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Patent # Description
US-9,330,917 Passivation layer for workpieces formed from a polymer
Methods of forming a passivation layer on a workpiece are disclosed. These methods utilize a SiC forming polymer to form the passivation layer. In addition,...
US-9,330,916 Method of manufacturing silicon carbide semiconductor device
A silicon carbide substrate having a first main surface and a second main surface opposite to the first main surface is prepared. A surface electrode is formed...
US-9,330,915 Surface pre-treatment for hard mask fabrication
A robust metallization profile is formed by pre-treat an anti-reflective coating layer by plasma before forming a hard mask layer. Pre-treatment is helpful...
US-9,330,914 Methods of forming line patterns in substrates
A method including forming a line pattern in a substrate includes using a plurality of longitudinally spaced projecting features formed along respective guide...
US-9,330,913 Semiconductor device and method of fabricating the same
A semiconductor device includes first, second, and third conductive lines, each with a respective line portion formed over a substrate and extending in a first...
US-9,330,912 Lithographic apparatus, fluid combining unit and device manufacturing method
A system for tuning the refractive index of immersion liquid in an immersion lithographic apparatus is disclosed. Two or more immersion liquids of different...
US-9,330,911 Light emitting device having group III-nitride current spreading layer doped with transition metal or...
A light-emitting device, such as a light-emitting diode (LED), has a group III-nitride current spreading layer which is either doped with transition metal, or...
US-9,330,910 Method of forming an array of nanostructures
A method of forming an array of nanostructures includes forming a plurality of seed points on a surface of a substrate, and growing masks from the seed points...
US-9,330,909 Semiconductor device
A semiconductor device in which an increase in oxygen vacancies in an oxide semiconductor layer can be suppressed is provided. A semiconductor device with...
US-9,330,908 Semiconductor structure with aspect ratio trapping capabilities
A semiconductor structure includes a first semiconductor region. The first semiconductor region includes a first semiconductor layer composed of a group IV...
US-9,330,907 Material quality, suspended material structures on lattice-mismatched substrates
Suspended structures are provided using selective etch technology. Such structures can be protected on all sides when the selective undercut etch is performed,...
US-9,330,906 Stress relieving semiconductor layer
A semiconductor structure, such as a group III nitride-based semiconductor structure is provided. The semiconductor structure includes a cavity containing...
US-9,330,905 Semiconductor device and manufacturing method of the same
A semiconductor device, in which the generation of interface states in the interface region between a nitride semiconductor layer and an aluminum oxide layer is...
US-9,330,904 Method of manufacturing semiconductor device and substrate processing apparatus
Provided are a method of manufacturing a semiconductor device and a substrate processing apparatus. The method includes: forming a first layer including a first...
US-9,330,903 Method of manufacturing semiconductor device, substrate processing apparatus and non-transitory...
Provided a method including forming a laminated film where a first film and a second film are laminated on a substrate by performing a cycle a predetermined...
US-9,330,902 Method for forming HfOx film based on atomic layer deposition (ALD) process
A method for forming a HfOx film based on atomic layer deposition (ALD) process includes: providing a substrate; dividing a plurality of ALD cycles as needed...
US-9,330,901 Nitrogen-containing oxide film and method of forming the same
A method of forming a nitrogen-containing oxide film is disclosed. The method comprises (a) exposing a substrate to a first gas pulse having one of an...
US-9,330,900 Layer-by-layer deposition of carbon-doped oxide films through cyclical silylation
Embodiments of the present invention generally relate to methods of forming carbon-doped oxide films. The methods generally include generating hydroxyl groups...
US-9,330,899 Method of depositing thin film
A method for forming a silicon germanium oxide thin film on a substrate in a reaction space may be performed using an atomic layer deposition (ALD) process. The...
US-9,330,898 Separation system, separation method, program and computer storage medium
The present invention is used for separating a superposed substrate in which a processing target substrate and a supporting substrate are joined together with...
US-9,330,897 Mercury-free discharge lamp
A mercury-free discharge lamp includes a luminous tube, and a pair of electrodes in the luminous tube such that the electrodes face each other in the luminous...
US-9,330,896 Mass analysis device and mass separation device
An object of the present invention is to provide a mass spectrometer and a mass separator whose design and performance are less restricted by problems arising...
US-9,330,894 Ion transfer method and device
An ion transport device can include a plurality of pole rod pairs arranged in parallel, and a controller. The controller can be configured to apply voltages in...
US-9,330,892 Simultaneous inorganic mass spectrometer and method of inorganic mass spectrometry
An inorganic mass spectrometer capable of measuring a relevant and large or the full mass spectral range simultaneously may include a suitable ion source (e.g.,...
US-9,330,891 Plasma processing method and plasma processing apparatus
A plasma processing method of the present disclosure includes attaching a Si-containing material or a N-containing material to an electrostatic chuck that is...
US-9,330,890 Electrode arrangement for a dielectrically limited gas discharge
The invention relates to a flexible flat electrode arrangement for a dielectrically limited gas discharge, comprising a central region (3), an edge region, and...
US-9,330,889 Plasma generation device with microstrip resonator
A plasma generation device, a system including a plasma generation device, and a method of generating plasma and vacuum UV (VUV) photons are described. In a...
US-9,330,888 Dry etching method
The present invention discloses a dry etching method. The dry etching method comprises: etching a first medium layer; introducing a second reaction gas in a...
US-9,330,887 Plasma reactor with tiltable overhead RF inductive source
Correction of skew in plasma etch rate distribution is performed by tilting the overhead RF source power applicator about a tilt axis whose angle is determined...
US-9,330,886 Irradiation installation and control method for controlling same
To control of an irradiation installation, a particle beam is generated with a beam intensity, and a beam quality of the particle beam is monitored with a beam...
US-9,330,885 Method of stack patterning using a ion etching
The embodiments disclose a method of stack patterning, including loading a stack into a stationary stack stage, rotating one or more ion beam grid assemblies...
US-9,330,884 Dome detection for charged particle beam device
According to an embodiment, a method of operating a charged particle beam device is provided. The charged particle beam device includes a beam separation unit,...
US-9,330,883 Charged particle beam device
Provided is a charged particle beam device with high sensitivity, capable of detecting charged particles emitted from a sample at high resolution. An absorption...
US-9,330,882 Particle beam detector
A particle beam detector is disclosed. The particle beam detector can include a particle beam receiving portion configured to convert particle beam energy to...
US-9,330,881 Blanking device for multi charged particle beams, and multi charged particle beam writing apparatus
A blanking device for multi-beams includes a substrate, a dielectric film formed on the substrate, plural first electrodes, at positions each exposed in a...
US-9,330,880 Ion implantation device
An ion implantation device equipped with a vacuum chamber (11), an electrode roll (13) on a portion of the outer circumferential part of which a film (2) is...
US-9,330,879 Bremstrahlung target for intensity modulated X-ray radiation therapy and stereotactic X-ray therapy
Direct write electron-beam-to-x-ray converters are described, which may be programmed to focus x-rays into an arbitrary shape to provide spatial and intensity...
US-9,330,878 Electromechanical x-ray generator
An electro-mechanical x-ray generator configured to obtain high-energy operation with favorable energy-weight scaling. The electro-mechanical x-ray generator...
US-9,330,877 Logic function generation from single microplasma transistor devices and arrays of devices
Logic devices are provided in multiple sub-collector and sub-emitter microplasma devices formed in thin and flexible, or inflexible, semiconductor materials....
US-9,330,876 Systems and methods for regulating pressure of a filled-in gas
A system for regulating a pressure of a filled-in gas is presented. The system includes a reservoir that stores a reservoir gas adsorbed in a sorbent material...
US-9,330,875 Method for determining a circuit element parameter
A method for determining a circuit element parameter in a ground fault circuit interrupter circuit. An electrical signal provided to a first node is used to...
US-9,330,874 Solder bump sealing method and device
A method for forming a cavity in a microfabricated structure, includes the sealing of that cavity with a low temperature solder. The method may include forming...
US-9,330,873 Electromagnetic switching device
Disclosed is an electromagnetic switching device. The electromagnetic switching device includes a housing, a fixed contact point inside the housing, a movable...
US-9,330,872 Electromagnetic relay
An electromagnetic relay includes a contact that includes a fixed contact and a movable contact, a permanent magnet provided on the peripheral side of the...
US-9,330,871 Relay
A relay includes: a fixed terminal on which a fixed contact is provided; a movable terminal on which a movable contact is provided; a cam that has an elliptical...
US-9,330,870 AC line powered relay driving circuits
Disclosed are exemplary embodiments of relay drive circuits. In an exemplary embodiment, a relay drive circuit generally includes a first diode, a second diode,...
US-9,330,869 Vacuum valve
A coil electrode has a ring section provided on a plane perpendicular to the axis line of fixed-side and movable-side electrode rods on which the coil...
US-9,330,868 Contact assembly for a vacuum circuit breaker
A contact assembly and a vacuum circuit breaker for interrupting an electrical current are disclosed. The contact assembly includes an outer field generating...
US-9,330,867 Vacuum switching apparatus, and electrode extension assembly and associated assembly method therefor
An electrode extension assembly is for a vacuum switching apparatus, such as a vacuum interrupter, including a vacuum envelope and separable contact assemblies....
US-9,330,866 Electrical switching device
Electrical switching device having a housing, at least two switching chambers within the housing with contacts to interrupt at least one current path, an arc...
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