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Electrophotographic photosensitive member
An electrophotographic photosensitive member includes a photosensitive layer containing a charge generating material, a charge transport material, and a binder...
Coating film-removing method for cylindrical substrate and manufacturing
method for electrophotographic...
Provided is coating film-removing method for removing unnecessary coating film on outer peripheral surface of lower side of cylindrical substrate by dip...
Image forming apparatus and process cartridge
An image forming apparatus includes an electrophotographic photoreceptor that includes a conductive substrate, an organic photosensitive layer provided on the...
Shadow mask tensioning method and apparatus
In a system and method of shadow mask tensioning, an object having second set of alignment features is positioned on a side of shadow mask having a first set of...
Lithographic apparatus and device manufacturing method
A substrate handling system for an apparatus, the substrate handling system including a substrate table constructed to hold a substrate, a surrounding structure...
A method for performing photolithography using a photo-resist is disclosed. The photo-resist comprises a first component and a second component. The method...
Lithographic apparatus and device manufacturing method
In a lithographic projection apparatus, a liquid supply system maintains liquid in a space between the projection system and the substrate. The liquid supply...
Exposure apparatus, exposure method, method for manufacturing device
An exposure apparatus exposes a substrate via a projection optical system and liquid. The exposure apparatus includes a first pipe section that flows liquid...
Model-based control of an optical imaging device
The disclosure provides a method of determining an actual input value of an input variable for a control unit of a microlithography imaging device. The actual...
Polarization-modulating optical element
A microlithography optical system includes a projection objective and an illumination system that includes a temperature compensated polarization-modulating...
Method of lithographically transferring a pattern on a light sensitive
surface and illumination system of a...
A method of lithographically transferring a pattern on a light sensitive surface in a multiple exposure process comprises the following steps: a) providing a...
Method of trimming resist pattern
A method of trimming a resist pattern, including forming a positive resist film on a substrate, the positive resist film is exposed and the positive resist film...
Photoresist and method
A photoresist with a group which will decompose bonded to a high etching resistance moiety is provided. Alternatively, the group which will decompose can...
A method for developing a substrate includes spinning the substrate with a spin holder and discharging a developer to the substrate from a plurality of exhaust...
Device substrate and fabricating method thereof
A device substrate and a fabricating method thereof are provided. The device substrate includes a substrate and a patterned light-shielding layer. The patterned...
Composition for film formation, resist underlayer film and forming method
thereof, pattern-forming method and...
A composition for film formation includes a compound represented by formula (1) and a solvent. In the formula (1), R.sup.1, R.sup.2 and R.sup.3 each...
Photoresist overcoat compositions
Photoresist overcoat compositions are provided. The compositions comprise: a matrix polymer, an additive polymer a basic quencher and an organic solvent. The...
Polymer dye and method for preparing the same, photoresist composition and
The disclosure relates to display technology field, especially relates to a polymer dye and a method for preparing the same, a photoresist composition, a color...
Vinyl ether group-containing copolymer, preparation process and use
The invention provides a vinyl ether group-containing copolymer, preparation process and use thereof. The copolymer comprises of the structural units...
Photoacid-generating copolymer and associated photoresist composition,
coated substrate, and method of forming...
A copolymer includes repeat units derived from an acid-labile monomer, an aliphatic lactone-containing monomer, a C.sub.1-12 alkyl (meth)acrylate in which the...
Self aligned patterning with multiple resist layers
A method for using self aligned multiple patterning with multiple resist layers includes forming a first patterned resist layer onto a substrate, forming a...
2-dimensional patterning employing tone inverted graphoepitaxy
After formation of a template layer over a neutral polymer layer, a self-assembling block copolymer material is applied and self-assembled. The template layer...
Manufacturing method of pattern transfer mask
A manufacturing method of a pattern transfer mask includes the following steps. A basic mask is provided. The basic mask includes a plurality of patterns formed...
Pellicle frame and process for producing same
The present invention provides a pellicle frame that can prevent generation of haze and reduces a surface glittering defect under irradiation with collected...
Agglutinant for pellicle and a pellicle including the same
There is provided a pellicle 1 for lithography having a frame 12, a film 11 and an agglutinant layer 13 (an adhesive to bond the pellicle on a photomask), in...
Mask blank substrate, substrate with multilayer reflective film,
reflective mask blank, reflective mask, method...
An object of the present invention is to provide a mask blank substrate and the like that enables critical defects to be reliably detected as a result of...
Image mask film scheme and method
A system and method for repairing a photolithographic mask is provided. An embodiment comprises forming a shielding layer over an absorbance layer on a...
Mask manufacturing method, mask substrate, and charged beam drawing method
A manufacturing method of a phase shift mask in an embodiment includes: forming a metal layer on a substrate, the metal layer having a first region and a second...
Method of manufacturing photomask blank and photomask blank
In a chamber (50), a quartz substrate (10) having a main surface on which an optical film (20) is formed is put on a susceptor (30). A flash lamp (60) is housed...
Extreme ultraviolet reflective element with multilayer stack and method of
An apparatus and method of manufacture of an extreme ultraviolet reflective element includes: a substrate; a multilayer stack on the substrate, the multilayer...
Planarized extreme ultraviolet lithography blank with absorber and
manufacturing system therefor
An extreme ultraviolet (EUV) mask blank production system includes: a substrate handling vacuum chamber for creating a vacuum; a substrate handling platform, in...
A projection apparatus includes an image-producing element and projection optics. The image-producing element produces at least one image, and the projection...
Light source device and display device
There is provided a light source device including at least one light source configured to emit light, a diffusion plate configured to diffuse and reflect the...
Projector and light emission control method in projector
A projector including: a plurality of light sources; a modulator that modulates light emitted from each of the plurality of light sources; a projection unit...
Light source apparatus and projector
A light source apparatus comprises a beam flux conversion optical system for making all the light emitting areas conjugate to one geometrical-optical output...
Cooling system for a projector
An air duct is secured in a projector. The air duct is configured to help a fan module to cool a light emitting module. The fan module defines an air vent. Each...
Method, apparatus, and manufacture for a tracking camera or detector with
fast asynchronous triggering
An image projection device for displaying an image onto a remote surface. The image projection device employs a scanner to project image beams of visible light...
Image capturing device and auto-focus method thereof
An image capturing device and an auto-focus method thereof are provided, where the method includes the following steps. An exposure time is calculated by using...
Focal plane shutter for cameras and digital camera provided with the same
A focal plane shutter includes: a first blade-driving unit that makes switches between normally open and normally closed methods; a second blade-driving first...
Shutter device and image pickup apparatus including shutter device
When a stepping motor is used as a driving source for a shutter device, if the stepping motor loses synchronization because of variations in load during driving...
Light wavelength conversion module, illumination system, and projection
A light wavelength conversion module including a substrate, a first light wavelength conversion layer, and a first light transmissive layer is provided. The...
Wavelength selective switch device, wavelength switching method for the
same and communication apparatus
There are provided a wavelength selective switch device, a communication apparatus and a wavelength switching method. The wavelength selective switch device...
Electrochromic multi-layer devices with charge sequestration and related
An electrochromic multi-layer stack is provided. The multi-layer stack includes an electrochromic multi-layer stack having a first substrate, a first...
Provided is an electrochromic device and a method for driving the electrochromic device, the electrochromic device including a first electrode, a first...
Electrochromic devices and methods
A heat treated electrochromic device comprising an anodic complementary counter electrode layer comprised of a mixed tungsten-nickel oxide and lithium, which...
A semiconductor device capable of maintaining data even after instantaneous power reduction or interruption. The semiconductor device includes first to sixth...
Gate driver on array circuit repair method
In the GOA circuit repair method provided by the present invention, the repair signal (Repair signal) is received by the GOA unit circuits of the Nth stage and...
Slot die coating apparatus and coating method using the same
A slot die coater planarizing an upper surface of an encapsulation layer and a coating method using the same. The slot die coater includes a slit nozzle...
Display panel comprising a wire disposed and sandwiched in between a
sealant and a planarization layer and...
A display panel, including a device substrate, an opposite substrate, a sealant, and a display medium, is provided. A pixel array of the device substrate is...
Conducting film or electrode with improved optical and electrical
performance for display and lighting devices...
A conducting film or device multilayer electrode includes a substrate and two transparent or semitransparent conductive layers separated by a transparent or...