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Patent # Description
US-9,337,017 Method for repairing damages to sidewalls of an ultra-low dielectric constant film
A method for repairing damages to sidewalls of an ultra-low dielectric constant film is disclosed by the present invention comprises the following steps:...
US-9,337,016 Semiconductor device and method of manufacturing the same
An upper surface of a plug (PL1) is formed so as to be higher than an upper surface of an interlayer insulating film (PIL) by forming the interlayer insulating...
US-9,337,015 Method of manufacturing a semiconductor device, method of processing a substrate, substrate processing...
Disclosed is a method of manufacturing a semiconductor device. The method includes forming a film containing carbon on a substrate by repeating a cycle plural...
US-9,337,014 Processing system architecture with single load lock chamber
A substrate processing system architecture includes an MOCVD reactor processing module coupled to a single three-level load lock chamber. The load lock has a...
US-9,337,013 Silicon wafer and method for producing the same
Methods for producing a silicon wafer from a defect-free silicon single crystal grown by a Czochralski (CZ) method are provided. The methods comprise: preparing...
US-9,337,012 Fluorine-containing resin film and solar cell module
Disclosed is a fluorine-containing resin film which is formed from a fluorine-containing resin composition and has a thickness of 10 to 50 .mu.m, wherein the...
US-9,337,011 Electrical device, system and method for operating with reduced acoustic noise generation
Disclosed herein is a device for reducing noise generated by an electrical component, the device including a stiffening component secured to an electrical...
US-9,337,010 Fluorescent lighting with aluminum nitride phosphors
A fluorescent lamp includes a glass envelope; at least two electrodes connected to the glass envelope; mercury vapor and an inert gas within the glass envelope;...
US-9,337,009 Exponential scan mode for quadrupole mass spectrometers to generate super-resolved mass spectra
A novel scanning method of a mass spectrometer apparatus is introduced so as to relate by simple time shifts, rather than time dilations, the component signal...
US-9,337,007 Apparatus and method for generating chemical signatures using differential desorption
The present invention is directed to a method and device to generate a chemical signature for a mixture of analytes. The present invention involves using a SPME...
US-9,337,006 Inlet sampling method and device
An inlet apparatus is disclosed. The apparatus may include a first conduit for sampling, and a second and third conduit for directing flow throughout the inlet...
US-9,337,005 Method of MS/MS mass spectrometry
A method of mass spectrometry is disclosed comprising alternating between a first mode in which parent ions are mass analyzed and a second mode in which the...
US-9,337,004 Grounded confinement ring having large surface area
A wafer processing system is provided for use with a driver and a material supply source. The driver is operable to generate a driving signal. The material...
US-9,337,003 Plasma processing apparatus and constituent part thereof
A constituent part is included in a plasma processing apparatus for performing a plasma process on a substrate mounted on a susceptor by using a plasma...
US-9,337,002 Corrosion resistant aluminum coating on plasma chamber components
Components of semiconductor material processing chambers are disclosed, which may include a substrate and at least one corrosion-resistant coating formed on a...
US-9,337,001 Microwave processing apparatus and control method thereof
A microwave processing apparatus includes: a processing chamber; a microwave introducing unit for generating microwaves and introducing the microwaves into the...
US-9,337,000 Control of impedance of RF return path
A system for controlling an impedance of a radio frequency (RF) return path includes a matchbox further including a match circuitry. The system further includes...
US-9,336,999 Plasma processing apparatus and plasma processing method
In a plasma processing apparatus including a first radio-frequency power supply which supplies first radio-frequency power for generating plasma in a vacuum...
US-9,336,998 Apparatus and method for dynamic control of ion beam energy and angle
In one embodiment a method of etching a substrate includes directing a first ion beam to the substrate through an extraction plate of a processing apparatus...
US-9,336,997 RF multi-feed structure to improve plasma uniformity
A plasma source assembly for use with a processing chamber is described. The assembly includes a multi-feed RF power connection to a single or multiple RF hot...
US-9,336,996 Plasma processing systems including side coils and methods related to the plasma processing systems
A plasma processing system for generating plasma to process a wafer. The plasma processing system includes a set of top coils for initiating the plasma, a set...
US-9,336,995 Multiple radio frequency power supply control of frequency and phase
A system has a first RF generator and a second RF generator. The first RF generator controls the frequency of the second RF generator. The first RF generator...
US-9,336,994 Multi charged particle beam writing apparatus and multi charged particle beam writing method
A charged particle beam writing apparatus includes a storage unit to store each pattern data of plural figure patterns arranged in each of plural small regions...
US-9,336,993 Digital pattern generator (DPG) for E-beam lithography
A method of lithography including providing a first mirror array and a second mirror array of a digital pattern generator (DPG); the second mirror array is...
US-9,336,992 Ion implantation apparatus
An ion implantation apparatus includes: a lens electrode unit including a plurality of electrode sections for parallelizing an ion beam; and a vacuum unit that...
US-9,336,991 Ion implantation device
The disclosed ion implantation apparatus has a vacuum chamber 11, a roller electrode 13 having a portion of an outer circumferential part on which a film 3 is...
US-9,336,990 Semiconductor process pumping arrangements
A semiconductor process pump configured to mitigate losses in pump speed during operation. The semiconductor process pump may include a housing having an inlet...
US-9,336,989 Method of cleaving a thin sapphire layer from a bulk material by implanting a plurality of particles and...
Embodiments relate to use of a particle accelerator beam to form thin layers of material from a bulk substrate. In particular embodiments, a bulk substrate...
US-9,336,988 Multi charged particle beam writing apparatus, and multi charged particle beam writing method
A multi charged particle beam writing apparatus includes a charge amount distribution calculation unit to calculate a charge amount distribution whose charge...
US-9,336,987 Charged particle beam apparatus
A charged particle beam apparatus including a column irradiating a sample with a charged particle beam, a detector detecting a secondary particle emitted from...
US-9,336,986 Electron beam data storage system and method for high volume manufacturing
The present disclosure provides for many different embodiments of a charged particle beam data storage system and method. In an example, a method includes...
US-9,336,985 Method for creating S/TEM sample and sample structure
An improved method and apparatus for S/TEM sample preparation and analysis. Preferred embodiments of the present invention provide improved methods for TEM...
US-9,336,984 Charged particle beam device and measuring method using the same
In an SEM provided with an ExB deflector for deflecting secondary electrons outside an optical axis of a primary electron beam between an electronic source and...
US-9,336,983 Scanning particle microscope and method for determining a position change of a particle beam of the scanning...
The invention refers to a scanning particle microscope comprising: (a) at least one reference object which is fixedly arranged at an output of the scanning...
US-9,336,982 Method of detecting electrons, an electron-detector and an inspection system
An electron-detector comprises a scintillator plate 207, electron optics 204 for directing a plurality of electron beams 9 onto the scintillator plate so that...
US-9,336,981 Charged particle detection system and multi-beamlet inspection system
A charged particle detection system comprises plural detection elements and a multi-aperture plate in proximity of the detection elements. Charged particle...
US-9,336,980 Electron beam writing apparatus, and method for adjusting convergence half angle of electron beam
An electron beam writing apparatus includes an electron gun system to emit an electron beam, a height adjustment unit, arranged at the downstream side compared...
US-9,336,979 Focused ion beam apparatus with precious metal emitter surface
A focused ion beam apparatus has an ion source chamber in which is disposed an emitter for emitting ions. The surface of the emitter is formed of a precious...
US-9,336,978 Protective device
A protective device including a substrate, a conductive section and a bridge element is provided. The conductive section is supported by the substrate, wherein...
US-9,336,977 Electrical switching apparatus and secondary disconnect assembly with terminal retention and correction...
A secondary disconnect assembly is for an electrical switching apparatus, such as a power circuit breaker. The secondary disconnect assembly includes a cradle...
US-9,336,976 Relay driving device and method for driving a relay
A relay driving device includes first and second power supply modules, a switching circuit, and a control module. The first power supply module outputs a first...
US-9,336,975 Power distribution apparatus supplying direct-current power
A power distribution apparatus for supplying power from a direct-current power supply to a load via a first connector and a second connector includes a sensor...
US-9,336,974 Gas circuit breaker
A pair of arcing contacts 3 and 5 facing each other are placed in a tank 1 to perform opening and closing operation, and a puffer cylinder 7 is coaxially...
US-9,336,973 Switch mechanism for activating different switches and portable electronic device therewith
A switch mechanism includes a button, a pressing component, a linking component and an activating component. The button is for moving in a first direction or a...
US-9,336,972 Switch device
A switch device includes a lever and a pusher. The pusher includes a surface that contacts the lever. When force is applied from the lever to the pusher, an...
US-9,336,971 Switch
A switch has an actuating arm including an actuating portion and a driving portion, a base including a support that supports the actuating arm, and a recess...
US-9,336,970 Disconnecting switch
A disconnecting switch includes a contact part that includes a stationary contact and a movable contact, a shaft that moves the movable contact relative to the...
US-9,336,969 Press detection sensor, input device and electronic apparatus
A press detection sensor contains a base member having predetermined length and width and also having a predetermined shape, a first conductor having...
US-9,336,968 Keyboard and method for assembling keyboard and portable electronic device
A keyboard applicable to a portable electronic device includes a flexible circuit board, a plurality of keys, a flexible frame, a first support plate, and a...
US-9,336,967 Switch device and timepiece
A switch device including a case having a through hole, a cylindrical member including a first cylindrical section having a small diameter arranged in the...
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