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Methods for integrated circuit design and fabrication
The present disclosure provides a method of patterning a target material layer over a semiconductor substrate. The method includes steps of: forming a plurality...
Semiconductor device and manufacturing method thereof
A vertical super junction MOSFET and a lateral MOSFET are integrated on the same semiconductor substrate. The lateral MOSFET is electrically isolated from the...
Methods of forming oxide thin film and electrical devices and thin film
transistors using the methods
Provided are a method of forming an oxide thin film and an electrical device and thin film transistor using the method. The method includes forming an oxide...
Nitride semiconductor wafer, nitride semiconductor element, and method for
manufacturing nitride semiconductor...
A nitride semiconductor wafer includes a silicon substrate, a first layer, a second layer, a third layer, a fourth layer, a fifth layer, and a sixth layer. The...
Epitaxial wafer and method of manufacturing the same
A method of manufacturing an epitaxial wafer, including a silicon substrate having a surface sliced from single-crystalline silicon and a silicon epitaxial...
Engineered substrates for semiconductor epitaxy and methods of fabricating
In a method for fabricating an engineered substrate for semiconductor epitaxy, an array of seed structures is assembled on a surface of the substrate. The seed...
p-Doped silicon layers
The invention relates to a process for producing p-doped silicon layers, especially those silicon layers which are produced from liquid silane-containing...
Hermetic CVD-cap with improved step coverage in high aspect ratio
Implementations described herein generally relate to methods for forming dielectric films in high aspect ratio features. In one implementation, a method for...
Semiconductor device and method of manufacturing the semiconductor device
A first nitride semiconductor layer contains Ga. The first nitride semiconductor layer is, for example, a GaN layer, an AlGaN layer, or an AlInGaN layer. Then,...
Deposition of boron and carbon containing materials
Methods of depositing boron and carbon containing films are provided. In some embodiments, methods of depositing B,C films with desirable properties, such as...
Silicon nanowire bio-chip structure
A silicon nanowire bio-chip structure and a manufacturing method thereof. The structure comprises a semiconductor substrate (1), a SiO.sub.2 insulating layer...
Flowable low-k dielectric gapfill treatment
Methods are described for forming a flowable low-k dielectric film on a patterned substrate. The film may be a silicon-carbon-oxygen (Si--C--O) layer in which...
Substrate processing method, substrate processing apparatus, and storage
A wafer is held horizontally and rotated by a substrate holding mechanism. An aqueous alkaline solution is supplied to a wafer by a nozzle and caused to flow...
Pre-cut wafer applied underfill film on dicing tape
A method for preparing a semiconductor with preapplied underfill comprises (a) providing a thinned silicon semiconductor wafer having a plurality of metallic...
Short arc type discharge lamp
Provided is a short arc discharge lamp that includes: a body including therein a reflection surface and having a front opening; a cathode and an anode opposed...
High pressure discharge lamp and lighting method thereof
The present high-pressure discharge lamp is composed of an arc tube part having an internal space, a pair of tungsten electrodes disposed in opposition to each...
High sensitivity electrospray interface
The invention provides a sheath-flow interface for producing electrospray from a capillary. The electrospray generated by the interface can be used as the...
Plume collimation for laser ablation electrospray ionization mass
In various embodiments, a device may generally comprise a capillary having a first end and a second end; a laser to emit energy at a sample in the capillary to...
Non-thermal plasma jet device as source of spatial ionization for ambient
mass spectrometry and method of...
The present invention relates to a non-thermal plasma jet device as spatial ionization source for ambient mass spectrometry of the type which allows a free...
Field asymmetric ion mobility spectrometry filter
Ion filter for FAIMS fabricated using the LIGA technique. The ion filter is manufactured using a metal layer to form the ion channels and an insulating support...
Ion optical element
An ion optical element that may be used as an ion guide in a mass spectrometer, as a reflectron in a time-of-flight mass spectrometer, as an ion mobility drift...
Method and apparatus for a porous electrospray emitter
An ionic liquid ion source can include a microfabricated body including a base and a tip. The body can be formed of a porous material compatible with at least...
Combustion pretreatment-isotope dilution mass spectrometry
Provided is a combustion pretreatment-isotope dilution mass spectrometry measuring concentration of a target element for detection contained in a target sample...
Method and apparatus for transporting samples in a mass spectrometer
A sample plate handling system for a time-of-flight mass spectrometer includes a transport chamber and a mass spectrometer chamber that is mechanically coupled...
Biomarkers for determining breast cancer bone metastasis
The invention provides biomarkers and biomarker profiles that discriminate between a subject with breast cancer that has metastasized to the bone and a subject...
Plasma enhanced chemical vapor deposition (PECVD) source
One embodiment is directed to a plasma source comprising a body in which a cavity is formed and at least two self-contained magnetron assemblies disposed within...
Gas dispersion disc assembly
An apparatus includes a gas dispersal plate and an adapter structure. The gas dispersal plate has a plurality of gas dispersion orifices, wherein one or more of...
Substrate treating apparatus and blocker plate assembly
A substrate treating apparatus includes a chamber that encloses an internal space; a susceptor in a lower part of the internal space; a shower head in an upper...
Plasma processing apparatus, plasma processing method, and storage medium
A plasma processing apparatus that enables polymer to be removed from an electrically insulated electrode. A susceptor of the plasma processing apparatus is...
Method of controlling the switched mode ion energy distribution system
Systems, methods and apparatus for regulating ion energies in a plasma chamber and chucking a substrate to a substrate support are disclosed. An exemplary...
Charged particle beam device and sample preparation method
Provided is a charged particle beam device provided with: a charged particle source; an objective lens for focusing a charged particle beam emitted from the...
Charged particle beam apparatus
The present invention provides apparatuses to inspect small particles on the surface of a sample such as wafer and mask. The apparatuses provide both high...
In-column detector for particle-optical column
The invention relates to an in-column back-scattered electron detector, the detector placed in a combined electrostatic/magnetic objective lens for a SEM. The...
Charged-particle beam lithographic system
A charged-particle beam lithographic system (100) delineates a pattern on a substrate (2) by directing a charged-particle beam (L) at the substrate. The system...
Electro-optical element for multiple beam alignment
The invention relates to a charged particle system for processing a target surface with at least one charged particle beam. The system comprises an optical...
Charged particle beam apparatus and sample observation method
There is provided a charged particle beam apparatus having the function of permitting observation of a sample in a gas atmosphere or in a liquid state, the...
Electron microscope and method of adjusting monochromator
An electron microscope is offered which can facilitate adjusting a monochromator. The electron microscope (100) includes the monochromator (20) having an energy...
Source of X-rays generating a beam of nanometric size and imaging device
comprising at least one such source
A source of X-rays, and imaging device, and an imaging process are provided, including a source of electrons generating an electron beam of nanometric size and...
Electron emission device and electron emission display
An electron emission device includes a number of second electrodes intersected with a number of first electrodes to define a number of intersections. The first...
Electron emission source and method for making the same
An electron emission source includes a first electrode, an insulating layer, and a second electrode stacked in that sequence, wherein the first electrode is a...
Ion source using field emitter array cathode and electromagnetic
An ion source for use in a radiation generator tube includes a back passive cathode electrode, a passive anode electrode downstream of the back passive cathode...
Electrical device with miswire protection and automated testing
The present invention is directed to an electrical wiring device that includes a plurality of line terminals, a plurality of feed-through load terminals, and at...
Trip device of molded case circuit breaker using a stair type hanger
Disclosed is a trip device of a molded case circuit breaker. The trip device includes a shooter configured to include a body and a rotating shaft which passes...
Cover assembly for circuit breaker, circuit breaker having the same, and
A cover assembly for a circuit breaker includes a cover, the cover including a first portion and a second portion. The first portion is configured to at least...
Nanowire-based mechanical switching device
Nanowire-based mechanical switching devices are described. For example, a nanowire relay includes a nanowire disposed in a void disposed above a substrate. The...
Switch apparatus for vehicle
A switch apparatus may include a switch body to which a connector of an electronic unit is connected and in which a relay board is provided, a conductive...
Magnetic float switch
A float switch with a float housing having a magnetically-activated, hermetically-sealed reed switch secured within an interior cavity in a first orientation...
Gas density monitoring system
A circuit breaker monitoring system may monitor both at least one gas characteristic of a gas surrounding the circuit breaker and at least one fault arc energy...
ARC extinguishing chamber for an electric protection apparatus and
electric protection apparatus comprising same
The present invention relates to an arc extinguishing chamber of an electric protection apparatus comprising an arc formation chamber containing a stationary...
Multi-command trigger switch
A multi-command trigger switch includes a rotary switch, a rotary casing and a trigger element. The rotary switch includes a base and a rotary disc coupled with...