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Patent # Description
US-9,384,971 Method of manufacturing semiconductor device by forming a film on a substrate
Provided is a technique including forming a film by performing a cycle a predetermined number of times. The cycle includes: forming a first layer by supplying a...
US-9,384,970 Method of manufacturing semiconductor device by forming a film on a substrate
Provided is a technique including forming a film on a substrate, the film including a first element and a second element different from the first element, by...
US-9,384,969 Method of manufacturing semiconductor device by forming a film on a substrate
Provided is a technique including forming a film on a substrate, the film including a first element and a second element different from the first element, by...
US-9,384,968 Method of manufacturing a semiconductor device by forming a film on a substrate
Provided is a technique of forming a film on a substrate by performing a cycle a predetermined number of times. The cycle includes: forming a first layer by...
US-9,384,967 Method of manufacturing a semiconductor device by forming a film on a substrate
Provided is a technique of forming a film on a substrate by performing a cycle a predetermined number of times. The cycle includes: forming a first layer...
US-9,384,966 Method of manufacturing a semiconductor device by forming a film on a substrate
Provided is a technique of forming a film on a substrate by performing a cycle a predetermined number of times. The cycle includes: forming a first layer by...
US-9,384,965 Polycrystallization method
According to one embodiment, provided is a polycrystallization method for polycrystallizing an amorphous semiconductor film that has a natural oxide film on the...
US-9,384,964 Method of manufacturing semiconductor device
The inventive concepts provide methods of manufacturing a semiconductor device including a thermal treatment process. The method may include providing a...
US-9,384,963 Preparation of cerium-containing precursor and deposition of cerium-containing films
Methods and compositions for depositing rare earth metal-containing layers are described herein. In general, the disclosed methods deposit the precursor...
US-9,384,962 Oxygen treatment of replacement work-function metals in CMOS transistor gates
A method of manufacturing a metal gate is provided. The method includes providing a substrate. Then, a gate dielectric layer is formed on the substrate. A...
US-9,384,961 Method for manufacturing semiconductor device, method for processing substrate, substrate processing apparatus...
A method for manufacturing a semiconductor device includes forming a thin film containing a specific element and having a prescribed composition on a substrate...
US-9,384,960 Method of manufacturing a semiconductor device with a continuous silicate glass structure
A method of manufacturing a semiconductor device includes forming a continuous silicate glass structure over a first surface of a semiconductor body, including...
US-9,384,959 Purging of porogen from UV cure chamber
A purge ring for providing a gas to a wafer processing chamber includes an inlet ring wall defining a ring hole space. An outer perimeter of the inlet ring wall...
US-9,384,958 High-pressure discharge lamp
A high-pressure discharge lamp may include a bulb, which surrounds a discharge volume, wherein a fill which contains mercury and a noble gas from the group...
US-9,384,957 Mass analysis device and mass calibration method
In conducting multiple repetitions of MS/MS analysis on the same test sample for which a precursor ion whose m/z is known (m/z=M) has been established, MS/MS...
US-9,384,956 Nebulizer and analysis equipment
A nebulizer characterized in being provided with: an inner tube, which is disposed coaxially with an outer tube in which a nebulizing outlet is formed and...
US-9,384,955 Mass spectrometer, control system and methods of operating and assembling a mass spectrometer
A mass spectrometer and methods for controlling a mass spectrometer are provided. In an exemplary embodiment, the mass spectrometer includes a plurality of...
US-9,384,954 Time of flight tubes and methods of using them
Certain embodiments described herein are directed to time of flight tubes comprising a cylindrical tube comprising an inner surface and an outer surface, the...
US-9,384,953 Tandem quadrupole mass spectrometer
A measurement condition memory stores a CID gas condition table indicating a relation between the scan speed of a mass scan by a front-stage quadrupole mass...
US-9,384,952 Method of MS mass spectrometry
A method of mass spectrometry is disclosed comprising alternating between a first mode in which parent ions are analysed and a second mode in which parent ions...
US-9,384,951 Mass analysis using alternating fragmentation modes
A method of mass spectrometry is disclosed wherein a Surface Induced Dissociation fragmentation device is repeatedly switched between a high fragmentation mode...
US-9,384,950 Chamber coatings
In one embodiment, a processing chamber is disclosed wherein at least one surface of the processing chamber has a coating comprising ...
US-9,384,949 Gas-flow control method for plasma apparatus
A gas-flow control method for a plasma apparatus is provided. The gas-flow control method includes mounting a first adjusting mechanism on a gas-distribution...
US-9,384,948 Hammerhead TCP coil support for high RF power conductor etch systems
The chamber, having a ceramic window disposed in a ceiling of the chamber is provided. Included is a ceramic support having a plurality of spokes that extend...
US-9,384,947 Cold plasma treatment devices and associated methods
A cold plasma mask application device for delivery of a cold plasma to the face of a patient. An appropriate gas is introduced into a gas containment area that...
US-9,384,946 Plasma processing apparatus
In a plasma processing apparatus having a processing chamber, a sample stage, a sample, a dielectric-composed insulating film and an electrode, the sample stage...
US-9,384,945 Automatic matching unit and plasma processing apparatus
In an automatic matching unit, a controller includes a first and a second matching algorithm. The operating point Z.sub.p is moved stepwise toward the matching...
US-9,384,944 Ion implanter and ion implantation method
A beamline unit of an ion implanter includes a steering electromagnet, a beam scanner, and a beam collimator. The beamline unit contains a reference trajectory...
US-9,384,943 Ion generating apparatus and method of removing a fluorine compound deposited in a source housing thereof
Provided is an ion generating apparatus. The ion generating apparatus includes opposed electrodes connected to a high-frequency power supply, and hence, even in...
US-9,384,942 Specimen preparation for transmission electron microscopy
A TEM specimen kit is disclosed, which comprises: (a) a top substrate and a bottom substrate, the top and the bottom substrates being transparent and...
US-9,384,941 Charged particle beam apparatus and sample observation method
A charged particle beam apparatus includes an electron beam column and an FIB column, in which an irradiation axis of the electron beam column and an...
US-9,384,940 Charged particle beam apparatus
In order to provide a charged particle beam apparatus capable of high resolution measurement of a sample at any inclination angle, a charged particle beam...
US-9,384,939 Electron beam writing apparatus and output control method
An output control method according to an embodiment is to control an output by a deflection amplifier that outputs a voltage signal to a deflection electrode of...
US-9,384,938 Particle-optical systems and arrangements and particle-optical components for such systems and arrangements
The present invention concerns a charged-particle multi-beamlet system that comprises a source of charged particles (301); a first multi-aperture plate (320)...
US-9,384,937 SiC coating in an ion implanter
An ion implanter has a coating of low resistivity silicon carbide on one or more of the conductive surfaces that are exposed to ions. For example, ions are...
US-9,384,936 Energy filter for charged particle beam apparatus
This invention provides two methods for improving performance of an energy-discrimination detection device with an energy filter of reflective type for a...
US-9,384,935 Cathode structures for X-ray tubes
An apparatus and method comprising a cathode structure which can be a cylindrical filament coiled in a helix or which can be constructed of a ribbon or other...
US-9,384,934 Electron exit window foil
An electron exit window foil for use with a high performance electron beam generator operating in a corrosive environment is provided. The electron exit window...
US-9,384,933 Performance optimization of a field emission device
A field emission device is configured as a heat engine, and the performance of the device is optimized.
US-9,384,932 Thick-film resistorized ceramic insulators for sealed high voltage tube electrodes
An annular ceramic washer has inner and outer cylindrical surfaces, first and second annular surfaces, and a winding path thick film resistor located on the...
US-9,384,931 Remote operated circuit breaker
A circuit breaker having a movable contact arm for opening and closing the circuit which is controlled separately by a circuit breaker mechanism for circuit...
US-9,384,930 Fuse appliance
A fuse appliance has a fuse carrier for receiving a fuse and a base. The fuse carrier is in a cavity of the base and is manually operable to remove or insert...
US-9,384,929 Fuse unit
A fuse unit includes a feeding terminal, an energizing terminal and a fusion portion. The feeding terminal is fixed to a battery post to receive power from a...
US-9,384,928 Electrical switching apparatus including transductor circuit and alternating current electronic trip circuit
An electrical switching apparatus includes a transductor circuit that senses a direct current between at least one input terminal and at least one output...
US-9,384,927 Electric vehicle relay
An electric vehicle relay includes: a pair of fixed electrodes; a movable electrode movable to contact or to be separated from the fixed electrode; a driving...
US-9,384,926 Method and apparatus for restoring mechanical relay from stuck fault to normal condition
Disclosed herein are a method and apparatus for restoring a mechanical relay from a stuck fault to a normal condition. The method may include detecting, by an...
US-9,384,925 Sterile disposable remote pneumatic actuators
The various embodiments of the present invention relate to remote pneumatic (bellows-action) actuators for switching applications, which are preferably sterile...
US-9,384,924 Gas circuit breaker
Provided are: a hermetically-enclosed tank that is filled with insulating gas; a blocking unit that is provided within the hermetically-enclosed tank and is...
US-9,384,923 Extruded bushing terminal radiator
A circuit breaker, or transformer, or insulated bus for use with AC voltages greater than 30 kilovolts and AC currents greater than 400 amperes includes an...
US-9,384,922 Commutating circuit breaker
A commutating circuit breaker that progressively inserts increasing resistance into a circuit via physical motion of a shuttle that is linked into the circuit...
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