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Patent # Description
US-9,507,276 Positioning device, control device and control method
The present invention relates to a positioning device, e.g. for use as a wafer stage, having a very stable temperature, a very low power consumption and a...
US-9,507,275 Support apparatus, lithographic apparatus and device manufacturing method
A support apparatus for a lithographic apparatus has an object holder and an extraction body radially outward of the object holder. The object holder is...
US-9,507,274 Substrate holder and method of manufacturing a substrate holder
An object holder (100) for a lithographic apparatus has a main body (400) having a surface (400a). A plurality of burls (406) to support an object are formed on...
US-9,507,273 Method and apparatus for tensioning a shadow mask for thin film deposition
In a method and apparatus for shadow mask tensioning, a shadow mask frame and an anchor frame are positioned in spaced relation defining a gap therebetween and...
US-9,507,272 Apparatus and method of controlling chuck, and exposure apparatus and control method thereof
Exemplary embodiments of the invention disclose an exposure apparatus and a method of tuning parameters of a chuck, which may reduce a time taken to level the...
US-9,507,271 System and method for manufacturing multiple light emitting diodes in parallel
System and method for manufacturing multiple light emitting diodes in parallel are disclosed. In one embodiment, the method includes providing an imaging writer...
US-9,507,270 Vacuum system for immersion photolithography
A vacuum system for extracting a stream of a multi-phase fluid from a photo-lithography tool comprises a pumping arrangement for drawing the fluid from the...
US-9,507,269 Illumination optical unit for projection lithography
An illumination optical unit for projection lithography has a first polarization mirror device to reflect and polarize of illumination light. A second mirror...
US-9,507,268 Illumination optical unit
An illumination optical unit for an EUV projection exposure apparatus has a diaphragm comprising a radiation-transmissive region having a discrete symmetry...
US-9,507,267 Exposure apparatus, exposure method, and device manufacturing method
An exposure apparatus comprises a metrology frame that supports a projection optical system, a first drive system that drives a first stage, a second drive...
US-9,507,266 Systems and methods for implementing advanced single pass cleaning of a reimageable surface in a variable data...
A system and method are provided for enclosing a plurality of cleaning unit components in a moist cleaning unit environment, the plurality of cleaning unit...
US-9,507,265 Exposure apparatus, exposing method, method for manufacturing device, program, and recording medium
An exposure apparatus includes a liquid immersion member including a first member and a second member and configured to form a liquid immersion space of the...
US-9,507,264 Color filter and manufacturing method thereof
A color filter pattern including a plurality of color filters arranged in a pattern and the manufacturing method thereof are provided. By performing at least...
US-9,507,263 Underlay film composition for imprints and method of forming pattern and pattern formation method using the same
Provided is the pattern formability and line edge roughness of the resultant substrate. An underlay film composition for imprints comprising a compound (A) and...
US-9,507,262 Resist top-coat composition and patterning process
There are provided a top coat composition and a patterning process using that composition, which reduce the effect of contaminants in the surrounding atmosphere...
US-9,507,261 Photosensitive composition, protective film, and element having the protective film
A photosensitive composition, a protective film, and an element having the protective film are provided. The photosensitive composition includes a polysiloxane...
US-9,507,260 Compositions and processes for photolithography
New photoresist compositions are provided that are useful for immersion lithography. In one preferred aspect, photoresist composition are provided that...
US-9,507,259 Photoresist composition
A photoresist composition comprises an acid-sensitive polymer, and a cyclic sulfonium compound having the formula: ...
US-9,507,258 Resin and photoresist composition comprising the same
The present invention provides a resin comprising a structural unit represented by the formula (aa): ##STR00001## wherein T.sup.1 represents a C4-C34 sultone...
US-9,507,257 Method for manufacturing a color filter, color filter and solid-state imaging device
The present disclosure relates to a method for manufacturing a color filter being capable of suppressing residue from being generated on a colored layer...
US-9,507,256 Imprint method, imprint apparatus, and process for producing chip
An imprint method for imprinting an imprint pattern of a mold onto a pattern formation material on a substrate so as to realize a high throughput includes the...
US-9,507,255 Methods of manufacturing integrated circuit devices by using photomask cleaning compositions
In a method of manufacturing an integrated circuit (IC) device, a photomask is wet-processed using a cleaning composition comprising an organic acid, an...
US-9,507,254 Method of manufacturing substrate with a multilayer reflective film, method of manufacturing a reflective mask...
An object of the present invention is to provide a substrate with a multilayer reflective film that enables the number of detected pseudo defects, to be reduced...
US-9,507,253 Mask pattern generating method, recording medium, and information processing apparatus
A method for generating a pattern of a mask used for an exposure apparatus through a calculation by a processor includes applying, to a target main pattern, a...
US-9,507,252 Photomask and pattern forming method using photomask
A photomask includes a transparent substrate, and a light shield provided to the transparent substrate. The light shield includes a translucent mask pattern...
US-9,507,251 Method for manufacturing reflective mask and apparatus for manufacturing reflective mask
According to one embodiment, a method is disclosed for manufacturing a reflective mask. The method can include forming a reflection layer on a major surface of...
US-9,507,250 Optical proximity correction for improved electrical characteristics
A method, computer program product, and data processing system for performing an improved optical proximity correction are disclosed, which better respect the...
US-9,507,249 Non-sticky erasable media with overcoat
Exemplary embodiments provide an erasable medium having an overcoat layer on a photochromic layer to provide a non-adhesive surface for the erasable medium when...
US-9,507,248 Two-beam interference apparatus and two-beam interference exposure system
A two-beam interference apparatus may include a wafer stage on which a wafer may be set, a beam splitter to split first laser light into second and third laser...
US-9,507,247 Projector
A projector includes a discharge lamp and a discharge lamp drive section. The discharge lamp drive section is configured to selectively perform a first drive in...
US-9,507,246 Semiconductor light source driving apparatus and a projection type display apparatus
A semiconductor light source driving apparatus includes a light source unit including plural light source modules connected in series, each light source module...
US-9,507,245 Detachable camera mount
Various camera mounts used to attach a camera to a helmet, vehicle, user, or other object are described. In one embodiment, a flexible camera mount deforms...
US-9,507,244 Lightweight telescoping camera crane
A lightweight camera crane has an outer arm pivotally attached to a base. A trim weight tray is rigidly attached to a back end of the outer arm. A moving...
US-9,507,243 Underwater camera system and assembly
Disclosed is an underwater camera including a waterproof housing comprising a main body configured to contain a camera and a lens aperture for a lens of the...
US-9,507,242 Imaging device, camera system, and control method for imaging device
An imaging device, comprising an interchangeable lens having a photographing optical system whose focal length can be varied, comprises a zoom position...
US-9,507,241 Adjustable camera field of view
For an adjustable camera field of view, a camera is disposed in an electronic device. A motivator modifies an optical path of the camera through one of a...
US-9,507,240 Blade drive device and optical instrument
A blade drive device includes: a board including an opening; first and second blades opening and closing the opening; and first and second actuators arranged...
US-9,507,239 Device for frequency conversion of a laser beam generated with a first frequency by a laser beam source
A device for frequency conversion of a first laser beam generated with a first frequency. The device has a first crystal for generating a second laser beam...
US-9,507,238 Linearized Bragg grating assisted electro-optic modulator
The invention provides a new linearized electro-optic modulator in which linearization is achieved by modulating the index of a Bragg grating reflector placed...
US-9,507,237 Differential TWE MZM driver for silicon photonics
A differential TWE MZM includes a differential driver, first and second capacitors, and first and second terminations. The differential driver includes a first...
US-9,507,236 Optical module and transmitting apparatus
An optical module includes: an optical modulator that performs an optical modulation process by using electrical signals input from a plurality of terminals;...
US-9,507,235 Optical module and transmitting apparatus
An optical module includes: an optical modulator that includes a plurality of electrodes and that performs an optical modulation process by using electrical...
US-9,507,234 Reflection-type light control element, reflection-type light control member, and multilayer glass
A reflection-type light control element according to the present invention is provided with a light control layer configured to exhibit a reversible change...
US-9,507,233 Electrochromic multi-layer devices with current modulating structure
A multi-layer device comprising a first substrate, a first electrically conductive layer on a surface thereof, and a first current modulating layer, the first...
US-9,507,232 Portable defect mitigator for electrochromic windows
Portable apparatus for identifying and mitigating defects in electronic devices disposed on substrates or windows wherein such defects can be visually perceived...
US-9,507,231 Display device
Provided are a display device and a method of manufacturing same, whereby deterioration in image display quality due to display unevenness or shadowing is...
US-9,507,230 Array substrate, liquid crystal panel and liquid crystal display
An array substrate comprises a first substrate and a plurality of gate lines and a plurality of the data lines provided on the first substrate, the plurality of...
US-9,507,229 Display device
In the technical field of display, a display device for solving the technical problem of H-block caused by the resistance of the wire on array is provided. The...
US-9,507,228 Array substrate and display device
An array substrate belongs to the technical field of display technology and solves the technical problem of low aperture ratio of prior liquid crystal display...
US-9,507,227 Liquid crystal panel and liquid crystal display
An edge portion of first ground wiring and an edge portion of second ground wiring are in contact with a space containing air having a relative dielectric...
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