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Metal structures and methods of using same for transporting or gettering
materials disposed within...
Embodiments of the present invention provide metal structures for transporting or gettering materials disposed on or within a semiconductor substrate. A...
Hard mask reshaping
One or more systems and methods for reshaping a hard mask are provided. A semiconductor arrangement comprises one or more structures formed from a layer...
Modified self-aligned contact process and semiconductor device
Methods of modifying a self-aligned contact process in a semiconductor fabrication and a semiconductor device are provided. A method includes forming a...
Selective etch for silicon films
A method of etching patterned heterogeneous silicon-containing structures is described and includes a remote plasma etch with inverted selectivity compared to...
Plasma etching method and plasma etching apparatus
In a plasma etching method for forming a hole in an etching target film, a process of generating a plasma of a processing gas containing at least C.sub.xF.sub.y...
Methods of forming patterns in semiconductor devices
Methods of forming a pattern in a semiconductor device may be provided. The methods may include sequentially forming a first hard mask layer and a second hard...
Method for manufacturing semiconductor device
One method includes sequentially forming an insulating film and a first material film on a semiconductor substrate, forming on the first material film a mask...
Plasma etching method, method for producing semiconductor device, and
plasma etching device
Provided is a plasma etching method increasing the selectivity of a silicon nitride film in relation to the silicon oxide film or silicon functioning as a base....
Post treatment for dielectric constant reduction with pore generation on
low K dielectric films
A method and apparatus for depositing a low K dielectric film with one or more features is disclosed herein. A method of forming a dielectric layer can include...
Method of manufacturing semiconductor device
The present invention provides a method of manufacturing a semiconductor device including using a first photomask to form a sacrificial block on a hard mask...
Plasma etching method and plasma etching apparatus
A groove shape can be improved. A plasma etching method includes plasma-processing a photoresist film that is formed on a mask film and has a preset pattern;...
Method of forming a semiconductor device
A semiconductor device includes an active region, a gate conductor and a source electrode. The active region includes a drain region, a channel region stacked...
Gas cluster ion beam etching process for etching Si-containing,
Ge-containing, and metal-containing materials
A method and system for performing gas cluster ion beam (GCIB) etch processing of various materials is described. In particular, the GCIB etch processing...
Controlled spalling using a reactive material stack
A reactive material stack is formed above a surface of a base substrate. The reactive material stack includes metals which when subjected to heat energy or...
Systems and methods for forming contact definitions
In one embodiment, a method for fabricating thin film tunnel devices includes forming multiple bottom electrodes on a substrate, depositing an insulating layer...
Spalling with laser-defined spall edge regions
Laser ablation can be used to form a trench within at least a blanket layer of a stressor layer that is atop a base substrate. A non-ablated portion of the...
Methods of forming patterns
Methods of forming patterns are provided. The methods may include sequentially forming an etch-target layer and a photoresist layer on a substrate, exposing two...
Metal halide solid-state surface treatment for nanocrystal materials
Methods of treating nanocrystal and/or quantum dot devices are described. The methods include contacting the nanocrystals and/or quantum dots with a solution...
Silicon carbide epitaxial wafer, and preparation method thereof
According to an embodiment, there is provided a method of fabricating an epitaxial wafer, which includes preparing a wafer in a susceptor; and growing an...
Patterned substrate design for layer growth
A patterned surface for improving the growth of semiconductor layers, such as group III nitride-based semiconductor layers, is provided. The patterned surface...
Thin film deposition apparatus with multi chamber design and film
A multi chamber thin film deposition apparatus and a method for depositing films, is provided. Each chamber includes a three dimensional gas delivery system...
Machining process for semiconductor wafer
A surface of a semiconductor wafer is subjected to high flattening processing. A resin application and grinding step is repeatedly carried out, the step...
Method for fabricating equal height metal pillars of different diameters
A process to form metal pillars on a flip-chip device. The pillars, along with a layer of solder, will be used to bond die pads on the device to respective...
Field electron emission film, field electron emission device, light
emission device, and method for producing them
A field electron emission film that is capable of being operated with low electric power and enhancing the uniformity in luminance within the light emission...
Amalgam spheres for energy-saving lamps and their production
Energy-saving lamps contain a gas filling of mercury vapor and argon in a gas discharge bulb. Amalgam spheres are used for filling the gas discharge bulb with...
Methods and systems for providing a substantially quadrupole field with
significant hexapole and octapole...
A system and method involving processing ions in a linear ion trap are provided, involving a two-dimensional asymmetric substantially quadrupole field having a...
Multireflection time-of-flight mass spectrometer
A method of reflecting ions in a multireflection time of flight mass spectrometer is disclosed. The method includes guiding ions toward an ion mirror having...
Periodic field differential mobility analyzer
A periodic field differential mobility analyzer apparatus for separating and identifying ionic analytes employs a series of elongated parallel channels, a pump,...
Mass spectrometer and method of driving ion guide
A method of operating an electrode changeover switch which switches the connection state of electrodes, the electrode changeover switch is provided in the...
Self-shielding flex-circuit drift tube, drift tube assembly and method of
The present disclosure is directed to an ion mobility drift tube fabricated using flex-circuit technology in which every other drift electrode is on a different...
MEMS 2D air amplifier ion focusing device and manufacturing method thereof
The present invention relates to the field of micro electro mechanical system (MEMS), and particularly relates to a MEMS device of a two-dimensional (2D) air...
Method and device to increase the internal energy of ions in mass
A method and a device increases (e.g., uniformly) the internal energy of ions, in order to remove water shells or adducts, to decompose clusters or molecular...
Method and apparatus for mass analysis utilizing ion charge feedback
A method of mass analysis and a mass spectrometer are provided wherein a batch of ions is accumulated in a mass analyzer; the batch of ions accumulated in the...
Integrated capacitor transimpedance amplifier
Spectrometers including integrated capacitive detectors are described. An integrated capacitive detector integrates ion current from the collector (220) into a...
Calibrating dual ADC acquisition system
A method of calibrating a dual gain ADC detector system is disclosed comprising passing a test signal through a high gain signal path to produce a first signal...
Saturation correction for ion signals in time-of-flight mass spectrometers
The invention relates to time-of-flight mass spectrometers in which individual time-of-flight spectra are measured by detection systems with limited dynamic...
Dynamic resolution correction of quadrupole mass analyser
A method of mass spectrometry is disclosed comprising automatically correcting the mass or mass to charge ratio resolution of a quadrupole mass filter or mass...
Plasma processing method and plasma processing apparatus
In a plasma processing apparatus of an exemplary embodiment, energy of microwaves is introduced from an antenna into the processing container through a...
Certified wafer inspection
A method for certifying an inspection system using a calibrated surface, comprising: acquiring a calibrated list from said calibrated surface, with said...
Charged particle beam device
When a signal electron is detected by energy selection by combining and controlling retarding and boosting for observation of a deep hole, etc., the only way...
Electron microscope sample holder for forming a gas or liquid cell with
two semiconductor devices
A novel sample holder for specimen support devices for insertion in electron microscopes. The novel sample holder of the invention allows for the introduction...
Coaxial drive apparatus for multidirectional control
A coaxial drive apparatus for multidirectional control, including: a housing; a stage pivotally installed in the housing, with the object laid on the stage; a...
Charged particle inspection method and charged particle system
The present invention relates to a charged particle system comprising: a charged particle source; a first multi aperture plate; a second multi aperture plate...
Dual-energy X-ray tubes
Dual-energy x-ray tubes. In one example embodiment, a dual-energy x-ray tube includes an evacuated enclosure, an anode positioned within the evacuated...
Self contained irradiation system using flat panel X-ray sources
The present disclosure describes a self-contained irradiator comprising at least one X-ray source inside a shielded enclosure, the one or more sources each...
Cold field electron emitters based on silicon carbide structures
A cold cathode field emission electron source capable of emission at levels comparable to thermal sources is described. Emission in excess of 6 A/cm.sup.2 at...
Medium voltage controllable fuse
An electric fuse, having a first fusible element and a disconnect section electrically connected in series to the first fusible element. The disconnect section...
Fuse failure display
Circuitry for fuse failure display for monitoring the trip status of a fuse is disclosed, wherein a light-emitting diode is provided in order to display the...
A fuse unit is provided having a fuse element (2) in which a first terminal connecting part (4) and second terminal connecting parts (5) are formed and an...
Circuit for protecting against reverse polarity
A circuit for protecting an electric load against reverse polarity is provided by using a MOSFET (metal oxide semiconductor field-effect transistor), wherein:...