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Patent # Description
US-9,372,416 Method for manufacturing electrophotographic photosensitive member
A method for manufacturing an electrophotographic photosensitive member using plasma CVD includes steps of placing a cylindrical base member in a reactor which...
US-9,372,415 Apparatus for removing solvent and photolithography apparatus using the same
A solvent removing apparatus is disclosed. One aspect includes a chamber, a first pump, a silencer, a valve, and a discharge unit. The chamber dries a coating...
US-9,372,414 Exposure method and device manufacturing method measuring position of substrate stage using at least three of...
In an exposure method of exposing a substrate with an energy beam via a projection optical system, a movable body that holds the substrate is driven to move the...
US-9,372,413 Optical apparatus for conditioning a radiation beam for use by an object, lithography apparatus and method of...
In an EUV (extreme ultraviolet) lithography apparatus, an illumination system includes a multifaceted field mirror and a multifaceted pupil mirror. A field...
US-9,372,412 Lithographic apparatus and device manufacturing method
A lithographic apparatus having an optical column capable of creating a pattern on a target portion of a substrate is disclosed. The optical column may have a...
US-9,372,411 Projection objective of a microlithographic projection exposure apparatus
A projection objective of a microlithographic projection exposure apparatus includes a wavefront correction device including a refractive optical element that...
US-9,372,410 Measuring method, stage apparatus, and exposure apparatus
An exposure apparatus can mitigate the impact of fluctuations in the refractive index of ambient gas, and improve, for example, stage positioning accuracy. An...
US-9,372,409 Exposure apparatus, control method thereof, and device fabrication method
An exposure apparatus advantageous for reducing the driving time of a stage is provided. In the apparatus, an input of an arrangement of exposure shots and an...
US-9,372,408 Mask pattern generation method
A method for generating a pattern of a mask includes obtaining data of a plurality of polygons representing a plurality of pattern elements, grouping polygons...
US-9,372,407 Exposure apparatus and a method for exposing a photosensitive element and a method for preparing a printing...
The invention pertains to an exposure apparatus, a method for exposing a photosensitive element to radiation using the exposure apparatus, and a method for...
US-9,372,406 Film portion at wafer edge
A film layer on a substrate of the wafer is patterned to form a first plurality of areas of the film layer and a second plurality of areas of the film layer....
US-9,372,405 Chemical liquid supply method and chemical liquid supply system
The pressure sensor detects a pressure in the operation chamber when the first opening/closing valve is opened at a time of starting a replenishment of the...
US-9,372,404 Organic film composition, method for forming organic film and patterning process using this, and...
The invention provides an organic film composition comprises (A) a heat-decomposable polymer, (B) an organic solvent, and (C) an aromatic ring containing resin,...
US-9,372,403 Chemically amplified photosensitive resin composition and method for producing resist pattern using the same
A chemically amplified photosensitive resin composition including a compound represented by formula (1) and/or formula (4), a resin having an acid-dissociative...
US-9,372,402 Molecular organometallic resists for EUV
Described herein are organometallic or inorganic complexes with high extreme ultraviolet (EUV) optical density (OD) and high mass density for use in thin films....
US-9,372,401 Method of forming micropatterns
A method of forming micropatterns separated over a misalignment margin includes forming a first mold pattern including a main pattern and a separation-assist...
US-9,372,400 Grayscale mask plate, color film substrate, related fabricating methods, and display device
A grayscale mask plate and method of fabricating the same, a color film substrate and method of fabricating the same, and a display device are disclosed. The...
US-9,372,399 Imprint lithography method and imprintable medium
An imprint lithography method is disclosed for reducing a difference between an intended topography and an actual topography arising from a part of a patterned...
US-9,372,398 Patterning in the directed assembly of block copolymers using triblock or multiblock copolymers
Provided herein are block copolymer thin film structures and methods of fabrication. The methods involve directing the assembly of ABA triblock copolymers such...
US-9,372,397 Polymer pen lithography
The disclosure relates to methods of printing indicia on a substrate using a tip array comprised of elastomeric, compressible polymers. The tip array can be...
US-9,372,396 Imprint lithography method
An imprint lithography apparatus and manufacturing method can lead to mechanical stress being formed in a substrate to which an imprint pattern is being...
US-9,372,395 Method of manufacturing a mask
A method of manufacturing a mask, the method including forming initial ribs such that forming the initial ribs includes forming at least two photoresist...
US-9,372,394 Test pattern layout for test photomask and method for evaluating critical dimension changes
Aspects of the present invention relate to a test photomask and a method for evaluating critical dimension changes in the test photomask. Various embodiments...
US-9,372,393 Mask blank, transfer mask, method of manufacturing a transfer mask, and method of manufacturing a semiconductor...
A mask blank for manufacturing a transfer mask adapted to be applied with ArF excimer laser exposure light that has a transparent substrate and a ...
US-9,372,392 Reticles for use in forming implant masking layers and methods of forming implant masking layers
In one example, a reticle disclosed herein includes a body having a center, an arrangement of a plurality of exposure patterns, wherein a center of the...
US-9,372,391 Method and system for forming patterns using charged particle beam lithography with variable pattern dosage
A method and system for fracturing or mask data preparation or optical proximity correction or proximity effect correction or mask process correction is...
US-9,372,390 Thermal processor employing radiant heater
A thermal processor including a rotatable hollow drum including a drum core having an interior surface and an exterior surface, and a radiant heater positioned...
US-9,372,389 Projector and portable terminal
According to one embodiment, a projector includes a light source unit, a light scanning unit, and a focus controller. The light source unit emits laser light....
US-9,372,388 Projection optical assembly with multiple refractive optical systems and related projector device
There is provided a projection optical system (1) that projects from a first image plane on a reducing side to a second image plane on an enlargement side,...
US-9,372,387 Laser projector
A laser projector includes a laser light source to emit laser light modulated in accordance with image information, a scanner to drive the laser light along two...
US-9,372,386 Projection system, support, and image display method
A projection system includes a first projector and a second projector. The projection system superimposes images projected from the first and second projectors...
US-9,372,385 Panoramic camera mount
A panoramic device includes a base member and a clamp member rotatably interconnected within a single plane of rotation with the base that includes a first...
US-9,372,384 Camera quick attachment and release mechanism
A quick attachment and release mounting mechanism for a camera. The mechanism includes a clamping base with clamping structure adapted to be secured around an...
US-9,372,383 L-plate bracket for camera equipment
A plate provides clearance between a camera and a quick-release receiver securing the camera to a support.
US-9,372,382 Rotary mechanism
A rotary mechanism is provided, including a first housing, a second housing, a rotary module, an elastic element, and a speed-reduction module. The rotary...
US-9,372,381 Robust modulator circuits using lateral doping junctions
Disclosed herein are methods, structures, and devices that compensates for modulator loss and modulation inefficiencies introduced by mask misalignments in...
US-9,372,380 Electrophoretic fluid
The present invention is directed to a display fluid comprising charged composite pigment particles dispersed in a solvent. The composite pigment particles have...
US-9,372,379 Thin film transistor substrate, method for fabricating the same, and display device including the same
A thin film transistor substrate, a method for fabricating the same, and a display device including the same are provided. In one aspect of the present...
US-9,372,378 TFT-LCD array substrate and method of manufacturing the same
An embodiment of the invention provides a thin film transistor liquid crystal display (TFT-LCD) array substrate comprising: a gate line and a data line that...
US-9,372,377 Liquid crystal display device
Gate lines are arranged in a first direction. Drain lines are arranged in a second direction. A first electrode has slits formed therein. Aperture regions...
US-9,372,376 Liquid crystal display device and manufacturing method thereof
A method of manufacturing a liquid crystal display device having a substrate with a display area, a control area adjacent to the display area, and terminals....
US-9,372,375 Liquid crystal display device
A display device includes a TFT substrate with gate signal lines, drain signal lines, thin-film transistors connected thereto, a gate driver connected to the...
US-9,372,374 Liquid crystal display device with unit pixel having rhombus-like plate portion
A liquid crystal display includes a lower panel, an upper panel, and a liquid crystal layer disposed therebetween. The lower panel includes a pixel electrode...
US-9,372,373 Liquid crystal device, driving method thereof, and electronic apparatus capable of improving display quality by...
In a liquid crystal device according to the embodiment of the invention, a high potential and a low potential relative to the counter electrode potential are...
US-9,372,372 Liquid crystal display device
A liquid crystal display device includes a first substrate and a second substrate. The first substrate includes a gate line and an auxiliary capacitance line...
US-9,372,371 Liquid crystal display panel, and liquid crystal display device
The present invention provides a liquid crystal display panel which is capable of providing a sufficiently high response speed and an excellent transmittance,...
US-9,372,370 Liquid crystal display and method of manufacturing the same
A liquid crystal display includes: a substrate; a thin film transistor disposed on the substrate; a pixel electrode disposed on the thin film transistor; and a...
US-9,372,369 Liquid crystal panel and manufacturing method thereof
A manufacturing method for a liquid crystal panel, comprising: coating a photoresist layer on a substrate; utilizing a first exposure energy and a first mask...
US-9,372,368 Display panel, display device using the same, and method for manufacturing display panel
A display panel, a display device using the same, and a method for manufacturing a display panel are provided. The display panel includes a first substrate (25)...
US-9,372,367 System for display images
A system for displaying images including a display panel is provided. The display panel has a display area and a peripheral area. The display panel includes a...
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