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Method of manufacturing semiconductor device, method of processing
substrate, substrate processing apparatus...
A method of manufacturing a semiconductor device, includes: alternately performing (i) a first step of alternately supplying a first raw material containing a...
Memory device structure and method
A system and method for manufacturing a memory device is provided. A preferred embodiment comprises manufacturing a flash memory device with a tunneling layer....
(110) surface orientation for reducing fermi-level-pinning between high-K
dielectric and group III-V compound...
A device with improved device performance, and method of manufacturing the same, are disclosed. An exemplary device includes a group III-V compound...
SiGe surface passivation by germanium cap
The present disclosure relates to a transistor device having a germanium cap layer that is able to provide for a low interface trap density, while meeting...
High-K metal gate process for lowering junction leakage and interface
traps in NMOS transistor
A method for fabricating semiconductor device is disclosed. The method includes the steps of: providing a substrate; forming an interfacial layer on the...
Laser annealing device including tunable mask and method of using the same
A laser annealing device for compensating wafer heat maps and its method are disclosed. A laser annealing device comprises a pump laser source array including...
Group III nitride semiconductor light-emitting device and production
The present invention provides a Group III nitride semiconductor light-emitting device having a low drive voltage and a production method therefor. A p-type...
Graphene laminate with band gap
A graphene laminate includes a first piezoelectric material layer having a negatively-charged surface and a positively-charged surface, a first graphene layer...
Self-aligned via patterning with multi-colored photobuckets for back end
of line (BEOL) interconnects
Self-aligned via patterning with multi-colored photobuckets for back end of line (BEOL) interconnects is described. In an example, an interconnect structure for...
Self-aligned double patterning
A semiconductor device and a method of forming the same are provided. An embodiment comprises a target layer and masking layers over the target layer. First...
Pattern forming method and article manufacturing method
Provided is a method for forming a pattern on a layer on a substrate. The method includes forming a line-and-space pattern on the layer; coating a resist on the...
Deposition of heteroatom-doped carbon films
Easily removable heteroatom-doped carbon-containing layers are deposited. The carbon-containing layers may be used as hardmasks. The heteroatom-doped...
Methods of forming a semiconductor layer including germanium with low
Methods of forming a semiconductor layer including germanium with low defectivity are provided. The methods may include sequentially forming a silicate glass...
Utilization of angled trench for effective aspect ratio trapping of
defects in strain relaxed heteroepitaxy of...
Embodiments of the present disclosure relate to reducing dislocation density in a heteroepitaxial growth film and devices including heteroepitaxial films with...
Lattice matched aspect ratio trapping to reduce defects in III-V layer
directly grown on silicon
A structure having application to electronic devices includes a III-V layer having high crystal quality and a low defect density on a lattice mismatched...
Nitride semiconductor component and process for its production
A process for the production of a layer structure of a nitride semiconductor component on a silicon surface, comprising: provision of a substrate having a...
Reaction chamber including a susceptor having draining openings for
manufacturing a silicon carbide wafer
An embodiment described herein includes a method for producing a wafer of a first semiconductor material. Said first semiconductor material has a first melting...
Decreasing the critical dimensions in integrated circuits
A method for lithographic patterning of a substrate is described. The method comprises obtaining a substrate to be patterned. It further comprises subsequently...
Apparatus including 4-way valve for fabricating semiconductor device,
method of controlling valve, and method...
An apparatus and method for fabricating a semiconductor device using a 4-way valve with improved purge efficiency by improving a gas valve system by preventing...
Apparatus and method for cleaning substrate
Provided are an apparatus and a method of cleaning a substrate. The apparatus includes a substrate supporting unit supporting a substrate, a container...
Flux residue cleaning system and method
A flux residue cleaning system includes first and second immersion chambers, first and second spray chambers, and a drying chamber. The first immersion chamber...
Semiconductor wafer structure
A semiconductor structure includes a wafer including a first surface and a periphery, a plurality of protrusions protruded from the first surface and a...
High efficiency lighting assembly
A lighting assembly (100) includes an electronic driver circuit (110) and a discharge lamp (10). The discharge lamp (10) is driven with a steady-state average...
High intensity discharge lamp
The invention describes a high intensity gas-discharge lamp comprising a discharge vessel (5, 5') enclosing a fill gas in a discharge chamber (2) and comprising...
Method and system for improving characteristic peak signals in analytical
A method and system are disclosed for improving characteristic peak signals in electron energy loss spectroscopy (EELS) and energy dispersive x-ray spectroscopy...
Linear ion beam bonding apparatus and array structure thereof
A linear ion beam bonding apparatus and an array structure thereof, comprising a pair of primary radiofrequency electrodes (501 and 502) extending along the...
Spatially correlated dynamic focusing
A Time of Flight mass analyzer is disclosed comprising one or more acceleration electrodes and a first device arranged and adapted to apply a DC voltage pulse...
Electrostatic mass spectrometer with encoded frequent pulses
A method, apparatus and algorithms are disclosed for operating an open electrostatic trap (E-trap) or a multi-pass TOF mass spectrometer with an extended flight...
Electrospray ionization interface to high pressure mass spectrometry and
An electrospray ionization (ESI)-mass spectrometer analysis systems include an ESI device with at least one emitter configured to electrospray ions and a mass...
Multiple ionization sources for a mass spectrometer
Systems and methods for a mass spectrometer include an atmospheric-pressure chemical ionization (APCI) source, one or more low-pressure chemical ionization...
Determination of metal and metalloid concentrations using ICPMS
A system for determining an analyte by inductively coupled plasma mass spectrometry (ICPMS) includes a sample introduction device having a heated cyclonic spray...
Investigating chemical-based events that occur in vehicles
A method and apparatus for investigating a chemical-based event inside a vehicle without significant delay. A number of samples of air are collected at a number...
Enhanced photoelectron sources using electron bombardment
A method of achieving heightened quantum efficiencies and extended photocathode lifetimes is provided that includes using an electron beam bombardment to...
Plasma enhanced chemical vapor deposition (PECVD) source
One embodiment is directed to a plasma source comprising a body in which a cavity is formed and at least two self-contained magnetron assemblies disposed within...
Argon and helium plasma apparatus and methods
An argon and helium plasma apparatus and method are disclosed that operate with argon or helium at atmospheric pressure, and at low temperatures, and with high...
Specimen holder for holding a semiconductor device during a sample
preparation procedure carried out using...
A specimen holder is configured to hold, during a sample preparation procedure carried out using first and second sample preparation apparatuses, a...
Method and device for characterizing an electron beam using an X-ray
detector with a patterned aperture...
A device for detecting X-rays radiated out of a substrate surface, said device comprising at least one X-ray detector, a resolver grating and a modulator...
Charged-particle microscope with Raman spectroscopy capability
A charged-particle microscope with Raman spectroscopy capability and a method for examining a sample using a combined charged-particle microscope and Raman...
Transmission electron microscope micro-grid
A transmission electron microscope micro-grid includes a carbon nanotube layer sandwiched between a first metal layer and a second metal layer. The carbon...
Testing apparatus using charged particles and device manufacturing method
using the testing apparatus
A substrate is irradiated by primary electrons and secondary electrons generated from the substrate are detected by a detector. A reference die is placed on the...
Mirror pulse compressor for electron beam apparatus
One embodiment pertains to an apparatus for compressing an electron pulse. An electron source is illuminated by a pulsed laser and generates a pulse of...
Method and apparatus for inducing chemical reactions by X-ray irradiation
A method for inducing chemical reactions using X-ray radiation comprises generating an irradiation volume within the interior of a reaction vessel by...
Traveling wave tube loaded by a material having negative permittivity and
A slow wave structure of a traveling wave tube is provided. The slow wave structure includes an input port, an output port, a first material, and a second...
Combination of materials for mercury-dispensing devices and devices
containing said combination of materials
An improved mercury-dispensing combination of materials is made up of a compound A including mercury and a second metal selected among titanium, zirconium and...
Multi-pole switch-fuse arrangement for busbar systems
The present invention relates to a multi-pole switch-fuse arrangement having at least two switch-fuse units into which one fuse link each can be inserted. The...
Circuit breaker heaters and translational magnetic systems
A thermal-magnetic trip unit is provided for a circuit breaker. The thermal-magnetic trip unit includes a heater and a translational magnetic system coupled to...
Circuit breaker terminal shield
A circuit breaker includes: a main body housing circuit-breaking parts; a terminal portion exposed outside the main body; a lug-type terminal block attached to...
Planar cavity MEMS and related structures, methods of manufacture and
Planar cavity Micro-Electro-Mechanical System (MEMS) structures, methods of manufacture and design structure are provided. The method includes forming at least...
Reed with hinge for reed switch
A reed for a reed switch and a reed switch are provided. The reed may include a first portion having a first thickness and a first length, a second portion...
Tri-stable flexure mechanism
Embodiments of a tri-stable flexure mechanism are described where a resilient component is present that serves as both a structural component in the kinematic...