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Substrate holders for uniform reactive sputtering
A substrate holder for a substrate including a frame body having an opening for the placement of the substrate. The frame body also includes a hollow portion...
Methods of forming self-aligned structures on patterned substrates are described. The methods may be used to form metal lines or vias without the use of a...
Apparatus for generating thermodynamically cold microwave plasma
The invention relates to an apparatus for generating a thermodynamically cold plasma under standard atmospheric conditions by injecting microwave radiation at a...
Plasma processing apparatus
A plasma processing apparatus includes a processing chamber configured to partition a processing space and a microwave generator configured to generate...
Plasma processing apparatus
A plasma processing apparatus has a long chamber having an opening portion, a gas supply apparatus that supplies gas into the chamber, a spiral coil having a...
Multi charged particle beam writing apparatus and multi charged particle
beam writing method
In accordance with one aspect of this invention, a multi charged particle beam writing apparatus includes an aperture member, in which a plurality of openings...
Method and system for dimensional uniformity using charged particle beam
A method for mask process correction or forming a pattern on a reticle using charged particle beam lithography is disclosed, where the reticle is to be used in...
Charged particle beam pattern writing method and charged particle beam
writing apparatus that corrects beam...
A charged particle beam pattern writing method according to an embodiment, includes measuring a position displacement amount of a stage above which a target...
Charged particle beam irradiation apparatus
The purpose of the present invention is to provide a charged particle beam irradiation apparatus of a relatively simple structure which performs cooling on a...
Scanning electron microscope device and pattern dimension measuring method
In a panoramic image construction technology a wide-range imaging area (EP) of semiconductor patterns is divided into a plurality of imaging areas (SEP), and...
Ion implanter, beam energy measuring device, and method of measuring beam
A beam energy measuring device in an ion implanter includes a parallelism measuring unit that measures a parallelism of an ion beam at a downstream of a beam...
Ion implantation apparatus, beam parallelizing apparatus, and ion
An ion implantation apparatus includes a beam parallelizing unit and a third power supply unit. The beam parallelizing unit includes an acceleration lens, and a...
Desktop electron microscope and combined round-multipole magnetic lens
A combined round-multipole magnetic lens comprises a coil bracket, a first pole piece and a second pole piece. At least a first pole shoe of the first pole...
Multipole and charged particle radiation apparatus using the same
In order to realize a multiple assembled easily with high accuracy, a multipole having assembly accuracy within 10 micrometer and within several seconds of...
GCIB nozzle assembly
A nozzle assembly used for performing gas cluster ion beam (GCIB) etch processing of various materials is described. In particular, the nozzle assembly includes...
Magnetic actuator for a circuit breaker arrangement
An exemplary magnetic actuator for a circuit breaker arrangement includes a coil, a core with a groove for accommodating a section of the coil, and a movable...
Circuit breaker with a magnet fixing means
The present invention provides a magnet fixing means having a circuit breaker including a heater generating heat due to a conduction current induced to a moving...
Electrical switching apparatus, and indication assembly and trip cam
A trip cam is for an indication assembly of an electrical switching apparatus. The electrical switching apparatus includes a housing and a number of poles. Each...
Normally closed microelectromechanical switches (MEMS), methods of
manufacture and design structures
Normally closed (shut) micro-electro-mechanical switches (MEMS), methods of manufacture and design structures are provided. A structure includes a beam...
Battery relay for automobile
Disclosed is a battery relay for a vehicle. The battery relay has a strengthened operation structure, which includes divided upper plunger and lower plunger by...
Method of placing a thermal fuse on a panel
A reflowable thermal fuse includes a positive-temperature-coefficient (PTC) device that defines a first end and a second end, a conduction element that defines...
Arc extinguishing contact assembly for a circuit breaker assembly
An arc extinguishing contact assembly for a circuit breaker assembly is provided. The arc extinguishing contact assembly includes a fixed contact assembly, a...
Bi-directional direct current electrical switching apparatus including
small permanent magnets on ferromagnetic...
An electrical switching apparatus for bi-directional direct current switching and interruption includes separable contacts, an operating mechanism to open and...
Compact bus bar assembly, switching device and power distribution system
A contact bus bar assembly for supplying power to a load, and further pertains to a switching device which can be connected to such a compact bus bar assembly,...
Pressure and rotationally actuated control element for a motor vehicle
A pressure and rotationally actuated control element for a vehicle steering wheel includes a bearing block and an input element. The bearing block is mounted on...
Systems and methods for implementing spring loaded mechanical key switches
with variable displacement sensing
Systems and methods are disclosed that enable spring loaded mechanical key switch assemblies having variable displacement sensing capabilities. In one example,...
A keyswitch includes a casing having a first magnetic area, a key cap, and a support device including first and second support members rotatably connected to...
Disclosed a trigger switch including: a case having a switch chamber in which a switch mechanism is arranged in a sealed state; a plunger inserted slidably into...
Molded case circuit breaker
A molded case circuit breaker, includes: a case; a power side terminal portion and a load side terminal portion formed at two sides of the case; a mounter...
Energy-storing unit with forcing mechanism, and on-load tap changing
An energy-storing unit with a forcing mechanism and an on-load tap changing device provided with the same which employ an inexpensive and simple structure and...
Actuation device for an explosion-proof housing
An actuation device (11) for an explosion-proof housing (10) in compliance with the ignition protection category "pressure-proof encapsulation". The actuation...
Method of making contact posts for a microelectromechanical device
A device 20 includes a substrate 22 coupled with a substrate 24 such that a volume 32 is formed between the substrates 22, 24. Contact posts 48, 50 on the...
Power storage device
A power storage device with high output is provided, in which the specific surface area is increased while keeping the easy-to-handle particle size of its...
Polarizable ion-conducting material
A polarizable ion-conducting material. The material contains mobile ions and a matrix formed of a polymer having ionic groups of a charge opposite to that of...
Solid electrolytic capacitor and improved method for manufacturing a solid
An improved process for forming a capacitor, and improved capacitor formed thereby is described. The process includes: providing an anode comprising a...
Capacitor for multiple replacement applications
A capacitor provides a plurality of selectable capacitance values, by selective connection of six concentrically wound capacitor sections of a capacitive...
Vertical metal insulator metal capacitor
A capacitor structure includes at least two capacitors. A first electrode includes a bottom conductive plane and first vertical conductive structures. The...
Multilayer ceramic capacitor and board having the same mounted thereon
A multilayer ceramic capacitor may include: a ceramic body; a first internal electrode is spaced apart from first and second end surfaces by a predetermined...
Multilayer ceramic capacitor and assembly board having the same
A multilayer ceramic capacitor may include: a ceramic body having upper and lower surfaces opposing each other in a thickness direction thereof and first and...
Monolithic ceramic electronic component
A monolithic ceramic electronic component includes an outer electrode including a first plating layer formed directly on a component body by electroless plating...
Additively deposited electronic components and methods for producing the
An exemplary embodiment of the present invention provides a passive electrical component comprising a substrate, a first electrically conductive layer, a first...
Conductive paste composition for external electrode and multilayer ceramic
electronic component including the same
There is provided a conductive paste composition for an external electrode, the conductive paste composition including a polymer resin, spherical first...
Methods for manufacture a capacitor with three-dimensional high surface
A capacitor, and methods of its manufacture, having improved capacitance efficiency which results from increasing the effective area of an electrode surface are...
Chip-type electronic component with outer electrodes
In an electronic component, a body includes top and bottom surfaces, first and second end surfaces, and first and second lateral surfaces. A first outer...
Multilayer ceramic capacitor and board having the same mounted thereon
A multilayer ceramic capacitor may include: a ceramic body in which dielectric layers having an average thickness of 0.2 .mu.m to 2.0 .mu.m are stacked; an...
Laminated inductor and manufacturing method thereof
A laminated inductor may include a body having a plurality of ceramic layers stacked therein, a plurality of conductive patterns formed on the ceramic layers,...
Entering a battery power down mode using over-the-air command for wireless
A wireless electronic device includes a rechargeable battery, a receiver, and a shut down module. The rechargeable battery is at least partially charged. The...
Power receiving device, power transmitting device and control device
There provided a power receiving device connectable with a first load circuit operating according to AC power from a power transmitting device in which the...
Coplanar energy transfer
An external transmitter inductive coil can be provided in, on, or with a belt designed to be placed externally around a part of a body of a patient. An...
A reactor includes an annular core, coils, a sensor detecting a state of the reactor, and a connector outputting signal from the sensor. Resin-molded bodies are...