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A semiconductor process includes the following steps. A first gate is formed on a substrate, wherein the first gate includes a stacked gate on the substrate and...
Transistor gate and process for making transistor gate
A transistor gate is formed of a stack of layers including a polysilicon layer and a tungsten layer separated by a barrier layer. A titanium layer reduces...
Apparatus and methods for improving the intensity profile of a beam image
used to process a substrate
Methods and apparatuses are provided for improving the intensity profile of a beam image used to process a semiconductor substrate. At least one photonic beam...
Substrate processing with reduced warpage and/or controlled strain
Provided are systems and methods for processing the surface of substrates that scan a laser beam at one or more selected orientation angles. The orientation...
Apparatus for forming porous silicon layers on at least two surfaces of a
plurality of silicon templates
An apparatus for forming porous silicon layers on at least two surfaces of a plurality of silicon templates in a batch electrochemical anodic etch process is...
Word line with multi-layer cap structure
Word lines are formed from a stack of layers that includes a metal (e.g. tungsten) layer with an overlying multi-layer cap structure. The multi-layer cap...
Methods and systems for dopant activation using microwave radiation
A semiconductor structure includes a substrate and a source/drain (S/D) junction. The S/D junction is associated with the substrate and includes a semiconductor...
Atomic layer deposition of silicon carbon nitride based materials
A process for depositing a silicon carbon nitride film on a substrate can include a plurality of complete deposition cycles, each complete deposition cycle...
Cleaning method, method of manufacturing semiconductor device, substrate
processing apparatus and...
A cleaning method includes (a) providing a process chamber after forming an oxide film on a substrate in the process chamber formed by a reaction tube and a...
Susceptor assemblies for supporting wafers in a reactor apparatus
Apparatus and methods for wafer processes such as etching and chemical vapor deposition processes are disclosed. In some embodiments, the apparatus includes a...
Semiconductor cleaner systems and methods
In an embodiment, the present invention discloses a EUV cleaner system and process for cleaning a EUV carrier. The euv cleaner system comprises separate dirty...
Socket and discharge lamp
A socket includes a main body section, a terminal provided in the main body section and assuming a cylindrical shape, a lead wire being welded to an end face...
Mass spectrometer with optimized magnetic shunt
The present invention relates to a mass spectrometer device comprising a source of ions, an electrostatic sector, a non-scanning magnetic sector arranged...
Use of cryogenic ion chemistry to add a structural characterization
capability to mass spectrometry through...
The present invention relates to mass spectrometry and infrared spectrometry and in particular, to a method of providing highly resolved infrared spectra of...
Filament for mass spectrometric electron impact ion source
The invention provides a cathode system for an Electron Ionization (EI) source comprising a filament and current supply posts, the current supply posts dividing...
Method and device for polarizing a DBD electrode
The invention relates to a device for treating the surface of a substrate by means of dielectric barrier discharge for generating a filamentary plasma,...
Control of impedance of RF delivery path
A plasma system includes an RF generator and a matchbox including an impedance matching circuit, which is coupled to the RF generator via an RF cable. The...
Feature etching using varying supply of power pulses
Etching a feature of a structure by an etch system is facilitated by varying supply of radio frequency (RF) power pulses to the etch system. The varying...
Multi-source plasma focused ion beam system
The present invention provides a plasma ion beam system that includes multiple gas sources and that can be used for performing multiple operations using...
Ozone supplying apparatus, ozone supplying method, and charged particle
beam drawing system
An ozone supplying apparatus according to an embodiment of the present invention is an ozone gas supplying apparatus which supplies an ozone gas to a vacuum...
Adjustable mass resolving aperture
Embodiments of the invention relate to a mass resolving aperture that may be used in an ion implantation system that selectively exclude ion species based on...
Radiation generating tube, and radiation generating apparatus and
radiation imaging system using the same
Provided is a radiation generating tube in which an insulating tube is prevented from being damaged by heat generation of a target or an electron emitting...
A fuse structure comprises a first conductive layer on a first level. The first conductive layer comprises a fuse line extending in a first direction. The fuse...
Circuit protection device
A circuit protection device includes a conductive layer which is connected to first and second terminals. A spring is electrically connected to the first and...
An electromagnetic relay has an iron core having legs at both ends and a coil wound therearound to form an electromagnet, a movable iron piece that pivotally...
Drive device for opening/closing body
An opening/closing-body drive device is achieved, in which a malfunction, caused by the electrical contacts of the relay switch freezing, can be reliably...
Electronic leakage reduction techniques
Electronic leakage reduction techniques are provided, whereby a device is configured to detect characteristics of an appliance and its power supply when the...
Quenching chamber of a medium-voltage switch disconnector
A quenching chamber in medium-voltage switch disconnectors includes a body made of a gassing material that is of a solid shape similar to a rectangular prism....
Wireless light switch system and method, remote switch device, and load
A wireless load control system is provided including one or more wireless switch components and one or more load controller components optionally in one-to-one,...
Molded case circuit breaker
A circuit breaker includes a housing and a line strap at least partially disposed within the housing. The line strap has a top surface and an opposing bottom...
Electronic switching module for a power tool
An electronic power apparatus includes a housing, a pair of input power pins and a pair of output power pins mounted on a power circuit board, and power...
An on-load tap changer is provided and includes a plurality of modules disposed in an interior space of a tank and arranged in a side-by-side manner. Each...
Actuator device with improved tactile characteristics
The invention relates to an actuator device (400) comprising an active layer (410) having directly or indirectly a skin layer (420) on top that can be touched...
Negative electrode for power storage device and power storage device
Provided is a negative electrode for a power storage device in which charge/discharge capacity is high and deterioration in battery characteristics due to...
Lithium ion capacitors and methods of production
A lithium-ion capacitor may include a cathode, an anode, a separator disposed between the cathode and the anode, a lithium composite material, and an...
Process for producing solution having electrically conductive polymer
dispersed therein, and electrolytic capacitor
A method for producing a conductive polymer dispersion liquid includes preparing an emulsion of a polyanion adsorbed on a conductive polymer precursor monomer...
Conductive paste, multilayer ceramic electronic component, and method for
A conductive paste that includes a (meth)acrylic resin serving as a binder resin, an organic solvent, and a metal powder. The (meth)acrylic resin has a glass...
The present invention relates to a planar transformer, the transformer including a core provided to induce formation of a magnetic field, a bobbin coupled to a...
Composite electronic component and composite electronic component
A composite electronic component includes a multilayer body, coils, an antistatic element and outer electrodes. The multilayer body is configured by laminating...
Solenoid coil for hazardous locations
A solenoid coil assembly for hazardous environments comprises a solenoid coil and an enclosure entirely filled with encapsulation material. The encapsulation...
Integrated passive iron shims in silicon
A magnetic apparatus having at least one magnetic shim situated between faces of two permanent magnets. The magnetic shim helps to make the magnetic field that...
Electrical component for attachment to paper and other substrates and
magnetic attachment mechanism
An electrical component for attachment to paper and other substrates comprises, according to one embodiment, a functional electronic part including one or more...
Coil terminal and electromagnetic relay
A coil terminal has a winding section comprising an end of coiled wire wound therearound. The winding section is bent relative to a remaining section of the...
Core passage step apparatus and methods
A bobbin apparatus for a magnetic component includes a core passage having one or more core passage steps located therein. The core passage steps provide one or...
Magnetic actuator includes a pole body having at least one magnetic region and at least one nonmagnetic region, the nonmagnetic region providing a magnetic...
Sintered ferrite magnet and its production method
A sintered ferrite magnet having a main phase composed of ferrite having a hexagonal, M-type magnetoplumbite structure, a grain boundary phase containing Si and...
Over-current protection device
An over-current protection device comprises a PTC device, first and second electrodes, a first welding metal plate and a second welding metal plate. The PTC...
Water blocking structure for insulation-coated wire and wire harness
A water blocking structure for an insulation-coated wire includes a heat-shrinkable tubular protective member that is closed at one end and that accommodates an...
Conductive water-borne coatings and methods for enhancing coating
The present disclosure is directed to conductive, translucent water-borne conductive coatings comprising a water-borne lubricant coating base material, an...
Method for producing highly conformal transparent conducting oxides
A method for forming a transparent conducting oxide product layer. The method includes use of precursors, such as tetrakis-(dimethylamino) tin and trimethyl...