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Plasma pre-clean module and process
A method for integrated circuit fabrication can include removing silicon oxide by a pre-clean process. The pre-clean process can include depositing a...
Substrate recycling method
Embodiments of the disclosure relate to a substrate recycling method and a recycled substrate. The method includes separating a first surface of a substrate...
Protective coating for silicon substrate
Various approaches discussed herein enable techniques for protecting die units made of silicon substrate. A substrate, or wafer, is provided that has multiple...
Droplet manipulation using gas-phase standing-wave ultrasound fields in MS
An ion source for a mass spectrometer is disclosed comprising an ionization device which emits a stream of droplets and one or more ultrasonic transmitters...
Apparatus and method for thermal assisted desorption ionization systems
The present invention is directed to a method and device to desorb an analyte using heat to allow desorption of the analyte molecules, where the desorbed...
Mass analysis data processing apparatus
In the case where a peak on a mass spectrum is saturated due to, for example, signal saturation in a detector or an amplifier provided downstream thereof, a...
Intensity correction for TOF data acquisition
Systems and methods are provided for correcting uniform detector saturation. In one method, a mass analyzer analyzes N extractions of an ion beam. A nonzero...
Electron multiplier body, photomultiplier tube, and photomultiplier
An electron multiplier body including a main body portion, an electron incidence portion, and a channel, in which the channel includes a first inner surface and...
Baffle and substrate treating apparatuses including the same
Provided is a substrate treating apparatus, which includes a plasma generating part configured to generate plasma, a housing disposed under the plasma...
Guard aperture to control ion angular distribution in plasma processing
A guard aperture is described to control the ion angular distribution in plasma processing in one example a workpiece processing system has a plasma chamber, a...
Controlled-energy electrical arc systems, methods, and apparatuses
Systems, methods, and apparatuses for triggering electrical arcs are disclosed. Such arcs are useful for testing combustible fluids and equipment operating near...
Wafer platen thermosyphon cooling system
Disclosed is a thermosyphon system for cooling a platen in an ion implantation system. The thermosyphon system may include a vacuum chamber housing at least one...
Method for evaluating charged particle beam drawing apparatus
In one embodiment, a charged particle beam drawing apparatus performs drawing by deflecting a charged particle beam with a deflector. A method for evaluating...
Shot data generation method and multi charged particle beam writing method
A shot data generation method includes inputting writing data for writing a pattern on a target object with multi charged particle beams, and generating shot...
TEM sample mounting geometry
A system and method for transmission electron microscopy is provided. The sample can be examined from multiple directions using an electron beam in a...
Control of ion angular distribution of ion beams with hidden deflection
A processing apparatus may include: an extraction plate disposed along a side of a plasma chamber, the extraction plate having a first and second aperture, and...
X-ray tube aperture body with shielded vacuum wall
X-ray tube aperture body with shielded vacuum wall. In one example embodiment, an aperture body for use in an x-ray tube having an anode and a cathode includes...
Radiation tube, radiation generating apparatus, and radiation imaging
In a radiation tube, a conductive member having an opening formed therein is disposed, and a dielectric is disposed in the conductive member. Thus, foreign...
Ion generation apparatus and electric equipment using the same
In this ion generation apparatus, tip end portions of needle electrodes are aligned in an X direction with being oriented in a Z direction, and protrude from a...
Method and device for generating a focused strong-current charged-particle
The invention relates to a method for generating a focused charged-particle beam, comprising at least the steps of: a) generating a charged-particle beam (10);...
Member-to-member fuse connection
A member-to-member connection bracket comprising a first connection member for coupling the connection bracket to a first structural member, a second connection...
Temperature switch and fluid heating device
A temperature switch performs switching according to temperature of a heater. The temperature switch includes a bimetal that is deformed when the temperature of...
Fuses, and methods of forming and using fuses
Some embodiments include a fuse having a tungsten-containing structure directly contacting an electrically conductive structure. The electrically conductive...
Electric excitation permanent magnet switch, electric excitation permanent
magnet switched reluctance motor and...
Two magnetic poles of a permanent magnet of a permanent magnet switch and the two ends of an iron core wound with an excitation coil are connected to each other...
Gas-insulated circuit breaker
A gas-insulated circuit breaker may include: a fixed contact having a hollow formed therein; a fixed arc contact disposed in the hollow of the fixed contact; a...
Controller-less quick tactile feedback keyboard
In some examples, techniques are provided for quick haptic feedback, without the use of a controller, which is local to individual, non-actuating keys, such as...
Push switch using a heart shaped cam
A heart cam mechanism of a switch includes a cam groove, which includes a heart cam and surrounding cams, and a lock pin. The heart cam has a concave part, a...
Input button assembly
An electronic device is provided including: a housing having a button hole formed therein: a button disposed in the button hole; a switch having a touch part;...
Control switch with integrated RFID tag
A control system for controlling operation of a field device includes a switch having a switch contact movable between an off position and an activated...
Switch device for sunroof
A switch device for a sunroof includes: a glass switch piece, which is switchable between glass opening positions and a glass closing position, which are for...
Disclosed is a magnetic contactor. The magnetic contactor includes a frame, a bobbin provided in the frame, and configured to include a hollow part, a movable...
The electromagnetic contactor has a pair of fixed contacts disposed to maintain a predetermined interval and a movable contact disposed so as to be attachable...
Electric storage device having current collector and vehicle having the
electric storage device
Provided are an electric storage device in which a current collector is not easily broken even when vibration is applied, and a vehicle having this electric...
Electrode active material for capacitor, and capacitor using said
electrode active material
An electrode active material for capacitors contains a porous carbon material. The porous carbon material has a BET specific surface area of 800 m.sup.2/g or...
Electrical storage device and method for manufacturing the same
An electrical storage unit that includes a positive electrode, which includes a positive-electrode collector electrode and a positive-electrode active material...
Yarn-type micro-supercapacitor method for fabricating same
The present invention relates to a yarn-type micro-supercapacitor fabricated by twisting a hybrid nanomembrane coated with a conducting polymer on a carbon...
Thin wire/thick wire lead assembly for electrolytic capacitor
A capacitor containing a solid electrolytic capacitor element including a sintered porous anode body, a first anode lead, and a second anode lead is provided....
Low energy milling to produce flake powders
A method for increasing surface area of a valve metal particle is provided as is an improved valve metal particle provided thereby. The method includes charging...
Addition of polymers to thiophene monomers in the in situ polymerization
Described is a process for the production of a capacitor, where an electrode body (1) of an electrode material (2) is provided, wherein a dielectric (3) covers...
Process for the production of electrolyte capacitors of high nominal
The invention relates to a process for the production of electrolyte capacitors having a low equivalent series resistance and low residual current for high...
Aluminum foil with carbonaceous particles dispersed and supported therein
An object of the present invention is to provide an aluminum foil that can make a positive electrode current collector thinner for size reduction and higher...
Cryogenic grinding of tantalum for use in capacitor manufacture
An electrolytic capacitor comprising an anode comprised of cryogenically milled anode material is described. The cryogenic milling process prepares the active...
Composite electronic component and board having the same mounted thereon
There is provided a composite electronic component including a composite body having a capacitor and an inductor coupled to each other, the capacitor including...
Multilayer ceramic electronic component and board having the same mounted
A multilayer ceramic electronic component is provided including a ceramic body having dielectric layers and a plurality of internal electrodes disposed in the...
Ceramic powder and multi-layer ceramic capacitor
A multi-layer ceramic capacitor is made by alternately layering a dielectric layer constituted by a sintered body of a ceramic powder, and an internal electrode...
Multilayer ceramic electronic component
There is provided a multilayer ceramic electronic component, including: a ceramic body having internal electrodes formed therein; external electrodes formed on...
Semiconductor structure and fabrication method thereof
A semiconductor structure is provided. The semiconductor structure includes a substrate; and a plurality of parallel first conductive layers formed on the...
Coil unit for thin film inductor, manufacturing method of coil unit for
thin film inductor, thin film inductor...
Embodiments of the invention provide a coil unit for a thin film inductor, a manufacturing method of a coil unit for a thin film inductor, a thin film inductor,...
Signal transmission through LC resonant circuits
An embodiment of an electronic system includes a first electronic circuit and a second electronic circuit. The electronic system further includes a resonant LC...
Coil and manufacturing method for same, and reactor
A coil includes a coil unit provided with a wire and a self-melting layer formed on surfaces of the wire, and a resin member affixed to the wire. The wire is...