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Methods of removing residual polymers formed during a boron-doped
amorphous carbon layer etch process
Methods for removing residual polymers formed during etching of a boron-doped amorphous carbon layer are provided herein. In some embodiments, a method of...
Process for forming wide and narrow conductive lines
Sidewall spacers formed on sides of mandrels are separated by first gaps in a first region and separated by wider second gaps in a second region. The second...
Adhesion layer for solution-processed transition metal oxides on inert
An ammonium thio-transition metal complex is used as an adhesion promoter for immobilizing temperature-stable transition metal oxide layers on an inert metal...
Composition including material, methods of depositing material, articles
including same and systems for...
Methods for depositing nanomaterial onto a substrate are disclosed. Also disclosed are compositions useful for depositing nanomaterial, methods of making...
Method of forming semiconductor film and photovoltaic device including the
A method of depositing a kesterite film which includes a compound of the formula: Cu.sub.2-xZn.sub.1+ySn(S.sub.1-zSe.sub.z).sub.4+q, wherein ...
Manufacturing method of semiconductor device
Disclosed is a semiconductor device using an oxide semiconductor, with stable electric characteristics and high reliability. In a process for manufacturing a...
Closed-space sublimation process for production of CZTS thin-films
In one embodiment, a method includes depositing a CZT(S, Se) precursor layer onto a substrate, introducing a source-material layer comprising Sn(S, Se) into...
Method of manufacturing semiconductor device, substrate processing
apparatus, and non-transitory...
A method of manufacturing a semiconductor device can enhance controllability of the diameters of grains of a film containing a predetermined element such as a...
Methods and systems for improved uniformity of SiGe thickness
A process is used to form a protective layer to cover a divot between two regions of a semiconductor material. During etching processes, the protective layer...
Wet oxidation process performed on a dielectric material formed from a
flowable CVD process
Methods of performing a wet oxidation process on a silicon containing dielectric material filling within trenches or vias defined within a substrate are...
Semiconductor dielectric interface and gate stack
A semiconductor/dielectric interface having reduced interface trap density and a method of manufacturing the interface are disclosed. In an exemplary...
Film forming method
A film forming method for forming a thin film composed of a SiOCN layer containing at least silicon (Si), oxygen (O), carbon (C) and nitrogen (N) on a surface...
Method of manufacturing semiconductor device
A method includes: forming a thin film on a substrate by performing a cycle a predetermined number of times, the cycle including: (a) supplying a source gas to...
Gas flow profile modulated control of overlay in plasma CVD films
Methods for modulating local stress and overlay error of one or more patterning films may include modulating a gas flow profile of gases introduced into a...
Soft landing nanolaminates for advanced patterning
Methods for depositing nanolaminate protective layers over a core layer to enable deposition of high quality conformal films over the core layer for use in...
Method and device for manufacturing a barrier layer on a flexible
The invention provides a method for manufacturing a barrier layer on a substrate, the method comprising: providing a substrate with an inorganic oxide layer...
Film forming method of SiCN film
A method of forming an SiCN film on a surface to be processed of an object, the method including: supplying an Si source gas containing an Si source into a...
Method for creating asymmetrical wafer
The present invention consists of a method for imparting asymmetry to a truncated annular wafer by either rounding one corner of the orientation flat, or...
Method for manufacturing silicon substrate and silicon substrate
A method for manufacturing a silicon substrate, including: performing a rapid heat treatment to a silicon substrate with a rapid-heating and rapid-cooling...
Substrate processing apparatus and substrate processing method
A substrate processing apparatus includes a substrate holding part, a substrate rotating mechanism, and a chamber. The substrate rotating mechanism incudes an...
Method and apparatus for wafer backgrinding and edge trimming on one
A workpiece processing apparatus is provided. The apparatus includes a rotary turntable having one or more spindles thereon, the turntable being configured to...
Method and system for controlling convective flow in a light-sustained
A system for controlling convective flow in a light-sustained plasma includes an illumination source configured to generate illumination, a plasma cell...
System and method for liquid extraction electrospray-assisted sample
transfer to solution for chemical analysis
A system for sampling a surface includes a surface sampling probe comprising a solvent liquid supply conduit and a distal end, and a sample collector for...
A mass spectrometer of ionizing a sample by a dielectric barrier discharge under a reduced pressure. An ionization with inconsiderable fragmentation can be...
Apparatus and method for sampling of confined spaces
In various embodiments of the invention, a cargo container can be monitored at appropriate time intervals to determine that no controlled substances have been...
System and method for fusing chemical detectors
Two complementary approaches to the science of IMS technology, IMS and differential IMS (DIMS), are combined into a single instrument to provide improvements in...
A method of searching for potentially unknown metabolites of pharmaceutical compounds is disclosed. The accurate mass of a pharmaceutical compound will...
Data directed acquisition of imaging mass
A method of ion imaging is disclosed comprising scanning a sample at a first resolution and acquiring first mass spectral data related to a first pixel...
Gas injector particle removal process and apparatus
A sonic cleaning tool having a component retaining fixture, a sonic bath, and a cleaning fluid circulating system. The sonic bath has a sound field transducer...
Modular microplasma microchannel reactor devices, miniature reactor
modules and ozone generation devices
A preferred modular microplasma microchannel reactor device includes a microchannel array arranged with respect to electrodes for generation of plasma and...
Sub-pulsing during a state
A method for achieving sub-pulsing during a state is described. The method includes receiving a clock signal from a clock source, the clock signal having two...
Laser sustained plasma light source with electrically induced gas flow
A laser sustained plasma light source includes a plasma bulb containing a working gas flow driven by an electric current sustained within the plasma bulb....
Apparatus for charged particle lithography system
An apparatus for use in a charged particle multi-beam lithography system is disclosed. The apparatus includes a plurality of charged particle doublets each...
High-energy ion implanter
A high-energy ion implanter includes a high-energy multi-stage linear acceleration unit that accelerates an ion beam so as to generate a high-energy ion beam, a...
Ion implanter and method of ion beam tuning
An energy analysis slit of an ion implanter is configured to enable switching between a standard slit opening used for implantation processing performed under a...
Apparatus and method of applying small-angle electron scattering to
characterize nanostructures on opaque substrate
An apparatus and methods for small-angle electron beam scattering measurements in a reflection or a backscattering mode are provided. The apparatus includes an...
Non-invasive charged particle beam monitor
An electromagnetic wakefield detector placed in close proximity to a design trajectory of a non-relativistic charged particle beam produces an optical signal in...
Electro-optical inspection apparatus using electron beam
An electron beam apparatus for capturing images by deflecting a primary electron beam by a deflector to irradiate each of sub-visual fields which are formed by...
Superposition measuring apparatus, superposition measuring method, and
superposition measuring system
When a scanning electron microscope is used to measure a superposition error between upper-layer and lower-layer patterns, an SN of the lower-layer pattern may...
Method of inspecting a semiconductor substrate
A semiconductor substrate inspection system includes an e-beam inspection system configured to deliver electrons to a specimen semiconductor substrate. A sensor...
Implantation apparatus with ion beam directing unit, semiconductor device
and method of manufacturing
An ion implantation apparatus includes an ion beam directing unit, a substrate support, and a controller. The controller is configured to effect a relative...
Apparatus having a magnetic lens configured to diverge an electron beam
Apparatus having a magnetic lens configured to diverge an electron beam are useful in three-dimensional imaging using an electron microscope. The magnetic lens...
X-ray sources using linear accumulation
A compact source for high brightness x-ray generation is disclosed. The higher brightness is achieved through electron beam bombardment of multiple regions...
Method for driving multi electric field emission devices and multi
electric field emission system
Provided is a method of driving multi electrical field emission devices. The method includes: respectively connecting first current control circuit devices for...
Magnetron power supply
A power supply for a magnetron has a PFC DC voltage source and an HV (High Voltage) converter. The voltage source is mains driven and supplies DC voltage above...
Electron emission source
An electron emission source includes a first electrode, a semiconductor layer, an insulating layer, and a second electrode stacked in that sequence, wherein an...
RF MEMS based large scale cross point electrical switch
This disclosure provides systems, methods, and apparatus for providing a crosspoint switch used in an optical fiber data network. The crosspoint switch can...
A laminate-type actuator including a laminate wherein an electrostrictive material layer is wound and laminated in a form of a tube together with first and...
Electromagnetic opposing field actuators
Electromagnetic actuators capable of generating a symmetrical bidirectional force are disclosed. The electromagnetic actuators include a housing made of a...
Device for detecting and signaling a change in the state of a push button
A device for detecting and signalling a change of state of a push-button, for example of emergency stop type. The device is in a form of an attachment that can...