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Support table for a lithographic apparatus, lithographic apparatus and
device manufacturing method
A support table for a lithographic apparatus, the support table having a support section and a conditioning system, wherein the support section, the...
Apparatus for transferring a substrate in a lithography system
An apparatus for transferring a target, such as a substrate or a substrate support structure onto which a substrate has been clamped, from a substrate transfer...
Exposure apparatus including a mask holding device which holds a periphery
area of a pattern area of the mask...
An exposure apparatus which transfers a pattern formed on a mask onto a photosensitive substrate placed in proximity to the mask, the apparatus including an...
Lithographic apparatus, device manufacturing method and displacement
A lithographic apparatus including a moveable object (WT) and a displacement measuring system arranged to determine a position quantity of the moveable object....
Wafer stage temperature control
A method includes loading a wafer onto a wafer stage of a lithography system, the wafer stage comprising a heating component and a temperature sensing...
Illumination system for a microlithographic projection exposure apparatus
Illumination systems for microlithographic projection exposure apparatus, as well as related systems, components and methods are disclosed. In some embodiments,...
Exposure apparatus, exposure method, and device manufacturing method
An exposure apparatus sequentially performs exposure in each of a plurality of underlying shot regions formed on a substrate and includes a controller. The...
Method and system for reducing pole imbalance by adjusting exposure
A method and system for adjusting exposure intensity to reduce unwanted lithographic effects is disclosed. In some exemplary embodiments, the method of...
Developing apparatus, developing method and storage medium
A developing apparatus includes: a substrate holder that hold a substrate horizontally; a developer nozzle that supplies a developer onto the substrate to form...
Photosensitive resin composition, method for producing hardened relief
pattern, semiconductor device and...
Provided is a photosensitive resin composition which comprises: (A-1) a resin containing a structure represented by general formula (1); and (B) a photo-acid...
Photoimageable compositions containing oxetane functionality
Embodiments in accordance with the present invention encompass negative-tone, solvent developable, self-imageable polymer compositions useful for forming films...
Photoresist composition and method for producing photoresist pattern
A photoresist composition comprising a resin having an acid-labile group; a salt represented by the formula (I); and a salt represented by the formula (B1). ...
Imprint apparatus and article manufacturing method
The imprint apparatus of the present invention includes a holding unit configured to hold a mold; a particle inspection unit configured to inspect whether or...
Pump system, a carbon dioxide supply system, an extraction system, a
lithographic apparatus and a device...
An extraction system, including a pump to pump gas along a conduit to a check valve configured to open at an upstream pressure over a certain magnitude, a...
Photo mask and method of manufacturing the same
A photo mask includes a transparent substrate and a mask pattern. The mask pattern is disposed on the transparent substrate. The mask pattern includes a...
Virtual reality theater structure
A virtual reality theater structure, including a reflection screen which has a view angle of up down 40-360.degree. and left right 120-360.degree., an effective...
Illumination optical system, projector, and projector system
An illumination optical system is provided with: a lens that condenses first luminous flux emitted from an optical fiber at an angle of divergence of .theta.1;...
Illumination optical system with light-compressing lens arrays having no
optical power on one section and image...
An illumination optical system includes a first compression system configured to compress a light flux on each of first and second sections, a second...
Light source apparatus and image display apparatus
A light source apparatus includes: at least one solid-state light source configured to output light in a predetermined wavelength range; a first optical system...
Image display apparatus, method of controlling the same, and
non-transitory computer-readable storage medium
An image display apparatus projects a first image by using a light source constituted by a plurality of point light sources, performs lighting in a unit of...
A projector includes a shell, a projection lens, an optical engine module, a power supply module a light source module and a fan. The shell defines an air...
A projector includes a projection optical apparatus that projects an image and a projection position adjustment apparatus that moves the projection optical...
Optical member driving device and projection image display apparatus
An optical member driving device of the present disclosure includes an optical member for changing an optical path, the optical member having a parallel flat...
Electronic device and control method thereof
The disclosure provides an electronic device comprising a projector. The projector comprises: a projection module comprising a lens for projection, and a motor,...
A ceiling hanger includes: a first plate fixed to a ceiling surface; a second plate forming a first rotation axis in the up-down direction after fitted to the...
Adaptable camera array structures
A housing structure that can be used for forming a variety of camera arrays is disclosed. The housing structure comprises a plurality of camera retaining...
Polynomial texture mapping and reflectance transformation imaging
apparatus and techniques
An image enhancement device and related techniques in support of polynomial texture mapping (PTM) (also known as reflectance transformation imaging (RTI))...
Electronic device with camera flash structures
An electronic device may contain a camera, a camera flash, and a display in a housing. The camera flash or the display may provide illumination while capturing...
Zoom lens and image pickup apparatus including the same
A zoom lens comprises, in order from an object side to an image side: a first lens unit having a positive refractive power; a second lens unit having a negative...
Higher order seedless raman pumping
An optical fiber is optically coupled to an optical multiplexer. First and second wavelength-selective reflectors are formed onto the optical fiber. The first...
Light modulator and exposure head
A first electro-optic crystal substrate and a second electro-optic crystal substrate are provided as an electro-optic crystal substrate. The first electro-optic...
Electrochromic devices and method of manufacturing the same
Provided is an electrochromic device including a first electrochromic layer, which includes a first nanostructure having first pores and first electrochromic...
Polymer stabilizing liquid crystal lens, method for manufacturing the
same, display device and electronic product
The present disclosure disclose a polymer stabilizing liquid crystal lens and a method for manufacturing the same, a display device and an electronic product....
Thin film transistor substrate, method of manufacturing the same and
display device having the same
A thin film transistor substrate is provided. The thin film transistor substrate includes a display area including a plurality of pixels, wherein the pixels are...
Liquid crystal display device
In a liquid crystal display device, a common electrode is formed on an organic passivation film, an interlayer insulating film is formed on the common...
Liquid crystal display device and electronic apparatus
According to an aspect, a liquid crystal display device includes a first substrate, a second substrate, a liquid crystal layer, a first electrode, and a second...
Liquid crystal display device
A first semiconductor layer is formed in the shape of an island in an active area displaying images on an array substrate. A second semiconductor layer is...
Electronic device having display with split driver ledges
An electronic device may be provided with a display. The display may be a liquid crystal display having a thin-film transistor layer and a color filter layer....
Semiconductor device and method for driving the same
A semiconductor device includes a photodiode, a first transistor, and a second transistor. The photodiode has a function of supplying a charge corresponding to...
Display panel including wiring protection pattern and display device
A display panel includes a first substrate in which a display region and a circuit component mounting region are defined and a second substrate, an end of which...
Liquid crystal display and manufacturing method thereof
Disclosed is a liquid crystal display. According to an exemplary embodiment, a liquid crystal display includes: a first substrate; a first electrode disposed on...
Liquid crystal display device
A liquid crystal display device with a pair of substrates which are arranged to face each other with liquid crystal therebetween, columnar spacers having the...
Curved liquid crystal display
A curved liquid crystal display including a first substrate having a curved shape; a plurality of gate lines and data lines on the first substrate; a plurality...
RGBW TFT LCD having reduce horizontal crosstalk
A TFT array substrate for a TFT LCD includes a plurality of pixels each consisting of a red sub-pixel, a green sub-pixel, a blue sub-pixel and a white sub-pixel...
Liquid-crystal display having slits in electrodes to increase aperture
ratio and improve transmittance
Provided is a liquid-crystal display (LCD) device. The LCD device includes: one pair of substrates; and a pixel electrode and a common electrode that are...
Liquid crystal display device and method of manufacturing the same
A liquid crystal display device and method of manufacturing a liquid crystal display device are provided. The liquid crystal display device includes: a thin...
Display device wherein widths of a plurality of first microcavities
decrease from a center of one of the...
A display device may include a display panel configured to display an image. The display device may further include a first electrode overlapping the display...
Display device having roof layers and manufacturing method of the display
A display device may include a first subpixel electrode; a first roof layer; a first liquid crystal layer disposed between the first subpixel electrode and the...
Liquid crystal device and electronic apparatus
In a liquid crystal device, in an element substrate, a first area, a second area, and a third area are provided in an area overlapped with sealing material...
Liquid crystal display device
An array substrate (20) is formed with a plurality of first grooves (28a), in a sealant region (SL), being apart from each other in the width direction of the...