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Patent # Description
US-9,519,230 Magnetic device and lithographic apparatus
A magnetic device includes first and second parts, a first magnetic part, with a first magnetic polarization, coupled to the first part, a second magnetic part,...
US-9,519,229 Apparatus and methods for inhibiting immersion liquid from flowing below a sustrate
A substrate stage is provided with an immersion liquid collection member that surrounds at least an alignment feature of the substrate stage used to align the...
US-9,519,228 Substrate holding apparatus and method
Provided are a substrate holding apparatus and a method of using the substrate holding apparatus. According to an aspect of the present invention, there is...
US-9,519,227 Metrology for measurement of photosensitizer concentration within photo-sensitized chemically-amplified resist...
Methods for measuring photosensitizer concentrations in a photo-sensitized chemically-amplified resist (PS-CAR) patterning process are described. Measured...
US-9,519,226 Optical imaging writer system
System and method for applying mask data patterns to substrate in a lithography manufacturing process are disclosed. In one embodiment, a parallel imaging...
US-9,519,225 Systems and methods for high-throughput and small-footprint scanning exposure for lithography
The present disclosure provides a lithography system comprising a radiation source and an exposure tool including a plurality of exposure columns densely packed...
US-9,519,224 Lithographic apparatus and method
A lithographic apparatus comprising a support structure constructed to support a patterning device, the patterning device being capable of imparting an EUV...
US-9,519,223 Surface position detection apparatus, exposure apparatus, and exposure method
A surface position detection apparatus capable of highly precisely detecting the surface position of a surface to be detected without substantially being...
US-9,519,222 Dynamic optical head layer and lithography method using the same
The present invention relates to a dynamic optical head layer in an optical lithography system forming patterns on a substrate, the dynamic optical head layer...
US-9,519,221 Method for microwave processing of photosensitive polyimides
A method for curing photosensitive polyimide (PSPI) films includes the steps of: depositing a PSPI film on a selected substrate, and curing the film by...
US-9,519,220 Method, photolithography method, and method of manufacturing a semiconductor device using a pellicle film
A pellicle for an EUV lithography may include a pellicle film, a supporting structure and a handling block. The pellicle film may have a first surface for...
US-9,519,219 Silver-containing compositions containing reactive polymers
Silver-containing compositions contain a water-soluble complex of a reactive polymer with either reducible silver ions or silver nanoparticles, the reactive...
US-9,519,218 Resin, resist composition and method for producing resist pattern
1. A resist composition includes (A1) a resin which includes a structural unit represented by formula (a4), and a structural unit having a sulfonyl group, and...
US-9,519,217 Chemically amplified positive resist composition and patterning process
A chemically amplified positive resist composition is provided comprising a substantially alkali-insoluble polymer having an acid labile group-protected acidic...
US-9,519,216 Positive photosensitive resin compositions
The present disclosure relates to compositions that include at least one polybenzoxazole precursor polymer, at least one photoacid generator, and at least one...
US-9,519,215 Composition of matter and molecular resist made therefrom
The present application for patent discloses a composition of matter comprising: comprising a solvent; and an ester having a chemical structure chosen from (I),...
US-9,519,214 Actinic-ray- or radiation-sensitive resin composition, actinic-ray- or radiation-sensitive film, pattern...
An actinic-ray- or radiation-sensitive resin composition includes a compound (A) that is configured to produce an acid when exposed to actinic rays or...
US-9,519,213 Patterning process and resist composition
A negative pattern is formed by coating a resist composition comprising (A) a polymer having an acid labile group, adapted to change its polarity under the...
US-9,519,212 Mask inspection apparatus and method of controlling the same
A mask inspection apparatus includes a mask transfer unit configured to transfer a mask in one of a first direction and a direction opposite to the first...
US-9,519,211 Photomask and methods for manufacturing and correcting photomask
The present invention provides a halftone mask comprising an assist pattern and a manufacturing method of the halftone mask, which uses an ArF excimer laser as...
US-9,519,210 Voltage contrast characterization structures and methods for within chip process variation characterization
A method for designing, a structure, method of inspecting and a computer system for designing voltage contrast integrated circuit characterization. The design...
US-9,519,209 Optically transparent and electrically conductive coatings and method for their deposition on a substrate
The present inventions relates to a substrate for a photolithographic mask comprising a coating deposited on a rear surface of the substrate, wherein the...
US-9,519,208 Photosensitive resin composition for color filters and uses thereof
A photosensitive resin composition for color filter including an alkai-soluble resin (A-1), an alkai-soluble resin (A-2) having a functional group represented...
US-9,519,207 Wavelength converting device and light emitting device using the same
Provided is a wavelength converting device having excellent optical output. The wavelength converting device includes a substrate and a wavelength converting...
US-9,519,206 High contrast projection screen with stray light rejection
A multi-layer projection screen includes a transparent substrate having first and second sides, a stray light rejection layer, and a lens array. The stray light...
US-9,519,205 Projection image display device
A projection image display device includes a rod lens of rectangular cross section, into which white light from a light source enters, and exits as diffused...
US-9,519,204 Light source apparatus used in a projection type image display apparatus
A light source apparatus which emits light from phosphor by exciting light and in which an efficiency of brightness is improved is provided. The light source...
US-9,519,203 Quick-reposition camera support
A quick-reposition camera support and method for photography of record in turbulent conditions, providing adjustable stability, controlled dropping, and quick...
US-9,519,202 Auto-focusing device and image pickup device
An auto-focusing device including: an imaging unit which generates image data of a subject image; an optical system which includes a focus lens; a lens driver...
US-9,519,201 Shutter holding mechanism
A shutter holding mechanism includes: a shutter substrate which is provided inside a camera body and in which a focal-plane type shutter unit is fixed; a...
US-9,519,200 Optical control device
Provided is an optical control device including first and second optical waveguides, a first control signal electrode including a first input-side signal...
US-9,519,199 Reflective structure with transparent and semi-transparent transmission regions
A reflective structure with transparent and semi-transparent transmission regions and includes a first transparent layer with a textured area, a reflective...
US-9,519,198 Liquid crystal display device
A liquid crystal display device, which includes: a liquid crystal layer; and a first substrate and a second substrate that are arranged so as to face each other...
US-9,519,197 Liquid crystal display substrate and liquid crystal display panel having the same
A liquid crystal display substrate includes a gate line, a data line a switching element and a pixel electrode each provided in plural. The pixel electrodes...
US-9,519,196 Liquid crystal display device
To prevent a phenomenon that an alignment film material is difficult to flow into the through-hole where a diameter of a through-hole for connecting between a...
US-9,519,195 Manufacturing method of display device
A method of manufacturing a display device including a thin substrate disposed with a rear electrode that is capable of preventing defects caused by static...
US-9,519,194 Liquid crystal display
A liquid crystal display, including: a first substrate; a gate line and a data line disposed on the first substrate; a pixel electrode disposed on the first...
US-9,519,193 Liquid crystal display
A liquid crystal display including a first substrate and a second substrate facing the first substrate, a gate line and a data line on the first substrate, a...
US-9,519,192 Array substrate, flat display panel and manufacturing method for the same
The present invention provides an array substrate, a flat display panel and a manufacturing for the same. The array substrate includes a substrate, a common...
US-9,519,191 Liquid crystal panel and the array substrate thereof
A liquid crystal panel and an array substrate are disclosed. The array substrate includes a plurality of pixel cells. Pixel electrodes of each of the pixel...
US-9,519,190 Display device and manufacturing method thereof
A display device includes a substrate including a plurality of pixel areas, a thin film transistor positioned on the substrate, a first insulating layer...
US-9,519,189 Liquid crystal cell, method for fabricating the same and display device
A method for fabricating a liquid crystal cell includes forming photosensitive-type alignment films on an upper substrate and a lower substrate respectively and...
US-9,519,188 Liquid crystal alignment film, method for preparing the same and use thereof
A liquid crystal alignment film, a method for preparing the same and use thereof. The method for preparing the alignment film comprises the steps of: coating...
US-9,519,187 Pixel structure
A pixel structure includes a patterned insulating layer and a patterned electrode layer. The patterned insulating layer includes a first area and a second area,...
US-9,519,186 Display device including a color conversion layer
A display device includes a display panel including pixels arranged in a matrix form along first and second directions crossing each other, a backlight unit...
US-9,519,185 Lighting system for transparent liquid crystal display
Exemplary embodiments provide a lighting system for a transparent LCD having opposing vertical edges, the system having a mullion lighting assembly positioned...
US-9,519,184 Backlight unit
Provided is a backlight unit including a plurality of light emitting diodes (LEDs) that emit light; a plurality of LED modules having a printed circuit board...
US-9,519,183 Liquid crystal display device having optical sensor
A liquid crystal display device which includes a pair of substrates, a pixel including a liquid crystal element between the pair of substrates, a lighting...
US-9,519,182 Display panel and method of manufacturing the same
A display panel includes a first substrate comprising a plurality of pixel areas, a second substrate facing the first substrate, a liquid crystal layer...
US-9,519,181 Display substrate and liquid crystal display device having the same
A display substrate includes a thin film transistor array disposed in a display area, a signal line disposed in a peripheral area surrounding the display area,...
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