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Method of fabricating a circuit board structure
A circuit board structure and a fabrication method thereof are disclosed. The circuit board structure includes a carrying board having a first and an opposite...
Coreless packaging substrate and method of fabricating the same
A coreless packaging substrate includes: a circuit buildup structure having at least a dielectric layer, a wiring layer and a plurality of conductive elements,...
Semiconductor devices, semiconductor device packages, and packaging
techniques for impedance matching and/or...
A semiconductor device, related package, and method of manufacturing same are disclosed. In at least one embodiment, the semiconductor device includes a radio...
Bipolar semiconductor device and method of manufacturing thereof
A power semiconductor device has a semiconductor body having a first surface and a second surface that runs substantially parallel to the first surface. A first...
Sputter etch processing for heavy metal patterning in integrated circuits
A method for fabricating one or more conductive lines in an integrated circuit includes providing a layer of copper containing conductive metal in a multi-layer...
Methods of fabricating memory devices using wet etching and dry etching
A method of fabricating semiconductor devices may include forming a mold structure on a lower layer, the mold structure including an etch stop layer doped at a...
Post ion implant stripper for advanced semiconductor application
The present invention relates to a substantially water-free photoresist stripping composition. Particularly, the present invention relates to a substantially...
Method of forming contact openings for a transistor
A method for making contact openings for connecting a transistor from a stack of layers comprising an active layer made of a semi-conductor material, a silicide...
Methods for dry etching semiconductor devices
The present invention provides methods for etching semiconductor devices, such aluminum nitride resonators. The methods herein allow for devices having improved...
Sulfur and fluorine containing etch chemistry for improvement of
distortion and bow control for har etch
In accordance with this disclosure, there is provided several inventions, including a method for etching a plurality of features in a stack comprising...
Systems and methods for improving wafer etch non-uniformity when using
A substrate processing system includes a processing chamber including a dielectric window and a pedestal for supporting a substrate during processing. A gas...
Processing gas diffusing and supplying unit and substrate processing
A processing gas diffusing and supplying unit is provided in a substrate processing unit including a processing chamber for accommodating a substrate. The...
Chemical mechanical polishing method
A chemical mechanical polishing method is provided comprising: providing a substrate, wherein the substrate comprises a silicon oxide and a silicon nitride;...
Etchant and etching process
A system and method for manufacturing semiconductor devices is provided. An embodiment comprises using an etchant to remove a portion of a substrate to form an...
Semiconductor die singulation method
In one embodiment, semiconductor die are singulated from a semiconductor wafer having a backmetal layer by placing the semiconductor wafer onto a carrier tape...
Flexible and stretchable sensors formed by patterned spalling
A material removal process referred to as spalling is used to provide flexible and stretchable sensors that can be used for healthcare monitoring, bio-medical...
Preparation method of a germanium-based schottky junction
The present invention discloses a preparation method of a germanium-based Schottky junction, comprising, cleaning a surface of N-type germanium-based substrate,...
Semiconductor device structure and method for forming the same
A method for forming a semiconductor device structure is provided. The method includes providing a wafer having a central portion and a peripheral portion...
Semiconductor device including catalyst layer and graphene layer thereon
and method for manufacturing the same
According to one embodiment, a semiconductor device is disclosed. The device includes a foundation layer including first and second layers being different from...
Semiconductor device having self-aligned gate contacts
A semiconductor device and a method for manufacturing the device. The method includes: depositing a first dielectric layer on a semiconductor device; forming a...
Transistor and method for forming the same
Various embodiments provide transistors and methods for forming the same. In an exemplary method, a substrate is provided, having a dummy gate structure...
Methods of manufacturing semiconductor devices
In a method of manufacturing a semiconductor device, a gate structure is formed on a substrate. An ion implantation process is performed at an upper portion of...
Apparatus and methods for spacer deposition and selective removal in an
advanced patterning process
Embodiments herein provide apparatus and methods for performing a deposition and a patterning process on a spacer layer with good profile control in multiple...
Epitaxial silicon germanium fin formation using sacrificial silicon fin
A method of forming semiconductor fins includes forming a plurality of sacrificial template fins from a first semiconductor material; epitaxially growing fins...
Oxide sputtering target, thin film transistor using the same, and method
for manufacturing thin film transistor
A thin film transistor includes a gate electrode, a source electrode, a drain electrode disposed on the same layer as the source electrode and facing the source...
PECVD microcrystalline silicon germanium (SiGe)
Embodiments of the present invention generally relate to methods for forming a SiGe layer. In one embodiment, a seed SiGe layer is first formed using plasma...
Physical vapor deposition of an aluminum nitride film
A method for physical vapor deposition of an aluminum nitride film, comprising: positioning a substrate and an aluminum target in a chamber; vacuuming the...
Lateral growth semiconductor method and devices
A method of growing high quality crystalline films on lattice-mismatched or amorphous layers is presented allowing semiconductor materials that would normally...
Semiconductor structures including liners comprising alucone and related
A semiconductor device including stacked structures. The stacked structures include at least two chalcogenide materials or alternating dielectric materials and...
Systems and methods for transfer of ions for analysis
The invention generally relates to systems and methods for transferring ions for analysis. In certain embodiments, the invention provides a system for analyzing...
Controlling hydrogen-deuterium exchange on a spectrum by spectrum basis
A mass spectrometer is disclosed comprising a liquid chromatography device for separating ions. A gas phase ion-neutral reaction device is arranged downstream...
Automatic amino acid sequencing of glycopeptide by Y1 ions
Apparatus and methods for automatic amino acid sequencing of a glycopeptide by mass spectrometry. The glycopeptide is fragmented by higher energy collision...
Data directed storage of imaging mass spectra
A method of ion imaging is disclosed comprising scanning a sample and acquiring first mass spectral data related to a first pixel location at a first spatial...
Pulsed remote plasma method and system
A system and method for providing pulsed excited species from a remote plasma unit to a reaction chamber are disclosed. The system includes a pressure control...
Showerhead-cooler system of a semiconductor-processing chamber for
semiconductor wafers of large area
Proposed is a showerhead-cooler system of a semiconductor-processing chamber with uniform distribution of plasma density. The showerhead has a plurality of...
Method of detecting arc discharge in a plasma process
An arc discharge detection device is used for detecting arc discharges in a plasma process. The arc discharge detection device includes a comparator configured...
Individual beam pattern placement verification in multiple beam
Methods and systems for verification of a mark written on a target surface during a multiple beam lithography process, and for verifying beam position of...
Arrangement for transporting radicals
The invention relates to an arrangement for transporting radicals. An electron beam system is presented comprising a beamlet generator; a beamlet manipulator...
Modeling and correcting short-range and long-range effects in E-beam
Processes and apparatuses are described for modeling and correcting electron-beam (e-beam) proximity effects during e-beam lithography. An uncalibrated e-beam...
Charged particle beam writing apparatus, and charged particle beam writing
A charged particle beam writing apparatus includes a correction term calculation processing circuitry to calculate a correction term which corrects an error of...
Linkage conduit for vacuum chamber applications
An ion implantation apparatus including an enclosure defining a process chamber, a carriage slidably mounted on a shaft within the process chamber and coupled...
Charged-particle-beam device and method for correcting aberration
The present invention provides a method and apparatus for correcting an aberration in a charged-particle-beam device. The apparatus includes a ...
Charged particle beam apparatus and trajectory correction method in
charged particle beam apparatus
There is provided a charged particle beam apparatus that includes a trajectory monitoring unit which is disposed above an objective lens (14) and which includes...
Plasma processing method and plasma processing apparatus
A plasma processing apparatus includes a processing chamber; a conductive base within the processing chamber; an electrostatic chuck, having an electrode,...
X-ray tube with adjustable intensity profile
An X-ray tube includes an emitter, and an electrode assembly. The emitter is configured to emit an electron beam toward a target. The electrode assembly...
Target and X-ray generating tube including the same, X-ray generating
apparatus, X-ray imaging system
The target includes a target layer configured to be irradiated with an electron to generate an X-ray and a support substrate configured to support the target...
Longitudinal high dose output, through transmission target X-ray system
and methods of use
An X-ray tube for accelerating electrons under a high voltage potential, said X-ray tube includes an evacuated elongated housing that is sealed, a through...
Advanced penning ion source
This disclosure provides systems, methods, and apparatus for ion generation. In one aspect, an apparatus includes an anode, a first cathode, a second cathode,...
Fuse circuit assembly
A fuse circuit assembly (1) includes: a linking plate (11) configured to carry a current input from an input part (14), the linking plate (11) having a shape...
A fuse unit includes a bus bar and an insulating protection portion. The bus bar has a power supply connection portion, an output connection portion, and a...