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Patent # Description
US-9,429,858 Rotary EUV collector
An EUV collector is rotated between or during operations of an EUV photolithography system. Rotating the EUV collector causes contamination to distribute more...
US-9,429,857 Electrostatic clamp, lithographic apparatus and method
An electrostatic clamp (21) configured to hold an object, the electrostatic clamp comprising an electrode (24), a resistive portion (23) formed from a resistive...
US-9,429,856 Detectable overlay targets with strong definition of center locations
An overlay target for a semiconductor device is disclosed. The overlay measurement target includes a first ring target located on a first measured layer of the...
US-9,429,855 Wavefront modification apparatus, lithographic apparatus and method
A wavefront modification apparatus that has a plurality of acoustic emitters, the acoustic emitters configured to emit acoustic waves which travel at least...
US-9,429,854 Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure...
A controller measures positional information of a stage within an XY plane using three encoders which at least include one each of an X encoder and a Y encoder...
US-9,429,853 Lithographic apparatus and device manufacturing method
A lithographic apparatus, including a movable table, a projection system configured to project a patterned radiation beam onto a substrate, and a liquid supply...
US-9,429,852 Microlens exposure system
A microlens exposure system includes a microlenses array and a mask fixed in place a predetermined space apart, wherein the gap between the microlens array and...
US-9,429,851 Projection optical system, exposure apparatus, and exposure method
An immersion projection optical system having, for example, a catadioptric and off-axis structure, reduces the portion of an image space filled with liquid...
US-9,429,850 Laser device, and exposure device and inspection device provided with laser device
A laser device includes: a laser light output unit that outputs a fundamental wave laser light; a wavelength conversion unit that performs wavelength conversion...
US-9,429,849 Adjusting method of pattern transferring plate, laser application machine and pattern transferring plate
According to one embodiment, a parameter for laser irradiation is adjusted in correspondence with thickness distribution of a substrate of a pattern...
US-9,429,848 Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure method
There is disclosed a polarization-modulating element for modulating a polarization state of incident light into a predetermined polarization state, the...
US-9,429,847 Extreme ultraviolet light source apparatus
An EUV light source apparatus by which detachment of a chamber or a part of the chamber, movement to a maintenance area, and highly accurate placement relative...
US-9,429,846 Pattern forming process and shrink agent
A negative pattern is formed by applying a resist composition onto a substrate, exposing the resist film, and developing the exposed resist film in an organic...
US-9,429,845 Method of patterning self-organizing material, patterned substrate of self-organizing material and method of...
A method for performing micro fabrication includes using, as a photomask, a self-organizing material-patterned substrate which is soluble in an organic solvent....
US-9,429,844 Coating compositions for use with an overcoated photoresist
Organic coating composition are provided including antireflective coating compositions that can reduce reflection of exposing radiation from a substrate back...
US-9,429,843 Positive resist composition and patterning process
A positive resist composition is provided comprising a polymer comprising recurring units having a carboxyl or phenolic hydroxyl group substituted with an acid...
US-9,429,842 Positive photosensitive resin composition, photosensitive resin film prepared by using the same, and display device
Disclosed are a positive photosensitive resin composition including (A) an alkali soluble resin, (B) a photosensitive diazoquinone compound, (C) a thermosetting...
US-9,429,841 Resist composition and method for producing resist pattern
A resist composition having a resin having a structural unit represented by the formula (I), a resin being insoluble or poorly soluble in alkali aqueous...
US-9,429,840 Pattern forming method, composition used therein, method for manufacturing electronic device, and electronic device
A pattern forming method includes: (i) a step of forming a first film by using an actinic ray-sensitive or radiation-sensitive resin composition (I), (ii) a...
US-9,429,839 Lithography process
A lithography method including: a preparation, during which a resist layer is deposited on a substrate, and a preliminary lithography carried out to define at...
US-9,429,838 Photosensitive resin composition for color filter and color filter using the same
Disclosed are a photosensitive resin composition for a color filter including (A) a colorant including a compound represented by Chemical Formula 1 and/or a...
US-9,429,837 Aqueous curable imprintable medium and patterned layer forming method
An aqueous curable imprintable medium having at least one curable compound according to Formula 1: ##STR00001## wherein R.sub.1-R.sub.3 are hydrolysable...
US-9,429,836 Exposure mask, exposure apparatus, and method for manufacturing display substrate
The present invention discloses an exposure mask, an exposure apparatus, and a method for manufacturing a display substrate, which are used for forming a...
US-9,429,835 Structure and method of photomask with reduction of electron-beam scatterring
The present disclosure provides a structure of a photomask. The photomask includes a substrate; and a conductive material layer dispose over the substrate and...
US-9,429,834 Three-dimensional imaging device
This 3D image capture device includes an image capturing section 100 and a signal processing section 200. The image capturing section 100 includes a...
US-9,429,833 Projection and camera system with repositionable support structure
A device includes a projection and camera system to create an augmented reality environment in which images are projected onto a scene and user movement within...
US-9,429,832 Oblique projection optical system and projection type display apparatus using the same
A projection type display apparatus including an oblique projection optical system having a plurality of lenses is disclosed. A lens nearest to a projection...
US-9,429,831 Lighting device and projector
In a lighting device, light in a first wavelength range which is output from a light emitting element passes through a first phase difference plate, and is...
US-9,429,830 Fluorescent light emitting element and projector
A fluorescent light emitting element includes a substrate; a phosphor layer that is provided on the substrate; an adhesive layer that is provided between the...
US-9,429,829 Illumination system and projection apparatus
An illumination system including at least one laser light source, a wavelength conversion device, and a two-dimensional (2D) anisotropic diffusion sheet is...
US-9,429,828 Image projection apparatus
An image projection apparatus for projecting an image using light includes a light source configured to emit the light; and an operating unit configured to...
US-9,429,827 Image projection apparatus, control method, and computer-readable storage medium
An image projection apparatus includes a light source in which a light emitting material emits light through an electric discharge between electrodes; an image...
US-9,429,826 Projection television device and screen
A front projection display device is provided including an image-generating source configured to generate an image, a wide angle lens system adapted to receive...
US-9,429,825 Modular projector cage and stacked frame using same
A modular projector cage for operably supporting an optical projector and for forming a stacked frame using another identical modular projector cage is...
US-9,429,824 Universal adjustable lens adapter
A universal adjustable lens adapter and rig system for smartphones, or similar electronic devices, that is modular in nature and provides a component for...
US-9,429,823 Bracket for camera
A camera security system including a camera housing having a camera therein, a bracket assembly and at least one non-standard fastener. The bracket assembly has...
US-9,429,822 Camera and accessory mounting adapter
A camera and accessory mounting adapter is a device that allows the user to mount a camera as well as various accessories to the end of a boom, pole, or similar...
US-9,429,821 In-ceiling or in-wall retracting camera platform system
A retractable camera platform system allows a mounted camera to be hidden while not in use. The system retracts a camera platform into a recess in the ceiling,...
US-9,429,820 Mounting apparatus for camera apparatus
A mounting apparatus for a camera apparatus is provided to be mounted on a mounting surface of a construction to support the camera apparatus. The mounting...
US-9,429,819 Camera and optical unit
A camera that has an optical unit includes: a base plate; a plurality of openings which is provided on the base plate and each of which has a substantially...
US-9,429,818 Accessory identification and configuration and corresponding accessory
An accessory includes a body including a dial having a surface and multiple sets of optically-recognizable identification marks formed as part of the surface....
US-9,429,817 Modular image capture booth
A modular image capture booth with a plurality of frame members having horizontal and vertical members for assembly into a frame for the modular image capture...
US-9,429,816 Camera system for a motor vehicle
In the case of a camera system for a motor vehicle, incident radiation can be guided by way of one or more deflection mirrors to a camera, at least one...
US-9,429,815 Blade drive device and optical instrument
A blade drive device includes: a board including an opening; first and second blades opening and closing the opening; and first and second actuators...
US-9,429,814 Laser arrangement and method for enhancing the life span of optical elements in a laser arrangement
A laser arrangement has a first optical element, provided and established to convert a first laser beam having a first frequency into a second laser beam having...
US-9,429,813 Deep ultraviolet laser generation device and light source device
In one embodiment, the present disclosure provides a deep ultraviolet laser generation device 1000 having a first laser source 100 at a first wavelength between...
US-9,429,812 Optical reflector based on a directional coupler and a coupled optical loop
An optical device includes an optical reflector based on a coupled-loopback optical waveguide. In particular, an input port, an output port and an optical loop...
US-9,429,811 Display panel and display method thereof and display apparatus
The present disclosure provides a display panel, a display method and a display apparatus. The display panel comprises: a first transparent substrate and a...
US-9,429,810 Electrophoresis device and display
An electrophoresis device includes: a plurality of electrophoretic particles included in insulating liquid and configured of a first particle and a second...
US-9,429,809 Fabrication of low defectivity electrochromic devices
Prior electrochromic devices frequently suffer from high levels of defectivity. The defects may be manifest as pin holes or spots where the electrochromic...
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