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Passivation layer for workpieces formed from a polymer
Methods of forming a passivation layer on a workpiece are disclosed. These methods utilize a SiC forming polymer to form the passivation layer. In addition,...
Method of manufacturing silicon carbide semiconductor device
A silicon carbide substrate having a first main surface and a second main surface opposite to the first main surface is prepared. A surface electrode is formed...
Surface pre-treatment for hard mask fabrication
A robust metallization profile is formed by pre-treat an anti-reflective coating layer by plasma before forming a hard mask layer. Pre-treatment is helpful...
Methods of forming line patterns in substrates
A method including forming a line pattern in a substrate includes using a plurality of longitudinally spaced projecting features formed along respective guide...
Semiconductor device and method of fabricating the same
A semiconductor device includes first, second, and third conductive lines, each with a respective line portion formed over a substrate and extending in a first...
Lithographic apparatus, fluid combining unit and device manufacturing
A system for tuning the refractive index of immersion liquid in an immersion lithographic apparatus is disclosed. Two or more immersion liquids of different...
Light emitting device having group III-nitride current spreading layer
doped with transition metal or...
A light-emitting device, such as a light-emitting diode (LED), has a group III-nitride current spreading layer which is either doped with transition metal, or...
Method of forming an array of nanostructures
A method of forming an array of nanostructures includes forming a plurality of seed points on a surface of a substrate, and growing masks from the seed points...
A semiconductor device in which an increase in oxygen vacancies in an oxide semiconductor layer can be suppressed is provided. A semiconductor device with...
Semiconductor structure with aspect ratio trapping capabilities
A semiconductor structure includes a first semiconductor region. The first semiconductor region includes a first semiconductor layer composed of a group IV...
Material quality, suspended material structures on lattice-mismatched
Suspended structures are provided using selective etch technology. Such structures can be protected on all sides when the selective undercut etch is performed,...
Stress relieving semiconductor layer
A semiconductor structure, such as a group III nitride-based semiconductor structure is provided. The semiconductor structure includes a cavity containing...
Semiconductor device and manufacturing method of the same
A semiconductor device, in which the generation of interface states in the interface region between a nitride semiconductor layer and an aluminum oxide layer is...
Method of manufacturing semiconductor device and substrate processing
Provided are a method of manufacturing a semiconductor device and a substrate processing apparatus. The method includes: forming a first layer including a first...
Method of manufacturing semiconductor device, substrate processing
apparatus and non-transitory...
Provided a method including forming a laminated film where a first film and a second film are laminated on a substrate by performing a cycle a predetermined...
Method for forming HfOx film based on atomic layer deposition (ALD)
A method for forming a HfOx film based on atomic layer deposition (ALD) process includes: providing a substrate; dividing a plurality of ALD cycles as needed...
Nitrogen-containing oxide film and method of forming the same
A method of forming a nitrogen-containing oxide film is disclosed. The method comprises (a) exposing a substrate to a first gas pulse having one of an...
Layer-by-layer deposition of carbon-doped oxide films through cyclical
Embodiments of the present invention generally relate to methods of forming carbon-doped oxide films. The methods generally include generating hydroxyl groups...
Method of depositing thin film
A method for forming a silicon germanium oxide thin film on a substrate in a reaction space may be performed using an atomic layer deposition (ALD) process. The...
Separation system, separation method, program and computer storage medium
The present invention is used for separating a superposed substrate in which a processing target substrate and a supporting substrate are joined together with...
Mercury-free discharge lamp
A mercury-free discharge lamp includes a luminous tube, and a pair of electrodes in the luminous tube such that the electrodes face each other in the luminous...
Mass analysis device and mass separation device
An object of the present invention is to provide a mass spectrometer and a mass separator whose design and performance are less restricted by problems arising...
Ion transfer method and device
An ion transport device can include a plurality of pole rod pairs arranged in parallel, and a controller. The controller can be configured to apply voltages in...
Simultaneous inorganic mass spectrometer and method of inorganic mass
An inorganic mass spectrometer capable of measuring a relevant and large or the full mass spectral range simultaneously may include a suitable ion source (e.g.,...
Plasma processing method and plasma processing apparatus
A plasma processing method of the present disclosure includes attaching a Si-containing material or a N-containing material to an electrostatic chuck that is...
Electrode arrangement for a dielectrically limited gas discharge
The invention relates to a flexible flat electrode arrangement for a dielectrically limited gas discharge, comprising a central region (3), an edge region, and...
Plasma generation device with microstrip resonator
A plasma generation device, a system including a plasma generation device, and a method of generating plasma and vacuum UV (VUV) photons are described. In a...
Dry etching method
The present invention discloses a dry etching method. The dry etching method comprises: etching a first medium layer; introducing a second reaction gas in a...
Plasma reactor with tiltable overhead RF inductive source
Correction of skew in plasma etch rate distribution is performed by tilting the overhead RF source power applicator about a tilt axis whose angle is determined...
Irradiation installation and control method for controlling same
To control of an irradiation installation, a particle beam is generated with a beam intensity, and a beam quality of the particle beam is monitored with a beam...
Method of stack patterning using a ion etching
The embodiments disclose a method of stack patterning, including loading a stack into a stationary stack stage, rotating one or more ion beam grid assemblies...
Dome detection for charged particle beam device
According to an embodiment, a method of operating a charged particle beam device is provided. The charged particle beam device includes a beam separation unit,...
Charged particle beam device
Provided is a charged particle beam device with high sensitivity, capable of detecting charged particles emitted from a sample at high resolution. An absorption...
Particle beam detector
A particle beam detector is disclosed. The particle beam detector can include a particle beam receiving portion configured to convert particle beam energy to...
Blanking device for multi charged particle beams, and multi charged
particle beam writing apparatus
A blanking device for multi-beams includes a substrate, a dielectric film formed on the substrate, plural first electrodes, at positions each exposed in a...
Ion implantation device
An ion implantation device equipped with a vacuum chamber (11), an electrode roll (13) on a portion of the outer circumferential part of which a film (2) is...
Bremstrahlung target for intensity modulated X-ray radiation therapy and
stereotactic X-ray therapy
Direct write electron-beam-to-x-ray converters are described, which may be programmed to focus x-rays into an arbitrary shape to provide spatial and intensity...
Electromechanical x-ray generator
An electro-mechanical x-ray generator configured to obtain high-energy operation with favorable energy-weight scaling. The electro-mechanical x-ray generator...
Logic function generation from single microplasma transistor devices and
arrays of devices
Logic devices are provided in multiple sub-collector and sub-emitter microplasma devices formed in thin and flexible, or inflexible, semiconductor materials....
Systems and methods for regulating pressure of a filled-in gas
A system for regulating a pressure of a filled-in gas is presented. The system includes a reservoir that stores a reservoir gas adsorbed in a sorbent material...
Method for determining a circuit element parameter
A method for determining a circuit element parameter in a ground fault circuit interrupter circuit. An electrical signal provided to a first node is used to...
Solder bump sealing method and device
A method for forming a cavity in a microfabricated structure, includes the sealing of that cavity with a low temperature solder. The method may include forming...
Electromagnetic switching device
Disclosed is an electromagnetic switching device. The electromagnetic switching device includes a housing, a fixed contact point inside the housing, a movable...
An electromagnetic relay includes a contact that includes a fixed contact and a movable contact, a permanent magnet provided on the peripheral side of the...
A relay includes: a fixed terminal on which a fixed contact is provided; a movable terminal on which a movable contact is provided; a cam that has an elliptical...
AC line powered relay driving circuits
Disclosed are exemplary embodiments of relay drive circuits. In an exemplary embodiment, a relay drive circuit generally includes a first diode, a second diode,...
A coil electrode has a ring section provided on a plane perpendicular to the axis line of fixed-side and movable-side electrode rods on which the coil...
Contact assembly for a vacuum circuit breaker
A contact assembly and a vacuum circuit breaker for interrupting an electrical current are disclosed. The contact assembly includes an outer field generating...
Vacuum switching apparatus, and electrode extension assembly and
associated assembly method therefor
An electrode extension assembly is for a vacuum switching apparatus, such as a vacuum interrupter, including a vacuum envelope and separable contact assemblies....
Electrical switching device
Electrical switching device having a housing, at least two switching chambers within the housing with contacts to interrupt at least one current path, an arc...