At Patents you can conduct a Patent Search, File a Patent Application, find a Patent Attorney, or search available technology through our Patent Exchange. Patents are available using simple keyword or date criteria. If you are looking to hire a patent attorney, you've come to the right place. Protect your idea and hire a patent lawyer.
Magnetic device and lithographic apparatus
A magnetic device includes first and second parts, a first magnetic part, with a first magnetic polarization, coupled to the first part, a second magnetic part,...
Apparatus and methods for inhibiting immersion liquid from flowing below a
A substrate stage is provided with an immersion liquid collection member that surrounds at least an alignment feature of the substrate stage used to align the...
Substrate holding apparatus and method
Provided are a substrate holding apparatus and a method of using the substrate holding apparatus. According to an aspect of the present invention, there is...
Metrology for measurement of photosensitizer concentration within
photo-sensitized chemically-amplified resist...
Methods for measuring photosensitizer concentrations in a photo-sensitized chemically-amplified resist (PS-CAR) patterning process are described. Measured...
Optical imaging writer system
System and method for applying mask data patterns to substrate in a lithography manufacturing process are disclosed. In one embodiment, a parallel imaging...
Systems and methods for high-throughput and small-footprint scanning
exposure for lithography
The present disclosure provides a lithography system comprising a radiation source and an exposure tool including a plurality of exposure columns densely packed...
Lithographic apparatus and method
A lithographic apparatus comprising a support structure constructed to support a patterning device, the patterning device being capable of imparting an EUV...
Surface position detection apparatus, exposure apparatus, and exposure
A surface position detection apparatus capable of highly precisely detecting the surface position of a surface to be detected without substantially being...
Dynamic optical head layer and lithography method using the same
The present invention relates to a dynamic optical head layer in an optical lithography system forming patterns on a substrate, the dynamic optical head layer...
Method for microwave processing of photosensitive polyimides
A method for curing photosensitive polyimide (PSPI) films includes the steps of: depositing a PSPI film on a selected substrate, and curing the film by...
Method, photolithography method, and method of manufacturing a
semiconductor device using a pellicle film
A pellicle for an EUV lithography may include a pellicle film, a supporting structure and a handling block. The pellicle film may have a first surface for...
Silver-containing compositions containing reactive polymers
Silver-containing compositions contain a water-soluble complex of a reactive polymer with either reducible silver ions or silver nanoparticles, the reactive...
Resin, resist composition and method for producing resist pattern
1. A resist composition includes (A1) a resin which includes a structural unit represented by formula (a4), and a structural unit having a sulfonyl group, and...
Chemically amplified positive resist composition and patterning process
A chemically amplified positive resist composition is provided comprising a substantially alkali-insoluble polymer having an acid labile group-protected acidic...
Positive photosensitive resin compositions
The present disclosure relates to compositions that include at least one polybenzoxazole precursor polymer, at least one photoacid generator, and at least one...
Composition of matter and molecular resist made therefrom
The present application for patent discloses a composition of matter comprising: comprising a solvent; and an ester having a chemical structure chosen from (I),...
Actinic-ray- or radiation-sensitive resin composition, actinic-ray- or
radiation-sensitive film, pattern...
An actinic-ray- or radiation-sensitive resin composition includes a compound (A) that is configured to produce an acid when exposed to actinic rays or...
Patterning process and resist composition
A negative pattern is formed by coating a resist composition comprising (A) a polymer having an acid labile group, adapted to change its polarity under the...
Mask inspection apparatus and method of controlling the same
A mask inspection apparatus includes a mask transfer unit configured to transfer a mask in one of a first direction and a direction opposite to the first...
Photomask and methods for manufacturing and correcting photomask
The present invention provides a halftone mask comprising an assist pattern and a manufacturing method of the halftone mask, which uses an ArF excimer laser as...
Voltage contrast characterization structures and methods for within chip
process variation characterization
A method for designing, a structure, method of inspecting and a computer system for designing voltage contrast integrated circuit characterization. The design...
Optically transparent and electrically conductive coatings and method for
their deposition on a substrate
The present inventions relates to a substrate for a photolithographic mask comprising a coating deposited on a rear surface of the substrate, wherein the...
Photosensitive resin composition for color filters and uses thereof
A photosensitive resin composition for color filter including an alkai-soluble resin (A-1), an alkai-soluble resin (A-2) having a functional group represented...
Wavelength converting device and light emitting device using the same
Provided is a wavelength converting device having excellent optical output. The wavelength converting device includes a substrate and a wavelength converting...
High contrast projection screen with stray light rejection
A multi-layer projection screen includes a transparent substrate having first and second sides, a stray light rejection layer, and a lens array. The stray light...
Projection image display device
A projection image display device includes a rod lens of rectangular cross section, into which white light from a light source enters, and exits as diffused...
Light source apparatus used in a projection type image display apparatus
A light source apparatus which emits light from phosphor by exciting light and in which an efficiency of brightness is improved is provided. The light source...
Quick-reposition camera support
A quick-reposition camera support and method for photography of record in turbulent conditions, providing adjustable stability, controlled dropping, and quick...
Auto-focusing device and image pickup device
An auto-focusing device including: an imaging unit which generates image data of a subject image; an optical system which includes a focus lens; a lens driver...
Shutter holding mechanism
A shutter holding mechanism includes: a shutter substrate which is provided inside a camera body and in which a focal-plane type shutter unit is fixed; a...
Optical control device
Provided is an optical control device including first and second optical waveguides, a first control signal electrode including a first input-side signal...
Reflective structure with transparent and semi-transparent transmission
A reflective structure with transparent and semi-transparent transmission regions and includes a first transparent layer with a textured area, a reflective...
Liquid crystal display device
A liquid crystal display device, which includes: a liquid crystal layer; and a first substrate and a second substrate that are arranged so as to face each other...
Liquid crystal display substrate and liquid crystal display panel having
A liquid crystal display substrate includes a gate line, a data line a switching element and a pixel electrode each provided in plural. The pixel electrodes...
Liquid crystal display device
To prevent a phenomenon that an alignment film material is difficult to flow into the through-hole where a diameter of a through-hole for connecting between a...
Manufacturing method of display device
A method of manufacturing a display device including a thin substrate disposed with a rear electrode that is capable of preventing defects caused by static...
Liquid crystal display
A liquid crystal display, including: a first substrate; a gate line and a data line disposed on the first substrate; a pixel electrode disposed on the first...
Liquid crystal display
A liquid crystal display including a first substrate and a second substrate facing the first substrate, a gate line and a data line on the first substrate, a...
Array substrate, flat display panel and manufacturing method for the same
The present invention provides an array substrate, a flat display panel and a manufacturing for the same. The array substrate includes a substrate, a common...
Liquid crystal panel and the array substrate thereof
A liquid crystal panel and an array substrate are disclosed. The array substrate includes a plurality of pixel cells. Pixel electrodes of each of the pixel...
Display device and manufacturing method thereof
A display device includes a substrate including a plurality of pixel areas, a thin film transistor positioned on the substrate, a first insulating layer...
Liquid crystal cell, method for fabricating the same and display device
A method for fabricating a liquid crystal cell includes forming photosensitive-type alignment films on an upper substrate and a lower substrate respectively and...
Liquid crystal alignment film, method for preparing the same and use
A liquid crystal alignment film, a method for preparing the same and use thereof. The method for preparing the alignment film comprises the steps of: coating...
A pixel structure includes a patterned insulating layer and a patterned electrode layer. The patterned insulating layer includes a first area and a second area,...
Display device including a color conversion layer
A display device includes a display panel including pixels arranged in a matrix form along first and second directions crossing each other, a backlight unit...
Lighting system for transparent liquid crystal display
Exemplary embodiments provide a lighting system for a transparent LCD having opposing vertical edges, the system having a mullion lighting assembly positioned...
Provided is a backlight unit including a plurality of light emitting diodes (LEDs) that emit light; a plurality of LED modules having a printed circuit board...
Liquid crystal display device having optical sensor
A liquid crystal display device which includes a pair of substrates, a pixel including a liquid crystal element between the pair of substrates, a lighting...
Display panel and method of manufacturing the same
A display panel includes a first substrate comprising a plurality of pixel areas, a second substrate facing the first substrate, a liquid crystal layer...
Display substrate and liquid crystal display device having the same
A display substrate includes a thin film transistor array disposed in a display area, a signal line disposed in a peripheral area surrounding the display area,...