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Apparatus for molding a semiconductor wafer and process therefor
Mold pieces (105 and 110) for molding a layer of mold compound on the interconnect side of a bumped semiconductor wafer (118) include a primary cavity (117) and...
Method of fabricating a semiconductor package
A method of fabricating a semiconductor package includes mounting a plurality of semiconductor devices on a substrate; forming a molding member that covers a...
Holding of interposers and other microelectronic workpieces in position
during assembly and other processing
A workpiece (120) has protruding conductive features (140) at least on a first side. The second side is processed while the workpiece is held from the first...
Contact structure and extension formation for III-V nFET
FinFET devices including III-V fin structures and silicon-based source/drain regions are formed on a semiconductor substrate. Silicon is diffused into the III-V...
Method for fabricating specific termination angles in titanium tungsten
Method of forming a termination angle in a titanium tungsten layer include providing a titanium tungsten layer and applying a photo resist material to the...
Mask and method for manufacturing semiconductor device
A mask may be used in a process for manufacturing a semiconductor device. The semiconductor device may include a source line, a first drain contact terminal,...
Method for fabricating semiconductor device horizontally shifted contact
Semiconductor devices, and methods for fabricating a semiconductor device, include forming a contact hole penetrating an interlayer insulating layer and...
Line layout and method of spacer self-aligned quadruple patterning for the
A line layout and a spacer self-aligned quadruple patterning method thereof are provided. The line layout includes a first line, a second line, a third line,...
Silicon dry etching method
A dry etching method according to the present invention is for etching a silicon layer as a processing target in a processing room, characterized by supplying...
Plasma etching method and plasma etching apparatus
Disclosed is a plasma etching method including a deposition process and an etching process. For a processing target object including a base layer and a...
Methods of etching trenches into silicon of a semiconductor substrate
A method of etching trenches into silicon of a semiconductor substrate includes forming a mask over silicon of a semiconductor substrate, with the mask...
Aqueous polishing composition and process for chemically mechanically
polishing substrates containing silicon...
An aqueous polishing composition comprising (A) abrasive ceria particles and (B) amphiphilic nonionic surfactants selected water-soluble and water-dispersible,...
Heterogeneous integrated circuits and devices thereof with a surrogate
substrate and transferred semiconductor...
A heterogeneous integrated circuit and method of making the same. An integrated circuit includes a surrogate substrate including a material selected from the...
Silicon-containing resist underlayer film-forming composition having
A composition for forming a resist underlayer film for lithography, including: as a silane, a hydrolyzable organosilane, a hydrolysate of the hydrolyzable...
Method of fabricating semiconductor device
A method of fabricating a semiconductor device includes forming line patterns over a first region of an etch target layer and a pre-pad pattern over second and...
Nitride-based semiconductor light-emitting device
A nitride-based semiconductor light-emitting device includes a light-emitting stack comprising a first semiconductor structure having a first conductivity, a...
Deposited material and method of formation
A system and method for manufacturing a semiconductor device is provided. An embodiment comprises forming a deposited layer using an atomic layer deposition...
Method of manufacturing semiconductor device, substrate processing
apparatus, and recording medium
A method of manufacturing a semiconductor device includes forming a film on a substrate by performing a cycle a predetermined number of times. The cycle...
Method for making semiconductor devices including reactant treatment of
residual surface portion
A method for making semiconductor devices may include forming a phosphosilicate glass (PSG) layer on a semiconductor wafer, with the PSG layer having a...
Semiconductor device and fabrication method thereof
The present disclosure provides a method for forming a semiconductor device. The method includes providing a substrate and forming a dielectric layer on the...
Manufacturing method and fluid supply system for treating substrate
A method of manufacture and fluid supply system for treating a substrate is provided. The fluid supply system for treating a substrate may include a substrate...
Method for cleaning and drying semiconductor substrate
The present invention provides a method for cleaning and drying a semiconductor substrate in which a semiconductor substrate onto which a pattern has been...
Fast start RF induction lamp
An induction RF fluorescent lamp, comprising a vitreous envelope filled with a working gas mixture, a power coupler comprising at least one winding of an...
Systems and methods for multipole operation
A method for identifying components of a sample includes providing a sample to an ion source and generating a plurality of ions from constituent components of...
Pulsed ion beam source for electrospray mass spectrometry
Apparatus and methods for creating a pulsed ion beam. The pulsed ion beam can be used for performing mass spectrometry. A pulsed solenoid valve can provide a...
Analytical apparatus utilizing electron impact ionization
An analytical apparatus (1) for mass spectrometry comprises an electron impact ioniser including an electron emitter (22) and an ionisation target zone (18)....
Ion optics components and method of making the same
A method of making an ion optics component includes providing an electrically isolating substrate and machining away material of the substrate from at least one...
In-chamber fluid handling system and methods handling fluids using the
A sample chamber is configured to accommodate a target such that a portion of the target is removable as a sample. A carrier gas injection system is configured...
Cascaded-signal-intensifier-based ion imaging detector for mass
A detector system for a mass spectrometer comprises: a metal channel dynode (MCD) comprising at least one perforated metal plate configured to receive the...
Electrostatic remote plasma source system and method
This disclosure describes systems, methods, and apparatus for capacitively coupling energy into a plasma to ignite and sustain the plasma within a remote plasma...
Ion implantation machine presenting increased productivity
The present invention relates to an ion implantation machine 100 that comprises: an enclosure 101 that is connected to a pump device 102; a plasma source...
Method for monitoring ion implantation
A method for monitoring ion implantation, comprising: a), providing a control piece and forming a mask layer; b), performing ion implantation process to implant...
Method of performing spectroscopy in a transmission charged-particle
A method of performing spectroscopy in a Transmission Charged-Particle Microscope comprising: a specimen holder; a source, for producing a beam of charged...
Holder assembly for cooperating with an environmental cell and an electron
A holder assembly comprises a first and a separable second part, the first part detachable from the second part, the first part comprising a tube and an...
Method of improving ion beam quality in an implant system
A method for improving the ion beam quality in an ion implanter is disclosed. In some ion implantation systems, contaminants from the ion source are extracted...
Bright and durable field emission source derived from refractory taylor
A method of producing field emitters having improved brightness and durability relying on the creation of a liquid Taylor cone from electrically conductive...
Substrate processing apparatus
A substrate processing apparatus includes a chamber accommodating a wafer, a susceptor disposed inside the chamber and on which the wafer is held, an upper...
Target structure and X-ray generating apparatus
In a target structure according to the present invention, a target is provided on a central area of an insulating substrate, and a first conductive member for...
X-ray tube cathode with magnetic electron beam steering
An x-ray tube cathode with magnetic electron beam steering. In one example embodiment, an x-ray tube cathode includes a cathode head and an electron emitter....
Fuse arrangement and a method for manufacturing a fuse arrangement
A fuse arrangement, including: at least a first terminal, a second terminal, and a fuse, wherein the first terminal and the second terminal may be electrically...
Control mechanism for a circuit-breaking device and a circuit-breaking
device comprising said mechanism
The present invention relates to a control mechanism for the displacement of at least one moving contact of a low-voltage circuit-breaking device. The control...
Molded case circuit breakers with a switch PCB over an internal pocket and
behind a front cover
Molded case circuit breakers (MCCBs) have an MCCB body with at least one switch printed circuit board (PCB) holding between 1-4 recessed switches. The switch...
Heat detector with shape metal alloy element
A temperature sensing system comprises a conductive tube, a shape memory alloy (SMA) element, and a detector. The SMA element is disposed to create an...
High-temperature, high-pressure vacuum relay
A relay assembly includes a switch body, an adaptor sleeve, a feed-through base, and an encapsulating resin. The switch body includes a flange extending...
A switch assembly includes a switch unit having first and second conductive plates, and a switch control unit having a sliding member and a locking member. The...
Method for protecting charging cable, and charging device
A driving battery of a vehicle that can be electrically driven is charged by determining a resistance value that corresponds to the size of the electrical...
Electrical contact arrangement
An electrical contact configuration includes a first contact piece with a contact socket and a second contact piece which can move relative to the first contact...
Arc-control chamber gear for two confined contact electrodes
An arc-control chamber gear for contact electrodes, the gear possessing openings in collars of an electrode centering cap so as to break the confinement of the...
Input devices and electronic device using said input devices
Input device in which a defect of a control disk is eliminated while making use of an advantage of the control disk and an electronic device using the input...
Multi-directional switch and operation input device
A sliding space is defined between a first housing and a second housing. The slider has at least a portion arranged within a sliding space, and is configured to...