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Double sided Si(Ge)/Sapphire/III-nitride hybrid structure
One aspect of the present invention is a double sided hybrid crystal structure including a trigonal Sapphire wafer containing a (0001) C-plane and having front...
Semiconductor devices and methods of manufacturing the same
A semiconductor device includes a substrate, a buffer layer on the substrate, and a plurality of nitride semiconductor layers on the buffer layer. The...
Method for producing graphene oxide with tunable gap
A method of fabricating a graphene oxide material in which oxidation is confined within the graphene layer and that possesses a desired band gap is provided....
Method of growing gallium nitride based semiconductor layers and method of
fabricating light emitting device...
Exemplary embodiments of the present invention relate to a method of growing gallium nitride-based semiconductor layers through metal-organic chemical vapor...
Manufacturing method of semiconductor device
A problem in the conventional technique is that metal contamination on a silicon carbide surface is not sufficiently removed in a manufacturing method of a...
Method of manufacturing semiconductor device, substrate processing
apparatus and non-transitory...
Provided is a method of manufacturing a semiconductor device, which is capable of increasing the controllability of the concentration of carbon in a film by...
Hydrogen-free silicon-based deposited dielectric films for nano device
Embodiments of the present invention provide hydrogen-free dielectric films and methods of fabrication. A hydrogen-free precursor, such as ...
Air-gap scheme for BEOL process
The present disclosure relates a method of forming a back-end-of-the-line (BEOL) metallization layer having an air gap disposed between adjacent metal...
Advanced ultra low k SiCOH dielectrics prepared by built-in engineered
pore size and bonding structured with...
Disclosed herein is an ultra-low dielectric (k) film and methods of making thereof. A ultra-low k film has a covalently bonded network comprising atoms of...
Interface adhesion improvement method
The present disclosure describes methods of an interface adhesion improvement methods used on a transparent substrate for OLED or thin film transistor...
Apparatus for advanced packaging applications
The embodiments disclosed herein pertain to novel methods and apparatus for removing material from a substrate. In certain embodiments, the method and apparatus...
Substrate processing apparatus and substrate processing method
A substrate processing apparatus includes a substrate holding part, a substrate rotating mechanism, and a chamber. The substrate rotating mechanism incudes an...
High-voltage discharge lamp, lamp unit, projection image display device,
and method for manufacturing...
Disclosed is a high-pressure discharge lamp (100) that reduces the occurrence of cracks even under high mercury vapor pressure. The high-pressure discharge lamp...
Isolation of charged particle optics from vacuum chamber deformations
A charged particle processing apparatus includes a vacuum chamber, an optics plate, charged particle optics mounted to the optics plate, and mounting members...
Dual field multipole converging ion guides, hyperbolic ion guides, and
An ion guide generates a first RF field of Nth order where N is an integer equal to or greater than 2, and a second RF field of 2Nth order superimposed on the...
Mass spectrometer interface
A mass spectrometer interface, having improved sensitivity and reduced chemical background, is disclosed. The mass spectrometer interface provides improved...
Mass spectrometry with selective ion filtration by digital thresholding
The methods described herein generally relate to characterization of large analytes, such as biomolecules, by molecular mass analysis. Specifically, the methods...
Mass spectrometric determination of fatty acids
The invention relates to the detection of fatty acids. In a particular aspect, the invention relates to methods for detecting very long chain fatty acids and...
Sputtering apparatus and sputtering method
An objective of the present invention is to provide a sputtering apparatus capable of obtaining an adequate film thickness distribution on a substrate surface...
Film deposition device
A film deposition device is disclosed. The device includes a driver, a sputtering target assembly, and at least one rotatable magnetoelectric device located at...
Plasma processing device, printing apparatus, printing system, computer
program product, and method for...
A plasma processing device includes a plasma processing unit that performs plasma processing on a predetermined area on a target recording medium at least two...
Component of a plasma processing apparatus having a protective in situ
formed layer on a plasma exposed surface
A component of a plasma processing chamber having a protective liquid layer on a plasma exposed surface of the component. The protective liquid layer can be...
Plasma processing system including a symmetrical remote plasma source for
minimal ion energy
A remote plasma source is enclosed by a pair of counter electrodes of conical or similar shape that are mirror images of one another and connected across a...
Ceramic showerhead with embedded RF electrode for capacitively coupled
A showerhead assembly for a substrate processing system includes a back plate connected to a gas channel. A face plate is connected adjacent to a first surface...
Symmetrical inductively coupled plasma source with side RF feeds and
spiral coil antenna
A plasma reactor has an overhead multiple coil antennas including a parallel spiral coil antenna and symmetric and radial RF feeds and cylindrical RF shielding...
Systems, methods and apparatus for choked flow element extraction
A plasma source includes a ring plasma chamber, a primary winding around an exterior of the ring plasma chamber, multiple ferrites, wherein the ring plasma...
Charged particle beam writing apparatus, aperture unit, and charged
particle beam writing method
A charged particle beam writing apparatus according to an embodiment includes: a beam emitter configured to emit a charged particle beam; an aperture having an...
Beam irradiation apparatus and beam irradiation method
Provided is a beam irradiation apparatus including: a beam scanner that is configured such that a charged particle beam is reciprocatively scanned in a scanning...
Pattern shape evaluation method, semiconductor device manufacturing
method, and pattern shape evaluation device
A cross-sectional shape or a three-dimensional shape of a circuit pattern is estimated and evaluated only from a planar image of the circuit pattern observed...
Apparatus and method for inspecting a surface of a sample
The invention relates to an apparatus and method for inspecting a sample. The apparatus comprises a generator for generating an array of primary charged...
Enhanced defect detection in electron beam inspection and review
One embodiment relates to an electron beam apparatus for inspection and/or review. An electron source generates a primary electron beam, and an electron-optics...
Liquid flow cells having graphene on nitride for microscopy
This disclosure provides systems, methods, and apparatus related to liquid flow cells for microscopy. In one aspect, a device includes a substrate having a...
Charged particle radiation device and specimen preparation method using
The present invention enables a sample to be observed in a clean state directly after preparation of a final observation surface when preparing a sample for...
Workpiece transport and positioning apparatus
An automated workpiece processing apparatus including a processing section including a processing module configured for processing a workpiece at a process...
Charged particle beam instrument and sample container
A charged particle beam instrument is offered which can introduce cooled samples easily into a sample chamber. The charged particle beam instrument (100) of the...
Enhanced barrier for liquid metal bearings
The present disclosure is directed towards the prevention of high voltage instabilities within X-ray tubes. For example, in one embodiment, an X-ray tube is...
X-ray tube target having enhanced thermal performance and method of making
An x-ray tube includes a frame enclosing a high vacuum, a cathode positioned within the enclosure, and a target assembly. The target assembly includes a target...
X-ray illuminators with high flux and high flux density
This disclosure presents systems for x-ray illumination that have an x-ray brightness several orders of magnitude greater than existing x-ray technologies....
X-ray analyzer having multiple excitation energy bands produced using
multi-material x-ray tube anodes and...
An x-ray tube includes a target on which electrons impinge to form a diverging x-ray beam. The target has a surface formed from first and second target...
Cooling structure for open x-ray source, and open x-ray source
An aperture cooling structure (a cooling structure used for the open X-ray source) 10 comprises an aperture unit 31 formed with an aperture 33, a holder 34 for...
Combined surge protection device with integrated spark gap
The object of the invention is a combined surge protection device with an integrated spark gap and with a fuse connected in series thereto, wherein the spark...
Circuit breaker arrangement and power distribution unit
A circuit breaker arrangement in supply of electric power has advantageous applications especially in power distribution units which supply DC power to...
Circuit breaker with input load increasing means
A circuit breaker comprises a switching mechanism that including a linkage with a drive joint that is mounted to be rotatable around a rotation axis by a...
Thermal trip device, switching device, thermal magnetic circuit breaker
and method for protecting an electrical...
A thermal trip device of a thermal magnet circuit breaker is disclosed for protecting an electrical circuit from damage by overload. A switching device...
Power and control unit for a low or medium voltage apparatus
A power and control unit for a low or medium voltage apparatus, said apparatus comprising at least a couple of electrical contacts that can be coupled/separated...
An actuator that includes a shelf having a pivot cone, a first member, a second member, a trigger pin and a trigger lever latch. The first member includes a...
Low-travel key mechanisms using butterfly hinges
A key mechanism can include one or more butterfly hinges. Each butterfly hinge includes a double wing design operative to move between a depressed position and...
A keyboard module includes a pressing layer, a switch circuit board, a base plate and plural glue dots. The pressing layer includes plural key parts. The switch...
Shimless button assembly for an electronic device
Embodiments of the present disclosure are directed to a shimless button assembly. According to such embodiments, a shimless button assembly includes a button...
Low travel dome and systems for using the same
A low travel switch and systems for using the same. A low travel switch may include a key cap and an elastomeric dome configured to provide a predefined tactile...