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Silicon carbide epitaxy
A method comprises providing a monocrystalline silicon wafer (11) having a principal surface (17) which supports a masking layer (24), for example silicon...
Ion beam activated directional deposition
Approaches herein provide precise areal surface reaction with directional ion beam activation. Exemplary approaches include selectively forming a material...
Method of manufacturing semiconductor device, substrate processing
apparatus, and recording medium
A method of manufacturing a semiconductor device is provided. The method includes treating a surface of an insulating film formed on a substrate by supplying a...
Method of fabricating an optoelectronic device with a hollow component in
A method of fabricating an epitaxial device, comprising: providing a substrate having a first surface and a normal direction; epitaxially forming a first...
Mass analyzers and methods of ion detection for a mass analyzer are provided. An electrostatic field generator provides an electrostatic field causing ion...
A mass spectrometer is disclosed comprising a first ion trap or ion guide, a single ion mobility spectrometer or separator stage and a second ion trap or ion...
Nebulizer and analyzer
An object is to mix multiple liquids sufficiently and then nebulize the mixed liquids while maintaining the nebulizing efficiency. A nebulizer includes a first...
Substance identification method and mass spectrometry system used for the
An identification probability estimation model, which shows the relationship between the S/N ratios of MS.sup.1 peaks and the cumulative number of the peaks in...
Electrode assembly and plasma processing apparatus
An electrode assembly of a plasma processing apparatus that enables damage to an electrode plate to be prevented, and enables an increase in the number of parts...
Mono-energetic neutral beam activated chemical processing system and
method of using
A chemical processing system and a method of using the chemical processing system to treat a substrate with a mono-energetic space-charge neutralized neutral...
Ion implanter provided with a plurality of plasma source bodies
The invention relates to an ion implanter that comprises an enclosure ENV having arranged therein a substrate carrier PPS connected to a substrate power supply...
Tuner, microwave plasma source and impedance matching method
A tuner (43) includes a microwave transmission path (51), having a coaxial structure, configured to transmit a supplied microwave to a planar slot antenna...
Microwave emission mechanism, microwave plasma source and surface wave
plasma processing apparatus
A microwave emission mechanism includes: a transmission path through which a microwave is transmitted; and an antenna section that emits into a chamber the...
Methods and systems for plasma deposition and treatment
An apparatus for separating ions having different mass or charge includes a waveguide conduit coupled to a microwave source for transmitting microwaves through...
Direct current superposition curing for resist reflow temperature
Techniques herein include methods for curing a layer of material (such as a resist) on a substrate to enable relatively greater heat reflow resistance....
Adjustable non-dissipative voltage boosting snubber network for achieving
large boost voltages
This disclosure describes a non-dissipative snubber circuit configured to boost a voltage applied to a load after the load's impedance rises rapidly. The...
Compensation of imaging deviations in a particle-beam writer using a
An exposure pattern is computed for exposing a desired pattern on a target in a charged-particle multi-beam processing apparatus to match a reference writing...
Bias voltage frequency controlled angular ion distribution in plasma
The angular ion distribution in plasma processing is controlled using a bias voltage frequency. In one example, a plasma containing gas ions is generated in a...
Pattern critical dimension measurement equipment and method for measuring
pattern critical dimension
Pattern critical dimension measurement equipment includes an electron source configured to generate a primary electron beam, a deflector configured to deflect...
Ion implantation apparatus
A multistage quadrupole lens system in an ion implantation apparatus includes a first quadrupole lens and a third quadrupole lens. A first bore radius of the...
Method and apparatus for clamping and cooling a substrate for ion
A system and method are disclosed for holding and cooling substrates during processing. A substrate clamp has an engagement portion for engaging a substrate...
Method and apparatus for generation of a uniform-profile particle beam
The present invention pertains to an apparatus for generating a charged particle beam comprising a magnetic element for controlling the profile of the beam in a...
X-ray source, method for producing X-rays and use of an X-ray source
emitting monochromatic X-rays
X-ray sources and production of X-rays, in particular, producing monochromatic x-rays is provided. More specifically, a method for producing X-rays and the use...
Bearing unit for rotary anodes of X-ray tubes
A bearing unit for rotary anodes of x-ray tubes includes a shaft and a flange element to which a rotary anode can be attached, wherein: the bearing unit can be...
Photo emitter X-ray source array (PeXSA)
A photo-emitter x-ray source is provided that includes a photocathode electron source, a laser light source, where the laser light source illuminates the...
Ion beam uniformity control
A plasma chamber having improved controllability of the ion density of the extracted ribbon ion beam is disclosed. A plurality of pairs of RF biased electrodes...
Selective synthesis of nanotubes without inhibitor
A method of forming nanotubes may include applying a photoresist to a metal substrate, selectively exposing a first portion of the photoresist to...
Integral module with lighted faceplate display
A faceplate assembly is provided. The faceplate assembly includes a faceplate having planar member with a first side and a second side, the planar member having...
Electromagnetic contactor including contact bearing portions for bearing
An electromagnetic contactor includes a contact device including a pair of fixed contacts and a movable contact contacting to and separating from the pair of...
Connection structure of electronic component and terminal metal fittings
A connection structure of an electronic component and terminal metal fittings includes a relay including a relay body and a plurality of terminals, terminal...
Circuit interrupter including thermal trip assembly and printed circuit
board Rogowski coil
A circuit interrupter includes a first terminal, a second terminal, separable contacts moveable between a closed position and an open position, the first and...
Button, button arrangement and electronic device employing same
A button is mounted to a housing of an electronic device, the button includes a pressing body and a sealed body. The pressing body is mounted to the housing....
Adaptable hazard detector mounting plate
According to one embodiment, a mounting plate for coupling a hazard detector with a wall or ceiling of a structure is provided. The mounting plate includes a...
RF switch with inter-domain ESD protection
An RF switch with inter-domain ESD protection. The RF switch comprises an RF domain section having a plurality of RF switching elements; and a DC domain section...
Mobile device assisted smart building control
A central controller for device automation can control output devices (e.g. automated lights and speakers) based on calculating the indoor location of a person....
Changing the state of a switch through the application of power
A switch includes a spring. The switch further includes a collapsing element. The spring has a first spring state in which it is being held in tension by a...
Portable racking device with fixed anti-torque tang for drawout power
A portable motorized device for remotely inserting or removing (racking) draw-out power circuit breakers. Many different designs of draw-out circuit breakers...
Automated operation of fixtures
Control devices for automatically and/or remotely controlling fixtures such as, for example, light fixtures and/or other electrical and/or electronic devices,...
An electromagnetic contactor includes a contact mechanism having a pair of fixed contacts disposed to maintain a predetermined interval in a longitudinal...
The present invention provides a means in which contact between contacts in a "double-break (or double-make) contact structure" occurs in two places in the same...
Composite electronic component and board having the same
A composite electronic component may include: a composite element in which a capacitor and an inductor are spaced apart from each other, the capacitor including...
Method of manufacturing flexible thin-film typer super-capacitor device
using a hot-melt adhesive film, and...
Disclosed are a method of manufacturing a flexible thin-film type super-capacitor device and a super-capacitor device manufactured by the same. The flexible...
Electrical storage device electrode binder composition, electrical storage
device electrode slurry, electrical...
An electrode binder composition that is used to produce an electrode used for an electrical storage device, includes (A) a polymer, (B) a carboxylic acid or a...
Graphene supported vanadium oxide monolayer capacitor material and method
of making the same
An method of producing an electronic device, including identifying a graphene sheet, functionalizing the graphene sheet to yield a functionalized sheet,...
Lithium titanium oxide (LTO)/carbon composite, preparation method for
LTO/carbon composite, negative electrode...
A lithium titanium oxide (LTO)/carbon composite, a preparation method for the LTO/carbon composite, a negative electrode material using the LTO/carbon...
Chip electronic component and board having the same
There is provided a chip electronic component may include: a ceramic body; external electrodes formed on both side portions of the ceramic body; and an...
Array-type multilayer ceramic electronic component and board having the
same mounted thereon
An array-type multilayer ceramic electronic component includes a ceramic body including a plurality of first dielectric layers and a plurality of second...
Monolithic ceramic electronic component
Outer electrodes include end-surface outer electrodes arranged on end surfaces of a ceramic multilayer body, and side-surface outer electrodes on side surfaces...
Multilayer ceramic electronic component
A multilayer ceramic electronic component includes a ceramic element body including internal electrodes and external electrodes electrically connected to...
Clad metal bus bar for film capacitor and film capacitor comprising the
A clad metal bus bar for a film capacitor may include a clad metal layer including: an aluminum layer; a first copper layer stacked on one surface of the...