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Method of manufacturing semiconductor device and substrate processing
An object of the present invention is to form a good thin film while suppressing generation of foreign substances in a low temperature region. Provided is a...
Systems and methods for reducing backside deposition and mitigating
thickness changes at substrate edges
A substrate processing system for depositing film on a substrate includes a processing chamber defining a reaction volume and including a substrate support for...
Method of manufacturing semiconductor device, substrate processing
apparatus, and non-transitory...
A technique includes forming a film having a borazine ring structure and containing boron and nitrogen on a substrate by intermittently performing an act of...
Film-forming method for forming silicon oxide film on tungsten film or
tungsten oxide film
A film-forming method includes forming a tungsten film or a tungsten oxide film on an object to be processed, heating the object on which the tungsten film or...
High temperature atomic layer deposition of silicon oxide thin films
Composition(s) and atomic layer deposition (ALD) process(es) for the formation of a silicon oxide containing film at one or more deposition temperature of about...
Method of manufacturing semiconductor device and substrate processing
A method of manufacturing a semiconductor device for forming a thin film having characteristics of low permittivity, high etching resistance and high leak...
Lamination method and lamination system
To provide a lamination method and a lamination system capable of excellently laminating a film-type laminate without damage even though the semiconductor is a...
Method for manufacturing semiconductor device
A system and method for anti-reflective layers is provided. In an embodiment the anti-reflective layer comprises a floating component in order to form a...
Method and device for slicing a shaped silicon ingot using layer transfer
A method for slicing a crystalline material ingot includes providing a crystalline material boule characterized by a cropped structure including a first...
Induction RF fluorescent lamp with load control for external dimming
An induction RF fluorescent lamp comprising a dimming device load control facility enabling the induction RF fluorescent lamp to provide for electrical loads...
An ion guide or ion trap is disclosed comprising a segmented linear ion guide or ion trap. Ions are confined radially within the ion guide or ion trap by the...
Method of assessing vacuum conditions in a mass spectrometer with
transient signal decay rates
A method is proposed for assessing the vacuum conditions in a mass spectrometer (10) such as an ion cyclotron resonance or orbital trapping mass spectrometer....
Methods, apparatus, and compositions for mass spectrometry
Methods, apparatus, compositions, systems, and articles of manufacture useful in connection with performing offsite mass spectrometric (MS) analysis of samples...
The same sample S is analyzed using an ion-trap (IT) mass spectrometer section 11 in which ions are captured in an ion trap before mass spectrometry and a...
Method of identifying precursor ions
A method of mass spectrometry is disclosed comprising mass selectively transmitting precursor ions from a mass analyzer into a fragmentation or reaction device,...
Data-processing system for chromatograph mass spectrometry
In processing chromatographic data, collected by performing a measurement for each of the segments which respectively define time ranges, a system determines...
Systems and methods for using variable mass selection window widths in
tandem mass spectrometry
Systems and methods are used to analyze a sample using variable mass selection window widths. A tandem mass spectrometer is instructed to perform at least two...
Photomultiplier and its manufacturing method
The present invention relates to a photomultiplier having a structure for making it possible to easily realize high detection accuracy and fine processing, and...
Plasma generation chamber with smooth plasma resistant coating
A faceplate or a selectivity modulation device (SMD) for a plasma generation chamber has a plasma resistant ceramic coating on a surface of the faceplate or...
Plasma etching method and plasma etching apparatus
Provided is a plasma etching method of etching OCOC film in which HTO films and carbon films are alternately laminated by plasma of mixed gas containing first...
Plasma processing method and plasma processing apparatus
A plasma processing method performs an etching process (S101) of supplying a first fluorine-containing gas into a plasma processing space and etching a target...
Gas supply method for semiconductor manufacturing apparatus, gas supply
system, and semiconductor manufacturing...
A gas supply method includes controlling communication between first and second gas pipes and a diffusion chamber using first and second valves; controlling...
Controlling ion energy within a plasma chamber
Systems and methods controlling ion energy within a plasma chamber are described. One of the systems includes an upper electrode coupled to a sinusoidal RF...
Substrate processing apparatus
A substrate processing apparatus can suppress an edge gas from being diffused toward a center region of a substrate. An upper electrode 200 serving as a gas...
Charged particle beam writing method, computer-readable recording medium,
and charged particle beam writing...
A charged particle beam writing method according to embodiments of the present disclosure includes: storing in a charged particle beam writing apparatus a...
Inspection equipment frequency transforms a mirror electron image with respect to position coordinates, calculates a value of a frequency plane origin or a...
Phase plate for a transmission electron microscope
The present invention relates to a method for cleaning a phase plate (1) for a transmission electron microscope wherein said phase plate is etched before being...
Charged particle microscope device and image capturing method
A specimen image capture method using a charged particle microscope device includes: a first image acquisition step in which the gain of a detector in a charged...
Electron beam generator, image apparatus including the same and optical
Provided may include an electron beam generator, an image apparatus including the same, and an optical apparatus. The optical apparatus includes a first and...
Discharging method for charged particle beam imaging
A layer of conductive or semi-conductive material is formed on a surface of a sample and then the sample, when being charged particle beam imaged, is...
High resolution high quantum efficiency electron bombarded CCD or CMOS
An electron-bombarded detector for detecting low light signals includes a vacuum tube structure defining a cylindrical vacuum tube chamber, a photocathode...
A low-filter is arranged for attachment to an exterior face of a wall of an electrically conducting screened chamber encasing the magnetron and an associated...
Microplasma generating array
A microplasma generator includes first and second conductive resonators disposed on a first surface of a dielectric substrate. The first and second conductive...
Temperature fuse and sliding electrode used for temperature fuse
A temperature fuse includes a cylindrical metal case, a sliding electrode slidable over an inner surface of the metal case, and a terminal electrically...
Laminated electrical fuse
A compact, high breaking capacity fuse that includes a top insulative layer, at least one intermediate insulative layer, and a bottom insulative layer arranged...
Compact plug and socket unit isolator systems for motor control centers
(MCC) and related MCC cabinets
Circuit breakers with cooperating plug and socket assemblies which are configured as separate spaced apart components, with plugs and sockets held spaced apart...
Thermal-mechanical flexible overload sensor
An overload relay is provided for electrical equipment, such as a motor. The overload relay includes a set of electrical contacts, a trip mechanism and a...
Circuit breaker assembly including a plurality of controllable circuit
breakers for local and/or remote control
A circuit breaker assembly includes a plurality of controllable circuit breakers. Each of the controllable circuit breakers includes separable contacts, an...
A fuse unit comprising a resin housing formed by insulator, a circuit body formed by conductor, molded integrally with the resin housing and branching and...
Electromagnetic switching device
An electromagnetic switching device is provided that includes a junction box having an accommodating space formed to be one side open by side plates and a...
Breaker, and safety circuit and secondary battery circuit provided with
A breaker is provided with: a movable piece (4) that has an elastically deformable elastic portion (43) and a movable contact on the tip of the elastic portion...
Magnetic switch actuators
Magnetic switches are disclosed herein. An example apparatus includes a mount and a switch actuator assembly coupled to the mount. The switch actuator assembly...
Arc control device for vacuum bulb
To control the arc that forms during cut-off in a vacuum bulb, a contact device makes it possible to inflict a rotational motion on the arc, while keeping the...
Switching method and switching device
A switching device has a first contact side with a first nominal current contact piece and a first electric arc contact piece, and a second contact side with a...
Plunger switch and method of operating same
A plunger switch assembly and method of operation comprises a housing having an interior cavity for locating electronic components, a contact support movably...
Method for assembling arc-extinguishing chamber of electromagnetic
A method for assembling an arc-extinguishing chamber of an electromagnetic contactor includes a step of fixing a pair of fixed contacts each including a support...
Extinguishing chamber for an electric protection apparatus and electric
protection apparatus comprising one...
An arc extinguishing chamber includes an arc formation chamber containing a stationary contact and a movable contact which form an arc between them when...
Electric hand tool with activation indication device
The invention relates to an electrically powered hand tool which comprises a device for providing tactile feedback to an operator of the tool. The tool further...
Assembled pole part with pole part frame
An exemplary assembled pole part includes two pole part frames made of insulating material, between which a vacuum interrupter is mounted. The vacuum...
Electrical switching apparatus and pole shaft assembly therefor
A pole shaft assembly is for an electrical switching apparatus. The electrical switching apparatus includes a housing, separable contacts enclosed by the...