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Method for repairing damages to sidewalls of an ultra-low dielectric
A method for repairing damages to sidewalls of an ultra-low dielectric constant film is disclosed by the present invention comprises the following steps:...
Semiconductor device and method of manufacturing the same
An upper surface of a plug (PL1) is formed so as to be higher than an upper surface of an interlayer insulating film (PIL) by forming the interlayer insulating...
Method of manufacturing a semiconductor device, method of processing a
substrate, substrate processing...
Disclosed is a method of manufacturing a semiconductor device. The method includes forming a film containing carbon on a substrate by repeating a cycle plural...
Processing system architecture with single load lock chamber
A substrate processing system architecture includes an MOCVD reactor processing module coupled to a single three-level load lock chamber. The load lock has a...
Silicon wafer and method for producing the same
Methods for producing a silicon wafer from a defect-free silicon single crystal grown by a Czochralski (CZ) method are provided. The methods comprise: preparing...
Fluorine-containing resin film and solar cell module
Disclosed is a fluorine-containing resin film which is formed from a fluorine-containing resin composition and has a thickness of 10 to 50 .mu.m, wherein the...
Electrical device, system and method for operating with reduced acoustic
Disclosed herein is a device for reducing noise generated by an electrical component, the device including a stiffening component secured to an electrical...
Fluorescent lighting with aluminum nitride phosphors
A fluorescent lamp includes a glass envelope; at least two electrodes connected to the glass envelope; mercury vapor and an inert gas within the glass envelope;...
Exponential scan mode for quadrupole mass spectrometers to generate
super-resolved mass spectra
A novel scanning method of a mass spectrometer apparatus is introduced so as to relate by simple time shifts, rather than time dilations, the component signal...
Apparatus and method for generating chemical signatures using differential
The present invention is directed to a method and device to generate a chemical signature for a mixture of analytes. The present invention involves using a SPME...
Inlet sampling method and device
An inlet apparatus is disclosed. The apparatus may include a first conduit for sampling, and a second and third conduit for directing flow throughout the inlet...
Method of MS/MS mass spectrometry
A method of mass spectrometry is disclosed comprising alternating between a first mode in which parent ions are mass analyzed and a second mode in which the...
Grounded confinement ring having large surface area
A wafer processing system is provided for use with a driver and a material supply source. The driver is operable to generate a driving signal. The material...
Plasma processing apparatus and constituent part thereof
A constituent part is included in a plasma processing apparatus for performing a plasma process on a substrate mounted on a susceptor by using a plasma...
Corrosion resistant aluminum coating on plasma chamber components
Components of semiconductor material processing chambers are disclosed, which may include a substrate and at least one corrosion-resistant coating formed on a...
Microwave processing apparatus and control method thereof
A microwave processing apparatus includes: a processing chamber; a microwave introducing unit for generating microwaves and introducing the microwaves into the...
Control of impedance of RF return path
A system for controlling an impedance of a radio frequency (RF) return path includes a matchbox further including a match circuitry. The system further includes...
Plasma processing apparatus and plasma processing method
In a plasma processing apparatus including a first radio-frequency power supply which supplies first radio-frequency power for generating plasma in a vacuum...
Apparatus and method for dynamic control of ion beam energy and angle
In one embodiment a method of etching a substrate includes directing a first ion beam to the substrate through an extraction plate of a processing apparatus...
RF multi-feed structure to improve plasma uniformity
A plasma source assembly for use with a processing chamber is described. The assembly includes a multi-feed RF power connection to a single or multiple RF hot...
Plasma processing systems including side coils and methods related to the
plasma processing systems
A plasma processing system for generating plasma to process a wafer. The plasma processing system includes a set of top coils for initiating the plasma, a set...
Multiple radio frequency power supply control of frequency and phase
A system has a first RF generator and a second RF generator. The first RF generator controls the frequency of the second RF generator. The first RF generator...
Multi charged particle beam writing apparatus and multi charged particle
beam writing method
A charged particle beam writing apparatus includes a storage unit to store each pattern data of plural figure patterns arranged in each of plural small regions...
Digital pattern generator (DPG) for E-beam lithography
A method of lithography including providing a first mirror array and a second mirror array of a digital pattern generator (DPG); the second mirror array is...
Ion implantation apparatus
An ion implantation apparatus includes: a lens electrode unit including a plurality of electrode sections for parallelizing an ion beam; and a vacuum unit that...
Ion implantation device
The disclosed ion implantation apparatus has a vacuum chamber 11, a roller electrode 13 having a portion of an outer circumferential part on which a film 3 is...
Semiconductor process pumping arrangements
A semiconductor process pump configured to mitigate losses in pump speed during operation. The semiconductor process pump may include a housing having an inlet...
Method of cleaving a thin sapphire layer from a bulk material by
implanting a plurality of particles and...
Embodiments relate to use of a particle accelerator beam to form thin layers of material from a bulk substrate. In particular embodiments, a bulk substrate...
Multi charged particle beam writing apparatus, and multi charged particle
beam writing method
A multi charged particle beam writing apparatus includes a charge amount distribution calculation unit to calculate a charge amount distribution whose charge...
Charged particle beam apparatus
A charged particle beam apparatus including a column irradiating a sample with a charged particle beam, a detector detecting a secondary particle emitted from...
Electron beam data storage system and method for high volume manufacturing
The present disclosure provides for many different embodiments of a charged particle beam data storage system and method. In an example, a method includes...
Method for creating S/TEM sample and sample structure
An improved method and apparatus for S/TEM sample preparation and analysis. Preferred embodiments of the present invention provide improved methods for TEM...
Charged particle beam device and measuring method using the same
In an SEM provided with an ExB deflector for deflecting secondary electrons outside an optical axis of a primary electron beam between an electronic source and...
Scanning particle microscope and method for determining a position change
of a particle beam of the scanning...
The invention refers to a scanning particle microscope comprising: (a) at least one reference object which is fixedly arranged at an output of the scanning...
Method of detecting electrons, an electron-detector and an inspection
An electron-detector comprises a scintillator plate 207, electron optics 204 for directing a plurality of electron beams 9 onto the scintillator plate so that...
Charged particle detection system and multi-beamlet inspection system
A charged particle detection system comprises plural detection elements and a multi-aperture plate in proximity of the detection elements. Charged particle...
Electron beam writing apparatus, and method for adjusting convergence half
angle of electron beam
An electron beam writing apparatus includes an electron gun system to emit an electron beam, a height adjustment unit, arranged at the downstream side compared...
Focused ion beam apparatus with precious metal emitter surface
A focused ion beam apparatus has an ion source chamber in which is disposed an emitter for emitting ions. The surface of the emitter is formed of a precious...
A protective device including a substrate, a conductive section and a bridge element is provided. The conductive section is supported by the substrate, wherein...
Electrical switching apparatus and secondary disconnect assembly with
terminal retention and correction...
A secondary disconnect assembly is for an electrical switching apparatus, such as a power circuit breaker. The secondary disconnect assembly includes a cradle...
Relay driving device and method for driving a relay
A relay driving device includes first and second power supply modules, a switching circuit, and a control module. The first power supply module outputs a first...
Power distribution apparatus supplying direct-current power
A power distribution apparatus for supplying power from a direct-current power supply to a load via a first connector and a second connector includes a sensor...
Gas circuit breaker
A pair of arcing contacts 3 and 5 facing each other are placed in a tank 1 to perform opening and closing operation, and a puffer cylinder 7 is coaxially...
Switch mechanism for activating different switches and portable electronic
A switch mechanism includes a button, a pressing component, a linking component and an activating component. The button is for moving in a first direction or a...
A switch device includes a lever and a pusher. The pusher includes a surface that contacts the lever. When force is applied from the lever to the pusher, an...
A switch has an actuating arm including an actuating portion and a driving portion, a base including a support that supports the actuating arm, and a recess...
A disconnecting switch includes a contact part that includes a stationary contact and a movable contact, a shaft that moves the movable contact relative to the...
Press detection sensor, input device and electronic apparatus
A press detection sensor contains a base member having predetermined length and width and also having a predetermined shape, a first conductor having...
Keyboard and method for assembling keyboard and portable electronic device
A keyboard applicable to a portable electronic device includes a flexible circuit board, a plurality of keys, a flexible frame, a first support plate, and a...
Switch device and timepiece
A switch device including a case having a through hole, a cylindrical member including a first cylindrical section having a small diameter arranged in the...