emission cathode
The disclosure relates to a method for making field emission cathode. A microchannel plate is provided. The microchannel plate includes a first surface and a...
Solenoid actuated circuit breaker
A circuit breaker includes a breaker handle that is remotely operated using a modular actuator mechanism. The actuator mechanism may be a solenoid or other...
Electronic contactor including separable upper bodies
Disclosed is an electronic contactor including: a lower body; a magnetic force generator disposed within the lower body and magnetized by electric power...
Proximity switch with snap lock
A proximity switch (20, 20A) that snaps quickly and locks between first and second positions of movable electrical contacts (32). A magnet (42) moves a first...
Circuit breaker with fluid injection
A circuit breaker including an ejection device including an arc-extinction medium for improved extinction of an arc formed during a breaker operation and an...
Contact slider unit for a switching unit, in particular for a circuit
A contact slider unit is disclosed for a switching unit, in particular for a circuit breaker, having a contact slider and a contact piece. In an embodiment, the...
Threaded rod-and-spacer switch handle tie
A switch coupling assembly is configured for coupling switch handles to provide simultaneous actuation and deactivation of an electrical device. The switch...
Mechanical interlock structure for switchgear
An interlock structure is coupled between actuating structure and a travel adjuster of a circuit breaker. The interlock structure includes a body having a bore...
Arcless fusible switch disconnect device for DC circuits
A fusible switch disconnect includes a fuse, a primary switch connected in series with the fuse. and a semiconductor switch device connected in parallel with...
A power tool includes at least one grip housing having at least one handle-shaped grip region and at least one switching unit having at least one movably...
Keyswitch and keyboard therewith
A key switch disposed on a base of a keyboard includes a key cap, a linkage bar, an edge plate and a recess portion. The key cap is disposed above the base. The...
Patterned graphite oxide films and methods to make and use same
The present invention relates to patterned graphite oxide films and methods to make and use same. The present invention includes a novel strategy developed to...
Double layer capacitors
Activated carbons having improved volumetric capacitance and double layer capacitors including these activated carbons are described herein.
Very high energy-density ultracapacitor apparatus and method
A very high energy-density ultracapacitor apparatus and method includes more than one carbon electrode with an outer surface and an inner surface. A conductive...
High voltage tantalum anode and method of manufacture
Tantalum powders produced using a tantalum fiber precursor are described. The tantalum fiber precursor is chopped or cut into short lengths having a uniform...
Solid electrolytic capacitor with interlayer crosslinking
A method for preparing a solid electrolytic capacitor and an improved solid electrolytic capacitor is provided. The method includes providing an anode, forming...